High-Q SAW filter and submicron process technology for timingextraction in high bit rate optical communications system

A new surface acoustic wave (SAW) filter configuration that consists of 3λ/8-wide meander-type electrodes and 3λ/8-wide excitation electrodes on ST-cut quartz was designed for use in a 2.5-Gb/s optical communications system. New submicron process techniques using the phase shifting method as well as several types of resist were investigated to fabricate this filter. It had an insertion loss of less than 14 dB and a Q of about 700, and satisfied all required system specifications over a temperature range from 0 to 60°C     

推陈出新,创办高水平的《学报》品牌——庆贺《军医进修学院学报》创刊30周年

电子束光刻(EBL)具有高的分辨率,能制备具有亚微米尺寸的声表面波(SAW)器件.一种采用EBL技术制备用于气体传感器的具有亚微米尺寸的SAW延迟线的方法:首先利用EBL在压电衬底上获得叉指换能器(IDT)的电子抗蚀剂图形;然后用剥离工艺制作出IDT电极.通过邻近效应校正和提高场拼接精度,制作的叉指电极具有一致性,电极形貌好.相对于干法刻蚀工艺,剥离工艺避免了对压电衬底表面的物理损伤.该技术为实现特征尺寸达到百纳米级的更高工作频率SAW器件的制造提供了很好的途径.     

Narrow-band filters employing surface-acoustic-wave resonators

It is possible to utilize a surface-acoustic-wave (SAW) interdigital transducer (IDT) with a large number of electrodes as a resonator-a SAW resonator. Band-elimination filters and bandpass filters with a narrow bandwidth have been developed employing SAW resonators.     

声表面波器件制作中的一种剥离技术

介绍了一种适用于LiTaO3、LiNbO3基片的金属剥离工艺技术。该剥离技术利用碱性溶剂浸泡处理光刻胶,光刻胶顶层形成一层有利于剥离的突出遮蔽层。利用该技术可制作线宽小于0.5μm的SAW芯片。该技术无需额外设备,工艺稳定且成本低。     

基于层次级联模型的声表面波COM参数提取方法

该文研究了基于层次级联模型的耦合模(COM)参数提取方法。通过仿真42°Y-X LiTaO₃衬底的有限长声表面波(SAW)单端谐振器,提取COM参数及建立COM参数数据库,研制了一款1 200 MHz的三换能器混合结构的SAW滤波器。结果表明,实际制作器件响应和仿真幅频响应符合性好,验证了该文提取COM参数方法的可行性,可用于指导SAW滤波器设计。     

SAW陀螺新型接收电极

该文在理论上分析了声表面波(SAW)陀螺中两列相向传播SAW形成的驻波在哥氏力作用下的相位分布及传播规律,设计出一种新型的接收电极.此电极能将陀螺效应激发的表面波同种电荷积累到一起,改进了原有电极中同根电极上正负相互抵消的缺点,增强了由陀螺效应激发出SAW的接收效率,本结果可对SAW陀螺的设计提供相关参考.     

Highly sensitive electrostatic voltage sensor on SAW double-waveguides

An electrostatic voltage sensor using two SAW oscillators based on SAW Delta v/v waveguides was constructed. The frequency difference between these two oscillators is proportional to the electrostatic voltage applied between the waveguides and special planar electrodes. The steepness of voltage-frequency characteristic as high as 1.32 kHz/V was obtained that provided a very high sensitivity, several orders of magnitude higher than in all SAW voltage sensors reported previously.<>     

A quasi-field equivalent circuit of an interdigital transducer of surface acoustic waves

A new equivalent circuit of a surface-acoustic-wave (SAW) interdigital transducer (IDT) is proposed. A method using this circuit for calculation of the device’s gain-frequency characteristic and impedance is described. The fingers of the transducer can be arbitrarily shaped and positioned. The electrode current is obtained via the rigorous calculation of the SAW-related charge in the piezoelectric substrate and of the charge induced by the former charge in the transducer electrodes. The method allows design of SAW devices with an arbitrary complex finger structure and a multilayer substrate.     

低频液体表面波衍射条纹的不对称性

为了对低频液体表面波衍射条纹强度及位置进行分析,用低频信号发生器驱动振子,产生稳定的液体表面波,一束激光照射液面,表面波对光形成了位相型光栅,产生了清晰的衍射图样.过中心沿水平方向对衍射图样进行线性扫描,得到了衍射条纹强度随位置的变化曲线及各级衍射条纹的中心位置及强度值,发现了衍射条纹强度及位置具有明显的不对称分布.理论上给出了衍射条纹强度与表面波之间的关系,并且对衍射条纹位置的近似条件及半角宽度进行分析,分别解释了在斜入射的情况下衍射条纹位置及强度的不对称分布.理论上推导出在垂直入射的情况下,衍射条纹的位置及强度是对称分布的.理论与实验结果比较吻合.     

声表面波器件小型化技术发展概述

以EPCOS生产的声表面波(SAW)芯片级封装和晶圆级封装为例,介绍了声表面波器件小型化发展的趋势.着重介绍了声表器件芯片级封装技术发展的各个阶段器件的结构特点.详述采用倒装、贴膜和晶圆键合技术将声表面波器件的尺寸减至最小及后续声表面波器件组件化封装的趋势.     

