Preparation of La0.8Sr0.2Cr0.97V0.03O3 − δ films for solid oxide fuel cell application

La_0.8Sr_0.2Cr_0.97V_0.03O_3 − δ (LSC) is commonly studied as a ceramic interconnect material as well as a coating material for metallic interconnects for solid oxide fuel cell applications. However, it is difficult to sinter this type of material to high density. In order to overcome this problem and to study the material in form of a thin film we have used Pulsed Laser Deposition to obtain a dense, uniform film with the right stochiometry. Investigation of preparation-parameter dependence of the LSC films deposited on a stainless steel substrate during pulsed-laser deposition was carried out. The LSC films were deposited with KrF excimer laser (248 nm) on a stainless steel substrate at different oxygen pressure and substrate temperatures. The substrate temperature (873-1073 K) and the oxygen background pressure (5-20 Pa) were varied in order to obtain optimal growth conditions. The surface morphology and structural information of the films were obtained using scanning electron microscope (SEM) and X-ray diffraction, respectively. Under the optimal preparation-parameter conditions: substrate temperature of 1023 K and an oxygen pressure of 10 Pa the structure of the film agreed with the target structure and the SEM micrographs show that the surfaces are homogeneous, smooth, crack-free and dense.     

Electrical transport and structural study of CuCr1 − xMgxO2 delafossite thin films grown by pulsed laser deposition

The growth and properties of delafossites CuCr_1 − xMg_xO₂ thin films are examined. These films are grown by pulsed laser deposition. As a class of materials delafossites have received recent interest since some members show p-type behavior. While not considered true wide-bandgap materials due to a narrow indirect bandgap that fails to adsorb light due to a forbidden same parity transition, optical transparencies greater than 40% in the visible can be observed. In order to be useful for transparent device applications, CuCr_1 − xMg_xO₂ films are needed with low resistivity and high optical transparency. Epitaxial films of CuCr_1 − xMg_xO₂ were grown on c-sapphire, examining the effects of oxygen pressure and growth temperature on film properties. Films were realized with resistivity of ~ 0.02 Ω-cm and optical transparency of 40% in the visible. The formation of a problematic secondary minority spinel phase of (Cu,Mg)Cr₂O₄ is discussed. While conductivity increases substantially with Mg doping, the incidence of the spinel phase increases as well.     

Surface energy modification of SiOxCyHz film using PECVD by controlling the plasma processes for OMCTS (Si4O4C8H24) precursor

SiO_x films produced from octamethylycyclodisiloxane (Si₄O₄C₈H₂₄, OMCTS) with oxygen carrier gas have a low contact angle. The surface energy of the SiO_x films can be changed by controlling the plasma process. SiO_xC_yH_z films were deposited on polycarbonate substrates by plasma enhanced chemical vapor deposition using OMCTS without oxygen carrier gas. The input power in the radio frequency plasma was changed to optimize the surface energy of the resulting SiO_xC_yH_z film. The plasma diagnostics, surface energy and surface morphology were characterized by optical emission spectrometry, contact angle measurements and atomic force microscopy, respectively. The chemical properties of the coatings were examined by Fourier transform infrared spectroscopy. The surface energy of the SiO_xC_yH_z films produced using a room temperature plasma process could be controlled by employing the appropriate intensity of excited neutrals, ionized atoms, molecules and energy (input rf power and bias), as well as the suitable dissociation of OMCTS.     

Hot-wire chemical vapor deposition of WO3−x thin films of various oxygen contents

We present the synthesis of tungsten oxide (WO_3−x) thin films consisting of layers of varying oxygen content. Configurations of layered thin films comprised of W, W/WO_3−x, WO₃/W and WO₃/W/WO_3−x are obtained in a single continuous hot-wire chemical vapor deposition process using only ambient air and hydrogen. The air oxidizes resistively heated tungsten filaments and produces the tungsten oxide species, which deposit on a substrate and are subsequently reduced by the hydrogen. The reduction of tungsten oxides to oxides of lower oxygen content (suboxides) depends on the local water vapor pressure and temperature. In this work, the substrate temperature is either below 250 °C or is kept at 750 °C. A number of films are synthesized using a combined air/hydrogen flow at various total process pressures. Rutherford backscattering spectrometry is employed to measure the number of tungsten and oxygen atoms deposited, revealing the average atomic compositions and the oxygen profiles of the films. High-resolution scanning electron microscopy is performed to measure the physical thicknesses and display the internal morphologies of the films. The chemical structure and crystallinity are investigated with Raman spectroscopy and X-ray diffraction, respectively.     

