BIMORPH-TYPE PIEZOELECTRIC THIN FILM BENDING ACTUATORS SYNTHESIZED BY HYDROTHERMAL METHOD

Lead zirconate titanium solid-solution (PZT) thin films with various thickness are synthe-sized on titanium substrates by repeated hydrothermal treatments. Young modulus, electric-field-in-duced displacement and the density of the PZT film are measured respectively. Bimorph- type bendingactuators are fabricated using these films. The model, which is used to analyze the driving ability ofbimorph-type bending actuators by hydrothermal method, is set up. It can be seen that the drivingability of bimorph-type bending actuators can be greatly improved by optimizing the thickness of PZTthin film and substrae from the theoretical analysis results. The measured values are expected to agreewith the theoretical values calculated by the above model.     

超磁致伸缩薄膜悬臂梁的非线性变形分析及试验

将双层超磁致伸缩薄膜(Giant magnetostrictive thin film,GMF)悬臂梁的磁致伸缩作用等效为分布弯矩作用,以简化磁机耦合模型。在几何非线性弹性变形理论基础上,根据哈密顿原理推导出超磁致伸缩薄膜非线性变形的控制方程,并给出超磁致伸缩薄膜悬臂梁静态几何非线性变形模型、非线性主共振和超谐波共振响应模型。采用悬臂梁式超磁致伸缩双层膜(铽镝铁—聚酰亚胺—钐铁)进行变形特性的试验研究,发现超磁致伸缩双层膜表现出明显的几何非线性变形特征,悬臂梁端部位移量约为厚度的2/3;同时检测到悬臂梁的超谐波共振现象,前三阶超谐波共振的驱动效率与一阶主共振的驱动效率具有可比性。将所提出的静态非线性变形模型和振动响应模型分别与试验结果对比发现,两个模型可较好地说明双层超磁致伸缩薄膜的非线性变形特性,为有效地利用超磁致伸缩薄膜设计开发微驱动器和微传感器提供依据。     

An improved resonantly driven piezoelectric gas pump

Piezoelectric pumps have the potential to be used in a variety of applications, such as in air circulation and compression. However, piezoelectric membrane pumps do not have enough driving capacity, and the heat induced during the direct contact between the driving part and the gas medium cannot be dissipated smoothly. When the gas is blocked, the piezoelectric vibrator generates heat quickly, which may eventually lead to damage. Resonantly driven piezoelectric stack pumps have high performance but no price advantage. In this situation, a novel, resonantly driven piezoelectric gas pump with annular bimorph as the driver is presented. In the study, the working principle of the novel pump was analyzed, the vibration mechanics model was determined, and the displacement amplified theory was studied. The outcome indicates that the displacement amplification factor is related with the original displacement provided by the piezoelectric bimorph. In addition, the displacement amplification effect is related to the stiffness of the spring lamination, adjustment spring, and piezoelectric vibrator, as well as to the systematic damping factor and the driving frequency. The experimental prototypes of the proposed pump were designed, and the displacement amplification effect and gas output performance were measured. At 70 V of sinusoidal AC driving voltage, the improved pump amplified the piezoelectric vibrator displacement by 4.2 times, the maximum gas output flow rate reached 1685 ml/min, and the temperature of the bimorph remained normal after 2000 hours of operation when the gas medium was blocked.     

压电双晶片的有限元分析及实验

采用有限元分析方法,分析了压电双晶片悬臂梁的位移形变特征.研究了金属弹性层、压电陶瓷片的材料属性及几何尺寸对双晶片偏转位移的影响;计算了双晶片的弹性模量、厚度以及加载电压与位移形变产生弯应力的关系;通过位移测试、弯应力测试等相关实验对有限元分析进行了验证.当加载电压为60 V(120 Vp-p)时,双晶片的偏转位移和弯应力分别为166/μm和34.7 m·N,实验结果证明本文所建的有限元模型是合理有效的.此外,测试了压电双晶片的振动特性,测得其谐振频率为310 Hz,在该频率下加载20 Vp-p电压,其端部位移输出即可达1.7 mm.有限元分析结果及实验验证为压电双晶片结构的优化设计提供了依据.     

