基于有限元法和色散COM模型的声表面波滤波器联合仿真

针对任意复杂膜系结构和电路拓扑结构的声表面波(SAW)滤波器的精确快速设计问题,该文基于声/电/磁多物理场耦合全波仿真平台,结合基因遗传优化算法和通用图形处理器(GPGPU)加速技术,利用有限元分层级联精确模型(HCT)优化设计梯形谐振器,色散COM模型优化设计纵向耦合谐振器,实现了任意复杂膜系结构和电路拓扑结构的SAW滤波器的正向设计与优化。通过42°Y-XLiTaO₃常规SAW滤波器的优化设计与研制,设计优化结果与实验结果吻合较好,验证了该方法的有效性和可行性。     

基于分层级联技术的梯形声表面波滤波器正向设计

针对任意复杂拓扑结构的梯形声表面波(SAW)滤波器的精确快速设计问题,基于声/电/磁多物理场耦合全波仿真平台,结合基因遗传优化算法和通用图形处理器(GPGPU)加速技术,利用有限元分层级联精确模型(HCT)代替COM模型进行SAW滤波器的设计与优化,计算速度和优化速度与COM模型相当。通过42°Y-X LiTaO₃常规SAW滤波器的优化设计与研制,插入损耗为0.67 dB,2 dB相对带宽为3.85%,验证了该方法的有效性和可行性。     

基于有限元分层级联技术SAW滤波器精确计算

针对任意复杂结构声表面波(SAW)器件精确快速分析及其内部多物理场耦合效应的精确表征问题,该文在充分考虑SAW器件实际存在的各种影响因素下,采用有限元分层级联算法推导出有限长结构SAW器件的有限元数学模型。基于全波仿真技术,考虑管座及键合线等封装模型电磁效应,对漏波型42°Y-X LiTaO₃温度补偿型声表面波(TC-SAW)器件进行计算,通过与实验结果对比,验证了计算模型的精确性,为高性能SAW器件的精确快速设计提供了支撑。     

基于HCT-FEM和3D电磁模型的SAW滤波器性能仿真系统

该文基于分层级联有限元(HCT-FEM)和三维电磁模型构建了一套声表面波(SAW)滤波器性能仿真系统。采用Matlab协同COMSOL建立的HCT-FEM模型计算声学元件导纳,用ANSYS建立的三维电磁模型计算含芯片走线、引线/金属球、封装外壳及测试电路的外部电磁S参数,并在ADS软件中对SAW滤波器频率响应进行复原。将该系统应用于一款芯片级封装(CSP)的普通SAW滤波器和一款表贴封装(SMD)的单晶薄膜SAW滤波器电性能仿真,仿真与实测结果吻合较好。     

空军总医院全军临床航空医学中心简介

通过建立声表面波(SAW)匹配滤波器的等效能量结构,利用交叉场电路等效模型,在频域上对SAW匹配滤波器进行分析.对于中心频率为60 MHz、抽头数32位的SAW匹配滤波器,采用上述方法得到的插入损耗和-3 dB带宽的计算值和测试值分别相差小于1 dB和1 kHz,证明了其正确性和有效性.     

文摘选辑

(一)声表面波技术 190 800MHz移动式电话收发两用机用低损耗离性能SAW滤波器——(Kinoshita Y.)《IEEE Trans.Veh.Technol.》VT-32 3(19B8)225—9 研制成移动式电话收发两用机的射频电路用的低损耗高性能SAW滤波器获得了两种性能优良的UHF(800MHz)和VHF(90MHz)带通滤波器在大量生产UHF/VHF集成电路中用SAW滤波器有较大的优越性。(声)     

