Temperature and frequency dependent electrical and dielectric properties of Al/SiO2/p-Si (MOS) structure

The electrical and dielectric properties of Al/SiO₂/p-Si (MOS) structures were studied in the frequency range 10 kHz-10 MHz and in the temperature range 295-400 K. The interfacial oxide layer thickness of 320 Å between metal and semiconductor was calculated from the measurement of the oxide capacitance in the strong accumulation region. The frequency and temperature dependence of dielectric constant (ε′), dielectric loss (ε″), dielectric loss tangent (tan δ) and the ac electrical conductivity (σ_ac) are studied for Al/SiO₂/p-Si (MOS) structure. The electrical and dielectric properties of MOS structure were calculated from C-V and G-V measurements. Experimental results show that the ε′ and ε″ are found to decrease with increasing frequency while σ_ac is increased, and ε′, ε″, tan δ and σ_ac increase with increasing temperature. The values of ε′, ε″ and tan δ at 100 kHz were found to be 2.76, 0.17 and 0.06, respectively. The interfacial polarization can be more easily occurred at low frequencies, and the number of interface state density between Si/SiO₂ interface, consequently, contributes to the improvement of dielectric properties of Al/SiO₂/p-Si (MOS) structure. Also, the effects of interface state density (N_ss) and series resistance (R_s) of the sample on C-V characteristics are investigated. It was found that both capacitance C and conductance G were quite sensitive to temperature and frequency at relatively high temperatures and low frequencies, and the N_ss and R_s decreased with increasing temperature. This is behavior attributed to the thermal restructuring and reordering of the interface. The C-V and G/ω-V characteristics confirmed that the N_ss, R_s and thickness of insulator layer (δ) are important parameters that strongly influence both the electrical and dielectric parameters and conductivity in MOS structures.     

Temperature dependent electrical and dielectric properties of Au/polyvinyl alcohol (Ni, Zn-doped)/n-Si Schottky diodes

The electrical and dielectric properties of Au/PVA (Ni, Zn-doped)/n-Si Schottky diodes (SDs) were studied in the temperature range of 80-400 K. The investigation of various SDs fabricated with different types of interfacial layer is important for understanding the electrical and dielectric properties of SDs. Therefore, in this study polyvinyl alcohol (PVA) film was used as an interfacial layer between metal and semiconductor. The electrical and dielectric properties of Au/PVA (Ni, Zn-doped)/n-Si SDs were calculated from the capacitance-voltage (C-V) and conductance-voltage (G/w-V) measurements. The effects of interface state density (N_ss) and series resistance (R_s) on C-V characteristics were investigated in the wide temperature range. It was found that both of the C-V-T and G/w-V-T curves included two abnormal regions and one intersection point. The dielectric constant (ε″), dielectric loss (ε″), dielectric loss tangent (tan δ) and the ac electrical conductivity (σ_ac) obtained from the measured capacitance and conductance were studied for Au/PVA (Ni, Zn-doped)/n-Si SDs. Experimental results show that the values of ε′, ε″ and tan δ are a strong function of the temperature. Also, the results indicate the interfacial polarization can be more easily occurred at high temperatures.     

The frequency and voltage dependent electrical characteristics of Al-TiW-Pd2Si/n-Si structure using I-V, C-V and G/ω-V measurements

The forward and reverse bias capacitance-voltage (C-V) and conductance-voltage (G/w-V) characteristics of Al-TiW-Pd₂Si/n-Si structures have been investigated over a wide frequency range of 5 kHz-5 MHz. These measurements allow to us the determination of the interface states density (N_ss) and series resistance (R_s) distribution profile. The effect of R_s on C and G is found noticeable at high frequencies. The C-V-f and G/w-V-f characteristics of studied structures show fairly large frequency dispersion especially at low frequencies due to N_ss in equilibrium with the semiconductor. The N_ss profile was obtained both forward bias current-voltage (I-V) characteristics by using into account the bias dependent of the ideality factor and effective barrier height (Φ_e) and low frequency (C_LF)-high frequency (C_HF) method. The plot of series resistance vs. voltage for the low frequencies gives a peak, decreasing with increasing frequencies. The frequency dependent C-V and G/w-V characteristics confirm that the R_s and N_ss of the Al-TiW-Pd₂Si/n-Si structures are important parameters that strongly influence the electric parameters in device.     

