非平衡磁控溅射技术制备用于红外减反射的无氢碳膜

红外减反射保护膜具有特定的厚度要求,如能进一步减小无氢类金刚石膜(DLC)的光学吸收,就能使其在较大厚度时不过分损失光通量而得以广泛应用.从这点来讲,无氢类金刚石膜是一种极具开发潜力的材料.本文采用非平衡磁控溅射技术(UBMS)制备了无氢类金刚石膜,并研究了其厚度均匀性.研究结果表明:该非平衡磁控溅射装置有能力获得大于φ150 mm的均匀性范围.对DLC膜红外透射谱的分析表明,分别在Si和Ge基底表面单面制备的DLC薄膜,其峰值透射率在波数2983/cm时分别为68.83%和63.05%,这一结果接近无吸收碳材料理论上所能达到的值.同时,在5000到800/cm范围内,未发现明显的吸收峰.这些优良的光学特性表明,采用非平衡磁控溅射技术制备的无氢DLC膜可以作为窗口的红外增透保护膜使用.     

非平衡磁控溅射类金刚石薄膜的特性

非平衡磁控溅射(UBMS)结合了普通磁控溅射(MS)和离子束辅助沉积的优势,易于实现离子镀,近年来得到了广泛的应用.采用该技术制备的类金刚石薄膜(DLC)具有许多独特的性质.本文研究了非平衡磁控溅射技术制备DLC薄膜的光学、机械,电学和化学性能.研究表明,非平衡磁控溅射制备的DLC膜具有较宽的光谱透明区,且表面光滑、摩擦系数小、耐磨损、抗化学腐蚀,同时具有较高的电阻率和良好的稳定性.     

退火对无氢钛掺杂类金刚石(Ti-DLC)膜结构及性能的影响

利用非平衡磁控溅射复合靶技术制备了一系列掺钛的无氢类金刚石(Ti-DIE)薄膜,并对薄膜的热稳定性能、机械性能、应力分布以及表面形貌进行了研究.实验结果表明:退火处理对Ti-DIE膜的性能具有重要影响.随着热处理温度的升高,成膜晶粒逐渐细化,电阻率上升但至一定值后趋于稳定.退火温度的升高,会促使薄膜应力逐渐减小,硬度变低,但其耐火温度可以达到600℃以上而不发生石墨化,这一结果为DLC膜在高温环境下的应用提供了一定思路.     

不同技术制备DLC膜的激光损伤特性研究

随着高能量大功率激光器的发展和激光元件的广泛应用,用于红外窗口表面增透保护的类金刚石薄膜(DLC)的抗激光损伤特性成为评价薄膜质量优劣的一个重要指标。然而,不同的制备方法和技术沉积的DLC薄膜具有各异的微观结构,从而具有不同的抗激光损伤特性。本文采用脉冲真空电弧(PVAD)和非平衡磁控溅射(UBMS)技术沉积了DLC膜,对两种DLC膜抗激光损伤特性进行了研究,测试结果表明,两种技术沉积的DLC薄膜激光损伤阈值分别0.6 J/cm2和0.3 J/cm2,PVAD技术比UBMS技术沉积的DLC薄膜具有更高的抗激光损伤阈值。基于实验研究了薄膜光学常数和表面形态,分析了两种技术制备DLC膜激光损伤特性差异的主要原因。结果表明,采用UBMS技术沉积的DLC膜具有较小的折射率和较大的消光系数,薄膜表面存在较多的疵病和缺陷,这些是其激光损伤阈值较低的主要原因。     

纳米级类金刚石梯度膜机械特性研究

本文采用非平衡磁控溅射及等离子体源离子混合注入方法在奥氏体不锈钢 1Cr18N9Ti基体上制备N TiN Ti(N ,C) DLC梯度涂层。采用原子力显微镜 (AFM)及喇曼光谱等手段观察分析梯度膜的显微组织与相组成 ,同时采用了纳米压入技术评定膜层的力学性能。实验结果表明 ,采用此方法制备的金刚石膜组织致密 ,性能良好     