金刚石SAW滤波器的设计和制作

通信系统向高频的发展趋势使声表面波(SAW)滤波器技术面临着越来越多的挑战。利用传统材料制作SAW滤波器的中心频率很难达到GHz频段,因此探索在高声速材料基础上制作SAW滤波器成为一种必然趋势。基于高声速材料金刚石设计了IDT/ZnO/金刚石结构的薄膜SAW滤波器,设计了镜像阻抗连接IDT的结构参数,并采用ADS软件对该结构进行了建模仿真。然后,通过ZnO薄膜制备工艺和IDT电极制备工艺,获得了金刚石SAW滤波器样品。最后,采用RF探针台对所制得的样品进行了性能测试和数据分析。测试结果表明,在金刚石厚膜衬底上获得了频率超过1 GHz的SAW滤波器样品。     

硅基钽酸锂压电单晶复合薄膜材料及应用

绝缘体上压电基板(POI)是一种新兴的压电单晶复合薄膜结构材料。POI基板由压电单晶材料薄层(单晶钽酸锂/铌酸锂)、二氧化硅层及高阻硅衬底构成,采用Smart-Cut工艺制备,可保证板层高均匀度及高质量的批量生产。通过这种基板可设计满足5G通信要求的高性能集成声表面波(SAW)谐振器和滤波器。基于POI材料制备的SAW器件具有高频、高品质因数(Q)值、低温度敏感性及较大带宽等优良特性,同时还能在同一芯片上集成多个SAW滤波器,具有广阔的市场应用前景。该文介绍了POI基板的制备、国内外的研究现状及POI基板在高性能SAW滤波器中的应用,综述了制备POI基板的关键技术并展望了未来的发展趋势。     

声表面波传感器检测电路的研究

针对目前声表面波(SAW)传感器检测电路的缺点,通过对SAW传感器信号的特征分析,设计了一种简单实用的SAW传感器检测电路,降低了硬件成本。该电路利用直接数字频率合成技术产生不同的频率信号,用以激励不同谐振频率的声表面波敏感元件,在间歇收发周期从SAW传感器输出信号中提取出反映被测量的频率信号,通过对该频率的测量得到被测物理量的变化。通过对SAW传感器的温度实验,获得了传感器的温度-频率特性,在较低频率(20MHz)时检测灵敏度可达1.36kHz/℃,具有较好的一致性;在较高频率(75MHz)时检测灵敏度可达2.03kHz/℃,存在一定偏差。     

国外简讯

美国柏杜大学报导了用ZnO/硅层状结构制作的第一个声表面波(SAW)谐振器及其特性.其结构与集成电路技术显然一致,通过对各种谐振器结构的测试获得了最佳Q值,这表明有可能把SAW谐振器与单片电路结合在一起,并可望用于单片式振荡器和窄带滤波器.SAW二端对结构分别由分开的输入和输     

电磁寄生参数在高频SAW滤波器设计中的应用

在设计高频声表面波(SAW)滤波器的过程中,若只考虑封装壳和键合线的电磁寄生参数而忽略汇流条的电磁寄生参数,则SAW滤波器的实际性能易受汇流条寄生参数影响而出现通带波动和驻波增大等问题。该文拟用电声-电磁联合仿真方法设计高频SAW滤波器以解决汇流条寄生参数对SAW滤波器性能的影响。通过此方法研制的滤波器通带插入损耗小于1 dB,波动0.5 dB,通带内驻波最大值2.1,-1.5 dB带宽75.7 MHz,-3 dB带宽84 MHz (相对带宽为4.8%),-30 dB带宽112 MHz,BW_{-3 dB}/BW_{-30 dB}矩形系数1.33。包含封装壳、键合线及汇流条的寄生参数的理论仿真结果与实验测试结果吻合较好,表明了采用此模型设计高频SAW滤波器的可行性。     

SAW filter manufacture and piezoelectric materials evaluation based on printed electronics technology

In this paper, the silver nanoparticle ink and ink-jet printing technology are used to manufacture the surface acoustic wave （SAW） filters. The characteristics of three common substrate piezoelectric materials of ST-quartz, Y36° -LiTaO3 and Y128°-LiNbO3 are evaluated. The experimental results show that Y128°-LiNbO3 matches the ink much better than others. The printed SAW filter with Y128°-LiNbO3 as piezoelectric substrate is realized, and its center frequency and bandwidth are 18.4 MHz and 500 kHz, respectively.     