On the profile of frequency and voltage dependent interface states and series resistance in (Ni/Au)/Al0.22Ga0.78N/AlN/GaN heterostructures by using current-voltage (I-V) and admittance spectroscopy methods

In order to explain the experimental effect of interface states (N_ss) and series resistance (R_s) of device on the non-ideal electrical characteristics, current-voltage (I-V), capacitance-voltage (C-V) and conductance-voltage (G/ω-V) characteristics of (Ni/Au)/Al_0.22Ga_0.78N/AlN/GaN heterostructures were investigated at room temperature. Admittance measurements (C-V and G/ω-V) were carried out in frequency and bias voltage ranges of 2 kHz-2 MHz and (−5 V)-(+5 V), respectively. The voltage dependent R_s profile was determined from the I-V data. The increasing capacitance behavior with the decreasing frequency at low frequencies is a proof of the presence of interface states at metal/semiconductor (M/S) interface. At various bias voltages, the ac electrical conductivity (σ_ac) is independent from frequencies up to 100 kHz, and above this frequency value it increases with the increasing frequency for each bias voltage. In addition, the high-frequency capacitance (C_m) and conductance (G_m/ω) values measured under forward and reverse bias were corrected to minimize the effects of series resistance. The results indicate that the interfacial polarization can more easily occur at low frequencies. The distribution of N_ss and R_s is confirmed to have significant effect on non-ideal I-V, C-V and G/ω-V characteristics of (Ni/Au)/Al_0.22Ga_0.78N/AlN/GaN heterostructures.     

On the profile of frequency dependent series resistance and surface states in Au/Bi4Ti3O12/SiO2/n-Si(MFIS) structures

The frequency dependent capacitance-voltage (C-V) and conductance-voltage (G/ω-V) characteristics of the metal-ferroelectric-insulator-semiconductor (Au/Bi₄Ti₃O₁₂/SiO₂/n-Si) structures (MFIS) were investigated by considering series resistance (R_s) and surface state effects in the frequency range of 1 kHz-5 MHz. The experimental C-V-f and G/ω-V-f characteristics of MFIS structures show fairly large frequency dispersion especially at low frequencies due to R_s and N_ss. In addition, the high frequency capacitance (C_m) and conductance (G_m/ω) values measured under both reverse and forward bias were corrected for the effect of series resistance to obtain the real capacitance of MFIS structures. The R_s-V plots exhibit anomalous peaks between inversion and depletion regions at each frequency and peak positions shift towards positive bias with increasing frequency. The C⁻²-V plot gives a straight line in wide voltage region, indicating that interface states and inversion layer charge cannot follow the ac signal in the depletion region, but especially in the strong inversion and accumulation region. Also, it has been shown that the surface state density decreases exponentially with increasing frequency. The C-V-f and G/w-V-f characteristics confirm that the interface state density (N_ss) and series resistance (R_s) of the MFIS structures are important parameters that strongly influence the electrical properties of MFIS structures.     

Frequency and temperature dependent dielectric properties of Al/Si3N4/p-Si(1 0 0) MIS structure

The dielectric properties of Al/Si₃N₄/p-Si(1 0 0) MIS structure were studied from the C-V and G-V measurements in the frequency range of 1 kHz to 1 MHz and temperature range of 80-300 K. Experimental results shows that the ε′ and ε″ are found to decrease with increasing frequency while the value of ε′ and ε″ increase with increasing temperature, especially, above 160 K. As typical values, the dielectric constant ε′ and dielectric loss ε″ have the values of 7.49, 1.03 at 1 kHz, and only 0.9, 0.02 at 1 MHz, respectively. The ac electrical conductivity (σ_ac) increases with both increasing frequency and temperature. The activation energy of 24 meV was calculated from Arrhenius plot at 1 MHz. The results indicate that the interfacial polarization can be more easily occurred at low frequencies and high temperatures.     

