PDMS多层次蘑菇形微结构的制作

提出了一种基于光刻胶牺牲层技术的用于制作多层次SU-8模具的新方法,并进一步采用浇注成型的方法制作了聚二甲基硅氧烷(PDMS)多层次蘑菇形微结构。在多层次SU-8模具的制作过程中,使用了正性光刻胶BP212作为牺牲层,并采用超声辅助显影的方法使显影的时间大大缩短。通过对多层次SU-8模具预处理,有效减小了多层次SU-8模具与PDMS的结合力,从而提高了PDMS脱模的成功率。对制作的PDMS多层次蘑菇形微结构和PDMS单层次微柱结构进行了接触角测试。结果表明,PDMS多层次蘑菇形微结构的接触角为150.93°±1.6°,PDMS单层次微柱结构的接触角为139.19°±0.1°。由此可知PDMS多层次蘑菇形微结构具有优异的超疏水性能。     

DCG全息图的再显影实验研究

实验表明，用重铬酸盐明胶记录的体全息图可水洗擦除后再显影。对高曝光量及多次曝光记录的全息图，采用适当的再显影工序，可改善全息图的图像质量。     

抗蚀剂的干法显影技术研究

在以前还只是处于想象境地的抗蚀剂干显影(等离子体显影)已展示了实现的可能性。一方面开发了能够干显影的抗蚀剂,另一方面还发展了能对现有抗蚀剂作干显影的新工艺。本文简述了至今为止所发表的抗蚀剂的干显影技术方法和技术动向,也介绍了我们所做的有关工作。     

激光全息法制备二维硅基图形衬底

理论上模拟了全息光刻法制备二维硅基图形阵列的光强分布和显影过程,通过改变激光波长及入射光与样品表面的夹角即可得到不同周期的二维图形.在此基础上,采用三束光一次曝光和湿法腐蚀图形转移技术,在n型(100)硅衬底上制备出了周期在亚微米量级的均匀二维图形阵列.该方法适合大面积硅基图形阵列的制作.     

激光全息法制备二维硅基图形衬底

理论上模拟了全息光刻法制备二维硅基图形阵列的光强分布和显影过程,通过改变激光波长及入射光与样品表面的夹角即可得到不同周期的二维图形.在此基础上,采用三束光一次曝光和湿法腐蚀图形转移技术,在n型(100)硅衬底上制备出了周期在亚微米量级的均匀二维图形阵列.该方法适合大面积硅基图形阵列的制作.     

抗蚀剂的干法显影技术研究

在以前还只是处于想象境地的抗蚀剂干显影（等离子体显影）已展示实现的可能性，一方面开发了能够干显影的抗蚀剂，另一方面还发展了能对现有抗蚀剂作干显影的新工艺。本文简述了至今为止所发表的抗蚀剂的干显影技术和技术动向，也介绍了我们所做的有关工作。     

无银明胶全息干版的红敏处理及其特性研究

无银明胶全息干版经过相应的红敏处理后,对波长为633nm的激光具有较好的感光灵敏度,可记录高衍射效率位相全息图。本文介绍适合于此种干版的红敏处理方法及其曝光和显影的特性,并提供有关实验参数。     

Cadence推出22纳米客制化显影光源优化软件

Cadence新推出客制化显影光源最佳化的软件，这是Cadence22纳米以下整合式显影光源最佳化技术系列中的全新功能。最佳化客制化显影光源技术强化了制程容许度，并提供22纳米半导体制造更佳的二维影像。Cadence与Tessera Technologies公司合作，将客制化显影光源技术的制造概念融人SMO软件技术系列中。     

匀胶显影设备工艺原理、结构及常见故障分析

本文介绍了匀胶显影技术的特点及原理,在分析介绍其设备种类的基础上,概述了匀胶显影设备的基本结构,详细分析了影响匀胶显影工艺的各种因素,总结了匀胶显影设备的常见故障,并提出了各种故障的处理措施。     

非对称全息方法制作闪耀光栅的模拟与分析

为了实现全息方法制作闪耀光栅,在对称全息光栅制作方法的墓础上,设计了一种非对称光路进行曝光。模拟了特定显影条件下光栅槽形及其衍射效率光谱。并与理想三角形闪耀光栅比较。结果表明：模拟槽形具备闪耀光栅槽形特征,其正一级衍射效率谱线与相应闪耀光栅非常接近。     

Silicon-based micromachined packages for high-frequencyapplications

A novel low-cost packaging approach is presented in this paper, which is appropriate for high-frequency electronic circuits in discrete, as well as integrated, configurations. This approach is based on silicon micromachining and can effectively provide on-wafer and discrete packaging for high-quality high-precision miniature components. The required fabrication techniques are compatible with standard integrated-circuit processing and, for this reason, are low in fabrication costs. As an example, this paper presents the development of a Ka-band package that can shield and electromagnetically isolate monolithic-microwave integrated-circuit components, such as a phase shifter. The performance of this package is compared to that of a ceramic one and demonstrates excellent electrical response in addition to high design versatility     

