Flip Chip Assembly of Thinned Silicon Die on Flex Substrates

Driven by a growing range of applications in the automotive, industrial, military, aerospace, computer, telecommunication, consumer electronics, and medical electronics industries, miniaturization and the use of flex circuits continue to be of prime interest to electronics manufacturers. The assembly of thinned silicon die (25-100 mum) onto flex substrates provides options for ultrathin, flexible electronics for applications ranging from smart cards to space-based radars. For high-density applications, 3-D modules can be fabricated by stacking and laminating preassembled and tested flex layers and then processing vertical interconnections. This paper describes a low cost, highly manufacturable process developed for flip chip assembly of thinned die to poly-imide flex substrates that eliminates the need for special handling tools and techniques. In this paper, solder bumped thinned die are reflow soldered to the patterned flex using a method that maintains the flex substrate flat during die placement and reflow. Reflow is followed by underfill dispense and cure. The underfill dispense process is critical to avoid underfill flowing onto the top of the thin silicon die and will be discussed. Parts assembled using these processes have undergone reliability testing, a high degree of reliability has been found, and those results are presented.     

Interconnection Technology Based on InSn Solder for Flexible Display Applications

A novel interconnection technology based on a 52InSn solder was developed for flexible display applications. The display industry is currently trying to develop a flexible display, and one of the crucial technologies for the implementation of a flexible display is to reduce the bonding process temperature to less than 150°C. InSn solder interconnection technology is proposed herein to reduce the electrical contact resistance and concurrently achieve a process temperature of less than 150°C. A solder bump maker (SBM) and fluxing underfill were developed for these purposes. SBM is a novel bumping material, and it is a mixture of a resin system and InSn solder powder. A maskless screen printing process was also developed using an SBM to reduce the cost of the bumping process. Fluxing underfill plays the role of a flux and an underfill concurrently to simplify the bonding process compared to a conventional flip‐chip bonding using a capillary underfill material. Using an SBM and fluxing underfill, a 20 μm pitch InSn solder SoP array on a glass substrate was successfully formed using a maskless screen printing process, and two glass substrates were bonded at 130°C.     

Effects of substrate design on underfill voiding using the low cost, high throughput flip chip assembly process and no-flow underfill materials

The formation of underfill voids is an area of concern in the low cost, high throughput, or "no-flow" flip chip assembly process. This assembly process involves placement of a flip chip device directly onto the substrate pad site covered with pre-dispensed no-flow underfill. The forced motion of chip placement causes a convex flow front to pass over pad and solder mask-opening features promoting void capture. This paper determines the effects of substrate design on the phenomena of underfill voiding using the no-flow process. A full-factorial design experiment analyzes several empirically determined factors that can affect void capture in no-flow processing. The substrate design parameters included pad height, solder mask opening height, pad/solder mask opening separation, and pad pitch. The process parameters include chip placement velocity and underfill viscosity. The process robustness is measured in terms of the number of voids created during chip placement, and is further analyzed for the location and any visible modes of void formation. The goal of the work is to determine improved substrate designs to minimize voiding in flip chip processing using no flow underfills.     

Solder wetting in a wafer-level flip chip assembly

Wafer-level flip chips provide an innovative solution in establishing flip chip as a standard surface mount process. In this paper, the wetting of solder bumps within confining underfill during the reflow of a wafer-level flip chip assembly is addressed. For real time monitoring of an assembly during the reflow process, a system using a high-speed camera is utilized. The collapse of solder bumps on the chip in the vertical direction is found to be a prerequisite of solder wetting. Underfill voids and outgassing are found to cause chip drift and tilt during the reflow process. In addition, symmetry of the underfill flow and fillet formation is identified as a critical factor in maintaining chip to substrate alignment. During solder wetting of the metallization pads on the substrate, the underfill needs to maintain a low viscosity. With the selection of a thermally stable underfill and corresponding process development, wafer-level flip chip assemblies with good solder interconnects are demonstrated     