压电分流阻尼控制悬臂梁振动的参数优化分析

采用阻抗分析技术,根据压电材料的机电耦合特性和RLC电路的电学阻抗特性,详细推导了RLC串联压电分流阻尼系统的机械阻抗特性,研究了作单模态振动的悬臂梁在粘贴压电片后形成的压电悬臂梁系统的位移传递函数特性。借助于调谐质量阻尼减振理论,进行了压电分流阻尼系统的参数优化分析,并通过算例验证了参数优化前后压电分流阻尼系统对悬臂梁振动的被动控制效果。     

器件韧性镀膜微划痕破坏机理研究

对硅基体上之韧性镀膜（铝膜）的粘结强度及破坏机理进行微划痕实验及理论研究,从实验中观察出该体系的破坏特征,进而测量出微划前水平驱动力、划痕深度随划前水平位移并伴随着界面脱胶发生的变化规律,针对微刈痕破坏特征,建立了双粘聚力模型,并对由微划痕引起的界面弹塑性脱胶进行了数值模拟,给出界面脱胶时能量释放率随其他材料参数变化的理论预测曲线,并将预测值与文中的铝／硅实验结果及与文献中关于铂／氧化镍的实验结果进行对比,达到基本符合。通过以对韧性薄膜／脆性基体的微划痕实验研究和理论分析,获得如下主要结论：（1）韧性膜的微划痕破坏特征为,当划刀尖端接近界面时,将突然发生薄膜测界面的脱胶现象,并在界面附近脆性基一侧形成界面裂纹并扩展;微划痕的水平驱动力表征了整个薄膜脱胶体系的能量释放率;薄膜或涂层材料的塑性变形对微划痕过程有较强的抑制作用。（2）界面的分离强度和材料的剪切强度对微划痕过程有重要的影响。（3）划痕刀片的几何特征角对刻痕水平驱动力影响不大。     

压电双晶片和单晶片驱动下泵的输出性能研究

为从理论上获得压电泵在薄片型压电双晶片和单晶片(统称压电振子)驱动时的输出流量关系,需要获得二者振动时产生的容积变化量。假设压电振子在周边固定约束条件下,应用弹性薄板的小挠度弯曲变形理论,推导了压电双晶片和单晶片振动时的容积变化方程,并根据方程对铜基板直径为35mm,压电陶瓷直径为29mm,基板和压电陶瓷厚度同时为0.2mm和0.3mm 2种规格的压电单晶片和双晶片进行了振动容积计算。计算结果显示,相同基板和陶瓷厚度的双晶片振动产生的容积变化量是单晶片的2.3倍。将上诉压电振子应用到单腔压电泵上进行输送气体流量测试,获得的实际输出流量比在1.5~2倍之间,理论计算结果与试验测试结果比较接近。理论推导结果为比较双晶片和单晶片驱动下压电泵的输出能力提供了可靠依据。     

Geometrical nonlinear deformation model and its experimental study on bimorph giant magnetostrictive thin film

The geometrical nonlinearity of a giant magnetostrictive thin film (GMF) can be clearly detected under the magnetostriction effect. Thus, using geometrical linear elastic theory to describe the strain, stress, and constitutive relationship of GMF is inaccurate. According to nonlinear elastic theory, a nonlinear deformation model of the bimorph GMF is established based on assumptions that the magnetostriction effect is equivalent to the effect of body force loaded on the GMF. With Taylor series method, the numerical solution is deduced. Experiments on TbDyFe/Polyimide (PI)/SmFe and TbDyFe/Cu/SmFe are then conducted to verify the proposed model, respectively. Results indicate that the nonlinear deflection curve model is in good conformity with the experimental data.     

压电双晶片传感器灵敏度特性分析

文中用模态分析法详细分析了压电双晶片力、振动、粗糙度传感器的位移特性及灵敏度特性,并给出了灵敏度与压电材料参数及晶片几何尺寸的关系。     

超磁致伸缩薄膜悬臂梁的非线性振动特性试验研究

超磁致伸缩薄膜(GMF)的振动特性是决定其驱动性能的重要因素。针对研制出的Cu基双层GMF(TbDyFe/Cu/SmFe),测量并分析了其磁致回线、矫顽力等磁化特性。在此基础上,采用基于激光位移传感器的薄膜振动特性试验装置,研究了Cu基GMF悬臂梁在低频低磁场下的振动特性,结果表明,Cu基GMF悬臂梁具有10阶超谐波共振特性,二、三阶超谐波共振的峰峰值均在35μm以上,且其一阶主共振呈现明显的"软弹簧"特征。最后,给出了直流偏置磁场和交流驱动磁场对Cu基GMF共振频率和振动幅值等驱动性能的影响规律,为设计开发低频低磁场驱动的GMF微执行器和微传感器提供试验参考。     

Analysis of Natural Vibrations of Round Bimorph Piezoelectric Ceramic Plates of Arbitrary Dimensions. II. Rigidly Fixed Piezoelectric Plate

