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1.
Jeong-Soo Lee Yang-Kyu Choi Daewon Ha Balasubramanian S. Tsu-Jae King Bokor J. 《Electron Device Letters, IEEE》2003,24(3):186-188
The hydrogen annealing process has been used to improve surface roughness of the Si-fin in CMOS FinFETs for the first time. Hydrogen annealing was performed after Si-fin etch and before gate oxidation. As a result, increased saturation current with a lowered threshold voltage and a decreased low-frequency noise level over the entire range of drain current have been attained. The low-frequency noise characteristics indicate that the oxide trap density is reduced by a factor of 3 due to annealing. These results suggest that hydrogen annealing is very effective for improving device performance and for attaining a high-quality surface of the etched Si-fin. 相似文献
2.
Ha J.H. Kim S.W. Seol Y.S. Park H.K. Choi S.H. 《Semiconductor Manufacturing, IEEE Transactions on》1996,9(2):289-291
The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF 6/Ar mixtures. It was found that while the plug loading effect is independent of varying SF6/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology 相似文献
3.
4.
Anacardic acids, 6-pentadec(en)ylsalicylic acids isolated from the cashew Anacardium occidentale L. (Anacardiaceae) nut and apple, were found to possess preventive antioxidant activity while salicylic acid did not show this activity. These anacardic acids prevent generation of superoxide radicals by inhibiting xanthine oxidase (EC 1.1.3.22, Grade IV) without radical-scavenging activity. Notably, the inhibition kinetics of anacardic acids do not follow hyperbolic dependence of enzyme inhibition on inhibitor contents (Michaelis–Menten equation) but follow the Hill equation instead. Anacardic acid (C15:1) inhibited the soybean lipoxygenase-1 (EC 1.13.11.12, Type 1) catalyzed oxidation of linoleic acid with an IC50 of 6.8 μM. The inhibition is a slow and reversible reaction without residual enzyme activity. The inhibition kinetics indicate that anacardic acid (C15:1) is a competitive inhibitor and the inhibition constant, KI, was 2.8 μM. Anacardic acids act as antioxidants in a variety ways, including inhibition of various prooxidant enzymes involved in the production of the reactive oxygen species and chelate divalent metal ions such as Fe2+ or Cu2+, but do not quench reactive oxygen species. The C15-alkenyl side chain is largely associated with the activity. 相似文献
5.
Jong-Eun Ha 《International Journal of Control, Automation and Systems》2012,10(6):1240-1244
Sensor fusion of a camera and laser range finder is important for the autonomous navigation of mobile robots. Finding the transformation between the camera and laser range finder is the first necessary step for the fusion of information. Many algorithms have been proposed, but these tend to require many different steps in order to achieve reliable and accurate results. A calibration structure that has triangular hole on its plane is proposed for the extrinsic calibration of a camera and laser range finder. Locations of laser scan data that are invisible on the calibration plane can be determined using property on the proposed calibration structure. First, we classify the laser scan data into two groups where one is on the plane and the other is off the plane. Then, we determine the absolute location of the laser scan data on the plane through a search of the parameters of the line. Finally, we can establish 3D-3D correspondences between the camera and laser range finder. Extrinsic calibration between a camera and laser range finder is found using a conventional 3D-3D transformation computing algorithm. Keywords: Calibration k]camera k]extrinsic calibration k]laser range finder 相似文献
6.
Operation, system architectures, and physical Layer design considerations of distributed MAC protocols for UWB 总被引:2,自引:0,他引:2
Impulse-based ultra wideband (I-UWB) is an attractive radio technology for large ad hoc and sensor networks due to its robustness to harmful multipath effects, sub-centimeter ranging ability, simple hardware, and low radiated power. To scale to large sizes, networks often implement distributed medium access control (MAC) protocols. However, most MAC protocols for I-UWB are centralized, and they target small wireless personal area networks and cellular networks. We propose three distributed MAC protocols suitable for I-UWB. Two multichannel protocols, called multichannel pulse sense multiple access (M-PSMA) and multichannel ALOHA achieve high aggregate throughput. A busy-signal protocol, called busy-signal multiple access (BSMA), reduces the energy wasted from re-transmitted packets. This paper describes the three protocols in terms of the protocol's operation, the supporting system architecture, and the I-UWB physical layer. Physical layer simulations confirm the feasibility of implementing the proposed systems and also provide parameters for network simulations. Network simulations show that the throughput of M-PSMA exceeds that of a centralized time-division multiple-access protocol and that the energy efficiency of BSMA far surpasses that of other distributed protocols. 相似文献
7.
