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Capacitance-based techniques are increasingly being used as the sensing method for low-force probes. Because the gap between electrodes is generally very small, relative motion between two electrode surfaces results in squeeze film forces that can provide an effective damping action. Recent investigations of the effect of damping on the fidelity of stylus measurement indicates that optimal dynamic conditions correspond to a system critical damping ratio between 0.4 and 0.8. This paper presents a theoretical analysis of the squeeze film forces between a cantilever beam and adjacent solid surface during lateral vibration based on an assumed mode of deflection. Two mode shapes were computed, one using the static beam deflection curve and the other the fundamental mode shape of a continuous prismatic beam. Experiments were carried out on 11 samples, of which 3 were too heavily damped for a realistic estimate of damping ratio. Comparison with calculated results revealed an absolute worst-case error of 0.063 in the damping ratio, with a standard deviation of 0.0175, which is considered to be within experimental error. 相似文献
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ZHAO Yang;HUANG Qiangxian 《光学精密工程》2022,30(19):2362-2369
When tapping mode atomic force microscopy (AFM) is operated in air, the distance between the cantilever and the sample is so small that cantilever oscillation induces squeeze film air damping in the gap. This study aims to model and analyze the effects of squeeze film damping by using the Euler-Bernoulli and Reynolds equations. Theoretical analysis shows that squeeze film damping can decrease the damping coefficient depending on the distance between the cantilever and the sample and the cantilever width. Then, resonant amplitude and quality factor (Q ) of the cantilever in multi-mode AFM are tested. Experimental results show that the Q of the fundamental resonant cantilever decreases obviously. The amplitudes of two cantilevers with widths of 20-2 μm decrease by 7.8% and 20.6%. Squeeze film damping can affect the cantilever with a large width to a greater extent than the cantilever with a small width. This phenomenon can also influence AFM dynamic characteristics; in particular, it can decrease flexural sensitivity and scanning speed. However, this phenomenon can only slightly affect the Q and amplitude of the cantilever. The impact of squeeze film damping of the cantilever is significantly reduced when AFM is operated in a higher-order resonant mode. 相似文献
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空气静压导轨气膜波动主要影响因素分析 总被引:4,自引:0,他引:4
针对空气静压导轨运动过程中出现的气膜波动问题,研究溜板气腔结构、节流器直径、供气压强对气膜内气旋及气膜波动的影响。通过仿真数据的对比分析发现气旋现象与气膜波动存在紧密的联系。从仿真结果得到了对气膜波动产生影响的因素有:节流孔的直径、气腔的结构形状和供气压强的大小。在上述的这些影响因素中供气压强的大小对气膜波动影响较大,最后试验对得出的这一结论进行了验证,与仿真结果吻合。这些分析为从导轨结构和工艺参数上对空气静压导轨的气膜波动进行抑制,提高导轨的稳定性及加工精度提供了理论依据。 相似文献
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为进一步优化提升静压干气密封的气膜开启能力,将狭缝节流器与静压干气密封相结合,设计狭缝节流静压干气密封,采用Fluent软件探究狭缝节流器结构参数和布列方式对干气密封性能的影响。结果表明:与经典小孔节流静压干气密封相比,相同节流面积下狭缝节流静压干气密封具有更高的气膜开启力;狭缝、均压槽周径比对静压干气密封气膜开启力的影响相互独立,存在最佳的周径比使得气膜开启力最大;在径向宽度一定的前提下,均压槽的平面空间越充裕,密封间隙内的气膜高压区范围越广、压力均布效果越好;狭缝沿径向、周向的列数增加均能提升气膜开启力;与周向连续狭缝布列相比,非连续性狭缝布列会导致更高的开启力。 相似文献