Deposition of WNxCy thin films for diffusion barrier application using the dimethylhydrazido (2) tungsten complex (CH3CN)Cl4W(NNMe2)

Tungsten nitride carbide (WN_xC_y) thin films were deposited by chemical vapor deposition using the dimethylhydrazido (2⁻) tungsten complex (CH₃CN)Cl₄W(NNMe₂) (1) in benzonitrile with H₂ as a co-reactant in the temperature range 300 to 700 °C. Films were characterized using X-ray diffraction (XRD), Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy and four-point probe to determine film crystallinity, composition, atomic bonding, and electrical resistivity, respectively. The lowest temperature at which growth was observed from 1 was 300 °C. For deposition between 300 and 650 °C, AES measurements indicated the presence of W, C, N, and O in the deposited film. The films deposited below 550 °C were amorphous, while those deposited at and above 550 °C were nano-crystalline (average grain size < 70 Å). The films exhibited their lowest resistivity of 840 µΩ-cm for deposition at 300 °C. WN_xC_y films were tested for diffusion barrier quality by sputter coating the film with Cu, annealing the Cu/WN_xC_y/Si stack in vacuum, and performing AES depth profile and XRD measurement to detect evidence of copper diffusion. Films deposited at 350 and 400 °C (50 and 60 nm thickness, respectively) were able to prevent bulk Cu transport after vacuum annealing at 500 °C for 30 min.     

Characterizations of ferromagnetic Zn1−xCoxO thin films grown on Al2O3 (0001) by reactive radio-frequency magnetron sputtering coupled with post-growth annealing

High-quality ferromagnetic Zn_1−xCo_xO thin films were deposited on a sapphire (0001) substrate at 600 °C by using reactive radio-frequency magnetron sputtering coupled with post-annealing treatment for 1 h at 580 °C under an Ar atmosphere. High resolution X-ray diffraction patterns show that hexagonal wurzite crystal structures of undoped ZnO film were maintained even after Co doping up to 4.5 at.% without forming Co clusters or oxides. X-ray photoelectron spectroscopy spectra represent the energy difference of 15.42 eV between Co2p_3/2 and Co2p_1/2, which is different from 15.05 eV of Co clusters. The characteristic absorption bands near 658, 616, and 568 nm wavelengths out of UV-VIS-IR spectroscopy spectra are correlated with the d-d transitions of tetrahedrally coordinated Co²⁺ ions. The low temperature photoluminescence spectrum for undoped ZnO shows a strong near-band edge (NBE) emission peak of 3.42 eV without deep level emission peaks. But, Co content increases in Zn_1−xCo_xO film, the NBE emission peak intensity decreases and another emission peak at 3.37 eV as well as a broad green emission peak at around 2.5 eV starts to appear with larger intensity due to the more actively creating oxygen vacancies. The emission peak at 3.37 eV proves the interaction between Co ions and the hydrogenic electrons in the impurity band and also supports the typical ferromagnetic hysteresis curves obtained by superconducting quantum interface device magnetometry at 300 K for Zn_1−xCo_xO films. High insulator characteristics are observed for as-grown Zn_1−xCo_xO films whereas it exhibits n-type characteristics with the increased carrier concentration, mobility, and resistivity after post-growth annealing. The spintronic devices could be fabricated with the utilization of Zn_1−xCo_xO films grown by the economically feasible reactive radio-frequency magnetron sputtering coupled with the post annealing treatment.     

Luminescence of Cr-doped ZnGa2O4 thin films deposited by pulsed laser ablation

Chromium-doped zinc gallate powder is synthesized via a solid-state reaction and subsequently deposited as a thin film on quartz substrates by using a pulsed laser deposition technique under two different deposition conditions. The films are characterized with X-ray diffraction, scanning electron microscopy, UV-vis spectrophotometry and luminescent measurements. As the oxygen pressure is changed from 0 to 1 Pa, we find that the grain size gets smaller, the crystallinity improves, the band-gap energy increases, the excitation peaks of the charge transfer band exhibit a remarkable blue-shift from 263 to 247 nm and the intensity of the red emission (694 nm) is enhanced. The results suggest that the structural and luminescent properties of ZnGa₂O₄:Cr^3 + thin film phosphors are improved by deposition at an oxygen pressure of 1 Pa.     

