Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Evaluation of performance enhancing proxies in internet over satellite

Performance enhancing proxies (PEPs) are widely used to improve the performance of TCP over high delay‐bandwidth product links and links with high error probability. In this paper we analyse the performance of using TCP connection splitting in combination with web caching via traces obtained from a commercial satellite system. We examine the resulting performance gain under different scenarios, including the effect of caching, congestion, random loss and file sizes. We show, via analysing our measurements, that the performance gain from using splitting is highly sensitive to random losses and the number of simultaneous connections, and that such sensitivity is alleviated by caching. On the other hand, the use of a splitting proxy enhances the value of web caching in that cache hits result in much more significant performance improvement over cache misses when TCP splitting is used. We also compare the performance of using different versions of HTTP in such a system. Copyright © 2003 John Wiley & Sons, Ltd.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

Computerized facility layout design

The paper describes a computerized facility layout designer, COMLAD II, for plant layout development. Besides developing an efficient layout, COMLAD II has useful features which allow fixing the departments, changing the shape of the departments and changing the length and width dimensions of the overall layout.     

Complete mobile email management

Years have lapsed since the inauguration of the first Wireless Application Protocol (WAP) application. One of the main reasons for the lukewarm response so far may be attributed to the lack of a “Killer” application. Many companies and developers have attempted to replicate email services (an Internet Killer appplication) within the WAP realm, but till now, no significant success has been reported. This paper will first discuss on the key functions which are lacking in the present WAP-email service, and which are arguably necessary if a much larger user base is to be attracted to these services. A new system will be proposed which can enable the user to send files residing in a remote personal computer (PC) as attachments to his emails using WAP-enabled mobile devices. The implementation of the system will be presented in details. Issue relating to the connection to various types of email servers and the security of the system will also be addressed in the paper.     

Interaction bounds in multivariable control systems

Time-domain limitations due to right half-plane zeros and poles in linear multivariable control systems are studied. Lower bounds on the interaction are derived. They show not only how the location of zeros and poles are critical in multivariable systems, but also how the zero and pole directions influence the performance. The results are illustrated on the quadruple-tank process, which is a new multivariable laboratory process.