Adhesion characterization of no-flow underfills used in flip chipassemblies and correlation with reliability

Adhesion is one of the key properties of underfills used in flip chip assemblies. This paper characterizes the adhesion strengths of no-flow underfill materials to various die passivations using the shear test techniques. A novel shear test vehicle with planner underfill layers between the die and substrate is presented. The adhesion strengths and failure modes of the no-flow underfill materials during shear testing correlate well with their thermal shock reliability test results. Underfill adhesion related failures such as delamination and crack are investigated and correlated between flip chip assemblies and shear test vehicle assemblies without solder joint interconnects     

倒装焊后清洗工艺及其对底部填充的影响

倒装焊封装是通过将整个芯片有源面进行管脚阵列排布并预制焊料凸点,通过倒装焊工艺进行互连,与传统引线键合技术相比具有更高的组装密度及信号传输速率,是实现电子产品小型化、轻量化、多功能化的关键技术之一.对于小尺寸微节距的倒装焊芯片来说,焊后清洗的难度相对更大,因此清洗技术也是影响倒装焊工艺的重要因素.针对不同清洗方式及参数...     

Application assessment of high throughput flip chip assembly for ahigh lead-eutectic solder cap interconnect system using no-flowunderfill materials

Flip chip on board (FCOB) is one of the most quickly growing segments in advanced electronic packaging. In many cases, assembly processes are not capable of providing the high throughputs needed for integrated surface mount technology (SMT) processing (Tummala et al, 1997). A new high throughput process using no-flow underfill materials has been developed that has the potential to significantly increase flip chip assembly throughput. Previous research has demonstrated the feasibility and reliability of the high throughput process required for FCOB assemblies. The goal of this research was to integrate the high throughput flip chip process on commercial flip chip packages that consisted of high lead solder balls on a polyimide passivated silicon die bonded with eutectic solder bumped pads on the laminate substrate interface (Qi, 1999). This involved extensive parametric experimentation that focused on the following elements: no-flow process evaluation and implementation on the commercial packages, reflow profile parameter effects on eutectic solder wetting of high lead solder bumps, interactions between the no-flow underfill materials and the package solder interconnect and tented via features, void capture and void formation during processing, and material set compatibility and the effects on long term reliability performance     

Yield analysis and process modeling of low cost, high throughputflip chip assembly based on no-flow underfill materials

As a concept to achieve low-cost, high-throughput flip chip on board (FCOB) assembly, a new process has been developed implementing next generation flip chip processing based no-flow fluxing underfill materials. The low-cost, high throughput flip chip process implements large area underfill printing, integrated chip placement and underfill flow and simultaneous solder interconnect reflow and underfill cure. The goals of this study are to demonstrate feasibility of no flow underfill materials and the high throughput flip chip process over a range of flip chip configurations, identify the critical process variables affecting yield, analyze the yield of the high throughput flip chip process, and determine the impact of no-flow underfill materials on key process elements. Reported in this work is the assembly of a series of test vehicles to assess process yield and process defects. The test vehicles are assembled by depositing a controlled mass of underfill material on the chip site, aligning chip to the substrate pads, and placing the chip inducing a compression type underfill flow. The assemblies are reflowed in a commercial reflow furnace in an air atmosphere to simultaneously form the solder interconnects and cure the underfill. A series of designed experiments identify the critical process variables including underfill mass, reflow profile, placement velocity, placement force, and underfill material system. Of particular interest is the fact that the no-flow underfill materials studied exhibit an affinity for unique reflow profiles to minimize process defects     

Correlation of flip chip underfill process parameters and materialproperties with in-process stress generation