激光扫描探测声表面波特性

介绍一种新型的探测声表面波传输特性的测量技术.实现了各向异性晶体声表面波衍射场分布的一维扫描显示;二维扫描在电视屏上可对声表面波阵面直接成象,在此基础上求出了声表面波相速以及探测声表面波器件表面缺陷.     

低损耗、髙矩形度声表滤波器设计研究

针对高矩形度低损耗声表面波(SAW)滤波器的需求背景,对混合结构低损耗SAW滤波器的设计技术展开研究,通过建立混合结构滤波器模型,分析优化滤波器性能,成功研制出中心频率260 MHz,插入损耗为2dB,矩形系数优化1.6的声表滤波器,测试与仿真结果基本一致。     

New phase-shifting technique for group-type unidirectional transducers used in surface-acoustic-wave filters

The letter reports a novel method of phase shifting useful in the group type of unidirectional transducers used for the design of low-loss SAW filters. This technique utilises the thin-film capacitance present between the newly described configuration of the feed-electrode layers as an essential element of the required phase shifter. The stray capacitance existing between the feed electrodes is used to advantage. The theoretical and experimental results of one of the filters fabricated are presented.     

96 MHz锥形叉指宽带声表面波滤波器

介绍声表面波锥形叉指换能器的基本原理,采用折线电极锥形叉指换能器制作的TD-SCDMA制式用96MHz宽带滤波器,1dB带宽4.8MHz,15dB抑制小于6.4MHz,插入衰耗约12dB,封装为SMD(13.3mm×6.5mm)。     

激光激发源对声表面波的影响

利用激光激发声表面波及光差分技术研究激光源对声表面波的影响。实验中利用了Nd∶YAG脉冲激光器激发超声,采用632nm的He-Ne激光器基于光束偏转法的光差分检测系统,测量了铝样品表面的声表面波,获得了很好的信号。在此基础上研究了激发源的形状和能量对激发的声表面波幅度的影响。同时从热弹和融蚀机制下讨论激光声表面波的产生。在这两种机制下,声表面波的幅度发生了很大的变化。随着激光能量密度的增加,声表面波的幅度由线性变化转换为非线性变化。这一结果对激光激发声表面波理论研究有一定的指导意义。     

双通道声表面波转速传感器

以声表面波中的陀螺效应为理论基础,通过数值计算获得了LiNbO3基底上声表面波波速随基底转动速率的变化,以此为依据设计了一种双通道声表面波转速敏感结构,制作出双通道声表面波转速传感器。通过实验,该传感器的分辨率为12Hz/r.s-1。     

RF oscillator implementation using integrated CMOS surface acoustic wave resonators

This work is a proof of concept that a monolithic CMOS surface acoustic wave (SAW) resonator can function as an RF oscillator. The design of the oscillator includes the measurement characteristics of the CMOS SAW resonator, its matching networks, and RF amplifier is described. The integrated SAW resonator, with its operating frequency controlled by the spacing of its transducers was fabricated using a combination of CMOS plus post-CMOS processes. Based on the operation and performance of the SAW resonators, an equivalent circuit model of the CMOS SAW resonator was developed. A series resonant oscillator design was simulated using Microwave Office^TM. The designed matching network improves both the insertion losses and the phase slope of the resonator, while the RF amplifier provides sufficient gain to ensure oscillation. Measurements conducted on the RF-CMOS SAW oscillator demonstrated oscillation at 600 MHz.     

2 GHz宽带低损耗SAW滤波器的研制

利用射频电路模拟软件中构建的声表面波(SAW)低损耗滤波器设计工具,对S波段SAW滤波器的设计技术展开研究。通过建立集总参数模型,分析高频下封装效应对滤波器性能的影响,并成功研制出中心频率达2.2GHz,最小插入损耗为-3dB,相对带宽达到7%的SAW滤波器,测试与仿真结果基本一致。     

基于MSC双声路SAW器件的设计仿真平台

利用模块化设计思想,在Matlab编程环境下实现了基于多条耦合器双声路声表面波器件的设计仿真平台。为了提高MSC双声路SAW器件的性能,该平台将多条耦合器、分裂指及假指设计方案融合到器件设计中。多条耦合器不仅实现了两个变迹换能器传递函数的乘积,而且消除了体声波对器件性能的影响。假指消除了通过变迹换能器引起的波前畸变。分裂指可以最小化换能器内部的声波反射问题。通过一个频率为203.559MHz的基于多条耦合器双声路声表面波器件的设计和实际测试结果的对比分析,证明了该设计仿真平台不仅可以进行器件版图结构的设计和模拟,而且设计平台所得到的版图和数据可以用于器件的掩膜版制作和器件封装尺寸参考。另外,该仿真设计平台可以很好地实现对器件的脉冲特性、频率响应特性的模拟和仿真。     

Optimization of frequency characteristics for SAW device using apodization weighting method

To calibrate the tracing performance of the thirty meter telescope(TMT)tertiary mirror,for the special requirement of the TMT,the laser tracker is used to verify the motion.Firstly,the deviation is divided into two parts,namely,the repeatable error and the unrepeatable part.Then,based on the laser tracker,the mearturement and evalutation methods of the rigid body motion for the mirror are established,and the Monte Carol method is used to determine the accuracy of the mothod.Lastly,the mothod is applied to the turn table of a classical telescope and the residual error is about 4 arc second.The work of this paper will guide the next desgin and construction work of the thirty meter telescope tertiary mirror.