The problem of natural vibrations of a round bimorph rigidly fixed supported piezoelectric ceramic plate (piezoplate) of an arbitrary thickness with arbitrary axisymmetric electrodes is solved using the method of finite elements. The natural frequency spectra are analyzed in the resonance and antiresonance regimes. The displacement distributions over the piezoplate surfaces (vibration modes) are also analyzed and the dynamic electromechanical coupling coefficient (DCC) is investigated as a function of the relative plate thickness for various piezoelectric ceramic compositions. Round bimorph piezoplates with partial electrodes are considered; it is shown that the DCC can be significantly (by tens times) raised using partial electrodes. The results obtained make it possible to estimate the limits of applicability of the approximate one-dimensional theory and choose the optimum geometric dimensions of the plate and electrodes that ensure the maximum DCC.     

悬臂梁双压电晶片振子发电性能研究

以双压电晶片振子为研究对象,对悬臂梁式双压电晶片振子在正压电效应下电压输出特性进行了有限元分析与试验研究,给出了压电晶片在悬臂梁上的最佳粘贴位置,并且利用有限元分析软件建立了悬臂梁双压电晶片振子的有限元模型,进行了结构尺寸参数对悬臂梁双压电晶片振子输出电压影响规律的仿真分析;利用压电陶瓷发电能力测试系统进行了试验测试,通过仿真和试验结果对比分析,得出了结构尺寸参数对悬臂梁双压电晶片振子发电的输出电压影响规律。     

BIMORPH PIEZOELECTRIC ACTUATOR FOR SMALL PIPE ROBOT

An experimental bimorph piezoelectric element (PZT) actuator for small pipe robot is developed. The robot can move in φ20 mm pipe, and can carry a CCD camera for detecting cracks or fine holes on inner surface of pipe. The velocity of the robot can reach 17～22 mm/s for vertical pipe up/down, respectively. Moving principle and its performance characteristics are presented.     

PMN-PZT多层厚膜微致动器的制作与分析

研制了一种用于计算机磁头精确定位的"U"形压电微致动器。该致动器由流延法在不锈钢(SUS304)基体上制备镁铌酸铅一锆钛酸铅(PMN-PZT)多层膜,并由丝网印刷工艺制作Ag／Pd内电极。在此基础上,在多普勒干涉仪(LDV)上对封装了压电元件的"U"形微致动器进行了测试。结果表明,该致动器具有优异的位移／电压灵敏度、谐振频率等特点。此外,有限元仿真进一步验证了多层结构的压电元件可以有效地提高压电微致动器的驱动能力。     

液晶相控阵指向矢分布求解及其光束偏转

为了分析液晶相控阵空间光调制特性与驱动电压之间的关系,根据液晶连续体弹性形变理论,提出一种基于非线性最小二乘差分迭代求解液晶指向矢空间分布的方法。该方法利用液晶材料的电光特性,以阈值电压时的液晶指向矢分布作为初始值,通过非线性最小二乘法推导在驱动电场的作用下液晶指向矢的空间分布情况,以及稳定状态时液晶相位延迟与驱动电压之间的相位调制特性曲线。最终通过实验完成了理论验证,控制液晶相控阵的驱动电压,实现对远场光束指向的偏转控制。利用驱动电压直接求解电位移矢量,为后续指向矢与电位移耦合迭代提供初始值,不仅减少了计算量,而且更加符合液晶分子在实际电场作用下的运动过程,减少了模型误差。结果表明:在系统的终止误差为1.0×10-8时,不同电压下的迭代时间均值为0.33s;在驱动电压为5V的情况下,该算法与差分迭代相比,液晶分子倾斜角的角度误差精度提高了0.09rad。     

PZN-PT based smart probe for high temperature fluid viscosity measurements

A smart sensing system is proposed for high-temperature (up to 90 °C) viscosity measurement of viscous fluids. The proposed sensing system is based on a smart cantilever probe on which a new generation of piezoelectric materials, relaxor ferroelectric Pb(Zn(1/3)Nb(2/3))O(3−x)PbTiO(3) (PZN-PT), is bonded. The proposed system utilizes a PZN-PT single crystal for actuation and a laser displacement sensor for vibration detection. By analyzing the vibrational properties of the cantilever probe, the viscosity of measured fluids at different temperatures (up to 90 °C) were extracted. Lab tests were carried out to verify and evaluate the effect of this system on high-temperature measurements. Results show a consistent agreement with theoretical analysis. In comparison to the existing high-performance piezoelectric material, lead magnesium niobate-lead titanate solid solution (1−x)[Pb(Mg1/3Nb2/3)O3]−x[PbTiO3] (PMN-PT), PZN-PT has a steady performance at high temperatures and shows more reliability. The proposed sensing system can be applied to real-time monitoring of viscous fluids in high-temperature environments, such as vehicle cooling systems, power plant cooling tower fluid monitoring, and other heat transfer systems.     