Electronic packaging designs are moving toward fewer levels of packaging to enable miniaturization and to increase performance of electronic products. One such package design is flip chip on board (FCOB). In this method, the chip is attached face down directly to a printed wiring board (PWB). Since the package is comprised of dissimilar materials, the mechanical integrity of the flip chip during assembly and operation becomes an issue due to the coefficient of thermal expansion (CTE) mismatch between the chip, PWB, and interconnect materials. To overcome this problem, a rigid encapsulant (underfill) is introduced between the chip and the substrate. This reduces the effective CTE mismatch and reduces the effective stresses experienced by the solder interconnects. The presence of the underfill significantly improves long term reliability. The underfill material, however, does introduce a high level of mechanical stress in the silicon die. The stress in the assembly is a function of the assembly process, the underfill material, and the underfill cure process. Therefore, selection and processing of underfill material is critical to achieving the desired performance and reliability. The effect of underfill material on the mechanical stress induced in a flip chip assembly during cure was presented in previous publications. This paper studies the effect of the cure parameters on a selected commercial underfill and correlates these properties with the stress induced in flip chip assemblies during processing     

Double bump flip-chip assembly

Capillary underfill remains the dominate process for underfilling Hip-chip die both in packages and for direct chip attach (DCA) on printed circuit board (PCB) assemblies. Capillary underfill requires a post reflow dispense and cure operation, and the underflow time increases with increasing die area and decreasing die-to-substrate spacing. Fluxing or no-How underfills are dispensed prior to die placement and cure during the solder reflow cycle. Since filler particles in the fluxing underfill can be trapped between the solder ball and the substrate pad during placement, the filler content of fluxing underfills is typically limited to <20% or assembly yield drops dramatically. At 20% filler concentration, the coefficient of thermal expansion (CTE) of the underfill is near that of the bulk resin (50-80 ppm//spl deg/C). In this paper, a double bump Hip-chip process is described. A filled capillary underfill is coated onto a wafer and cured. The wafer is then polished to expose the solder bumps. A second solder bump is formed over the original bump by stencil printing solder paste. After dicing, the die is assembled to the PCB using unfilled fluxing underfill. In the resulting structure, the low CTE underfill is near the low CTE Si die, and the higher CTE underfill is in contact with the PCB. In addition, the standoff height is increased compared to a conventional single bump assembly. In air-to-air thermal shock tests, the double bump assembly was /spl sim/ 1.5 X more reliable than the conventional single bump construction with fluxing underfill. Modeling results are also presented.     

Failure analysis of solder bumped flip chip on low-cost substrates

Failure analyses of 63/37 Sn/Pb solder bumped flip chip assemblies with underfill encapsulant are presented in this study, Emphasis is placed on solder flowed-out, nonuniform underfill and voids, and delaminations. The X-ray, scanning acoustic microscope (SAM), and tomographic acoustic micro imaging (TAMI) techniques are used to analyze the failed samples. Also, cross sections are examined for a better understanding of the failure mechanisms. Furthermore, temperature dependent nonlinear finite element analyses together with fracture mechanics are used to determine the effects of underfill void sizes on the flip chip solder joint reliability     

Mechanical loading of flip chip joints before underfill: the impact on yield and reliability

The underfill-facilitated migration from ceramic to lower cost laminate substrates has become a powerful enabler of direct chip attach by offering lower cost, greater electrical functionality, and a smaller system footprint over comparable packaging technologies. Once underfilled, flip chip on laminate has proven extremely reliable even in severe automotive environments. However, between the process steps of reflow and underfill cure, unprotected flip chip solder joints assembled to laminate boards are susceptible to damage and breakage if mishandled. Here, the survivability and long-term reliability of flip chip joints was studied over a range of applied strains. Mechanical loading of joints was applied via beam deflections of populated, but nonunderfilled, laminate boards. Electrical continuity was monitored before and after testing to determine when the load applied to the flip chip exceeded the joint fracture strength. The propensity for solder joint fracture was then calculated as a function of solder bump size and also as a function of strain rate. Analysis of the mechanical properties of solder revealed assembly strategies which reduce bump damage and eliminate yield loss during the process steps leading up to underfill cure. Both strained and unstrained units were then underfilled and cycled between −50 and +150 °C. While mechanical damage was evident in bump cross-sections of strained flip chip assemblies, the fatigue lives of underfilled solder joints were found to be independent of the size of mechanical loads applied before underfill.     

