大口径SiC轻量化反射镜组件的结构设计

针对某空间相机1.1 m口径反射镜的光机结构设计任务,为降低反射镜的重量,提高其环境适应性,设计了一种重力变形小、抗振性强、热尺寸稳定性高的空间反射镜结构系统。首先,详细分析了反射镜及支撑结构选材依据及应考虑的主要因素。然后,提出一种背部半封闭式扇形轻量化孔的反射镜轻量化结构方案,并利用参数化建模分析的方法对其结构参数进行了优化设计。采用背部三点柔性支撑方式对反射镜进行支撑,通过柔性铰链的柔性来调节由于装配中的过定位和热环境变化导致的反射镜面形精度降低问题。最后,对反射镜组件的力学和热特性分析结果表明,反射镜在X向1 g重力作用下反射镜面形精度PV为62.4 nm,RMS为5.7 nm,在20±4℃环境温度变化范围内面形精度达到PV为61.7 nm,RMS为6.3 nm,反射镜组件基频为150 Hz,能够满足静态刚度、动态刚度和热尺寸稳定性的设计指标要求。     

单反式光端机反射镜柔性支撑参数化设计与试验

为保证单反式光端机指向捕获跟踪(Pointing, acquisition and tracking, PAT)时反射镜在恶劣空间环境下的面形精度,设计了一种底面开槽的柔性支撑结构。由于柔性支撑结构参数较多,为避免各参数之间严重耦合,采用正交优化方法对柔性支撑结构进行参数优化设计,再利用有限元方法对反射镜组件进行热力学特性分析。仿真分析结果表明,反射镜组件一阶频率为352.61 Hz,在1g重力和10℃温升(温降)共同作用下的最大面形误差RMS为λ/54.79(λ=623.8 nm),能够满足动、静态刚度和热尺寸稳定性要求。使用ZYGO干涉仪在(20±10)℃温度范围内对反射镜面形进行检测,结果表明,反射镜面形PV值优于λ/6,RMS优于λ/43,满足RMS≤λ/40的指标要求。实验结果表明,柔性支撑参数设计可靠,满足使用要求。     

空间遥感相机大口径反射镜结构优化设计

为满足大口径反射镜在复杂空间环境下对高面形精度和热稳定性的要求,针对某Φ660 mm口径反射镜进行了轻量化研究。提出了一种采用经典理论公式创建反射镜初始结构,结合灵敏度分析和参数优化进行综合设计的方法。首先构建了反射镜参数化模型,采用灵敏度分析研究镜体结构参数对面形变化的影响规律,找到对镜面面形RMS值灵敏度高的结构参数进行优化迭代。相比于传统反射镜结构设计方法,此方法缩小了优化设计空间,节约了计算成本与时间,能够在设计空间内全局寻优,较快收敛于最优值。优化后反射镜在自重载荷工况下镜面面形PV值小于λ/10,RMS值小于λ/40(λ=632.8 nm),镜体质量为13.6 kg,轻量化率达78.4%。镜体组件一阶频率为121 Hz,满足反射镜动态刚度要求,根据优化后的结果建立了反射镜的最佳结构模型,并进行了投产制造。     

大口径空间反射镜组件结构设计与分析

设计了某1.2 m口径的空间光学反射镜结构及其支撑结构系统。首先,合理选取了反射镜及其支撑结构的材料。从反射镜镜坯制作工艺、力学特性、热特性以及反射镜重量等因素考虑,最终选取基于反应烧结SiC材料的背部半开放式扇形轻量化孔的反射镜结构形式,反射镜设计重量为87.6 kg,轻量化率达到79%。其次,确定了在光轴水平状态下进行检测装调的方案,并进行其支撑结构的设计,采用3个双轴柔性铰链从背部对反射镜支撑,使大口径反射镜同时满足静态刚度、动态刚度、强度和热尺寸稳定性的要求。最后,对反射镜进行了组件级有限元分析。结果表明,反射镜在X向重力和4℃均匀温升作用下面形RMS分别为7.8 nm和9.4 nm,反射镜组件一阶固有频率为153 Hz,满足设计指标要求。     

空间相机反射镜SiC/Al 支撑板轻量化结构优化设计

在保证空间光学遥感相机反射镜组件结构刚度、位置精度、面形精度的同时,最大限度地降低反射镜支撑板的质量,是轻量化设计的一个重要内容。提出了通过拓扑优化确定反射镜用SiC/Al 材料的背部支撑板轻量化形式的方案。采用有限元分析法对获得的优化结果进行分析。分析结果表明: 重力载荷下面形精度达到/10 PV,/50 RMS（=632.8 nm）,PV 值13.3 nm,RMS 值2.9 nm,反射镜组件一阶固有频率239 Hz,均优于传统结构形式的反射镜。拓扑优化的方法获得的轻量化背部支撑板能够满足使用要求。     

