Fabrication of a “Soft” Membrane Electrode Assembly Using Layer‐by‐Layer Technology

A new type of thin‐film electrode that does not utilize conducting polymers or traditional metal or chemical vapor deposition methods has been developed to create ultrathin flexible electrodes for fuel cells. Using the layer‐by‐layer (LbL) technique, carbon–polymer electrodes have been assembled from polyelectrolytes and stable carbon colloidal dispersions. Thin‐film LbL polyelectrolyte–carbon electrodes (LPCEs) have been successfully assembled atop both metallic and non‐metallic, porous and non‐porous substrates. These electrodes exhibit high electronic conductivities of 2–4 S cm^–1, and their porous structure provides ionic conductivities in the range of 10^–4 to 10^–3 S cm^–1. The electrodes show remarkable stability towards oxidizing, acidic, or delaminating basic solutions. In particular, an LPCE consisting of poly(diallyldimethyl ammonium chloride)/poly(2‐acrylamido‐2‐methyl‐1‐propane sulfonic acid)/carbon–platinum assembled on a porous stainless steel support yields an open‐circuit potential similar to that of a pure platinum electrode. With LbL carbon–polymer electrodes, the membrane‐electrode assembly (MEA) in a fuel cell can be made several times thinner, assume multiple geometries, and hence be more compact. The mechanism for LPCE deposition, electrode structure, and miniaturization will be presented and discussed, and demonstrations of the LbL electrodes in a traditional Nafion‐based proton fuel cell and the first demonstration of a thin‐film hydrogen–air “soft” fuel cell fully constructed using multilayer assembly are described.     

Spray Layer‐by‐Layer Electrospun Composite Proton Exchange Membranes

Polymer electrolyte films are deposited onto highly porous electrospun mats using layer‐by‐layer (LbL) processing to fabricate composite proton conducting membranes. By simply changing the assembly conditions for generation of the LbL film on the nanofiber mat substrate, three different and unique composite film morphologies can be achieved in which the electrospun mats provide mechanical support; the LbL assembly produces highly conductive films that coat the mats in a controlled fashion, separately providing the ionic conductivity and fuel blocking characteristics of the composite membrane. Coating an electrospun mat with the LbL dipping process produces composite membranes with “webbed” morphologies that link the fibers in‐plane and give the composite membrane in‐plane proton conductivities similar to that of the pristine LbL system. In contrast, coating an electrospun mat using the spray‐LbL process without vacuum produces a uniform film that bridges across all of the pores of the mat. These membranes have methanol permeability similar to free‐standing poly(diallyl dimethyl ammonium chloride)/sulfonated poly(2,6‐dimethyl 1,4‐phenylene oxide) (PDAC/sPPO) thin films. Coating an electrospun mat with the vacuum‐assisted spray‐LbL process produces composite membranes with conformally coated fibers throughout the bulk of the mat with nanometer control of the coating thickness on each fiber. The mechanical properties of the LbL‐coated mats display composite properties, exhibiting the strength of the glassy PDAC/sPPO films when dry and the properties of the underlying electrospun polyamide mat when hydrated. By combining the different spray‐LbL fabrication techniques with electrospun fiber supports and tuning the parameters, mechanically stable membranes with high selectivity can be produced, potentially for use in fuel cell applications.     

Very High Performance Alkali Anion‐Exchange Membrane Fuel Cells

Anion‐exchange membrane fuel cells (AEMFCs) have emerged as an alter‐native technology to overcome the technical and cost issues of proton‐exchange membrane fuel cells (PEMFCs). In this study, we describe a new electrocatalyst for AEMFCs composed of carbon nanotubes (CNTs), KOH‐doped polybenzimidazole (PBI) and platinum nanoparticles (Pt), in which the CNTs are wrapped by KOH‐doped PBI at a nanometer thickness and Pt is efficiently loaded on the wrapping layer. In the electrocatalyst, it is revealed that the CNTs and the KOH‐doped PBI layer function as electron‐ and hydroxide‐conductive paths, respectively, and the large exposed surface of the Pt allows an effective access of the fuel gas. Quantitative formation of the well‐defined interfacial structure formed by these components leads to an excellent mass transfer in the catalyst interface and realizes a high fuel‐cell performance. Membrane electrode assemblies fabricated with the electrocatalyst show a high power density of 256 mW cm^?2. To the best of our knowledge, this is the highest value for AEMFC systems measured in similar experimental conditions.     