Parametric reliability analysis of no-underfill flip chip package

This research proposes a parametric analysis for a flip chip package with a constraint-layer structure. Previous research has shown that flip-chip type packages with organic substrates require underfill for achieving adequate reliability life. Although underfill encapsulant is needed to improve the reliability of flip chip solder joint interconnects, it will also increase the difficulty of reworkability, increase the packaging cost and decrease the manufacturing throughput. This research is based on the fact that if the thermal mismatch between the silicon die and the organic substrate could be minimized, then the reliability of the solder joint could be accordingly enhanced. This research proposes a structure using a ceramic-like material with CTE close to silicon, mounted on the backside of the substrate to constrain the thermal expansion of the organic substrate. The ceramic-like material could reduce the thermal mismatch between silicon die and substrate, thereby enhancing the reliability life of the solder joint. Furthermore, in order to achieve better reliability design of this flip chip package, a parametric analysis using finite element analysis is performed for package design. The design parameters of the flip chip package include die size, substrate size/material, and constraint-layer size/material, etc. The results show that this constraint-layer structure could make the solder joints of the package achieve the same range of reliability as the conventional underfill material. More importantly, the flip chip package without underfill material could easily solve the reworkability problem, enhance the thermal dissipation capability and also improve the manufacturing throughput     

Reliability of a Silicon Stacked Module for 3-D SiP Microsystem

Solder joint reliability of 3-D silicon carrier module were investigated with temperature cycle and drop impact test. Mechanical simulation was carried out to investigate the solder joint stress using finite element method (FEM), whose 3-D model was generated and solder fatigue model was used. According to the simulation results, the stress involved between flip chip and Si substrate was negligible but stress is more concentrated between Si carriers to printed circuit board (PCB) solder joint area. Test vehicles were fabricated using silicon fabrication processes such as DRIE, Cu via plating, SiO deposition, metal deposition, lithography, and dry or wet etching. After flip chip die and silicon substrate fabrication, they were assembled by flip chip bonding equipment and 3-D silicon stacked modules with three silicon substrate and flip chip dies were fabricated. Daisy chains were formed between flip chip dies and silicon substrate and resistance measurement was carried out with temperature cycle test (C, 2 cycles/h). The tested flip chip test vehicles passed T/C 5000 cycles and showed robust solder joint reliability without any underfill material. Drop test was also carried out by JEDEC standard method. More details on test vehicle fabrication and reliability test results would be presented in the paper.     

Assembly of Copper Column Interconnect Flip Chip

This paper addresses a new flip chip interconnection technology, flexible flip chip connection (F2C2) technology, for attaching silicon chips to a chip carrier using flexible copper wires. F2C2 is a novel approach to create area array flip chip interconnections using a matrix block of wires encapsulated with a heat-resistant, dissolvable substance. A slice from the wire matrix ingot is first attached to the chip using solder. The other end of the slice is then matched and soldered to the footprint of a substrate. Finally, the encapsulating, dissolvable substance is removed from the body of the slice, leaving the chip attached to the carrier by the inter- disposed, flexible copper wires. The compliant copper wire interconnections can accommodate the coefficient of thermal expansion (CTE) mismatch problem between die and substrate, thus eliminating the need for underfill.     

Study of the electrical performance of chip-on-board (COB) devices

When a bare die is flipped directly onto the printed circuit board (PCB) during chip-on-board assembly, it becomes exposed to a number of factors, which could influence its electrical performance. Although the mechanical integrity of flip-chip devices has been thoroughly studied, there is very little evidence of detailed investigations of the electrical performance of these devices. The present paper aims to bridge this gap by studying the electrical parameters of flip chip devices and analysing the changes occurring following assembly. A dedicated test chip comprised of passive and active semiconductor devices was designed for the study. Two different types of tacky flux and underfill materials were used in the flip chip assembly process. The flip chip structures were then subjected to various environmental stress techniques for accelerating ageing. Electrical parameters of the devices such as threshold voltage, I-V characteristics, off-state leakage current, current gain, and resistance were measured at various stages of the programme. A slight change in device parameters was observed immediately after assembly. Further change in some device parameters was observed after environmental stressing. The paper investigates the mechanisms that could be responsible for the changes, such as mechanical stresses introduced during the flip chip process or ionic contamination inherent to the assembly process.     