混合结构声表面波滤波器的设计

为了提高矩形系数,该文针对混合结构的声表面波滤波器的设计展开研究。建立仿真模型,采用纵向耦合结构级联单个谐振器或多个谐振器,并在36°Y-X LiTaO₃和41°Y-X LiNbO₃压电材料上研制出两种声表面波滤波器。测试结果表明,滤波器的矩形系数分别为1.7和2,测试与仿真结果基本吻合。     

基于LiTaO3基片宽带声表面波滤波器设计方法

通讯系统传输效率的提升对滤波器带宽的要求越来越高,如果使用常规声表面波(SAW)滤波器设计技术,则将面临损耗大或带宽达不到要求的问题。该文根据系列宽带SAW滤波器产品开发结果,总结了采用特殊技术用LiTaO₃压电基片实现相对带宽8%以上的宽带SAW滤波器设计方法,其包括利用外围电感、电容增加SAW谐振器的谐振频率和反谐振频率的间隔,提高阻抗元滤波器带宽;利用多模式纵向耦合谐振滤波器结构增加滤波器带宽;利用双通带滤波器并联结构获得大带宽滤波器。上述方法各有优缺点,其均能获得约为9%的带宽。     

250 MHz SAW FILTERS FOR SS/FDMA SYSTEM EMPLOYING ST-CUT QUARTZ SUBSTRATES

Surface acoustic wave (SAW) filters are key devices in developing the bandwidth-variable filter matrix for the subchannel switched frequency division multiple access (SS/FDMA) system. This paper addresses the design and fabrication of two 250 MHz SAW filters employing temperature-stable ST-cut quartz substrates. The specafications for these filters are decided with due consideration of practical use by INTELSAT-type satellites. Measured electrical responses of the individual and combined channels show satisfactory performance. Computer simulations are performed using the measured responses to assess the effects of the SAW filters on digital carriers. Finally, the effects of the temperature and ageing stability characteristics are discussed based on the measured and calculated responses.     

SAW Bandpass Filter Design for 1.6-GHz PCM Timing Tank Applications

A 1.6-GHz surface acoustic wave (SAW) timing tank for a self-timed regenerative repeater for an ultrahigh-speed PCM optical fiber transmission system is described. A SAW narrow bandpass filter with 0.74-mu m linewidth interdigital transducers with double electrode geometry and 20-nm aluminum metallization on AT-quartz substrate is realized by conventional optical photolithography. Typical performance obtained is as follows: center frequency f/sub 0/ is 1.5993 GHz; insertion loss is 22 dB; stopband attenuation is above 23 dB with respect to the passbaand; stability is |2Q/sub L//spl dot/Delta f /f/sub 0/| < 0.1, where Q/sub L/ is loaded Q value and Delta f is mistuning due to temperature effects. It is demonstrated that SAW quartz transversal filters can be made into new practical filters which have both high Q value and high stability fn the GHz range and are satisfactory from the standpoints of precise design, fabrication technique, and performance.     

Devices based on surface acoustic waves for temperature sensors

Temperature dependences of the central frequency and intrinsic loss of delay line based on surface acoustic waves (SAWs) are measured in a temperature interval of 10–300°C for langasite acoustic line and two-input SAW cavity with the acoustic line made of black lithium niobate that have central frequencies of about 342 and 427 MHz, respectively, at room temperature. The application of such SAW devices in temperature sensors at temperatures of no greater than 300°C with the frequency-domain input signal is considered. A method for monitoring of minor temperature variations at a sensitivity of 0.001°C using SAW cavities with the acoustic line made of black lithium niobate is proposed and experimentally tested.