7A04铝合金表面DLC薄膜制备及性能研究

为提高7A04铝合金的表面性能,利用射频辅助等离子体浸没离子注入与沉积设备,在其表面制备类金刚石(DLC)薄膜。由于DLC薄膜与铝合金基体力学性能差别较大,导致膜基结合力差。本研究采用非平衡磁控溅射技术预先沉积一层Si膜,作为过渡层改善膜基结合力;利用激光拉曼光谱仪、维式显微硬度计、纳米划痕仪、摩擦磨损试验机等设备,系统分析了薄膜结构、显微硬度、膜基结合力及耐磨损性能。结果表明,Si过渡层的制备提高了基体的承载能力和膜基结合力,进而使耐磨损性能得到大幅度提高。     

Si3N4球/DLC膜摩擦副在真空环境下的摩擦学行为研究

采用非平衡磁控溅射技术在高速钢基体上制备了类金刚石(DLC)膜。采用球盘式摩擦磨损试验机考察了DLC膜在大气和真空环境干摩擦条件下的摩擦学性能,并比较分析了GCr15钢球和Si3N4球不同摩擦配副对DLC膜的摩擦学性能。采用光学显微镜及扫描电镜观察了摩擦副的磨损表面形貌。研究结果表明:由于转移膜的形成Si3N4球/DLC膜摩擦副在大气下具有良好的摩擦学性能;而在真空条件下摩擦副易发生明显的粘着磨损,使摩擦系数、磨斑增加,磨损表面上存在着较多的片状磨屑和微米级颗粒。     

非平衡磁控溅射类金刚石碳膜的性能

用非平衡磁控溅射的方法在室温下制备了光滑、均匀、致密的类金刚石(DLC)薄膜,分析和研究了DLC膜的形貌、结构和摩擦特性.结果表明,靶工作电流对DLC膜的沉积有重要的影响.随着工作电流的增大,薄膜的沉积速率增大,薄膜中sp3键的含量增加.薄膜的摩擦系数随着工作电流的增加略有增大,在摩擦的初始阶段,摩擦系数较高,随着摩擦循环次数的增加,摩擦系数逐渐减小,并逐渐趋于稳定.     

柱弧离子镀和非平衡磁控溅射镀制备Ti-N-C黑色硬质膜

采用柱弧离子镀和中频孪生靶非平衡磁控溅射镀膜技术制备了Ti-N-C多层复合黑色硬质膜.采用轮廊仪扫描电子显微镜(SEM)、分光光度计、显微硬度计等手段研究了所得膜层的各项性能.结果表明,两种工艺都可以获得颜色较深的黑色硬质膜,柱弧离子镀制备黑色硬质膜的效率高、力学性能更好;中频孪生靶非平衡磁控溅射制备的黑色硬质膜表面光滑、颜色更深.     

中频脉冲非平衡磁控溅射技术制备类金刚石膜的结构与性能

利用中频脉冲非平衡磁控溅射技术在载玻片上制备了类金刚石(DLC)薄膜,研究了沉积气压对薄膜厚度、微观结构、机械性能和光学性能的影响。厚度测试结果表明,DLC膜厚度随沉积气压的增加而增加。X射线光电子能谱测试结果表明,当沉积气压由0.18Pa增加到1.50Pa时,DLC薄膜中sp~3杂化碳含量随沉积气压的增加而减少。纳米压痕和椭偏仪测试结果表明,DLC膜的纳米硬度、折射率均随沉积气压的增加而减小。采用浅注入模型分析了沉积气压对薄膜生长和键合结构的影响。以上结果表明,沉积气压对DLC膜的厚度、sp~3杂化碳含量、机械与光学性能具有较大的影响。     

Optimisation of diamond-like carbon films by unbalanced magnetron sputtering for infrared transmission enhancement

Diamond-like carbon (DLC) films have potential applications in infrared transmission enhancement. Reducing or eliminating mechanical stress and optical absorption of DLC is important in such applications because relatively thick films are necessary. In this work, DLC was deposited in an unbalanced magnetron sputtering (UBMS) system. Mechanical and optical properties of the DLC films were analysed. Thick DLC films were deposited which satisfied applications for the infrared windows at 3–5 and 8–10 μm. At optimised conditions, the stress in the DLC films decreased with increasing thickness, approaching 1 GPa. For single side DLC coated silicon substrate, about 69% transmittance was achieved at wavelengths near 5 μm, close to the theoretical value for non-absorbing DLC material. Other properties such as surface roughness, wetting angle, and stability were also studied, which showed that the DLC films produced in the UBMS system were excellent for infrared transmission enhancement applications in tough environments.     

