硅微陀螺仪器件级真空封装技术研究

为进一步提高硅微陀螺仪的品质因数及其稳定性,研究了硅微陀螺仪器件级真空封装的高真空获取技术和真空保持技术。首先,以硅微陀螺仪动力学方程为基础,分析了硅微陀螺仪的误差信号与品质因数之间的关系,并采用稀薄气体动力学分析具有高品质因数陀螺仪的空气阻尼。根据早期真空封装陀螺仪的品质因数跟踪测试曲线,分析了品质因数下降原因。采用程序升温脱附职谱分析法（TPD-MS）分析陶瓷管壳和金属盖板的放气特性,并选用了合理的吸气剂。最后,改进了器件级真空封装流程。测试结果表明,采用改进的器件级真空封装的陀螺仪品质因数最高可达162660,约为早期真空封装陀螺仪品质因数的14倍,且在一年内的变化小于0.05%。     

硅微陀螺仪器件级真空封装

为实现硅微陀螺仪真空封装以提高其性能,对硅微陀螺仪器件级真空封装技术进行研究.首先,设计硅微陀螺仪的专用陶瓷封装管壳,并采用钎焊技术进行封帽,采用金锑合金为焊料以满足封装过程中的高温.分析除气工艺对硅微陀螺仪品质因数的影响,除气试验结果表明,将硅微陀螺仪芯片和封装壳体放置在真空炉中进行高温烘烤,能有效地提高硅微陀螺仪的品质因数.制定硅微陀螺仪器件级真空封装的工艺流程,封装好的硅微陀螺仪的品质因数约为10 363.7,约为空气下的50倍.硅微陀螺仪品质因数跟踪测试结果表明,真空封装的硅微陀螺仪存储5个月后,其品质因数降低为最初的55.1%,这表明采用该器件级真空封装技术封装的硅微陀螺仪的真空保持度较差,有待进一步研究.     

利用MEMS综合微加工方法实现的非全硅微陀螺技术

本文的主要内容包括(1)简要介绍了硅微型陀螺仪的分类及其基本工作原理,包括硅微型梳状线振动驱动式陀螺仪、振动轮式微机械陀螺仪、硅微型框架驱动式陀螺仪.(2)详细介绍了以微陀螺为核心的微型惯性测量系统的组成,在应用中的关键技术,主要问题及解决途径,并展望了微型惯性测量系统的发展前景.(3)提出了利用MEMS综合微加工方法实现的非全硅微陀螺技术.     

光开关中静电驱动的微悬臂梁耦合分析

采用顺序耦合法 ,对光开关中的、静电驱动的悬臂梁进行分析 ,得出了悬臂梁的动态响应特性 ,并指出了空气阻尼对器件性能的影响 ,为微机械传感器的设计提供了有力的分析方法     

振动轮式微机械陀螺动态特性光学测试方法研究

振动轮式微机械陀螺尺寸小、振动频率高,为了精确评价其动态特性,建立了基于高速摄像技术、显微技术与数字图像相关技术的光学测试系统。配有光学显微镜的高速摄像设备(32000fps)记录并保存被测物瞬时序列图像,根据被测物的角振动特性设计相应的图像相关计算方法以获得振子各时刻的运动位移,并通过位移时间曲线分析振子的固有频率、阻尼系数及品质因子等动态特性参数。实验结果显示,图像相关精度达0.01像素,频率测量误差小于0.01%。高精度地测量了振动轮式微机械陀螺的动态特性,为微结构动态特性的研究提供了一个有效方法。     

陀螺仪动态角度测量系统的设计

针对动态环境下载体角度测量,采用双陀螺仪设计动态角度测量系统,实现大型风力发电机运行中风机叶片振动角度的监测。设计的系统由双陀螺仪传感器模块和主控模块构成,均采用ARM Cortex-M0内核微控制运算器对数据进行处理。陀螺仪传感器模块采用MPU6050,针对该MEMS器件特性引起的低精度和数据易发散的问题,通过卡尔曼滤波器进行数据处理,改善其鲁棒性。测量系统采用模块化设计,提高了动态测量过程中抗干扰性能。实验结果表明,设计的系统测量动态角范围大,角度测量响应速度快,具有较高的测量精度。     

硅微陀螺仪的机械耦合误差分析

机械耦合误差是硅微陀螺仪的主要误差之一,为了向减小或消除机械耦合误差提供理论依据,研究了机械耦合误差的产生机理。本文以z轴硅微陀螺仪为研究对象,以动力学方程和矩阵理论为基础,分析了由于加工非理想性产生的不等弹性、阻尼不对称和质量不平衡产生的误差信号,建立了机械耦合误差信号的数学模型,并定量分析了z轴硅微陀螺仪样品的机械耦合误差信号。结果表明,机械耦合误差信号包含了正交耦合误差和与有用信号同相位的误差信号,其中正交耦合误差为主要误差信号,且主要由不等弹性产生。最后,测试了z轴硅微陀螺仪的正交耦合误差信号,为342.59 º/s,且与理论结果相吻合。因此,抑制和补偿正交耦合误差是减小机械耦合误差的关键技术之一。     

