Development of a new annealing process to allow new top electrode materials for SrBi2Ta2O9 capacitors

Abstract

Using the Rapid Thermal Annealing (RTA) process, a technique has been established to obtain SrBi₂Ta₂O₉ (SBT) films which showed well-shaped hysteresis curves without a postannealing process after top electrode deposition, maintaining high remanent polarization (Pr) values. RTA conditions were optimized for nucleation of SBT. The effect of a seed layer on the film properties became obvious. This process allowed top electrode materials other than Pt. High remanent polarization (Pr) values could be also obtained with Pd top electrodes.     

A high-capacitance PZT-on-Ta2O5 memory cell with a chemically stable electrode suitable for sub-micron processing

A high-capacitance Pb (Zrx, Ti1-x)O3 (PZT)-on-Ta2O5 memory cell suitable for sub-micron processing is proposed, and an experimental capacitor of PZT (Zr/Ti= 52/48)-on-Ta2O5 with Ta electrode was prepared. The X-ray diffraction and XMA analysis of the sample showed that PZT reacted with neither Ta nor Ta2O5. The capacitor with 500 nm PZT thickness shows current density of 10-8 A/cm2 at 4MV/cm, the breakdown field of 8MV/cm, and the effective dielectric constant of 40.     

Evaluation of SiO/sub 2/ antifuse in a 3D-OTP memory

We have evaluated an antifuse technology used in a novel three-dimensional one-time-programmable (3D-OTP) nonvolatile solid-state memory. The 3D-OTP memory uses deposited polysilicon antifuse sandwiches to build its memory cells. The polysilicon based SiO/sub 2/ antifuse show different breakdown characteristics compared to conventional traditional gate oxides. Long-term storage tests show that this 3D-OTP solid-state memory not only can be a general purpose ROM, but also can be an ideal media for archiving.     

Corona and breakdown characteristics between sphere electrode with a protrusion and plane electrode under negative pulse voltage in N/sub 2/ gas

Corona and breakdown characteristics for a configuration of a sphere with a needle and a plane in N/sub 2/ gas are studied. The protrusion was used to simulate a metallic particle attached to a high voltage conductor surface in power apparatus. The corona and breakdown characteristics depend on the vertical distance between the needle tip and the bottom sphere. It was observed that the breakdown path changed from needle-to-plane to sphere-to-plane while increasing the vertical distance of the needle from the plane. Although corona was generated at the needle-tip at first and developed in the direction of the plane, both the needle-plane and the sphere-plane breakdown occurred at some short vertical distances. The sphere-plane breakdown in that distance was triggered by corona from the needle.     

微波技术在Li/SOCl2电池正极成型中的应用

通过用水混合聚四氟乙烯(PTFE)乳液、乙炔黑等,并利用微波加热,使碳正极成型,然后,组装成ER14505电池.控制2 800 W的微波功率、3 min的加热时间,可制成含有合适的孔率、孔径等的碳正极,且组装的电池性能优良.运用微波技术加工Li/SOCl2电池碳正极,可改善电池的大电流、低温和电压滞后等性能.     

微波技术在Li/SOCl2电池正极成型中的应用

通过用水混合聚四氟乙烯(PTFE)乳液、乙炔黑等,并利用微波加热,使碳正极成型,然后,组装成ER14505电池.控制2 800 W的微波功率、3 min的加热时间,可制成含有合适的孔率、孔径等的碳正极,且组装的电池性能优良.运用微波技术加工Li/SOCl2电池碳正极,可改善电池的大电流、低温和电压滞后等性能.     

Surface and morphological investigation of the electrode/electrolyte properties in an all-solid-state battery using a Li<Subscript>2</Subscript>S-P<Subscript>2</Subscript>S<Subscript>5</Subscript> solid electrolyte

All-solid-state lithium-ion batteries represent a promising battery technology thanks to the replacement of the volatile and flammable state-of-the-art liquid electrolyte by a solid electrolyte. Despite the recent progress in the synthesis of sulfide based solid electrolyte with high ionic conductivity, little is known about the interface reactivity of the solid electrolyte with electrode materials. In this study, we synthesized and characterized an amorphous solid electrolyte with the nominal composition (Li₂S)₃(P₂S₅). We assessed the feasibility of using this electrolyte at the laboratory scale, and we discuss the potential challenges that govern its electrochemical performance. Galvanostatic cycling and rate performance measurements were conducted using lithium titanium oxide (Li₄Ti₅O₁₂) as the negative electrode material. The electrochemical measurements were performed using two different counter electrodes, namely Li metal and an InLi_x alloy. The alloy counter electrode suppressed the formation of lithium dendrites, resulting in increased cycling stability and cell safety. Post mortem X-ray photoemission spectroscopy measurements reveal the reactivity of the solid electrolyte Li₃PS₄ with the Li₄Ti₅O₁₂, lithium metal, and InLi_x alloy.     

Laser‐induced burst corona and streamer corona for a positive DC nonuniform field gap in N2/NO mixtures

The characteristic of sparkover in a DC nonuniform field gap is closely related to the discharge mode at the onset time of corona. In order to investigate the transition mechanism from burst corona to glow corona or streamer corona, a discharge experiment which is controlled by a pulsed laser in N₂/NO mixture has been performed. From highly sensitive observation of discharge luminescence which corresponds to the discharge current wave, the transition from burst corona to streamer corona is identified by the electron avalanche, which is formed initially at the tip of the rod electrode with the highest electric field, and the effect of secondary ionization. Moreover, it is verified that the measured electron burst drift time with laser irradiation in the discharge gap is determined by the electric field of the discharge gap. © 2002 Wiley Periodicals, Inc. Electr Eng Jpn, 140(2): 10–17, 2002; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.10007