Systematic characterization of Cl2 reactive ion etchingfor improved ohmics in AlGaN/GaN HEMTs

Pre-metal-deposition reactive ion etching (RIE) was performed on an Al_0.3Ga_0.7N/AlN/GaN heterostructure in order to improve the metal-to-semiconductor contact resistance. An optimum AlGaN thickness for minimizing contact resistance was determined. An initial decrease in contact resistance with etching time was explained in terms of removal of an oxide surface layer and/or by an increase in tunnelling current with the decrease of the AlGaN thickness. The presence of a dissimilar surface layer was confirmed by an initial nonuniform etch depth rate. An increase in contact resistance for deeper etches was experienced. The increase was related to depletion of the two-dimensional (2-D) electron gas (2-DEG) under the ohmics. Etch depths were measured by atomic force microscopy (AFM). The contact resistance decreased from about 0.45 Ωmm for unetched ohmics to a minimum of 0.27 Ωmm for 70 Å etched ohmics. The initial thickness of the AlGaN layer was 250 Å. The decrease in contact resistance, without excessive complications on device processing, supports RIE etching as a viable solution to improve ohmic contact resistance in AlGaN/GaN HEMTs     

Computing hysteresis points of nonlinear equations depending on two parameters

A direct method is described for computing a hysteresis point (double turning point) corresponding to a cusp point of a system ofn nonlinear equations inn variables depending on two parameters. By addition of two equations a minimally extended system ofn+2 nonlinear equations is constructed for which the hysteresis point is an isolated solution. An efficient implementation of Newton's method is presented not requiring evaluations of second derivatives of the original problem. Two numerical examples show the efficiency of theQ-quadratically convergent method.     

A Convenient Synthesis of Some Coumarin Derivatives Using SnCl2 · 2H2O as Catalyst

Some substituted coumarins have been synthesized by von-Pechmann condensation using SnCl₂ · 2H₂O (10 mol %) as catalyst in ethanolic medium. The reactions are simple, easy in handling and environmentally benign.     

Schwingfestigkeit von Schraube‐Mutter‐Verbindungen

High cycle fatigue of bolted connections Extensive tests regarding the influences on the fatigue of bolt‐nut‐connections of preloading with torsion, of preloading with yielding, of loading with superimposed bending and of the tested lot are processed. These influences are not yet known according to VDI 2230. New testing devices were designed for these tests, which allow a far less expensive operation and may easily be used for bolts of diameters up to M100 and testing frequencies up to 1000 Hz. The validity of fatigue resistance according to VDI 2230 is specified with respect to the test results. The determined influence of the tested lots is unexpectedly high. The manufacturing process of bolts should be improved to minimize this influence.