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1.
采用金属有机物热分解(MOD)法制备了SnO_2酒敏元件,XRD和AES谱表明热处理后己酸亚锡已转化为SnO_2。此外还证实SnO_2元件的内电势是加热丝偏位引起的热电势。元件的主要技术指标为:灵敏度>8,选择性>6,响应时间<5s,恢复时间<30s。  相似文献   

2.
采用SnCl4和O2为反应源,ArF准分子激光CVD生长SnO2薄膜,利用XRD、UVT、XPS研究了薄膜的组成和结构,实验表明SnO2薄膜属于四方晶系、金红石结构,薄膜的紫外可见光透射率大于90%,吸收边波长为355nm,禁带宽度为3.49eV。最后,对SnO2薄膜的反应机理进行了讨论  相似文献   

3.
蔡长安 《电子技术》1998,25(1):45-45
微机软故障检修三例蔡长安1.例一故障现象:一台486DX2/66计算机,每次开机时都出现“Press<F1>toRESUME”,按F1进入CMOS设置状态。故障分析和处理:微机设置的参数一般采用CMOS记忆参数电路,在关机后由充电电池来供电,由于电池...  相似文献   

4.
詹娟 《电子器件》1997,20(4):46-49
本文主要研究了硅片直接键合技术制备SOI材料,并在此材料上采用全离子注入硅栅工艺制造了1μm沟道CMOS环形振荡器。由于SOI。SDB中的硅膜保持着本体硅的性质,故所得陪管的特性比较好,(迁移率:NMOS为680cm2/V·s,PMOS为370cm2/V·s,跨导:NMOS为38mS,PMOS为25mS)。但发现MOS管具有“Kink”效应,随着硅膜厚度的减小,“Kink”效应有所抑制。实验所得CMOS19级环形振荡器的单级延时为0.79ns,由此可见,SOI/SDB材料在VLSI中将有很大的发展前景  相似文献   

5.
用于亚微米CMOS的轻掺杂漏工艺   总被引:1,自引:0,他引:1  
本文研究了轻掺杂漏工艺对器件特性的影响。优化了轻掺杂区离子注入的剂量和能量。优化的SiO2侧墙LDD工艺有效地抑制了短沟道效应。研制成功了沟道长度为0.5μm的CMOS27级环振电路,门延迟为170ns.  相似文献   

6.
SnOxideStatesofSnOxFilmsInducedbyVacuumAnnealingH.YanG.H.ChenG.Y.Cao(DepartmentofAppliedPhysics,BeijingPolytechnicUniversity...  相似文献   

7.
惰性气体分子及其二聚物的紫外高分辨激光光谱蔡继业(中国科学院安徽光机所激光光谱室合肥230031)DimovSSLipsonRH(DepartmentofChemistry,theUniversityofWesternOntario,LondonOn...  相似文献   

8.
不同CO吸附类型对超细SnO_2气敏元件的作用   总被引:1,自引:0,他引:1  
本工作采用超细SnO2为基体,CO为检测气体,检测了烧结型SnO2元件在不同温度下的气敏效应.同时利用流动饱和法测试了粉体不同温度下对CO的可逆及不可逆吸附量.一方面通过新材料的使用,降低了元件的工作温度;另一方面,通过吸附测试与气敏效应的关联,认为:超细粉体低温时表面可逆CO量的存在,是其能够降低工作温度的主要原因.粉体表面的不可逆CO量直接影响着元件的响应输出(灵敏度).材料本身的吸附总量和气敏特性有着良好的对应关系.SnO2元件气敏效应的发挥是粉体表面可逆与不可逆吸附共同作用的结果.  相似文献   

9.
SnO2/Si的光伏特性   总被引:1,自引:0,他引:1  
采用CVD方法在硅单晶上制备SnO2薄膜,对不同硅衬底及在不同温度下淀积SnO2制得SnO2/Si进行光电压谱的测量,得出最佳的制备温度;采用类金属半导体接触模型,推导出有关计算公式,计算得出其介面复合速度和异质结势垒宽度等参数。  相似文献   