Effect of annealing on diamond-like carbon characteristics by electron spin resonance spectral analysis

We have examined the effect of annealing on physicochemical properties of the diamond-like carbon (DLC) films to produce higher quality films by the electron spin resonance spectral analyses of the immobilized dangling-bond sites (DBS), since amount of DBS reflects the characteristics of DLC films. On heat treatment of DLC deposited from ethylene monomer under anaerobic condition, the DBS decay was clearly shown, as the temperature raised. The decay described by second-order kinetics indicated that the recombination reaction of DBS progressed on heat treatment, suggesting that annealing treatment would accelerate the carbon-carbon covalent bonding network to produce harder films. In fact, the resulted DLC film derived from ethylene monomer showed non-existence of any type of oxygen atom based on X-ray photoelectron spectrum measurement, and water contact angle measurement showed higher hydrophobic surface of the DLC films.     

离子辅助轰击能量对类金刚石薄膜性能的影响

研究了利用ＩＢＡＤ方法沉积类金刚石薄膜时,离子的辅助轰击能量对薄的微观结构、表面粗糙度,弹性、硬度以及摩擦系数的影响,获得了机械和摩擦性能优异的类金刚石薄膜。讨论了薄膜微观结构和性能之间的关系。分析了不同硬度测试方法的差异。     

常温生长类金刚石薄膜的实验研究

利用射频等离子体增强化学气相沉积(RFPECVD)工艺在常温下实现在不锈钢、硅片、玻璃等基底上大面积沉积类金刚石(DLC)膜.薄膜表面光滑致密,与衬底的结合力较高.用Raman,FTIR,SEM,EDX研究了薄膜的形貌、结构与组分.用栓-盘摩擦磨损试验机测试了薄膜的摩擦系数.通过优化沉积参数,所沉积的DLC膜在与100Cr6钢球对磨时摩擦系数低于0.01.在摩擦过程中DLC膜的磨损机制借助SEM进行了研究.     

类金刚石薄膜中杂质Fe对其力学性能的影响

描述了利用射频等离子体溅射法采用不同阴极在衬底Ｓｉ片上形成类金刚石薄膜的杂质含量及杂质对厚度和硬度的影响分析与结果,比较了ＤＬＣ膜的力学性能在有无金属杂质情况下的异同,分析和计算了其硬度与硬度与制备参数间的关系,得出利用石墨作电极能制备出质量较好的ＤＬＣ膜,初步探讨在Ｓｉ衬底上沉积高硬度和强附着度类金刚石薄膜的有关工艺条件,并在理论上对这一结果进行了解释。     

Study of diamond-like carbon films on LiNbO3

Diamond-like carbon (DLC) films have been successfully deposited on Y-cut LiNbO₃ substrates using the plasma enhanced CVD technique. A thin interlayer of SiC between the DLC films and the LiNbO₃ is necessary to ensure a good adhesion of the DLC films to the LiNbO₃ substrate. The physical properties and structural network of the DLC films have been investigated in detail. It is observed that the film hardness is increased with increasing the film thickness, as is the adhesion of the DLC films to the LiNbO₃ substrates. The effect of accelerating surface acoustic wave by the DLC films has been confirmed.     

Chemical diagnosis of DLC by ESR spectral analysis

Diamond-like carbon (DLC) films were deposited utilizing plasma enhanced chemical vapor deposition (PECVD) with four precursor gases such as methane, ethylene, acetylene and benzene in gas phase. Electron spin resonance (ESR) spectra showed that dangling-bond sites (DBSs) observed in all films were characterized by an isotropic broad single line. The DLC film with unsaturated precursor gases had the higher film growth rate and the higher DBS accumulative rate. Although the DBS in DLC films were quite stable at room temperature under anaerobic conditions, the DBS decayed rapidly to level off toward a limiting value when exposed to air. The stability and reactivity of the DBS in DLC film were assumed to depend on chemical structure of organic gas used as precursor. The detailed-ESR study on DBS of the DLC films could be one of the powerful tools for diagnosing the micro-structural properties and the quality of films.