Fuel Cell Membrane Electrode Assemblies Fabricated by Layer‐by‐Layer Electrostatic Self‐Assembly Techniques

High activity, carbon supported Pt electrocatalysts were synthesized using a supercritical fluid method and a selective heterogeneous nucleation reaction to disperse Pt onto single walled carbon nanotube and carbon fiber supports. These nanocomposite materials were then incorporated into catalyst and gas diffusion layers consisting of polyelectrolytes, i.e., Nafion, polyaniline, and polyethyleneimine using layer‐by‐layer (LBL) assembly techniques. Due to the ultrathin nature and excellent homogeneity characteristics of LBL materials, the LBL nanocomposite catalyst layers (LNCLs) yielded much higher Pt utilizations, 3,198 mW mg_Pt^?1, than membrane electrode assemblies produced using conventional methods (～800 mW mg_Pt^?1). Thinner membranes (100 bilayers) can further improve the performance of the LNCLs and these layers can function as catalyzed gas diffusion layers for the anode and cathode of a polymer electrolyte membrane fuel cell.     

Molecular‐Scale Hybridization of Clay Monolayers and Conducting Polymer for Thin‐Film Supercapacitors

Development of electrode materials with well‐defined architectures is a fruitful and profitable approach for achieving highly‐efficient energy storage systems. A molecular‐scale hybrid system is presented based on the self‐assembly of CoNi‐layered double hydroxide (CoNi‐LDH) monolayers and the conducting polymer (poly(3,4‐ethylene dioxythiophene):poly(styrene sulfonate), denoted as PEDOT:PSS) into an alternating‐layer superlattice. Owing to the homogeneous interface and intimate interaction, the resulting CoNi‐LDH/PEDOT:PSS hybrid materials possess a simultaneous enhancement in ion and charge‐carrier transport and exhibit improved capacitive properties with a high specific capacitance (960 F g^–1 at 2 A g^–1) and excellent rate capability (83.7% retention at 30 A g^–1). In addition, an in‐plane supercapacitor device with an interdigital design is fabricated based on a CoNi‐LDH/PEDOT:PSS thin film, delivering a significantly enhanced energy and power output (an energy density of 46.1 Wh kg^–1 at 11.9 kW kg^–1). Its application in miniaturized devices is further demonstrated by successfully driving a photodetector. These characteristics demonstrate that the molecular‐scale assembly of LDH monolayers and the conducting polymer is promising for energy storage and conversion applications in miniaturized electronics.     

Molecularly Coupled Two‐Dimensional Titanium Oxide and Carbide Sheets for Wearable and High‐Rate Quasi‐Solid‐State Rechargeable Batteries

High‐performance, flexible, and lightweight powering electrodes are urgently needed to meet the increasing interest in deformable electronic devices, particularly those utilizing solid‐state electrolytes and performing at high charging rates, which unfortunately have remained a formidable challenge. Here, by regularly stacking two‐dimensional (2D) titanium oxide and carbide sheets, in which the two kinds of sheets are coupled at the molecular level, a self‐standing electrode is achieved with ideal mechanical durability and excellent electrochemical performance, including superb rate performance (delivering a capacity of 114 mAh g^?1 in 3.4 min) and good cycling stability (remaining >93% after 1000 cycles at 1000 mA g^?1). Profiting from these advantages, a flexible and safe full lithium‐ion battery, employing a poly(ethylene glycol) diamine‐based gel polymer as the electrolyte, possesses an excellent power density of 1412 W kg^?1 while maintaining a high energy density of 59 Wh kg^?1, which outperforms most documented flexible batteries that utilize liquid electrolytes and is even comparable with some cells using coin configurations. Importantly, the performance was well maintained under mechanical deformation and after multiple breaking and self‐healing cycles, demonstrating the feasibility for practical application in wearable powering devices. The results highlight the numerous possibilities for utilizing sheet materials to fabricate wearable electrode materials.     

Selective Ion Transport and Complexation in Layer‐by‐Layer Assemblies of p‐Sulfonato‐ calix[n]arenes and Cationic Polyelectrolytes