DDM-CM理论及其在VLSI中的应用

阐述了保角变换理论的最新研究成果DDM-CM理论及其在VLSI中的应用。其最大的优点就是给出的结果比较简单、精确,并且在整个的计算过程中不需要求解保角变换函数,只要求得导体几何的保角模即可。     

电磁场在矢量波函数空间的完全射影定理

证明了广义的亥姆赫兹定理－电磁场在矢量波函数的完全射影定理。在这一定理中每一个任意的电磁矢量函数都可以在矢量波函数空间中被唯一地分离成三个独立的分量,每一个分量都可以用一个标量函数来表示。     

Information Network Systems and Information Sharing on Administrative Websites

In Japanese "e-government" policy, called "e-Japan", the "administrative document management system" is functioning as information searching systems. On the other hand, this system has also generated the problem that it is not fully functioning as a means for the information sharing in a governmental agency. So, the purpose of this research is to find how the administrative document management system can function as information sharing in administrative organization. For this purpose, this paper considers the current status and some problems firstly. And secondary, this paper proposes the idea and constructs some information systems using administrative official Website. This is the method and approach of this research. As a conclusion, this proposal information system junctions as information sharing support systems.     

New insights in the relation between electron trap generation andthe statistical properties of oxide breakdown

In this paper it is demonstrated in a wide stress field range that breakdown in thin oxide layers occurs as soon as a critical density of neutral electron traps in the oxide is reached. It is proven that this corresponds to a critical hole fluence, since a unique relationship between electron trap generation and hole fluence is found independent of stress field and oxide thickness. In this way literature models relating breakdown to hole fluence or to trap generation are linked. A new model for intrinsic breakdown, based on a percolation concept, is proposed. It is shown that this model can explain the experimentally observed statistical features of the breakdown distribution, such as the increasing spread of the Q_BD-distribution for ultrathin oxides. An important consequence of this large spread is the strong area dependence of the Q_BD for ultrathin oxides     

Emission Reduction and Capacity Increase in GSM Networks by Single Antenna Interference Cancellation

There is an increasing demand to utilize the frequency spectrum of mobile communication systems most efficiently. This means in particular to GSM networks that the frequency reuse shall be planned as low as possible. In this case the system may become limited by interference rather than coverage. One promising technology for GSM mobiles in interference-limited systems is single antenna interference cancellation (SAIC). This receiver technology allows both for increasing the network capacity and for reducing the base station transmit power. The aim of this paper is to assess the emission reduction as well as the system capacity capabilities when SAIC technology is applied in downlink receivers.     

A New Microwave Amplifier for Multichannel FM Signals Using a Synchronized Oscillator

Because of the excellent results of the noise-loading test on an IMPATT oscillator that is phase-locked to an external FM driving signal, a new microwave amplifier for multichannel FM signals using a synchronized oscillator is proposed. An IMPATT oscillator, injection-synchronized with an FM signal, is regarded as an amplifier and its noise characteristics for multichannel signals are evaluated with the noise-loading method as recommended by the International Radio Consultative Committee. The results show that when this oscillator satisfies the noise characteristics for 960 telephone message channels, it assures a gain of approximately 15 dB at 11 GHz, and in this sense, this oscillator can be regarded as an amplifier for multimessage channels. The degradation of SNR of this amplifier is less than 2 dB. This excellent result is obtained because of the following. In the video band, the modulation suppression of an FM driving signal in the injection-synchronized oscillator, such as the IMPATT, is very small, while the oscillator noise, which dominates the entire output characteristic, is considerably reduced by the synchronizing action of the oscillator. This amplification continues up to the high-frequency range in which this principle of operation applies.     

A perfectly matched layer for the 3-D wave equation in the timedomain

In this paper, a three-dimensional (3-D) PML for the 3-D scalar wave equation is proposed for applications in practical finite difference time-domain schemes such as the time-domain wave-potential (TDWP) technique and the time-domain scalar wave equation approaches to the analysis of optical waveguides. The theoretical formulation is based on the stretched coordinates approach. It is shown that this PML is suitable for the termination of open problems as well as for port terminations in high-frequency circuit problems. New PML conductivity profile is proposed, which offers lower reflections in a wider frequency band in comparison with the commonly used profiles     

On the Efficacy of R-on-M Redundancy

A redundant configuration consisting of m identical elements and r universal spare elements is postulated. Each of the spares in this ``r-on-m' configuration can substitute for any one of the m elements required for the system to be operational. The system reliability attainable with this configuration is examined as a function of r and m, simple bounds are derived, and a method is presented for determining the optimum values for r and m as a function of the relative complexity of the associated switch. It is shown that an r-on-m configuration can provide an extremely efficient means for obtaining significant improvement in reliability, and is often nearly as effective as a parallel configuration involving m times as many spares.     

通信网络系统可靠性评测技术研究

通过指出现有通信网络系统可靠性评测技术的不足,有针对性地提出解决的思路和方法,并介绍了改进方法的步骤,同时探讨了网络抗毁性的问题。