On the profile of frequency dependent dielectric properties of (Ni/Au)/GaN/Al0.3Ga0.7N heterostructures

The voltage (V) and frequency (f) dependence of dielectric characteristics such as dielectric constant (ε′), dielectric loss (ε^″), dielectric loss tangent (tan δ) and real and imaginary part of electrical modulus (Μ′ and M^″) of the (Ni/Au)/GaN/Al_0.3Ga_0.7N heterostructures have been investigated by using experimental admittance spectroscopy (capacitance-voltage (C-V) and conductance-voltage (G/w-V)) measurements at room temperature. Experimental results show that the values of the ε′, ε^″, tan δ and the real and imaginary parts of the electric modulus (Μ′ and M^″) obtained from the C and G/w measurements were found to be strong function of frequency and applied bias voltage especially in depletion region at low frequencies. These changes in dielectric parameters can be attributed to the interfacial GaN cap layer, interface polarization and a continuous density distribution of interface states and their relaxation time at metal/semiconductor interface. While the values of the ε′ decrease with increasing frequencies, tan δ, Μ′ and M^″ increase with the increasing frequency. Also, the dielectric loss (ε^″) have a local maximum at about frequency of 100 kHz. It can be concluded that the interface polarization can occur more easily at low frequencies with the number of interface states located at the metal/semiconductor interface.     

Analysis of electrical characteristics of Au/SiO2/n-Si (MOS) capacitors using the high-low frequency capacitance and conductance methods

The purpose of this paper is to analyze electrical characteristics in Au/SiO₂/n-Si (MOS) capacitors by using the high-low frequency (C_HF-C_LF) capacitance and conductance methods. The capacitance-voltage (C-V) and conductance-voltage (G/ω-V) measurements have been carried out in the frequency range of 1 kHz-10 MHz and bias voltage range of (−12 V) to (12 V) at room temperature. It was found that both C and G/ω of the MOS capacitor were quite sensitive to frequency at relatively low frequencies, and decrease with increasing frequency. The increase in capacitance especially at low frequencies is resulting from the presence of interface states at Si/SiO₂ interface. Therefore, the interfacial states can more easily follow an ac signal at low frequencies, consequently, which contributes to the improvement of electrical properties of MOS capacitor. The interface states density (N_ss) have been determined by taking into account the surface potential as a function of applied bias. The energy density distribution profile of N_ss was obtained from C_HF-C_LF capacitance method and gives a peak at about the mid-gap of Si. In addition, the high frequency (1 MHz) capacitance and conductance values measured under both reverse and forward bias have been corrected for the effect of series resistance (R_s) to obtain the real capacitance of MOS capacitors. The frequency dependent C-V and G/ω-V characteristics confirm that the N_ss and R_s of the MOS capacitors are important parameters that strongly influence the electrical properties of MOS capacitors.     

The C-V-f and G/ω-V-f characteristics of Al/SiO2/p-Si (MIS) structures

The frequency dependence of capacitance-voltage (C-V) and conductance-voltage (G/ω-V) characteristics of the Al/SiO₂/p-Si metal-insulator-semiconductor (MIS) structures has been investigated taking into account the effect of the series resistance (R_s) and interface states (N_ss) at room temperature. The C-V and G/ω-V measurements have been carried out in the frequency range of 1 kHz to 1 MHz. The frequency dispersion in capacitance and conductance can be interpreted only in terms of interface states and series resistance. The N_ss can follow the ac signal and yield an excess capacitance especially at low frequencies. In low frequencies, the values of measured C and G/ω decrease in depletion and accumulation regions with increasing frequencies due to a continuous density distribution of interface states. The C-V plots exhibit anomalous peaks due to the N_ss and R_s effect. It has been experimentally determined that the peak positions in the C-V plot shift towards lower voltages and the peak value of the capacitance decreases with increasing frequency. The effect of series resistance on the capacitance is found appreciable at higher frequencies due to the interface state capacitance decreasing with increasing frequency. In addition, the high-frequency capacitance (C_m) and conductance (G_m/ω) values measured under both reverse and forward bias were corrected for the effect of series resistance to obtain the real diode capacitance. Experimental results show that the locations of N_ss and R_s have a significant effect on electrical characteristics of MIS structures.     