10.
Fe_2O_3-SnO_2双层薄膜对氨气敏感特性及其机理研究   总被引:2,自引:0,他引:2  
本文报道了以Fe(CO)5和SnCl4为源,采用PECVD技术淀积Fe2O3-SnO2双层薄膜,将该薄膜淀积在陶瓷管上,对氨气的敏感特性进行了测量,并讨论了敏感机理.  相似文献   

11.
无团聚纳米级SnO_2粉末及其气敏元件的制备   总被引:5,自引:1,他引:4  
用液相沉淀法在结晶五水四氯化锡的水溶液中滴加浓氨水,通过在沉淀时加入高分子有机分散剂,剧烈搅拌,控制反应结束时pH值,用无水乙醇洗涤、冷冻干燥及选取适当的煅烧温度等一系列工艺手段来制取SnO2粉末。将得到的粉末用TEM、BET及XRD半峰宽法测定其粒径大小,证明粉末最小平均粒径可至3.79nm且无团聚存在,XRD分析表明所得的SnO2为四方相。将此粉末制成气敏元件,经测试表明气敏性能有很大提高。  相似文献   

12.
王冰  徐平  杨国伟 《半导体学报》2008,29(8):1469-1474
在550℃下,通过Au-Ag合金助催热蒸发氧化亚锡,制备了25nm的Sn02纳米线.测试了Sn02纳米线的室温光致发光谱,其四个发光峰中,418nm的峰足新发现的峰,它是孪晶纳米线的面缺陷造成的.SnO2纳米线的低温生长机制遵从VLS生长机制,且与5nO粉末的应用有一定的关系.Sn02纳米线的较小尺度与气相因子的低温度低浓度化学反应有关.  相似文献   

13.
We present a novel methodology for analysis of the average end-to-end latency and link utilization of wormhole NoCs with heterogeneous link capacities and heterogeneous number of virtual channels per unidirectional link. Our analysis methodology supports different heterogeneous NoC topologies for which no analysis framework has been developed in the past. The average end-to-end latency per flow is separated to three components: (1) The time it takes the head-flit to leave the source queue (queuing time at the source); (2) The time it takes the head-flit to reach the destination module (path acquisition time) and (3) The time it takes the rest of the packet to leave the network (transfer time). Furthermore, we take into account the interaction between intersecting flows. The average link utilization is calculated based on the path acquisition time and transfer time. To that end, our analysis introduces a set of implicit equations, which can be efficiently solved iteratively. We demonstrate the accuracy and the efficiency of our approximate analysis by comparing the analysis results to accurate simulations for several synthetic examples and SoC multimedia applications in heterogeneous networks. In addition, we compare the analysis results with HNOCS simulation results for a chip-multi-processor (CMP) using SPLASH-2 and PARSEC traces for both homogeneous and heterogeneous NoC configurations.  相似文献   

14.
自组装型SnO2纳米线超低浓度H2传感器的研制   总被引:1,自引:1,他引:0  
采用FESEM及气敏传感器测试系统,研究了用自组装方式制备的SnO2纳米线气敏传感器的氢敏特性。结果表明:在工作温度为200℃时,对于超低浓度[(2~8)×10–6]的氢气具有0.58~1.00的探测灵敏度及3 s的响应时间和10 s的恢复时间。继而从气敏机制、自组装制备方式、SnO2纳米线的优良的比表面特性及其尺度(30~40 nm)低于德拜长度(43 nm)等角度,解释了此传感器对超低浓度氢气具有良好气敏特性的原因。  相似文献   

