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191.
Ha J.H. Kim S.W. Seol Y.S. Park H.K. Choi S.H. 《Semiconductor Manufacturing, IEEE Transactions on》1996,9(2):289-291
The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF 6/Ar mixtures. It was found that while the plug loading effect is independent of varying SF6/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology 相似文献
192.
The growth structure of MgF2 and NdF3 films grown on polished CaF2(111) substrates deposited by molecular beam deposition has been investigated using transmission electron microscopy (TEM) of microfractographical and surface replications as well as cross-sectional TEM, atomic force microscopy, packing density, and absorption measurements. It has been shown that by taking advantage of ultrahigh vacuum environments and a special stratification property of MgF2 and NdF3 films, the preparation of nanocrystalline films of high packing density and low optical absorption is possible at a substrate temperature of 425 K. 相似文献
193.
The adoption of asymmetrical digital subscriber lines (ADSL) technology in conjunction with the broadcast digital subscriber lines (BDSL) proposed in this paper could provide a cost effective solution for the introduction of digital video services in the near term. BDSL provides the same digital broadcast video programs to all subscribers through existing twisted pair telephone loops. In this paper, the basics of telephone loop-based digital subscriber lines are first discussed. Then the potential of BDSL is explored in the twisted pair loop plant near end crosstalk (NEXT), far end crosstalk (FEXT), and white noise environment. The capability of BDSL is examined with different serving areas and transmit power levels. The possibility of using orthogonal quadrature amplitude modulation (QAM) to implement a zero guard-band BDSL system is studied. Computer BDSL performance simulations are then presented. The combination of high-bit-rate digital subscriber lines (HDSL), ADSL, and BDSL can provide telephone subscribers many digital broadband services 相似文献
194.
Ferdinand P. Ferragu O. Lechien J.L. Lescop B. Magne S. Marty V. Rougeault S. Kotrotsios G. Neuman V. Depeursinge Y. Michel J.B. Van Uffelen M. Varelas D. Berthou H. Pierre G. Renouf C. Jarret B. Verbandt Y. Stevens W. Voet M.R.H. Toscano D. 《Lightwave Technology, Journal of》1995,13(7):1303-1313
Recent developments of stability control in mines, essentially based on Ge-doped fiber Bragg gratings (FBG) are reported including results about the different aspects of the system: accurate characterizations of FBG, sensor network topology and multiplexing method, user interface design and sensor packaging 相似文献
195.
Composite chiral materials are realized by embedding large numbers of handed inclusions within a host material. A computational methodology is presented whereby the effective constitutive parameters of artificial chiral materials are computed while accounting for all self and mutual interactions among the inclusions. This technique combines a full-wave, Monte-Carlo scattering solution for randomly oriented inclusions together with an analytical solution for the scattering by a canonically-shaped body having a properly chosen constitutive model. It is believed that the effective constitutive parameters shown in this paper are the first full-wave computation of these quantities to appear in the literature 相似文献
196.
197.
198.
W. Claeys V. Quintard S. Dilhaire D. Lewis Y. Danto 《Quality and Reliability Engineering International》1994,10(4):289-295
We have recently developed an optical contactless method for testing the quality of solder joints during accelerated thermal cycling ageing processes.1 The method was based upon the measurement of the dynamic thermal behaviour of the joint to short bursts of Joule heating. It has proved to be efficient in revealing the formation of cracks at the lead-solder interface. We present a method to evaluate ageing at a much earlier stage in the cycling process. We have observed in earlier work,1 that before cracks appear, structural changes occur in the solder at the lead-solder interface. The thermal response of the solder joint is recorded over time to a Peltier heat perturbation produced by flowing a current pulse through the interface where structural changes occur. The key point in this method is to discriminate the Peltier effect from the Joule thermal response because both effects generate heat. The variation of the early Peltier response in the thermal cycling ageing tests is seen as a quantitative signature of the structural changes in the lead-solder interface. 相似文献
199.
Chen L.R. Benjamin S.D. Smith P.W.E. Sipe J.E. 《Quantum Electronics, IEEE Journal of》1998,34(11):2117-2129
We discuss theoretical and experimental studies on the propagation of ultrashort pulses through fiber Bragg gratings. We also consider several applications in optical communications to be found by combining ultrashort pulses and fiber Bragg gratings: a multiwavelength source for wavelength-division-multiplexed systems and a means for implementing optical code-division multiple access 相似文献
200.
Low-temperature-grown GaAs (LT-GaAs) is a promising material for all-optical switching devices due to its outstanding optical characteristics. In this paper, we outline a simplified model we have developed to describe the dynamics of the carriers in this material. We also report the results of a series of measurements that we have performed to characterize the optical properties of the material. Specifically, we present the first measurements of the two-photon absorption coefficient and the refractive index changes as a function of the growth and annealing temperatures in LT-GaAs. Finally, we show how our model can be used to optimize the material for applications in all-optical switching 相似文献