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1.
Cresswell M.W. Allen R.A. Guthrie W.F. Sniegowski J.J. Ghoshtagore R.N. Linholm L.W. 《Semiconductor Manufacturing, IEEE Transactions on》1998,11(2):182-193
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of monocrystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are electrically insulated from the bulk-silicon substrate by a layer of silicon dioxide provided by SIMOX (Separation by the IMplantation of OXygen) processing. The motivation is to facilitate the development of linewidth reference materials for critical-dimension (CD) metrology-instrument calibration. The selection of the (110) orientation of the starting silicon and the orientation of the structures' features relative to the crystal lattice enable a lattice-plane-selective etch to generate reference-feature properties of rectangular cross section and atomically planar sidewalls. These properties are highly desirable for CD applications in which feature widths are certified with nanometer-level uncertainty for use by a diverse range of CD instruments. End applications include the development and calibration of new generations of CD instruments directed at controlling processes for manufacturing devices having sub-quarter-micrometer features 相似文献
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Christina Dirk‐Faitakis D Grant Allen 《Journal of chemical technology and biotechnology (Oxford, Oxfordshire : 1986)》2005,80(7):737-745
This paper describes the development and simulation of an unsteady state biofilter model used to predict dynamic behaviour of cyclically‐operated biofilters and compares it with experimental results obtained from three, parallel, bench‐scale biofilters treating both periodically fluctuating concentrations and constant concentrations of an α‐pinene‐laden gas stream. The dynamic model, using kinetic parameters estimated from the constant concentration biofilter, was able to predict the performance of cyclic biofilters operating at short cycle periods (ie, in the order of minutes and hours). Steady state kinetic data from a constant concentration biofilter can be used to predict unsteady state biofilter operation. At a 24 h cycle period, the dynamic model compared well with experimental results. For long cycle periods (ie, hours and days), removal efficiency decreased after periods of non‐loading: the longer the period of non‐loading, the poorer the biofilter's performance at the re‐commencement of pollutant loading. At longer time scales the model did not effectively predict transient behaviour, as adsorption and changes in kinetic parameters were not accounted for. Modelling results showed that similar biofiltration performance for the cyclic and constant concentration biofiltration of α‐pinene is expected for biofilters operating solely in the first order kinetics regime. Poorer performance for cyclic biofilters following Monod kinetics spanning the entire kinetics range is expected as the cycle amplitude increases. The most important parameters affecting the performance of a cyclically‐operated biofilter with short cycle periods are: amplitude of cyclic fluctuations, Cg, max/Cg, relative value of the half‐saturation constant in the Monod expression, Ks, and effective diffusivity of α‐pinene in the biofilm, De. Copyright © 2005 Society of Chemical Industry 相似文献
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This study reports on a multivariate analysis of the moving bed biofilm reactor (MBBR) wastewater treatment system at a Canadian pulp mill. The modelling approach involved a data overview by principal component analysis (PCA) followed by partial least squares (PLS) modelling with the objective of explaining and predicting changes in the BOD output of the reactor. Over two years of data with 87 process measurements were used to build the models. Variables were collected from the MBBR control scheme as well as upstream in the bleach plant and in digestion. To account for process dynamics, a variable lagging approach was used for variables with significant temporal correlations. It was found that wood type pulped at the mill was a significant variable governing reactor performance. Other important variables included flow parameters, faults in the temperature or pH control of the reactor, and some potential indirect indicators of biomass activity (residual nitrogen and pH out). The most predictive model was found to have an RMSEP value of 606 kgBOD/d, representing a 14.5% average error. This was a good fit, given the measurement error of the BOD test. Overall, the statistical approach was effective in describing and predicting MBBR treatment performance. 相似文献
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A rapid and convenient method for the measurement of bicarbonate, carbonate, or carbon dioxide in water was developed using fourier transform infrared spectroscopy (FTIR). Bicarbonate and carbonate are converted to carbon dioxide by lowering the pH of the solution, then the absorbance of the dissolved carbon dioxide at 2345 wavenumbers is measured using a liquid sample cell. If the measurement of dissolved carbon dioxide is the objective, the pH is not adjusted, and the carbon dioxide in the free form can be measured without interference from low levels of carbonates. The method is linear from 10.48 ppm to a minimum of 366.8 ppm carbon dioxide (r squared = 0.9996). The coefficient of variation at 10.48 ppm (LOD 3 signal/noise), 52.4 ppm, and 262 ppm is 45.6, 4.0, and 3.9, respectively. The average percent recovery at 10.48 ppm, 52.4 ppm, and 262 ppm is 74.5, 104.2, and 104.0, respectively. 相似文献
8.
Stephen J. Allen Pauline A. Brown 《Journal of chemical technology and biotechnology (Oxford, Oxfordshire : 1986)》1995,62(1):17-24
The adsorption of the three metal ions, copper, cadmium and zinc in single component and multi-component mixtures in aqueous solutions by lignite is reported. A comparison is made between the single component saturation uptake and the multi-component uptakes. The isotherms indicate a competitive uptake with copper being preferentially absorbed by the lignite in multi-component solutions. The isotherms are plotted to obtain the Langmuir constants, the Freundlich constants and the Redlich–Peterson constants. Lignite is shown to possess an affinity for the metal ions which make its use as an adsorbent a possible alternative to the use of more expensive activated carbons. 相似文献
9.
The effects of α‐form and β‐form nuclei on polymorphic morphology of poly(butylene adipate) (PBA) upon recrystallization from the molten state up to various Tmax values were examined by differential scanning calorimetry (DSC), wide‐angle X‐ray diffraction (WAXD) and polarized light microscopy (PLM). In this study, PBA with complex melting and polymorphism behaviour was used as a model for examining different types and extents of residual nuclei. As the PBA initially containing the sole α‐crystal was brought to a molten state of various Tmax, the extents of trace α‐form crystal nuclei varied and were dependent on Tmax. Furthermore, it did not matter whether, initially, the PBA contained α‐ or β‐form crystals (or both) because only a single type of α‐nuclei could be left upon treatment to the molten liquid state at Tmax. Therefore, only the α‐crystal in PBA had ‘memory capacity’ in the molten liquid state while the β‐crystal did not. This was so because the latter had been completely transformed into the solid state prior to being heated into a liquid. PBA crystallized before α‐nuclei could be packed into α‐crystal, regardless of the crystallization temperature (Tc). For recrystallization from molten PBA without any nuclei, the crystalline polymorphism was correspondingly influenced by Tc. Copyright © 2005 Society of Chemical Industry 相似文献
10.
Allen M. Johnson Michael A. Schoenfelder David J. Lebold 《Quality and Reliability Engineering International》1993,9(1):55-62
The Rainbow net simulation technique is applied to modelling the impact of system load and fault handling on the availability of a fault-tolerant multiprocessor architecture. Rainbow nets are described along with the motivation for creating this modelling technique. A Rainbow net fault-handling model is created for the fault-tolerant multiprocessor architecture and the topology is shown to remain constant in size, independent of the number of processor, memory and I/O elements configured in the system. Simulation is performed with a varying load in terms of the number of active jobs the system must support. Results are given showing how the fault-tolerant capability varies with load. Two new metrics for evaluating fault tolerance are introduced; namely full fault-tolerability and partial fault-tolerability. They are based on simple observations in the model. 相似文献