Frequency and voltage effects on the dielectric properties and electrical conductivity of Al-TiW-Pd2Si/n-Si structures

Different from conventional metal-Si compounds-n-Si structures, the thin film of TiW alloy was deposited on Pd₂Si-n-Si to form a diffusion barrier between aluminum (Al) and Pd₂Si-n-Si. Dielectric properties and electrical conductivity of TiW-Pd₂Si/n-Si structures in the frequency range of 5 kHz-10 MHz and voltage range of (−4 V) to (10 V) have been investigated in detail by using experimental C-V and G-V measurements. Experimental results indicate that the values of ε′ show a steep decrease with increasing frequency for each voltage. On the other hand, the values of ε″ show a peak, and its intensity increases with decreasing voltage and shifts towards the lower frequency side. The ac electrical conductivity (σ_ac) and the real part of electric modulus (M′) increase with increasing frequency. Also, the imaginary part of electric modulus (M″) shows a peak and the peak position shifts to higher frequency with increasing applied voltage. It can be concluded that the interfacial polarization can be more easily occurred at low frequencies, and the majority of interface states at metal semiconductor interface, consequently contributes to deviation of dielectric properties of TiW-Pd₂Si/n-Si structures.     

Dielectric properties and ac electrical conductivity studies of MIS type Schottky diodes at high temperatures

Dielectric properties and ac electrical conductivity of the Al/SiO₂/p-Si (MIS) Schottky diodes were studied in the frequency and temperature range of 10 kHz-1 MHz and 300-400 K, respectively. Experimental results show that the dielectric constant (ε′), dielectric loss (ε″), loss tangent (tan δ), ac electrical conductivity (σ_ac) and the electric modulus were found a strong function of frequency and temperature. The values of the ε′, ε″ and tan δ decrease with increasing frequencies due to the interface states capacitance and a decrease in conductance with increasing frequency. Also, these values increase with increasing temperature. The σ_ac is found to increase with increasing frequency and increasing temperature. The variation of conductivity as a function of temperature and frequency reveals non-adiabatic hopping of charge carriers between impurities localized states. In addition, the experimental dielectric data have been analyzed by considering electric modulus formalism.     

Frequency and voltage dependence of admittance characteristics of Al/Al2O3/PVA:n-ZnSe Schottky barrier diodes

This paper reports the frequency dependence of admittance measurements i.e C–V and G/ω–V characteristics of Al/Al₂O₃/PVA:n-ZnSe MIS diode. The interface states (N_ss) and series resistance (R_s) of the MIS diode strongly influence the C–V–f and G/ω–V–f characteristics. The conductance method is used to calculate the series resistance (R_s), the density of states (N_ss), insulator layer capacitance and thickness. The frequency dependent dieclectric parameters such as dielectric constant (εʹ), dielectric loss (ε″), loss tangent (tan δ) and a.c. electrical conductivity (σ_ac) has been calculated and which are also responsible for observed frequency dispersion in C–V and G/ω curves.     

Study on the frequency dependence of electrical and dielectric characteristics of Au/SnO2/n-Si (MIS) structures

In this paper, we present a detailed investigation of the electrical and dielectric properties of the Au/SnO₂/n-Si (MIS) structures. The capacitance-voltage (C-V) and conductance-voltage (G/ω-V) characteristics have been measured in the frequency range of 1 kHz-1 MHz at room temperature. Calculation of the dielectric constant (?′), dielectric loss (?″), loss tangent (tan δ), ac electrical conductivity (σ_ac), ac resistivity (ρ_ac) and the electric modulus are given in the studied frequency ranges. Experimental results show that the values of dielectric parameters are a strong function of frequency. The decrease of ?′ and ?″ with increasing frequency were observed. In addition the increase of σ_ac with increasing frequency is founded. Also, electric modulus formalism has been analyzed to obtain the experimental dielectric data. The interfacial polarization can be more easily occurred at the lower frequency and/or with the number of interface state density between SnO₂/Si interface, consequently, contribute to the improvement of dielectric properties of MIS structure.     