The first study of ion transport across self‐assembled multilayered films of p‐sulfonato‐calix[n]arenes and poly(vinyl amine) (PVA) is presented. The films are prepared by the alternate electrostatic layer‐by‐layer assembly of the anionic calixarenes and cationic PVA on porous polyacrylonitrile (PAN) supports. We use tetra‐p‐sulfonato‐calix[4]arene (calix4), hexa‐p‐sulfonato‐calix[6]arene (calix6), and octa‐p‐sulfonato‐calix[8]arene (calix8) as the calixarenes. Ultraviolet (UV) studies indicate that dipping solutions of pH 6.8, without a supporting electrolyte, are most suited for film preparation. Calix8 is adsorbed in higher concentrations per layer than calix6 or calix4, probably because desorption is less pronounced. The permeation rates, P_Rs, of monovalent alkali‐metal chlorides (Li, Na, K, Cs), magnesium chloride, divalent transition‐metal chlorides (Ni, Cu, Zn), trivalent lanthanide chlorides (La, Ce, Pr, Sm), and sodium sulfate across the calix4/PVA, calix6/PVA, and calix8/PVA membranes are studied and compared with the corresponding P_R values across a poly(styrene sulfonate) (PSS)/PVA multilayer membrane prepared under the same conditions. The P_R values of the alkali‐metal salts are between 4 and 17 × 10^–6 cm s^–1, those of magnesium chloride and the transition‐metal salts are 0.2–1.3 × 10^–6 cm s^–1, and those of the lanthanide salts are about 0.1 × 10^–6 cm s^–1. Possible origins for the large differences are discussed. Ion transport is first of all controlled by electrostatic effects such as Donnan rejection of di‐ and trivalent ions in the membrane, but metal‐ion complexation with the calixarene derivatives also plays a role. Complexation occurs especially between Li⁺ or Na⁺ and calix4, Mg²⁺, or Cu²⁺ and calix6, Cu²⁺, Zn²⁺, or the lanthanide ions and calix8. Divalent sulfate ions are found to replace the calixarene polyanions in the membrane. UV studies of the permeate solutions indicate that calix4 especially is displaced during sulfate permeation.     

Highly Conductive PEDOT:PSS Electrode with Optimized Solvent and Thermal Post‐Treatment for ITO‐Free Organic Solar Cells

Highly conductive poly(3,4‐ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) films as stand‐alone electrodes for organic solar cells have been optimized using a solvent post‐treatment method. The treated PEDOT:PSS films show enhanced conductivities up to 1418 S cm^?1, accompanied by structural and chemical changes. The effect of the solvent treatment on PEDOT:PSS has been investigated in detail and is shown to cause a reduction of insulating PSS in the conductive polymer layer. Using these optimized electrodes, ITO‐free, small molecule organic solar cells with a zinc phthalocyanine (ZnPc):fullerene C₆₀ bulk heterojunction have been produced on glass and PET substrates. The system was further improved by pre‐heating the PEDOT:PSS electrodes, which enhanced the power conversion efficiency to the values obtained for solar cells on ITO electrodes. The results show that optimized PEDOT:PSS with solvent and thermal post‐treatment can be a very promising electrode material for highly efficient flexible ITO‐free organic solar cells.     

Ultra‐Thin Self‐Assembled Protein‐Polymer Membranes: A New Pore Forming Strategy

Self‐assembled membranes offer a promising alternative for conventional membrane fabrication, especially in the field of ultrafiltration. Here, a new pore‐making strategy is introduced involving stimuli responsive protein‐polymer conjugates self‐assembled across a large surface area using drying‐mediated interfacial self‐assembly. The membrane is flexible and assembled on porous supports. The protein used is the cage protein ferritin and resides within the polymer matrix. Upon denaturation of ferritin, a pore is formed which intrinsically is determined by the size of the protein and how it resides in the matrix. Due to the self‐assembly at interfaces, the membrane constitutes of only one layer resulting in a membrane thickness of 7 nm on average in the dry state. The membrane is stable up to at least 50 mbar transmembrane pressure, operating at a flux of about 21 000–25 000 L m^?2 h^?1 bar^?1 and displayed a preferred size selectivity of particles below 20 nm. This approach diversifies membrane technology generating a platform for “smart” self‐assembled membranes.     

Enhanced Interfacial Stability of Hybrid‐Electrolyte Lithium‐Sulfur Batteries with a Layer of Multifunctional Polymer with Intrinsic Nanoporosity