Void Formation Study of Flip Chip in Package Using No-Flow Underfill

The advanced flip chip in package (FCIP) process using no-flow underfill material for high I/O density and fine-pitch interconnect applications presents challenges for an assembly process that must achieve high electrical interconnect yield and high reliability performance. With respect to high reliability, the voids formed in the underfill between solder bumps or inside the solder bumps during the no-flow underfill assembly process of FCIP devices have been typically considered one of the critical concerns affecting assembly yield and reliability performance. In this paper, the plausible causes of underfill void formation in FCIP using no-flow underfill were investigated through systematic experimentation with different types of test vehicles. For instance, the effects of process conditions, material properties, and chemical reaction between the solder bumps and no-flow underfill materials on the void formation behaviors were investigated in advanced FCIP assemblies. In this investigation, the chemical reaction between solder and underfill during the solder wetting and underfill cure process has been found to be one of the most significant factors for void formation in high I/O and fine-pitch FCIP assembly using no-flow underfill materials.     

Effect of Gold Stud Bump Topology on Reliability of Flip Chip on Flex Interconnects

The flip chip technique using conductive adhesives have emerged as a good alternative to solder flip chip methods. Different approaches of the interconnection mechanism using conductive adhesives have been developed. In this paper, test chips with gold stud bumps are flip-chipped with conductive adhesives onto a flexible substrate. An experimental study to characterize the bonding process parameters is reported. Initial results from the environmental studies show that thermal shock test causes negligible failure. On the other hand, high humidity test causes considerable failure in flip chip on flex assemblies. Improvements in the reliability of the assembly are achieved by modifying the shape of the gold stud bumps.     

Reliability of adhesive joined thinned chips on flexible substrates under humid conditions

Thin chips are an interesting option for reducing the thickness of an electronics package. In addition to the reduced size, thinned chips are flexible and can dissipate more heat than thicker ones. Joining of the thin chips can be done using several different techniques. Of these, anisotropic conductive adhesives (ACA) are an interesting option as they have several advantages, such as low bonding temperature and capability for high density interconnections. The reliability of ACA flip chip joints under thermal cycling conditions has been found to increase when thinned chips are used. However, the effect of humidity has not been fully explored. In this study the reliability of thinned chips (50 μm) under humid conditions was investigated using thin flexible substrates. Seven test lots were assembled with thinned chips using two different ACA films and liquid crystal polymer (LCP), polyimide (PI) and thin FR-4 substrates. A high humidity and high temperature test was used to study the reliability of the interconnections. A finite element model (FEM) was used to analyse the stresses in the test samples during testing. Several failures occurred during the test and significant differences between the substrates were seen. Additionally, bonding pressure was found to be a critical factor for the reliability under the humid conditions.     

Processing of fluxing underfills for flip chip-on-laminate assembly

Fluxing underfill eliminates process steps in the assembly of flip chip-on-laminate (FCOL) when compared to conventional capillary flow underfill processing. In the fluxing underfill process, the underfill is dispensed onto the board prior to die placement. During placement, the underfill flows in a "squeeze flow" process until the solder balls contact the pads on the board. The material properties, the dispense pattern and resulting shape, solder mask design pattern, placement force, placement speed, and hold time all impact the placement process and the potential for void formation. A design of experiments was used to optimize the placement process to minimize placement-induced voids. The major factor identified was board design, followed by placement acceleration. During the reflow cycle, the fluxing underfill provides the fluxing action required for good wetting and then cures by the end of the reflow cycle. With small, homogeneous circuit boards it is relatively easy to develop a reflow profile to achieve good solder wetting. However, with complex SMT assemblies involving components with significant thermal mass this is more challenging.