Dielectric properties in Au/SnO2/n-Si (MOS) structures irradiated under Co-γ rays

The metal-oxide-semiconductor (MOS) structures with insulator layer thickness range of 55-430 Å were stressed with a bias of 0 V during ⁶⁰Co-γ ray source irradiation with the dose rate of 2.12 kGy/h and the total dose range was 0-5×10⁵ Gy. The real part of dielectric constant ε′, dielectric loss ε″, dielectric loss tangent tanδ and the dc conductivity σ_dc were determined from against frequency, applied voltage, dose rate and thickness of insulator layer at room temperature for Au/SnO₂/n-Si (MOS) structures from C-V capacitance and G-V conductance measurements in depletion and weak inversion before and after irradiation. The dielectric properties of MOS structures have been found to be strongly influenced by the presence of dominant radiation-induced defects. The frequency, applied voltage, dose rate and thickness dependence of ε′, ε″, tanδ and σ_dc are studied in the frequency (500 Hz-10 MHz), applied voltage (−10 to 10 V), dose rate (0-500 kGy) and thickness of insulator layer (55-430 Å) range, respectively. In general, dielectric constant ε′, dielectric loss ε″ and dielectric loss tangent are found to decrease with increasing the frequency while σ_dc is increased. Experimental results shows that the interfacial polarization can be more easily occurred at the lower frequency and/or with the number of density of interface states between Si/SnO₂ interfaces, consequently, contribute to the improvement of dielectric properties of Au/SnO₂/n-Si (MOS) structures.     

On the energy distribution of interface states and their relaxation time and capture cross section profiles in Al/SiO2/p-Si (MIS) Schottky diodes

The energy distribution profile of the interface states (N_ss) and their relaxation time (τ) and capture cross section (σ_p) of metal-insulator-semiconductor (Al/SiO₂/p-Si) Schottky diodes have been investigated by using the high-low frequency capacitance and conductance methods. The capacitance-voltage (C-V) and conductance-voltage (G/ω-V) characteristics of these devices were investigated by considering series resistance (R_s) effects in a wide frequency range (5 kHz-1 MHz.). It is shown that the capacitance of the Al/SiO₂/p-Si Schottky diode decreases with increasing frequency. The increase in capacitance especially at low frequencies results form the presence of interface states at Si/SiO₂ interface. The energy distributions of the interface states and their relaxation time have been determined in the energy range of (0.362-E_v)-(0.512-E_v) eV by taking into account the surface potential as a function of applied bias obtained from the measurable C-V curve (500 Hz) at the lowest frequency. The values of the interface state density (N_ss) ranges from 2.34 × 10¹² to 2.91 ×  10¹² eV⁻¹/cm², and the relaxation time (τ) ranges from 1.05 × 10⁻⁶ to 1.58 × 10⁻⁴ s, showing an exponential rise with bias from the top of the valance band towards the mid-gap.     

The profile of temperature and voltage dependent series resistance and the interface states in (Ni/Au)/Al0.3Ga0.7N/AlN/GaN heterostructures

The temperature dependence of capacitance-voltage (C-V) and the conductance-voltage (G/w-V) characteristics of (Ni/Au)/Al_0.3Ga_0.7N/AlN/GaN heterostructures were investigated by considering the effect of series resistance (R_s) and interface states N_ss in a wide temperature range (79-395 K). Our experimental results show that both R_s and N_ss were found to be strongly functional with temperature and bias voltage. Therefore, they affect the (C-V) and (G/w-V) characteristics. The values of capacitance give two peaks at high temperatures, and a crossing at a certain bias voltage point (∼3.5 V). The first capacitance peaks are located in the forward bias region (∼0.1 V) at a low temperature. However, from 295 K the second capacitance peaks appear and then shift towards the reverse bias region that is located at ∼−4.5 V with increasing temperature. Such behavior, as demonstrated by these anomalous peaks, can be attributed to the thermal restructuring and reordering of the interface states. The capacitance (C_m) and conductance (G/w-V) values that were measured under both reverse and forward bias were corrected for the effect of series resistance in order to obtain the real diode capacitance and conductance. The density of N_ss, depending on the temperature, was determined from the (C-V) and (G/w-V) data using the Hill-Coleman Method.     

Frequency and gate voltage effects on the dielectric properties of Au/SiO2/n-Si structures

To determine the dielectric constant (ε′), dielectric loss (ε″), loss tangent (tan δ), the ac electrical conductivity (σ_ac) and the electric modulus of Au/SiO₂/n-Si structure, the measurement admittance technique was used. Experimental results show that the values of ε′, ε″, tan δ, σ_ac and the electric modulus show fairly large frequency and gate bias dispersion especially at low frequencies due to the interface charges and polarization. An increase in the values of the ε′ and ε″ were observed with both a decrease in frequency and an increase in frequency. The σ_ac is found to increase with both increasing frequency and voltage. In addition, the experimental dielectrical data have been analyzed considering electric modulus formalism. It can be concluded that the interface charges and interfacial polarization have strong influence on the dielectric properties of metal-insulator-semiconductor (MIS) structures especially at low frequencies and both in depletion and accumulation regions.     