The use of lithium‐ion conductive solid electrolytes offers a promising approach to address the polysulfide shuttle and the lithium‐dendrite problems in lithium‐sulfur (Li‐S) batteries. One critical issue with the development of solid‐electrolyte Li‐S batteries is the electrode–electrolyte interfaces. Herein, a strategic approach is presented by employing a thin layer of a polymer with intrinsic nanoporosity (PIN) on a Li⁺‐ion conductive solid electrolyte, which significantly enhances the ionic interfaces between the electrodes and the solid electrolyte. Among the various types of Li⁺‐ion solid electrolytes, NASICON‐type Li_1+xAl_xTi_2‐x(PO₄)₃ (LATP) offers advantages in terms of Li⁺‐ion conductivity, stability in ambient environment, and practical viability. However, LATP is susceptible to reaction with both the Li‐metal anode and polysulfides in Li‐S batteries due to the presence of easily reducible Ti⁴⁺ ions in it. The coating with a thin layer of PIN presented in this study overcomes the above issues. At the negative‐electrode side, the PIN layer prevents the direct contact of Li‐metal with the LATP solid electrolyte, circumventing the reduction of LATP by Li metal. At the positive electrode side, the PIN layer prevents the migration of polysulfides to the surface of LATP, preventing the reduction of LATP by polysulfides.     

Room‐Temperature Metallic Fusion‐Induced Layer‐by‐Layer Assembly for Highly Flexible Electrode Applications

To fabricate flexible electrodes, conventional silver (Ag) nanomaterials have been deposited onto flexible substrates, but the formed electrodes display limited electrical conductivity due to residual bulky organic ligands, and thus postsintering processes are required to improve the electrical conductivity. Herein, an entirely different approach is introduced to produce highly flexible electrodes with bulk metal–like electrical conductivity: the room‐temperature metallic fusion of multilayered silver nanoparticles (NPs). Synthesized tetraoctylammonium thiosulfate (TOAS)‐stabilized Ag NPs are deposited onto flexible substrates by layer‐by‐layer assembly involving a perfect ligand‐exchange reaction between bulky TOAS ligands and small tris(2‐aminoethyl)amine linkers. The introduced small linkers substantially reduce the separation distance between neighboring Ag NPs. This shortened interparticle distance, combined with the low cohesive energy of Ag NPs, strongly induces metallic fusion between the close‐packed Ag NPs at room temperature without additional treatments, resulting in a high electrical conductivity of ≈1.60 × 10⁵ S cm^?1 (bulk Ag: ≈6.30 × 10⁵ S cm^?1). Furthermore, depositing the TOAS–Ag NPs onto cellulose papers through this approach can convert the insulating substrates into highly flexible and conductive papers that can be used as 3D current collectors for energy‐storage devices.     

Photovoltaic Devices: Highly Conductive PEDOT:PSS Electrode with Optimized Solvent and Thermal Post‐Treatment for ITO‐Free Organic Solar Cells (Adv. Funct. Mater. 6/2011)

Highly conductive poly(3,4‐ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) films as stand‐alone electrodes for organic solar cells have been optimized using a solvent post‐treatment method. The treated PEDOT:PSS films show enhanced conductivities up to 1418 S cm^?1, accompanied by structural and chemical changes. The effect of the solvent treatment on PEDOT:PSS has been investigated in detail and is shown to cause a reduction of insulating PSS in the conductive polymer layer. Using these optimized electrodes, ITO‐free, small molecule organic solar cells with a zinc phthalocyanine (ZnPc):fullerene C₆₀ bulk heterojunction have been produced on glass and PET substrates. The system was further improved by pre‐heating the PEDOT:PSS electrodes, which enhanced the power conversion efficiency to the values obtained for solar cells on ITO electrodes. The results show that optimized PEDOT:PSS with solvent and thermal post‐treatment can be a very promising electrode material for highly efficient flexible ITO‐free organic solar cells.     

MXene‐Bonded Flexible Hard Carbon Film as Anode for Stable Na/K‐Ion Storage

Hard carbon (HC) is a promising anode material for sodium‐ion batteries (SIBs) and potassium‐ion batteries (PIBs), but the volume change during the insertion/extraction of Na⁺ or K⁺ limits the cycle life, especially for PIBs due to the large ion size of K⁺. Moreover, the conventional anodes fabricated through the coating method cannot satisfy the requirement of flexible devices. Here, it is shown that 2D carbide flakes of Ti₃C₂T_x MXene can be used as multifunctional conductive binders for flexible HC electrodes. The use of MXene nanosheets eliminates the need for all the electrochemically inactive components in the conventional polyvinylidene fluoride–bonded HC electrode, including polymer binders, conductive additives, and current collectors. In MXene‐bonded HC electrodes, conductive and hydrophilic MXene 2D nanosheets construct a 3D network, which can effectively stabilize the electrode structure and accommodate the volume expansion of HC during the charge/discharge process, leading to an enhanced electrode capacity and excellent cycle performance as anodes for both SIBs and PIBs. Benefiting from the 3D conductive network, the MXene‐bonded HC film electrodes also present improved rate capability, indicating MXene is a very promising multifunctional binder for next‐generation flexible secondary rechargeable batteries.     

