Design considerations for piezoelectric polymer ultrasound transducers

Much work has been published on the design of ultrasound transducers using piezoelectric ceramics, but a great deal of this work does not apply when using the piezoelectric polymers because of their unique electrical and mechanical properties. The purpose of this paper is to review and present new insight into seven important considerations for the design of active piezoelectric polymer ultrasound transducers: piezoelectric polymer materials selection, transducer construction and packaging requirements, materials characterization and modeling, film thickness and active area design, electroding selection, backing material design, and front protection/matching layer design. Besides reviewing these design considerations, this paper also presents new insight into the design of active piezoelectric polymer ultrasonic transducers. The design and fabrication of an immersible ultrasonic transducer, which has no adhesive layer between the active element and backing layer, is included. The transducer features direct deposition of poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymer onto an insulated aluminum backing substrate. Pulse-echo tests indicated a minimum insertion loss of 37 dB and -6 dB bandwidth of 9.8 to 22 MHz (71%). The use of polymer wear-protection/quarter-wave matching layers is also discussed. Test results on a P(VDF-TrFE) transducer showed that a Mylar/sup TM/ front layer provided a slight increase in pulse-echo amplitude of 15% (or 1.2 dB) and an increase in -6 dB pulse-echo fractional bandwidth from 86 to 95%. Theoretical derivations are reported for optimizing the active area of the piezoelectric polymer element for maximum power transfer at resonance. These derivations are extended to the special case for a low profile (i.e., thin) shielded transducer. A method for modeling the non-linear loading effects of a commercial pulser-receiver is also included.     

Fabrication and evaluation of a single-element Bi(0.5)Na(0.5)TiO(3)-based ultrasonic transducer

This paper discusses the fabrication and characterization of a single-element ultrasonic transducer with a lead-free piezoelectric active element. A piezoelectric ceramic with composition of 0.88Bi(0.5)Na(0.5)TiO(3)-0.08Bi(0.5)K(0.5)TiO(3)- 0.04Bi(0.5)Li(0.5)TiO(3) was chosen as the active element of the transducer. This composition exhibited a thickness coupling coefficient (kt) of 0.45, a dielectric constant of 440 (at 1 kHz), and a longitudinal piezoelectric coefficient (d(33)) of 84 pC?N(-1). To make the transducer, the ceramic was sandwiched between an epoxy-tungsten backing layer and a silver epoxy matching layer. An epoxy lens was also incorporated into the transducer?s design to focus the ultrasound beam. The focused transducer with a center frequency of about 23 MHz demonstrated a -6-dB bandwidth of 55% and an insertion loss of -32 dB; the -20-dB pulsed length was measured to be 150 ns. A phantom made of copper wires (30 μm in diameter) was utilized to investigate the imaging capability of the transducer. The results indicated that the fabricated transducer, with a lateral resolution of 260 μm and a relatively high depolarization temperature, could be considered as a candidate for replacement of lead-based ultrasonic transducers.     

PMN-PT single crystal, high-frequency ultrasonic needle transducers for pulsed-wave Doppler application

High-frequency needle ultrasound transducers with an aperture size of 0.4 mm were fabricated using lead magnesium niobate-lead titanate (PMN-33% PT) as the active piezoelectric material. The active element was bonded to a conductive silver particle matching layer and a conductive epoxy backing through direct contact curing. An outer matching layer of parylene was formed by vapor deposition. The active element was housed within a polyimide tube and a 20-gauge needle housing. The magnitude and phase of the electrical impedance of the transducer were 47 omega and -38 degrees, respectively. The measured center frequency and -6 dB fractional bandwidth of the PMN-PT needle transducer were 44 MHz and 45%, respectively. The two-way insertion loss was approximately 15 dB. In vivo high-frequency, pulsed-wave Doppler patterns of blood flow in the posterior portion and in vitro ultrasonic backscatter microscope (UBM) images of the rabbit eye were obtained with the 44-MHz needle transducer.     

Acoustic impedance matching of piezoelectric transducers to the air

The purpose of this work is threefold: to investigate material requirements to produce impedance matching layers for air-coupled piezoelectric transducers, to identify materials that meet these requirements, and to propose the best solution to produce air-coupled piezoelectric transducers for the low megahertz frequency range. Toward this end, design criteria for the matching layers and possible configurations are reviewed. Among the several factors that affect the efficiency of the matching layer, the importance of attenuation is pointed out. A standard characterization procedure is applied to a wide collection of candidate materials to produce matching layers. In particular, some types of filtration membranes are studied. From these results, the best materials are identified, and the better matching configuration is proposed. Four pairs of air-coupled piezoelectric transducers also are produced to illustrate the performance of the proposed solution. The lowest two-way insertion loss figure is -24 dB obtained at 0.45 MHz. This increases for higher frequency transducers up to -42 dB at 1.8 MHz and -50 at 2.25 MHz. Typical bandwidth is about 15-20%.     