MEMS陀螺与编码器在机器人自主定位中的应用

为提高微机械陀螺仪输出精度及移动机器人定位精度,研究了基于微机械陀螺仪与光电编码器的移动机器人自主定位方法。实时小波滤波法算法去除微机械陀螺仪输出数据噪声;通过微陀螺精度校正平台,用加权最小二乘支持向量回归机算法对微机械的先验数据作回归运算,构造先验回归决策函数,运用回归决策函数补偿微机械陀螺仪输出误差,提高微机械陀螺仪的角速率输出准确度;实验证实了方法能较好提高了MEMS陀螺仪的准确度,可以应用于移动机器人的自主定位之中。     

一种栅型结构微机械陀螺的研究

介绍了一种新型结构微机械陀螺的设计及制作。新型陀螺的驱动振动和敏感检测振动的阻尼均为滑膜阻尼，且几乎相同，惯性质量块为栅型结构，由弹性悬臂梁支撑，驱动固定电极和敏感检测固定电极位于惯性质量块下方。分析了新型陀螺的工作特性，说明了陀螺结构参数对陀螺灵敏度的影响，实验结果表明，大气状态下，新型栅结构微机械陀螺的驱动和敏感检测品质因子Q均可达到66。     

空气阻尼对横向振动微谐振器的影响

在一维动力学模型的基础上,对横向振动微谐振器的振动性能进行了研究,并对计入空气阻尼和未计入空气阻尼两种情况进行了比较,在对空气阻尼的计算中,计入了稀薄气体效应.研究发现在低频驱动下,两种计算模型振动幅度非常接近,但是在驱动电压频率与横向振动微谐振器的固有频率接近时,两种模型振幅差别大大增加,振幅差增大的主要影响因素是空气阻尼的作用.同时发现空气阻尼对横向振动微谐振器的谐振频率影响很小.     

Design and simulation of a tuning fork micromachined gyroscope with slide film damping

1Introduction Micromachinedgyroscopeshaveattracted lotsofattentionduringthepastseveralyears duetotheirsmallsize,lowcost,massproduc tionandeasyintegrationwithelectronics[12].It isveryimprotantforaeronautics,astronautics,automobilesandmilitaryapplicationtodevelop micromachinedgyroscopewithhighperform ance.Allvibratorygyroscopesarebasedonthe transferofenergybetweentwovibrationmodes ofastructurecausedbyCoriolisacceleration.A numberofgyroscopes,includingtuningforks,vi bratingbeamsandvibtatingshell…     

Experimental Analysis of the Gas Film Damping Effect in an Aerostatic Guideway under Microscale

This article studies the mechanism of gas film damping on the aerostatic guideway system at a microscale with the modified Reynolds equation. The slide film damping force due to the fluid viscous effect is calculated, and the squeeze damping force caused by the gas compression and escape between two plates is analyzed. The damping ratio in the calculation model for the slide film damping is compared with the calculated results from the experiment and the finite element analysis results. Using the results of the study, the optimal supply pressure is designed. The method applied in this article provides the theoretical basis for the analysis and solution of the dynamic performance of an aerostatic guideway.     

栅结构微机械陀螺运动特性的研究

对一种新型微机振动陀螺原型的运动特性进行了理论分析。采用差分电容信号调制解调方法测量了微机械陀螺驱动和检测模态的幅频特性。理论计算和实验结果表明,在大气状态下,该微机械陀螺驱动模态和检测模态的品质因子具有相近数值,在100左右。测量了驱动模态民激励驱动下,微机械陀螺检测模态的幅频特性,实验结果表明,在无角速度输入的情况下,微机械陀螺在驱动模态和检测模态的谐振模态的谐振频率处发生谐振。     

Resonance-mode effect on microcantilever mass-sensing performance in air

This research investigates the air drag damping effect of the micromachined cantilevers in different resonance modes on the quality factor, which are operated in ambient air. Based on a simplified dish-string model for air drag force acting on the resonant cantilever, the air drag damping properties of the cantilevers vibrating in different modes are analyzed with theoretic vibration mechanics, which is complemented and further confirmed with finite-element simulation. Four kinds of integrated cantilevers, which resonate in the first flexural mode, the second flexural mode, the first torsional mode, and the second torsional mode, respectively, are designed and fabricated by using micromachining techniques. Finally, biomolecular sensing experiments are carried out to verify the theoretical results obtained before. From both the modeling and experimental results, it can be seen that damping characteristics of the torsional cantilever resonators are generally better than that of the flexural ones, and quality factor of the cantilever resonator in a higher-frequency mode is always superior to that in a lower-frequency one. Among the four kinds of microcantilever resonators operated in our experiments, the one operated in the second flexural modes exhibits the highest Q factor and the best biomass sensing performance.     