Ion beam deposition of α-Ta films by nitrogen addition and improvement of diffusion barrier property

Ta thin films were deposited on Si (100) substrates by an ion beam deposition method at various substrate bias voltages under Ar + N₂ atmosphere with different pressure ratios of Ar and N₂. The effects of nitrogen pressure in the plasma gas and the substrate bias voltage on the surface morphology, crystalline microstructure, electrical resistivity and diffusion barrier property were investigated. It was found that the fraction of a metastable β-phase in the Ta film deposited at the substrate bias voltage of − 50 V films decreased by adding nitrogen gas, while the α-Ta phase became dominant. As a result, the Ta films deposited at the substrate bias voltage of − 50 V under Ar (9 Pa) + N₂ (3 Pa) atmosphere showed a dominant α-phase with good surface morphology, low resistivity, and superior thermal stability as a diffusion barrier.     

Preparation of Zr1−x AlxO2 by annealing of ZrOx/Al thin films in the air atmosphere

Preparation of Zr_1−xAl_xO₂ by annealing of ZrO_x/Al thin layers in the reactive medium is presented in this work. At first ZrO_x thin films were deposited by reactive cathodic arc evaporation. Cathodic arc evaporation is the most versatile PVD coating technology. The process uses arc evaporation to create highly ionized plasma. It allows the “droplets” to escape into the coating under special condition in the chamber. After complete analysis of the process of arc deposition, ZrO_x thin films with thickness of ∼600 nm were deposited on Al₂O₃ and quartz substrates. Using vaporization on ZrO_x thin films 10% mol of Al was deposited and these ZrO_x/Al thin films were annealed at 500–900 °C in the air medium. The Zr_0.9Al_0.1O₂ thin films with nanocrystallite and two phases, monoclinic and cubic, were produced using the above-mentioned technique. The structure and optical properties of films were investigated by XRD, ellipsometry, photospectometry, respectively.     

A study of atomic layer deposited LiAlxOy films on Mg-Li alloys

LiAl_xO_y films with thicknesses of 65-200 nm were deposited by the atomic layer deposition (ALD) technique on the LZ101 Mg-Li alloy. The ALD-deposited LiAl_xO_y films exhibit an amorphous structure and have an atomic ratios of Li:Al:O = 1:1:2. The potentio-dynamic polarization tests show that the corrosion resistance of Mg-Li alloys can be significantly improved due to the dense and pinhole-free structure as well as the excellent coverage and conformity of the ALD-deposited LiAl_xO_y films.     

Physical properties of transparent conducting Cd-Te-In-O thin films: Outlining a thermodynamic system for transparent conducting oxides

Cd-Te-In-O thin films are grown by pulsed laser deposition using a composite target of CdTe powder embedded in an indium matrix. Oxygen pressures range from 2.00 to 6.67 Pa at a substrate temperature of 420 °C. The structure, optical transmission and sheet resistance of the films are measured. Substitutional compounds with In_2 − 2x(Cd,Te)_2xO₃ stoichiometry are found at high oxygen pressures. A ternary phase diagram of the CdO-In₂O₃-TeO₂ system shows the relationship between the structure and the stoichiometry of the films. To evaluate film performance, a figure of merit is proposed based on the relationship between the integral photonic flux and the sheet resistance. The best figure of merit values corresponds to a sample prepared at 3.8 Pa O₂ that consists of (In₂O₃)_0.3(CdTe₂O₅)_0.7 and exhibits an optical band gap of 3.0 eV. This sample is a suitable substrate for electrodeposition due to its good electrochemical stability.     