15.
The systematic features of laser-induced desorption from an SnO2 surface exposed to 10-ns pulsed neodymium laser radiation are studied at the photon energy 2.34 eV, in the range of pulse energy densities 1 to 50 mJ/cm2. As the threshold pulse energy 28 mJ/cm2 is achieved, molecular oxygen O2 is detected in the desorption mass spectra from the SnO2 surface; as the threshold pulse energy 42 mJ/cm2 is reached, tin Sn, and SnO and (SnO)2 particle desorption is observed. The laser desorption mass spectra from the SnO2 surface coated with an organic copper phthalocyanine (CuPc) film 50 nm thick are measured. It is shown that laser irradiation causes the fragmentation of CuPc molecules and the desorption of molecular fragments in the laser pulse energy density range 6 to 10 mJ/cm2. Along with the desorption of molecular fragments, a weak desorption signal of the substrate components O2, Sn, SnO, and (SnO)2 is observed in the same energy range. Desorption energy thresholds of substrate atomic components from the organic film surface are approximately five times lower than thresholds of their desorption from the atomically clean SnO2 surface, which indicates the diffusion of atomic components of the SnO2 substrate to the bulk of the deposited organic film.  相似文献   

16.
SnO2纳米粉体的制备及其气敏性能研究   总被引:1,自引:0,他引:1  
以Sn粒为原料,在柠檬酸体系中,用sol-gel法合成了具有四方晶系的SnO2粉体。用XRD、TEM对产物的组成、粒径、形貌进行了表征。结果表明:产物为平均粒径25 nm左右的圆球形颗粒。另外,在最佳工作温度300℃时,采用静态配气法测试了材料的气敏性能,发现SnO2对体积分数为5×10–5的氯气的灵敏度高达805,而且对其它气体有很好的抗干扰能力。元件的响应恢复特性良好,响应时间和恢复时间分别为3 s和7 s。  相似文献   

17.
本文采用金属有机物热分解(MOD)法制备SnO_2薄膜,探索了锑掺杂对薄膜电阻的调制,通过I—V特性发现Al/SnO_2系统存在零电压电位,最后还测试了薄膜的气敏特性。  相似文献   

18.
磁控反应溅射SnO2薄膜的气敏特性研究   总被引:3,自引:0,他引:3  
为研究SnO2薄膜的气敏特性,采用直流磁控反应溅射法制备了SnO2薄膜。探讨和分析了SnO2薄膜气敏元件的敏感机理。对SnO2薄膜的电阻和灵敏度的测试以及对实验结果的分析表明:SnO2薄膜厚度在150~400nm为宜,一般膜厚在250nm时较为敏感。在SnO2薄膜中掺入Pd、Pt、Ag等微量杂质可大大提高SnO2薄膜气敏元件的灵敏度,且使灵敏度的峰值向低温方向移动,增强了对H2、CO和C2H5OH等可燃气体的选择性、响应时间由3min缩短到0.5s以下。  相似文献   

19.
From the recent experimentally observed conduction band offset and previously reported band gaps,one may deduce that the valence band offset between rutile SnO2 and TiO2 is around 1 eV,with TiO2 having a higher valence band maximum.This implication sharply contradicts the fact that the two compounds have the same rutile structure and the Γ3^+ VBM state is mostly an oxygen p state with a small amount of cation d character,thus one would expect that SnO2 and TiO2 should have small valence band offset.If the valence band offset between SnO2 and TiO2 is indeed small,one may question the correctness of the previously reported band gaps of SnO2 and TiO2.In this paper,using first-principles calculations with different levels of computational methods and functionals within the density functional theory,we reinvestigate the long-standing band gap problem for SnO2.Our analysis suggests that the fundamental band gap of SnO2 should be similar to that of TiO2,i.e.,around 3.0 eV.This value is significantly smaller than the previously reported value of about 3.6 eV,which can be attributed as the optical band gap of this material.Similar to what has been found in In2O3,the discrepancy between the fundamental and optical gaps of SnO2 can be ascribed to the inversion symmetry of its crystal structure and the resultant dipole-forbidden transitions between its band edges.Our results are consistent with most of the optical and electrical measurements of the band gaps and band offset between SnO2 and TiO2,thus provide new understanding of the band structure and optical properties of SnO2.Experimental tests of our predictions are called for.  相似文献   

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