力载荷下液体静压导轨的主动振动分析

以力载荷下的液体静压导轨为对象,建立了闭式导轨、开式导轨的主动振动模型,推导了系统的油膜刚度、阻尼系数的计算公式,计算了简谐、非简谐周期载荷下导轨系统的固有频率、幅值及相角,从理论上分析了设计参数对导轨系统的固有频率、幅值的影响。以闭式液体静压导轨为例,对导轨系统的固有频率、幅值放大系数进行了分析,结果表明：调整油腔压力、油膜厚度均可改变导轨系统的固有频率;力载荷作用下导轨的幅值放大系数基本上不受油腔压力的影响,而随油膜厚度的增大、油液温度的升高、载荷频率的降低而增大。详细地分析了力载荷下液体静压导轨的主动振动,为工程实际中减少导轨振动、提高加工精度提供了参考依据。     

Vibro-acoustic Radiation Characteristics Analysis of Railway Vehicle Wheel with Damping Ridges Based on Modal Strain Energy

The existing researches on the damping wheel mainly focus on investigating the influence of damping structure change on the vibro-acoustic control.The changes include the geometric size of the damping structure,the damping material parameters,and the placement,and so on.In order to further understand the mechanism in reducing the acoustic radiation of railway wheel with layer damping treatment,in this paper,the wheel is simply modified by a full-sized circular plate.The circle plate side has stuck circumference constrained damping ridges and radial constrained damping ridges on it.Based on a hybrid finite element method-boundary element method(FEM-BEM),the paper develops a vibro-acoustic radiation model for such a distributed constrained damping structure.The vibration and acoustic radiation of the circular plate is analyzed.In the analysis,the dynamic response of the system is obtained by using the 3D finite model superposition method.The obtained vibration response is used as the initial boundary condition in solving Helmholtz boundary integral equation for the sound radiation analysis.In the procedure,firstly,the modal analysis of the circular plate is performed to get the distribution of the system modal strain energy.Secondly,the vibro-acoustic radiation characteristics of the plate with different kinds of circumference damping ridges and radial damping ridges are compared in order to try to find the best effective damping ridge structure.Thirdly,using the distribution of the plate modal strain energy investigates the effect of the ridge distribution locations on the circular plate on its vibro-acoustic radiation.The calculation and analysis research results show that,the sticking circumference and radial damping ridges on the plate can control the vibro-acoustic radiation of the plate effectively in different frequency range.The distribution of the constrained damping ridge has an effect on reduction in vibro-acoustic radiation of the circular plate.The present research is very useful in the design of railway wheel with low noise level.     

基于结构能量准则的阻尼器位置及参数优化

针对振动系统中阻尼器位置及参数优化问题,提出了分步优化方法,在考虑阻尼器自身重量的影响下,通过对一般阻尼结构模态阻尼比位置灵敏度的分析,建立了阻尼器位置优化模型,并根据结构能量最小的优化准则及阻尼器质量的约束条件,得到了相应部位上的阻尼器优化参数.以弹簧-质量振荡系统和板壳结构为例,进行了数值仿真验证,结果表明该方法可...     

Dynamic characteristics of a direct-drive air-bearing slide system with squeeze film damping

Direct-drive air-bearing slides have the inherent advantages of high positioning accuracy and smoothness of motion, but due to low damping in the air bearings, they generally lack dynamic stiffness. The rigidity of the drive, both statically and dynamically, can also be low compared to mechanical equivalents. In this paper, the dynamic response of an air-bearing slide fitted with a novel design of oil-lubricated squeeze film damper and driven by a fast-response, high-resolution control system is reported. The results show that the damper produces a substantial improvement in dynamic stiffness and that sufficient drive stiffness can be obtained to enable the slide to be used in some precision-machining applications.     

带气膜阻尼悬臂平板的振动特性研究

针对航空发动机叶片振动疲劳损伤问题,建立了带振动能量耗散机制的气膜阻尼理论模型.将气膜内气体的流动分别等效为牛顿流体的流动和泊肃叶流体的流动,推导出气膜阻尼结构的阻尼比方程,研究了带气膜阻尼悬臂平板的振动特性.目的是为航空发动机风扇叶片气膜阻尼的结构设计提供理论依据和技术支撑.结果表明:泊肃叶流体能够考虑更多的振动能量...     

阻尼材料中气泡的存在对结构阻尼性能的影响

为了研究粘弹性阻尼结构的阻尼层中的气泡对结构阻尼性能的影响,制备了两种自由阻尼层结构,其中一个阻尼层中含有较多的气泡,而另一个则基本没有气泡。对两种结构进行试验模态分析,研究比较了两种结构的阻尼比,同时还比较了两结构对应点的加速度导纳曲线和相同激励下的线性谱曲线。研究结果表明,阻尼材料中气泡的存在将会降低结构的阻尼性能。