Pulsed laser deposition of (WO3)1 − x(Nb2O5)x thin films: Characterization and gasochromic studies

A series of (WO₃)_{1 − x}(Nb₂O₅)_x (x = 0, 0.05, 0.1 and 0.15) mixed oxide films were fabricated by pulsed laser deposition (PLD) at 27 Pa oxygen partial pressure on ITO glass substrates. The thickness of the (WO₃)_{1 − x}(Nb₂O₅)_x thin films is about 350 ± 30 nm and their surface has a uniform morphology. A layer of platinum (Pt) was then sputtered onto the surface of the film. The hydrogen gas sensing performance of Pt catalyst activated (WO₃)_{1 − x}(Nb₂O₅)_x thin films were investigated. The cycling of the coloration was obtained from UV–vis spectra. Gasochromic coloration of (WO₃)_{1 − x}(Nb₂O₅)_x thin films were investigated at room temperature in H₂–N₂ mixtures containing 1–100 mol% of H₂. The results show that the shortest response time of (WO₃)_{1 − x}(Nb₂O₅)_x/Pt hydrogen sensor is within 30 s and the highest transmittance change (ΔT) varies from 20% to 30%.     

Microstructure and optical properties of MgxZn1−xO thin films grown by means of pulsed laser deposition

The single-phase epitaxial Mg_xZn_1−xO (0.4 < x < 0.9) alloy films with wide band gap have been deposited on cubic LaAlO₃ (LAO) (100) substrates by pulsed laser deposition (PLD). X-ray diffraction measurement and TEM photograph indicate that the cubic phase could be stabilized up to Zn content about 0.6 without any phase separation. Films and substrates have a good heteroepitaxial relationship of (100) _MgxZn1−xO||(100)_LAO (out-of-plane) and (011)_MgxZn1−xO||(010)_LAO (in-plane)_. The lattice parameters a of Mg_xZn_1−xO films increase almost linearly with increasing ZnO composition, while the band gap energy of the materials increases from 5.17 to 5.27 eV by alloying with more MgO. The cross-section morphology reveals layer thickness of about 250-300 nm and AFM scan over a 30 μm × 30 μm area reveals a surface roughness R_a of about 100 nm.     

Effects of ambient oxygen pressures and substrate temperatures in pulsed laser deposited Zn0.85Li0.15O thin films

Li doped zinc oxide Zn_1−xLi_xO (x = 0.15) thin films were grown by using the pulsed laser deposition method. The depositions were done onto Pt(111)/Ti/SiO₂/Si(100) substrate set at temperatures ranging from 300 °C to 700 °C, with varying the ambient O₂ pressure range of 3-20 mTorr. The effects of substrate temperatures and ambient O₂ pressures on the surface morphology and structural properties of the Zn_0.85Li_0.15O thin films were investigated by using the scanning probe microscopy and X-ray diffraction spectra, respectively. Also the chemical structures of the films were investigated by observing the X-ray photoelectron spectra of the core and shallower levels. We observed the deep blue PL emissions centered at about 390 nm (3.20 eV) from the Zn_0.85Li_0.15O thin films. It was investigated with respect to the ambient O₂ pressures during the deposition. It is considered that the deep blue PL emission in the Zn_0.85Li_0.15O thin film may be related to the incorporation of oxygen vacancies.     

Preparation of homogeneous VOX thin films by ion beam sputtering and annealing process

Polycrystalline VO_x thin films that were prepared for thermal-sensitive material of far infrared sensor had been deposited on Si substrates by ion beam sputtering deposition. Scanning electron microscopy images indicated that VO_x thin films (oxygen pressure of 1.5×10⁻³ Pa) were grown into compact and ultra-fine grains (?50 nm), the film surfaces seemed smooth and uniform. Four-point probe measurements showed that the homogeneity of the films was better than 98% in a size of 30×30 mm². The four-point probe measurement on hot plate presented the sheet resistance and the temperature coefficient of resistance of the VO_x thin film that were 50 kΩ/square and −0.021 K⁻¹ at 28°C, respectively. In addition, some samples annealed in Ar atmosphere had their resistance decreased. Thus, vanadium oxide films containing more amount VO₂ were obtained.     