High‐Yield Fabrication,Activation, and Characterization of Carbon Nanotube Ion Channels by Repeated Voltage‐Ramping of Membrane‐Capillary Assembly

The interior channels of carbon nanotubes are promising for studying transport of individual molecules in a 1D confined space. However, experimental investigations of the interior transport have been limited by the extremely low yields of fabricated nanochannels and their characterization. Here, this challenge is addressed by assembling nanotube membranes on glass capillaries and employing a voltage‐ramping protocol. Centimeter‐long carbon nanotubes embedded in an epoxy matrix are sliced to hundreds of 10 µm‐thick membranes containing essentially identical nanotubes. The membrane is attached to glass capillaries and dipped into analyte solution. Repeated ramping of the transmembrane voltage gradually increases ion conductance and activates the nanotube ion channels in 90% of the membranes; 33% of the activated membranes exhibit stochastic pore‐blocking events caused by cation translocation through the interiors of the nanotubes. Since the membrane‐capillary assembly can be handled independently of the analyte solution, fluidic exchange can be carried out simply by dipping the capillary into a solution of another analyte. This capability is demonstrated by sequentially measuring the threshold transmembrane voltages and ion mobilities for K⁺, Na⁺, and Li⁺. This approach, validated with carbon nanotubes, will save significant time and effort when preparing and testing a broad range of solid‐state nanopores.     

Highly Stable Anion Exchange Membranes with Internal Cross‐Linking Networks

Anion exchange membranes (AEMs) with excellent stability and high ion conductivity are fabricated via the formation of internal cross linking networks. The internal crosslinking networks are constructed by reacting 4,4′‐bipyridine with chloromethylated polysulfone. The bipyridine group simultaneously functions as ionic conductor and cross linker in this system. The performance of the membrane is tuned via controlling the 4,4′‐bipyridine content in the casting solution. The prepared membranes demonstrate excellent chemical stability and high ion conductivity under acidic conditions. As a consequence, the membranes show very promising performance for vanadium flow battery application, exhibiting a Coulombic efficiency of 99.2% and an energy efficiency of 81.8% at a current density of 140 mA cm^?2. The battery that is assembled with the prepared membrane shows a stable battery performance over more than 1600 cycles, which is by far the longest cycle life reported. These results indicate that the AEMs with internal crosslinking structures are promising candidates for battery systems and even for fuel cells.     

Inorganic Acid‐Impregnated Covalent Organic Gels as High‐Performance Proton‐Conductive Materials at Subzero Temperatures

Proton exchange membrane fuel cells usually suffer from severe power loss and even damage under subzero‐temperature working surroundings, which restricts their practical use in cold climates and in high‐altitude drones. One of the effective solutions to these issues is to develop new types of proton‐conductive materials at subzero temperature. This study presents a series of acylhydrazone‐based covalent organic gels (COGs). The COGs are stable in acidic media and show high proton conductivity over the temperature range of ?40 to 60 °C under anhydrous conditions. Compared with other reported organic conductive materials, both a state‐of‐the‐art conductivity of 3.8 × 10^?4 S cm^?1 at ?40 °C and superior long‐term stability are demonstrated. Moreover, the COGs possess remarkable self‐sustainability, good processability, and superior mechanical properties, and may be processed and molded into any desirable shapes for practical applications. These advantages make COGs hold great promises as solid‐state electrolytes under subzero‐temperature operating conditions.     

Self‐Assembly of Flexible Free‐Standing 3D Porous MoS2‐Reduced Graphene Oxide Structure for High‐Performance Lithium‐Ion Batteries

Flexible freestanding electrodes are highly desired to realize wearable/flexible batteries as required for the design and production of flexible electronic devices. Here, the excellent electrochemical performance and inherent flexibility of atomically thin 2D MoS₂ along with the self‐assembly properties of liquid crystalline graphene oxide (LCGO) dispersion are exploited to fabricate a porous anode for high‐performance lithium ion batteries. Flexible, free‐standing MoS₂–reduced graphene oxide (MG) film with a 3D porous structure is fabricated via a facile spontaneous self‐assembly process and subsequent freeze‐drying. This is the first report of a one‐pot self‐assembly, gelation, and subsequent reduction of MoS₂/LCGO composite to form a flexible, high performance electrode for charge storage. The gelation process occurs directly in the mixed dispersion of MoS₂ and LCGO nanosheets at a low temperature (70 °C) and normal atmosphere (1 atm). The MG film with 75 wt% of MoS₂ exhibits a high reversible capacity of 800 mAh g^?1 at a current density of 100 mA g^?1. It also demonstrates excellent rate capability, and excellent cycling stability with no capacity drop over 500 charge/discharge cycles at a current density of 400 mA g^?1.     