During the solidification of the AZ91D-alloys, the Al8(Mn, Fe)5 phase is generally precipitated in the melt in advance of the precipitation of the primary α-Mg. The basic principle for manufacturing AZ91D-alloy slurries for semi solid forming is to use the Al8(Mn, Fe)5 precipitates as the heterogeneous nucleation sites for primary α-Mg phases. Microscopic analysis for the location of the Al8(Mn, Fe)5 precipitate explains that the Al8(Mn, Fe)5 precipitate is the effective heterogeneous nucleation site for the primary α-Mg phase. It was also observed that increase of the Mn content in the melt and the cooling rate below to the solid/liquid two-phase region resulted in smaller and more globular primary α-Mg due to the increase of heterogeneous nucleation sites. It was found that the average α-Mg diameter grew as a function of t0.278, where t is the holding time at the solid/liquid two-phase region. This would be attributed to the Ostwald type ripening and coalescence between primary α-Mg phases. The cooling rate below to the solid/liquid two-phase region, Mn content in AZ91D alloy, and the holding time and temperature affected on the quality of slurry. 相似文献
8.
Chemical Processing of Nanostructured Cemented Carbide 总被引:1,自引:0,他引:1
Chemical processing is becoming a vital component in the economic development of advanced engineering materials. Our research group on chemical processing has been focussed on the development of process to produce nanophase cemented carbide. It is a much more direct route for making WC/Co than traditional processing methods, and offers the potential for lower cost production of novel materials with homogeneous nanophase microstructures and improved properties. This paper addresses the scientific and technical issues relating to the chemical processing of nanophase WC/Co composite powder and their sintering. 相似文献
9.
Ji Hyun Lee Ji Woong Kim Ha Rim Yang Seong-Won Song Song-Jae Lee Yeongha Jeon Anna Ju Narim Lee Min-Gu Kim Minjoo Kim Kyusang Hwang Jin Hwan Yoon Hyunbo Shim Sukmook Lee 《International journal of molecular sciences》2022,23(13)
Small-cell lung cancer (SCLC) is the most aggressive form of lung cancer and the leading cause of global cancer-related mortality. Despite the earlier identification of membrane-proximal cleavage of cell adhesion molecule 1 (CADM1) in cancers, the role of the membrane-bound fragment of CAMD1 (MF-CADM1) is yet to be clearly identified. In this study, we first isolated MF-CADM1-specific fully human single-chain variable fragments (scFvs) from the human synthetic scFv antibody library using the phage display technology. Following the selected scFv conversion to human immunoglobulin G1 (IgG1) scFv-Fc antibodies (K103.1–4), multiple characterization studies, including antibody cross-species reactivity, purity, production yield, and binding affinity, were verified. Finally, via intensive in vitro efficacy and toxicity evaluation studies, we identified K103.3 as a lead antibody that potently promotes the death of human SCLC cell lines, including NCI-H69, NCI-H146, and NCI-H187, by activated Jurkat T cells without severe endothelial toxicity. Taken together, these findings suggest that antibody-based targeting of MF-CADM1 may be an effective strategy to potentiate T cell-mediated SCLC death, and MF-CADM1 may be a novel potential therapeutic target in SCLC for antibody therapy. 相似文献
10.
Pia Stari
Jure Mravlje Miran Mozeti
Rok Zaplotnik Barbara etina Bati
Ita Junkar Katarina Vogel Miku 《International journal of molecular sciences》2022,23(13)
Cold plasma (CP) technology is a technique used to change chemical and morphological characteristics of the surface of various materials. It is a newly emerging technology in agriculture used for seed treatment with the potential of improving seed germination and yield of crops. Wheat seeds were treated with glow (direct) or afterglow (indirect) low-pressure radio-frequency oxygen plasma. Chemical characteristics of the seed surface were evaluated by XPS and FTIR analysis, changes in the morphology of the seed pericarp were analysed by SEM and AFM, and physiological characteristics of the seedlings were determined by germination tests, growth studies, and the evaluation of α-amylase activity. Changes in seed wettability were also studied, mainly in correlation with functionalization of the seed surface and oxidation of lipid molecules. Only prolonged direct CP treatment resulted in altered morphology of the seed pericarp and increased its roughness. The degree of functionalization is more evident in direct compared to indirect CP treatment. CP treatment slowed the germination of seedlings, decreased the activity of α-amylase in seeds after imbibition, and affected the root system of seedlings. 相似文献