采用双晶片驱动的棒板结合式压电驱动器设计

设计制作了一种采用双晶片压电陶瓷结构的棒板结合式压电驱动器.和瓷片分别粘接在青铜定子的上下两侧.定子上的金属圆柱体被用来放大振动的横向位移,并对金属棒状的转子进行激振,使其旋转.利用有限元分析(FEA)对定子进行了分析,发现在同样的驱动模式下,与传统的单片陶瓷片驱动器相比,该驱动器可以提供更多的横向和纵向的振动位移,大约提高25%左右.这种新结构也可避免不同振动模式之间的模态耦合现象,并产生理想的振动模态,以提高驱动器的运行稳定性.实验表明,驱动器在25 Vo-p低电压下可以提供512r/rain的转速,而单片陶瓷驱动器在该电压下不能工作.这种压电驱动器可以经过优化和调整来满足不同的实际应用,如精确定位仪器,生物工程和光聚焦系统等.     

具有三层结构的SU-8胶V形微电热驱动器

为解决SU-8胶微电热驱动器在工作过程中存在平面外运动的问题,提出了一种具有铜-SU-8胶-铜三层对称结构的新型SU-8胶V形微电热驱动器.采用刚度矩阵方法建立了包含被驱动结构刚度的微电热驱动器力学模型,并针对一种柔性微夹钳,利用该模型对微电热驱动器进行了几何参数设计.利用Ansys仿真软件对所设计微驱动器进行了分析,仿真结果验证了所建模型的合理性.提出了一种新的MEMS加工工艺来制作三层结构微电热驱动器,并测试了它的性能.结果表明,实验结果与仿真结果相差不大,在150mV驱动电压下,所设计微驱动器温度仅升高约32.93℃,并对微夹钳产生约2.5 μm的输入位移,使微夹钳产生126μm的钳口距离改变量.微驱动器仅消耗大约30.35 mW的功率,钳口的平面外运动小于500 nm.最后,利用微电热驱动器驱动的微夹钳成功地对一个长1.2 mm,宽135μm,厚50μm的SU-8胶材料微型零件进行了微操作实验,实验证明了微驱动器实际性能基本满足设计要求.     

轴向预压缩双晶片动力学模型与特性分析

基于欧拉梁的假设,将双晶片简化为3层压电层合梁,由Hamilton原理建立系统的动力学模型,得到描述轴向预压缩压电双晶片的偏微分方程及特定边界条件,通过求解上述微分方程的边值问题得到双晶片在不同轴向力下的输出特性的解析表达式。利用有限元软件对双晶片进行仿真,验证了理论分析的正确性,增加理论分析结果的可信度。最后通过实验的方法研究双晶片的静、动力学特性,证明了施加轴向力可以降低双晶片的弯曲刚度和固有频率,显著增加其机电耦合效率,提高力和位移输出能力。轴向力虽然会影响双晶片启动时的位移峰值,但是对响应时间和带宽影响较小,大轴向力下双晶片仍具有带宽高与响应快的优势。     

Active control of flow noise sources in turbulent boundary layer on a flat-plate using piezoelectric bimorph film

The piezoelectric bimorph film, which, as an actuator, can generate more effective displacement than the usual PVDF film, is used to control the turbulent boundary-layer flow. The change of wall pressures inside the turbulent boundary layer is observed by using the multi-channel microphone array flush-mounted on the surface when actuation at the non-dimensional frequency f_b⁺=0.008 and 0.028 is applied to the turbulent boundary layer. The wall pressure characteristics by the actuation to produce local displacement are more dominantly influenced by the size of the actuator module than the actuation frequency. The movement of large-scale turbulent structures to the upper layer is found to be the main mechanism of the reduction in the wallpressure energy spectrum when the 700v/u_τ-long bimorph film is periodically actuated at the non-dimensional frequency f_b⁺ =0.008 and 0.028. The biomorph actuator is triggered with the time delay for the active forcing at a single frequency when a 1/8″ pressuretype, pin-holed microphone sensor detects the large-amplitude pressure event by the turbulent spot. The wall-pressure energy in the late-transitional boundary layer is partially reduced near the convection wavenumber by the open-loop control based on the large amplitude event.