A miniaturized catheter 2-D array for real-time, 3-D intracardiac echocardiography

The design, fabrication, and characterization of a 112 channel, 5 MHz, two-dimensional (2-D) array transducer constructed on a six layer flexible polyimide interconnect circuit is described. The transducer was mounted in a 7 Fr (2.33 mm outside diameter) catheter for use in real-time intracardiac volumetric imaging. Two transducers were constructed: one with a single silver epoxy matching layer and the other without a matching layer. The center frequency and -6 dB fractional bandwidth of the transducer with a matching layer were 4.9 MHz and 31%, respectively. The 50 omega pitch-catch insertion loss was 80 dB, and the typical interelement crosstalk was -30 dB. The final element yield was greater than 97% for both transducers. The transducers were used to acquire real-time, 3-D images in an in vivo sheep model. We present in vivo images of cardiac anatomy obtained from within the coronary sinus, including the left and right atria, aorta, coronary arteries, and pulmonary veins. We also present images showing the manipulation of a separate electrophysiological catheter into the coronary sinus.     

Design and fabrication of a 40-MHz annular array transducer

This paper investigates the feasibility of fabricating a five-ring, focused annular array transducer operating at 40 MHz. The active piezoelectric material of the transducer was a 9-microm thick polyvinylidene fluoride (PVDF) film. One side of the PVDF was metallized with gold and forms the ground plane of the transducer. The array pattern of the transducer and electrical traces to each annulus were formed on a copper-clad polyimide film. The PVDF and polyimide were bonded with a thin layer of epoxy, pressed into a spherically curved shape, then back filled with epoxy. A five-ring transducer with equal area elements and 100-microm kerfs between annuli was fabricated and tested. The transducer had a total aperture of 6 mm and a geometric focus of 12 mm. The pulse/echo response from a quartz plate located at the geometric focus, two-way insertion loss (IL), complex impedance, electrical crosstalk, and lateral beamwidth all were measured for each annulus. The complex impedance data from each element were used to perform electrical matching, and the measurements were repeated. After impedance matching; fc approximately equal to 36 MHz and -6-dB bandwidths ranged from 31 to 39%. The ILs for the matched annuli ranged from -28 to -38 dB.     

A single-element transducer with nonuniform thickness for high-frequency broadband applications

The design, fabrication, and evaluation of a high-frequency single-element transducer are described. The transducer has an annular geometry, with the thickness of the piezoelectric material increasing from the center to the outside. This single-element annular transducer (SEAT) can provide a broader frequency range than a conventional single-element transducer with a uniform thickness (single-element uniform transducer, or SEUT). We compared the characteristics of a SEAT and a SEUT. Both transducers used 36deg-rotated, Y-cut lithium niobate (LiNbO₃) material. The SEAT had a diameter of 6 mm and comprised 6 subelements of equal area (electrically connected by a single electrode on each side) whose thickness ranged from 60 mum (center) to 110 mum (outside), which resulted in the center frequency of the subelements varying from 59.8 MHz to 25 MHz. The overall center frequency was 42.4 MHz. The annular pattern was constructed using an ultrasonic sculpturing machine that reduced the root-mean-square value of the surface roughness to 454.47 nm. The bandwidth of the SEAT was 19% larger than that of the SEUT. However, compared with the SEUT, the 2-way insertion loss of the SEAT was increased by 3.1 dB. The acoustic beam pattern of the SEAT was also evaluated numerically by finite-element simulations and experimentally by an ultrasound beam analyzer. At the focus (10.5 mm from the transducer surface), the -6 dB beam width was 108 mum. There was reasonable agreement between the data from simulations and experiments. The SEAT can be used for imaging applications that require a wider transducer bandwidth, such as harmonic imaging, and can be manufactured using the same techniques used to produce transducers with multiple frequency bands.     