空间引力波望远镜主反射镜系统的结构设计优化

针对空间引力波望远镜主反射镜系统的结构及支撑组件进行了设计与优化。主反射镜运用了侧面3点支撑对镜体进行约束,并对支撑点的选取与布局进行了研究。反射镜采用能够实现较大弯曲刚度的背部钻孔式半封闭构型,通过有限元计算结合多目标遗传算法对反射镜轻量化结构进行了参数优化,在不降低面形精度的条件下使镜体结构轻量化率达到74%。设计了一种由两个无阻隔串联式柔度单元组合而成的可调节双轴连杆型Bipod柔性铰链结构,其可对反射镜面形误差进行补偿。建立了柔性铰链并联机构作用于反射镜的数学模型,对其进行了基于MATLAB的参数取值分析,并通过有限元方法完成了对参数取值的修正。最后进行了空间热载荷条件下的反射镜面形分析,结果表明反射镜面形误差优于λ/60,满足设计要求。     

小型反射镜中心支撑技术

所述空间遥感器反射镜的工作温度为18±15℃,要求反射镜在此复杂工况条件下满足设计要求.介绍了反射镜材料和支撑结构材料的选择;对反射镜的支撑方式、轻量化等方面进行了分析讨论;根据反射镜柔性支撑结构的设计原理,采用CAD/CAE工程软件进行了分析及优化,通过有限元法优化设计了一种反射镜中心支撑的柔性结构,在此温度变化范围内,反射镜面形误差变化量PV值小于λ/10、RMS值小于λ/40(A=632.8nm).最后,通过力学环境实验测试反射镜面形变化量和反射镜组件模拟件的动态特性,证明该结构满足设计要求.     

大口径离轴反射镜四点热锁辅助支撑设计与验证

针对大口径离轴反射镜组件高面形精度、高可靠性和高稳定性支撑的要求,设计了一种中心筒支撑配合四点可自由加、解热锁辅助支撑的离轴反射镜新型复合支撑方案,热锁部件在力学试验和发射过程中锁紧,地面测试及在轨时释放,在保证面形的同时,有效提升了反射镜组件基频及抗力学性能,并在某空间遥感器706 mm×560 mm口径离轴反射镜组件研制中进行了验证,结果表明采用四点热锁辅助支撑的反射镜组件在加锁后动态性能优良,满足基频大于120 Hz、静载30 g条件下胶应力≤3 MPa的要求,且加锁前及解锁后面形均满足RMS优于λ/40 （λ=632.8 nm）的要求,验证了该设计的有效性。     

空间引力波望远镜主镜组件的结构设计

针对空间引力波望远镜皮米量级的极高光程稳定性需求,对系统中主镜组件进行了优化设计。采用微晶玻璃（Zerodur）作为反射镜材料,支撑结构材料为铟钢（4J36）。首先,通过对反射镜参数的优化,使其在保证面形精度的同时镜体轻量化率达到了72%。然后,设计了一种双轴联杆型Bipod柔性反射镜支撑结构,并采用了侧面三点支撑的形式。以保证有效的支撑刚度及卸载效果为目的,建立了柔性铰链的数学模型,并基于Matlab对其尺寸参数进行了优化。最后,对优化设计后主镜组件进行了模态分析及振动试验,并完成了在轨分析与波前质量计算。结果显示,主镜组件的一阶固有频率为373 Hz,与试验结果的相对误差为3.5%;在轨环境下主镜面形精度达到8.9 nm（RMS）;波前精度为/5（=1 064 nm）。表明该反射镜组件满足设计指标要求。     

铝基复合材料结构遥感器设计分析

空间遥感器光学反射镜的高刚度、支撑结构的合理性以及良好的热尺寸稳定性是保证其成像的关键因素。遥感器的重量对于运载平台也是至关重要的。针对这些问题,提出一种支撑杆的连接方式,能够减轻遥感器的重量。反射镜和背板采用高体份铝基复合材料,不仅保证高度、强度,而且因采用同一种材料从而避免了热环境对遥感器结构变形的影响。通过采用有限元仿真分析,在重力和10°温升情况下各反射镜的面形PV值〈55nm,满足〈1/10λ（λ=632.8nm）指标要求,整个结构的前三阶模态为115Hz,120Hz,203Hz。结果表明,采用支撑杆以及铝基复合材料的遥感器结构能够满足空间环境要求,为进一步工程应用提供了理论依据。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.