The frequency-dependent electrical characteristics of interfaces in the Sn/p-Si metal semiconductor structures

The purpose of this paper is to investigate frequency-dependent electrical characteristics of the interface states in Sn/p-Si metal semiconductor (MS) Schottky structures. To yield quantitative information about their frequency (f) and voltage (V) dependent characteristics, Sn/p-Si MS structures have been studied by using capacitance (C) and conductance (G/ω) measurements over a wide range of frequencies (50 kHz-1 MHz). The increase in capacitance at lower frequencies is seen as a signature of interface states, and the densities of which are evaluated to be of the order of ≅10¹⁰ cm⁻² eV⁻¹. The presence of the interfaces states (N_SS) is also evidenced as a peak in the capacitance-frequency characteristics that increases in magnitude with decreasing frequencies. Furthermore, the voltage and frequency dependence of series resistance (R_S) were calculated from the C-V and G/ω-V measurements and plotted as functions of voltage and frequency. The effect of R_S on C and G/ω is found noticeable at high frequencies. The C-V-f and G/ω-V-f characteristics of studied structures show fairly large frequency dispersion especially at low frequencies due to N_SS in equilibrium with the semiconductor. The experimental values of interface state densities and series resistance from C-V-f and G/ω-V-f measurements were obtained in the ranges of 3.46 × 10¹⁰−1.26 × 10⁹ cm⁻² eV⁻¹ and 71.1-57.3 Ω, respectively. Experimental results show that both the R_S and N_SS values should be taken into account in determining frequency-dependent electrical characteristics.     

Temperature dependent dielectric studies of Ni/n-GaP Schottky diodes by capacitance and conductance measurements

The dielectric properties of Ni/n-GaP Schottky diode were investigated in the temperature range 140–300 K by capacitance–voltage (C–V) and conductance–voltage (G/ω–V) measurements. The effect of temperature on series resistance (R_s) and interface state density (N_ss) were investigated. The dependency of dielectric constant (ε′), dielectric loss (ε′′), loss tangent (tan δ), ac conductivity (σ_ac), real (M′) and imaginary (M′′) parts of the electric modulus over temperature were evaluated and analyzed at 1 MHz frequency. The temperature dependent characteristics of ε′ and ε′′ reveal the contribution of various polarization effects, which increases with temperature. The Arrhenius plot of σ_ac shows two activation energies revealing the presence of two distinct trap states in the chosen temperature range. Moreover, the capacitance–frequency (C–f) measurement over 1 kHz to 1 MHz was carried out to study the effect of localized interface states.     

Frequency and voltage dependence of negative capacitance in Au/SiO2/n-GaAs structures

The frequency (f) and bias voltage (V) dependence of electrical and dielectric properties of Au/SiO₂/n-GaAs structures have been investigated in the frequency range of 10 kHz–3 MHz at room temperature by considering the presence of series resistance (R_s). The values of R_s, dielectric constant (ε′), dielectric loss (ε″) and dielectric loss tangent (tan δ) of these structures were obtained from capacitance–voltage (C–V) and conductance–voltage (G/ω–V) measurements and these parameters were found to be strong functions of frequency and bias voltage. In the forward bias region, C–V plots show a negative capacitance (NC) behavior, hence ε′–V plots for each frequency value take negative values as well. Such negative values of C correspond to the maximum of the conductance (G/ω). The crosssection of the C–V plots appears as an abnormality when compared to the conventional behavior of ideal Schottky barrier diode (SBD), metal–insulator–semiconductor (MIS) and metal–oxide–semiconductor (MOS) structures. Such behavior of C and ε′ has been explained with the minority-carrier injection and relaxation theory. Experimental results show that the dielectric properties of these structures are quite sensitive to frequency and applied bias voltage especially at low frequencies because of continuous density distribution of interface states and their relaxation time.