Synergistic Roll‐to‐Roll Transfer and Doping of CVD‐Graphene Using Parylene for Ambient‐Stable and Ultra‐Lightweight Photovoltaics

A roll‐to‐roll (R2R) transfer technique is employed to improve the electrical properties of transferred graphene on flexible substrates using parylene as an interfacial layer. A layer of parylene is deposited on graphene/copper (Cu) foils grown by chemical vapor deposition and are laminated onto ethylene vinyl acetate (EVA)/poly(ethylene terephthalate). Then, the samples are delaminated from the Cu using an electrochemical transfer process, resulting in flexible and conductive substrates with sheet resistances of below 300 Ω sq^?1, which is significantly better (fourfold) than the sample transferred by R2R without parylene (1200 Ω sq^?1). The characterization results indicate that parylene C and D dope graphene due to the presence of chlorine atoms in their structure, resulting in higher carrier density and thus lower sheet resistance. Density functional theory calculations reveal that the binding energy between parylene and graphene is stronger than that of EVA and graphene, which may lead to less tear in graphene during the R2R transfer. Finally, organic solar cells are fabricated on the ultrathin and flexible parylene/graphene substrates and an ultra‐lightweight device is achieved with a power conversion efficiency of 5.86%. Additionally, the device shows a high power per weight of 6.46 W g^?1 with superior air stability.     

A Printable Metallic Current Collector for All‐Printed High‐Voltage Micro‐Supercapacitors: Instantaneous Surface Passivation by Flash‐Light‐Sintering Reaction

Recently, a printable power source that can be implemented on demand in integrated circuitries has gained tremendous attention to facilitate next‐generation, form‐factor free, miniaturized electronic systems. Among various energy storage units, a solid‐state micro‐supercapacitor with in‐plane device architecture has been recognized as a viable candidate with characteristic advantages of long cycle life‐time, high frequency response, and fast charge/discharge rate. However, to date, high performance, all‐printed micro‐supercapacitors have rarely been reported owing to an absence of printable current collector materials that can sustain high voltage conditions. In this study, a multidimensional printable particle mixture comprising Ni nanoparticles, Ni flakes, and a photoreactive polymer, polyvinylpyrrolidone is proposed. The highly conductive, printed metallic current collector is generated with a conductive surface passivation layer in a timescale of 10^?3 s by flash‐light sintering process. It is revealed that the resulting metallic current collector is stable at a voltage as high as 3 V in the carbon electrode‐based device, enabling the fabrication of an all‐printed solid‐state micro‐supercapacitor with an areal energy density of 79–23 mJ cm^?2 at an areal power density of 0.4–12.8 mW cm^?2. Arbitrarily designed device circuits can be generated on demand simply by using a digitally programmable printing process, without incorporation of additional interconnection lines.     

Sputtered Titanium Carbide Thick Film for High Areal Energy on Chip Carbon‐Based Micro‐Supercapacitors

The areal energy density of on‐chip micro‐supercapacitors should be improved in order to obtain autonomous smart miniaturized sensors. To reach this goal, high surface capacitance electrode (>100 mF cm^?2) has to be produced while keeping low the footprint area. For carbide‐derived carbon (CDC) micro‐supercapacitors, the properties of the metal carbide precursor have to be fine‐tuned to fabricate thick electrodes. The ad‐atoms diffusion process and atomic peening effect occurring during the titanium carbide sputtering process are shown to be the key parameters to produce low stress, highly conductive, and thick TiC films. The sputtered TiC at 10^?3 mbar exhibits a high stress level, limiting the thickness of the TiC‐CDC electrode to 1.5 µm with an areal capacitance that is less than 55 mF cm^?2 in aqueous electrolyte. The pressure increase up to 10^?2 mbar induces a clear reduction of the stress level while the layer thickness increases without any degradation of the TiC electronic conductivity. The volumetric capacitance of the TiC‐CDC electrodes is equal to 350 F cm^?3 regardless of the level of pressure. High values of areal capacitance (>100 mF cm^?2) are achieved, whereas the TiC layer is relatively thick, which paves the way toward high‐performance micro‐supercapacitors.