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Dynamic characteristics of an air ultrasonic squeeze film are affected by disturbance of the levitating object. A completely analytical model for the dynamic characteristics of the air squeeze film taking into consideration the effects of the disturbance acting on the levitating object was established by using compressible gas hydrodynamic lubricating theory. The models were solved by nonlinear numerical methods. Dynamic characteristics of the air squeeze film at specific cases were obtained and the effects of the disturbance amplitude and frequency on dynamic characteristics were discussed. It is found that these influences are significant. Experiments on stiffness and damping coefficients of the squeeze film measurement were carried out. The results showed some discrepancy with the theoretical values. 相似文献
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针对求解MEMS挤压膜阻尼过程中存在的问题,采用了多重网格方法进行求解,与传统方法相比,应用于挤压膜中流体问题的求解具有收敛速度快,数值稳定性好的优点,求得了谐振器平板间的压力分布函数以及微谐振器的各个性能指标的值,研究了挤压膜中流体阻尼力的特性以及与谐振器件幅—频特性的关系。 相似文献
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1Introduction Micromachinedgyroscopeshaveattracted lotsofattentionduringthepastseveralyears duetotheirsmallsize,lowcost,massproduc tionandeasyintegrationwithelectronics[12].It isveryimprotantforaeronautics,astronautics,automobilesandmilitaryapplicationtodevelop micromachinedgyroscopewithhighperform ance.Allvibratorygyroscopesarebasedonthe transferofenergybetweentwovibrationmodes ofastructurecausedbyCoriolisacceleration.A numberofgyroscopes,includingtuningforks,vi bratingbeamsandvibtatingshell… 相似文献
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非线性挤压油膜阻尼器转子系统的非协调运动分析 总被引:1,自引:0,他引:1
为了对挤压油膜阻尼器转子系统的非协调运动进行分析,提出了非线性油膜力数据库方法,有效地解决了非线性油膜力的快速计算问题。该方法将阻尼器轴颈沿径向和周向的速度变化范围(-∞,+∞)转化到(-1,+1),给定阻尼器的长径比,建立了阻尼器轴颈在各离散运动状态下的油膜力数据库,直接示得对应运动状态下的非互性油膜力,从而对转子系统的非协调运动进行分析。数值计算表明,非线性油膜力数据库方法对转子系统的非协调运动分析非常有效。数值计算得到了转子 特定参数范围内的分叉图,系统存在亚谐波、概周期和混沌等非协调运动。该方法对实际转子系统的稳定性分析及优化设计具有一定的应用价值。 相似文献
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针对航空发动机转子常见的两种故障模式碰摩和不对中,实验研究挤压油膜阻尼器分别对上述两种故障引发的振动的抑制效果。在转子实验器上分别模拟碰摩故障和不对中故障,并测试使用挤压油膜阻尼器前后故障转子振动特征的变化。实验结果表明,碰摩故障导致转子振动一阶反进动和一阶进动比增大,不对中故障导致转子振动二倍频增大;对于碰摩故障,挤压油膜阻尼器可以有效减小涡轮盘处振动和弹支辐条的应变,但对压气机盘减振失效;对于不对中故障,挤压油膜阻尼器可以减小转子振动,对于二倍频振动幅值的抑制尤为明显。 相似文献
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含均压槽静压止推气体轴承的气膜特性 总被引:1,自引:0,他引:1
采用ICEM建立含均压槽的静压止推气体轴承的气膜二维计算模型,分析不同供气压力和气膜厚度下的气膜压力、速度分布,并计算不同供气压力和气膜厚度下的承载力和气体质量流量。结果表明:随着供气压力和气膜厚度的增大,均压槽内的气旋现象越来越明显;随着供气压力的减小和气膜厚度的增大,气膜压力趋近于线性分布;轴承的承载力随着供气压力的增大而增大,气体流量随着供气压力和气膜厚度的增大而增大。均压槽是影响气膜压力和速度分布的关键因素,而均压槽内的气旋现象是影响均压槽内部流场的主要原因之一,而随着气膜厚度的增大均压槽的这种影响会而逐渐减小。 相似文献
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对不同供气压力与不同偏心率情况下的闭式C型气浮导轨进行CFD(计算流体力学)分析,得到其压力、速度的分布图,以及偏心率和供气压力对气浮导轨承载能力和刚度的影响规律。结果表明:偏心率越大,上气浮面的压力值会越大,下气浮面的压力值越小,上下气膜速度的差值越大;随着偏心率的增加,承载力呈增大趋势,刚度会有所降低;相同偏心率情况下,供气压力增大,承载力和刚度都会增加。对闭式C型气浮导轨的承载性能进行实验研究,实验结果与数值仿真结果吻合较好,证明了该仿真分析方法的可行性和有效性。 相似文献