Intracardiac catheter 2-D arrays on a silicon substrate

The design, fabrication, and characterization of a 7 MHz, two-dimensional (2-D) array transducer built on a silicon substrate is described. The array fits inside a 9-French (2.9 mm O.D.) catheter for use in real-time intracardiac volumetric imaging. The -6 dB fractional bandwidth of the transducer is 30%, the 50 /spl Omega/ pitch-catch insertion loss is 78 dB, and the interelement crosstalk is -25 dB. Realtime volumetric images in phantoms and in-vitro images of a sheep heart have been acquired yielding measured spatial resolution of 2 mm at a depth of 1 cm. The cardiac structures imaged include ventricular chambers, interventricular septum, mitral and tricuspid valves and real-time 3-D rendered volumes of the tricuspid valve in the open and closed position.     

A high-frequency annular-array transducer using an interdigital bonded 1-3 composite

This paper reports the design, fabrication, and characterization of a 1-3 composite annular-array transducer. An interdigital bonded (IB) 1-3 composite was prepared using two IB operations on a fine-grain piezoelectric ceramic. The final composite had 19-μm-wide posts separated by 6-μm-wide polymer kerfs. A novel method to remove metal electrodes from polymer portions of the 1-3 composite was established to eliminate the need for patterning and aligning the electrode on the composite to the electrodes on a flexible circuit. Unloaded epoxy was used for both the matching and backing layers and a flexible circuit was used for interconnect. A prototype array was successfully fabricated and tested. The results were in reasonable agreement with those predicted by a circuit-analogous model. The average center frequency estimated from the measured pulse-echo responses of array elements was 33.5 MHz and the -6-dB fractional bandwidth was 57%. The average insertion loss recorded was 14.3 dB, and the maximum crosstalk between the nearest-neighbor elements was less than -37 dB. Images of a wire phantom and excised porcine eye were obtained to show the capabilities of the array for high-frequency ultrasound imaging.     

Design and fabrication of PZN-7%PT single crystal high frequency angled needle ultrasound transducers

A high-frequency angled needle ultrasound transducer with an aperture size of 0.4 x 0.56 mm2 was fabricated using a lead zinc niobate-lead titanate (PZN- 7%PT) single crystal as the active piezoelectric material. The single crystal was bonded to a conductive silver particle matching layer and a conductive epoxy backing material through direct contact curing. A parylene outer matching layer was formed by vapor deposition. Angled needle probe configuration was achieved by dicing at 45 degrees to the single crystal poling direction to satisfy a clinical request for blood flow measurement in the posterior portion of the eye. The electrical impedance magnitude and phase of the transducer were 42 Omega and -63 degrees , respectively. The measured center frequency and the fractional bandwidth at -6 dB were 43 MHz and 45%, respectively. The two-way insertion loss was approximately 17 dB. Wire phantom imaging using fabricated PZN-7%PT single crystal transducers was obtained and spatial resolutions were assessed.     

25 MHz ultrasonic transducers with lead- free piezoceramic, 1-3 PZT fiber-epoxy composite, and PVDF polymer active elements

This paper presents the fabrication and characterization of single-element ultrasonic transducers whose active elements are made of lead-free piezoceramic, 1-3 PZT/polymer composite and PVDF film. The lead free piezoelectric KNNLT- LS(K_0.44Na_0.52Li_0.04)(Nb_0.84Ta_0.10S_0.06b)O₃ powders and ceramics were prepared under controlled humidity and oxygen flow rate during sintering. Due to its moderate longitudinal piezoelectric charge coefficient (175 pC/N) and k_t of 0.50, the KNN-LT-LS composition may be a good candidate for highfrequency transducer applications. PZT fibers with 25 μm diameter formed by the viscose suspension spinning process were incorporated into epoxy to fabricate 1-3 composites with the averaged k_t = 0.64 and d₃₃ = 400 pC/N. Using KNN-LS-LT ceramic, 1-3 PZT fiber composite, and PVDF film, 3 different unfocused single element transducers with center frequencies of 25 MHz were fabricated. The acoustic characterization of the transducers demonstrated that wideband and low insertion loss could be obtained employing KNN-LS-LT ceramic. The ?6 dB bandwidth and insertion loss were 70% and ?21 dB, respectively. In comparison, the insertion loss of the ceramic transducer was much smaller than those made with 1-3 composite and PVDF film. This was attributed to closer electrical impedance match to 50 Ω and higher thickness coupling coefficient of the ceramic transducer.     

Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications

This paper discusses the design, fabrication, and testing of sensitive broadband lithium niobate (LiNbO/sub 3/) single-element ultrasonic transducers in the 20-80 MHz frequency range. Transducers of varying dimensions were built for an f# range of 2.0-3.1. The desired focal depths were achieved by either casting an acoustic lens on the transducer face or press-focusing the piezoelectric into a spherical curvature. For designs that required electrical impedance matching, a low impedance transmission line coaxial cable was used. All transducers were tested in a pulse-echo arrangement, whereby the center frequency, bandwidth, insertion loss, and focal depth were measured. Several transducers were fabricated with center frequencies in the 20-80 MHz range with the measured -6 dB bandwidths and two-way insertion loss values ranging from 57 to 74% and 9.6 to 21.3 dB, respectively. Both transducer focusing techniques proved successful in producing highly sensitive, high-frequency, single-element, ultrasonic-imaging transducers. In vivo and in vitro ultrasonic backscatter microscope (UBM) images of human eyes were obtained with the 50 MHz transducers. The high sensitivity of these devices could possibly allow for an increase in depth of penetration, higher image signal-to-noise ratio (SNR), and improved image contrast at high frequencies when compared to previously reported results.     

Dual layer matching (20 MHz) piezoelectric transducers with glassand parylene

This study describes a method of applying very thin broadband matching layers to 2 mm diameter 20 MHz transducers. Dual layer acoustic matching between the ceramic and the medium at the front face of the transducer was accomplished by selecting 1/4 wavelength glass layers from a commercial source, epoxying them to the ceramic, and vapor depositing parylene to 1/4 wavelength thickness on the glass. A 8 dB fractional bandwidth of 0.75 and insertion loss of -10 dB was found on the average for these transducers. This method allowed fabricating probes that performed well, were reproducible, provided both a matching and protection coating, and could be fabricated in a practical manner     

A 256 x 256 2-D array transducer with row-column addressing for 3-D rectilinear imaging

We present simulation and experimental results from a 5-MHz, 256times256 2-D (65536 elements, 38.4times38.4 mm) 2-D array transducer with row-column addressing. The main benefits of this design are a reduced number of interconnects, a modified transmit/receive switching scheme with a simple diode circuit, and an ability to perform volumetric imaging of targets near the transducer with transmit beamforming in azimuth and receive beamforming in elevation. The final dimensions of the transducer were 38.4 mm times 38.4 mm times 300 mum. After a row-column transducer was prototyped, the series resonance impedance was 104 Omega at 5.4 MHz. The measured -6 dB fractional bandwidth was 53% with a center frequency of 5.3 MHz. The SNR at the transmit focus was measured to be 30 dB. At 5 MHz, the average nearest neighbor crosstalk was -25 dB. In this paper, we present 3-D images of both 5 pairs of nylon wires embedded in a clear gelatin phantom and an 8 mm diameter cylindrical anechoic cyst phantom acquired from a 256 times 256 2-D array transducer made from a 1-3 composite. We display the azimuth and elevation B-scans as well as the C-scan for each image. The cross-section of the wires is visible in the azimuth B-scan, and the long axes can be seen in the elevation B-scan and C-scans. The pair of wires with 1-mm axial separation is discernible in the elevational B-scan. When a single wire from the wire target phantom was used, the measured lateral beamwidth was 0.68 mm and 0.70 mm at 30 mm depth in transmit beamforming and receive beamforming, respectively, compared with the simulated beamwidth of 0.55 mm. The cross-section of the cyst is visible in the azimuth B-scan whereas the long axes can be seen as a rectangle in the elevation B-scan and C-scans.     

A micromachine high frequency ultrasound scanner using photolithographic fabrication

In this paper we describe two new types of transducer assemblies fabricated from polyimide films with photolithography that use a polyimide micromachined (MEMS) actuator to mechanically scan an ultrasound beam. Forward viewing transducers pivoted on cantilever hinges and side scanning transducers tilted on torsion hinges were fabricated on polyimide substrates with tables 1.125 mm and 2.25 mm wide. PZT transducers fabricated on these tables operating at 20 MHz and 30 MHz yielded insertion losses of 20-26 dB and fractional bandwidths of 34-49%. The transducer assemblies driven by MEMS actuators produced sector scans of 45-60° in air at resonant frequencies of 32 to 90 Hz and sector scans in fluid of 6-8°. Real time images of wire phantoms were obtained using a single channel imaging system based on a personal computer platform with LabVIEW software     