Analysis of precursors for crystal growth of YBaCuO thin films in magnetron sputtering deposition

We correlated the crystallinity of YBaCuO films prepared by magnetron sputtering deposition using Ar/O₂ mixture gas with the atomic and molecular composition in the gas phase. YBaCuO films were deposited on MgO substrates at 670 °C. Two-dimensional distributions of Y, Ba, Cu, YO, BaO, and CuO densities and one-dimensional distribution of O density were measured by laser-induced fluorescence spectroscopy. The Y and Ba densities decreased significantly with the increase of the O₂ partial pressure, and they were below the detection limit at an O₂ flow ratio of 10% and a total gas pressure of 53 Pa. The decrease in the Y and Ba densities was compensated by an increase in the YO and BaO densities. The decrease in the Cu density with the increase of the O₂ partial pressure was less significant, while the CuO density was below the detection limit at all the discharge conditions. The O density was evaluated to be 10¹²-10¹³ cm^− 3, which was much higher than the Cu density. On the other hand, YBaCuO films with high crystallinity were obtained at total gas pressures of 53-80 Pa and O₂ flow ratios of 50-70%. Therefore, it is concluded that the precursors for the deposition of YBaCuO films with high crystallinity are Cu, YO, BaO, and O.     

Finestructures study of the diamond/titanium interface by transmission electron microscopy

It is well known that a TiC layer can be formed and should act as a buffer layer in diamond films deposited on Ti alloy. Through our cross-sectional investigation in HRTEM, a thin layer (20–30 nm) was first identified between the outermost diamond film and the inner reactive TiC layer adjacent to the substrate. This layer consists of numerous crystalline nanoparticles with grain sizes of 5–20 nm. Through electron nanodiffraction patterns combined with EDS and EELS analysis, these nanoparticles can be identified as a TiC_1−xO_x phase with a similar structure to cubic TiC. Besides, C atoms and O atoms in TiC_1−xO_x randomly occupy the vacancies of C in TiC. The thickness of this TiC_1−xO_x layer does not change significantly with increasing deposition time, and the diamond phase directly nucleates and grows on it.     

Nanoporous cluster-assembled WOx films prepared by radio-frequency assisted laser ablation

The influence of substrate temperature and ambient gas pressure-composition on the characteristics of WO_x films synthesized by radio-frequency assisted pulsed laser deposition (RF-PLD) are studied with the aim to obtain nanostructured films with large surface area that appear promising for gas sensing applications. A tungsten target was ablated both in chemically reactive molecular oxygen at 5 Pa and in a mixed oxygen-helium atmosphere at 700 Pa. Corning glass was used as the substrate, at 473, 673 and 873 K. Other deposition parameters such as laser fluence (4.5 J/cm²), laser wavelength (355 nm), radio-frequency power (150 W), and target to substrate distance (4 cm) were kept fixed. The sensitivity on the deposition parameters of roughness, morphology, nanostructure and bond coordination of the deposited films were analysed by atomic force microscopy, scanning electron microscopy, transmission electron microscopy and micro-Raman spectroscopy. The role of the investigated process parameters to nanoparticle formation and to the development of an extended nanostructure is discussed.     

The deposition and optical properties of Ge1−xCx thin film and infrared multilayer antireflection coatings

The effects of deposition parameters on the deposition rate, microstructure, and composition of Ge_1−xC_x thin films prepared by plasma enhanced chemical vapor deposition were studied and the films' infrared optical properties were investigated. The results show that the carbon content of these films increases as the precursor gas flow ratio of CH₄:GeH₄ increases, while the infrared refractive index of these films decreases from 4 to 2. The deposition rate increases with the radio-frequency power and reaches a constant value when the power goes above 60 W. Ge_1−xC_x/diamond-like carbon infrared antireflection coatings were prepared, and the transmittance of the coatings in the band of 8 to 14 μm was 88%, which is superior to that of Zinc Sulfide substrate by 14%.     

Characterization of ZnO-In2O3 transparent conducting films by pulsed laser deposition

Transparent conducting oxide (TCO) films in the ZnO-In₂O₃ system were prepared by a pulsed laser deposition method. A target that consists of the mixture of ZnO and In₂O₃ powders was used. Influences of the target composition x (x = [Zn]/([Zn] + [In])) and heater temperature on structural, electrical and optical properties of the TCO films were examined. Introduction of oxygen gas into the chamber during the deposition was necessary for improvement in the transparency of the deposited films. The amorphous phase was observed for a wide range of x = 0.20-0.60 at 110 °C. Minimum resistivity was 2.65 × 10⁻⁴ Ω cm at x = 0.20. The films that showed the minimum resistivity had an amorphous structure and the composition shifted toward larger x, as the substrate temperature increased. The films were enriched in indium compared to the target composition and the cationic In/Zn ratio increased as the substrate temperature was increased.