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对空气阻尼进行定性和定量分析是MEMS器件设计中非常重要的一个步骤,直接影响MEMS器件的动态性能。研究了第三个区域中振动轮式微机械陀螺仪的滑膜阻尼,提出了滑膜阻尼模型,分析了滑膜阻尼的动态性能,包括速度分布、阻尼机制以及由此产生的能量损耗。根据滑膜阻尼分析结果,给出了品质因数的计算公式。试验表明,空气条件下振动轮式微机械陀螺仪品质因数的测试结果与理论值的误差约为16%。研究结果为振动轮式微机械陀螺仪结构设计中定量分析空气阻尼提供了理论依据。 相似文献
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The pure squeeze thin film elastohydrodynamic lubrication motion of circular contacts with effects of surface forces and surface roughness taken into account is explored under constant load conditions. The coupled transient stochastic Reynolds, elasticity deformation, the load balance, surface forces (hydrodynamic, solvation and van der Waals pressure) and lubricant rheology equations were solved simultaneously by using the finite difference method and the Gauss–Seidel iteration method. The simulation results reveal that the differences between radial type roughness and circular type roughness problems are apparent as the film thickness is thinner than 5 nm. The oscillation phenomena in pressure and film thickness come mainly from the action of solvation forces. The effects of surface forces become significant as the film thickness becomes thinner. The film thickness with circular type roughness is thicker than that with radial type roughness. Copyright © 2012 John Wiley & Sons, Ltd. 相似文献
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针对管道振动现象,设计了一种整体式挤压油膜阻尼器并分析其刚度影响规律.利用SAP2000软件模拟仿真阻尼减振效果.搭建二维门型管道振动试验台,在管道上安装整体式挤压油膜阻尼器,研究整体式挤压油膜阻尼器控制管道振动的影响规律.结果表明:整体式挤压油膜阻尼器安装在激振源处且与激振力平面平行时的减振效果最佳,较原始振动降幅达... 相似文献
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《Lubrication Science》2017,29(8):531-539
Squeeze film flow occurs when two surfaces move in a normal direction relative to each other and is a phenomenon of importance to many engineering systems, from macro to microscale. Squeeze film damping is widely used in large‐scale rotating machinery but even more so presently in microsystems. In the latter case, for modelling purposes, the two surfaces producing the squeeze film flow are typically assumed perfectly parallel, which is often not the case in practice. This paper presents a general formula for squeezing flow between two rigid surfaces for both parallel and tilted configurations in the 1‐dimensional case (2‐dimensional flow). The solution is derived from the Reynolds equation. The results in the parallel case compare favorably to previous literature data. A case study is presented for plates with dimensions characteristic of microelectromechanical systems. The important contribution of this paper is to isolate and study this “tilt effect” which can contribute to discrepancies and confusion in interpreting squeeze film behaviour, particularly at the microscale. 相似文献
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为了进行挤压油膜阻尼器油膜阻尼系数识别的实验研究,首先,利用信号发生器和功率放大器对双向激励实验器进行激振;然后,借助阻抗头获得激励和响应数据;最后,基于机械阻抗原理,通过最小二乘法拟合,得到挤压油膜阻尼器的油膜阻尼系数。通过改变油膜宽度和油膜间隙,研究不同挤压油膜阻尼器参数对油膜阻尼的影响。研究结果表明,随着油膜宽度的线性增大,油膜阻尼呈现非线性增大的趋势。可以通过增大油膜宽度和油膜阻尼,来提高阻尼器的减振性能。随着油膜间隙的线性增大,油膜阻尼呈现非线性减小的趋势,减振性能下降。 相似文献
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整体式气浮导轨的等间隙设计是在Reynolds方程的控制下,采用质量守恒原理,找到一组满足约束的节流孔直径,通过改变内径的节流孔会使导轨产生一个预偏载,使其与工作过程中由导轨原有偏载产生的偏角相抵消,从而恢复工作中导轨气膜的等间隙状态,消除原整体式气浮导轨承受偏载后,可能引起导轨间隙不等和刮蹭等问题,提高导轨稳定性及其工作精度。 相似文献