Fabrication of high frequency spherically shaped ceramictransducers

Difficulty in obtaining well focused efficient ultrasound transducers has limited the development of new high frequency applications of B-mode imaging. This paper describes a method for fabricating high frequency (53 MHz) spherically focused lead zirconate titanate (PZT) transducers. A transducer is fabricated by bonding a malleable backing layer onto a thin plate of PZT and then pressing the plate into a spherically shaped well. The backing layer evenly distributes stresses across the material when it is pressed into the well. Local concentrations of stress which lead to fracture are avoided and the material can be deformed without macroscopic cracking. The characteristics of a 2 mm diameter 53 MHz PZT transducer with a 4 mm focal length are described. A lateral beam width of 68 μm and a 12 dB depth of field of 1.5 mm were obtained. The minimum two-way insertion loss of the system was -25 dB and the 6 dB bandwidth of the pulse echo response was 30%. An image of a resolution phantom and an in vivo skin image illustrate the excellent imaging characteristics of the transducer     

High-frequency ultrasonic transducer fabricated with lead-free piezoelectric single crystal

High-frequency (25 MHz) ultrasonic transducers with Na(0.5)Bi(0.5)TiO(3)-BaTiO(3) (NBT-BT) lead-free piezoelectric single crystal as the active elements are fabricated and characterized. The impedance measurement reveals that the poled [001]-oriented NBT-BT single crystal exhibits a high thickness electromechanical coefficient k(t) of 0.52 and a low clamped dielectric constant of 80. The -6-dB bandwidth of the transducer is 46.16% and the insertion loss at the center frequency is -31.89 dB. The good performance of the transducer indicates that the NBT-BT single crystal would be a promising lead-free material for ultrasonic transducer applications.     

Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

Micromachining techniques, in combination with low temperature ceramic composite sol-gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUTs). The processing techniques of low temperature (710 degrees C) composite sol-gel ceramic (sol + ceramic powder) deposition and wet etching were used to deposit and structure 27-microm thick lead zirconate titanate (PZT) films on silicon substrates to produce annular array Tm-pMUTs. Using these techniques, high quality PZT materials with near bulk permittivity have been obtained. The Tm-pMUT devices were shown to resonate at approximately 60 MHz in air and 50 MHz in water. From resonance measurements k(t) values ranging between 0.2 and 0.47 have been calculated and shown to depend on the level of porosity within the film. Lower values of kt were observed for films with higher levels of porosity, which was attributed to the relative decrease in the effective piezoelectric coefficient epsilon(33) with respect to stiffness and permittivity as a function of increasing porosity. This paper presents the successful micro-fabrication of a Tm-pMUT device and discusses the optimization of the poling conditions and effect of PZT microstructure on the coupling coefficient k(t). Pulse echo measurements in water, showing a -6 dB center frequency of 53 MHz and 47% -6 dB bandwidth, using a target 15 mm away from the transducer, have been included to demonstrate successful operation of the device. Full analysis of these results will be conducted in later publications.     

Bandwidth and resolution enhancement through pulse compression

A novel pulse compression technique is developed that improves the axial resolution of an ultrasonic imaging system and provides a boost in the echo signal-to-noise ratio (eSNR). The new technique, called the resolution enhancement compression (REC) technique, was validated with simulations and experimental measurements. Image quality was examined in terms of three metrics: the eSNR, the bandwidth, and the axial resolution through the modulation transfer function (MTF). Simulations were conducted with a weakly-focused, single-element ultrasound source with a center frequency of 2.25 MHz. Experimental measurements were carried out with a single-element transducer (f/3) with a center frequency of 2.25 MHz from a planar reflector and wire targets. In simulations, axial resolution of the ultrasonic imaging system was almost doubled using the REC technique (0.29 mm) versus conventional pulsing techniques (0.60 mm). The -3 dB pulse/echo bandwidth was more than doubled from 48% to 97%, and maximum range sidelobes were -40 dB. Experimental measurements revealed an improvement in axial resolution using the REC technique (0.31 mm) versus conventional pulsing (0.44 mm). The -3 dB pulse/echo bandwidth was doubled from 56% to 113%, and maximum range sidelobes were observed at -45 dB. In addition, a significant gain in eSNR (9 to 16.2 dB) was achieved.     

Surface micromachined capacitive ultrasonic transducers

The current state of novel technology, surface microfabricated ultrasonic transducers, is reported. Experiments demonstrating both air and water transmission are presented. Air-coupled longitudinal wave transmission through aluminum is demonstrated, implying a 110 dB dynamic range for transducers at 2.3 MHz in air. Water transmission experiments from 1 to 20 MHz are performed, with a measured 60 dB SNR at 3 MHz. A theoretical model is proposed that agrees well with observed transducer behavior. Most significantly, the model is used to demonstrate that microfabricated ultrasonic transducers constitute an attractive alternative to piezoelectric transducers in many applications.