A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication

The defect of process equipments is a major factor that impairs the yields in the mass production of semiconductor wafer fabrication and it is a main supervision means to use high-resolution defect inspection tools to detect and monitor the defect damage. Due to the high investment costs of these inspection tools and the resulting decrease in the throughput, how to improve the sampling rate is an important issue for the associated inspection strategy. This paper proposes a new concept and implementation of virtual inspection (VI) to enhance the detection and monitoring of defect in semiconductor production process. The underlying theory of the VI concept is that the state variables identifications (SVIDs) of process equipments can reflect the process quality effectively and loyally. The approach of VI is to combine the application of the fault detection and classification (FDC), and the defect library and the re-engineering of inspection procedure to reach the full-scope of strategic objective. VI enables the defect monitoring to enter a new era by promoting the monitoring level of defect inspection from the previous lot-sampling basis to the wafer-sampling level, and hence upgrades the sampling strategy from random-sampling to full and right-sampling. In this study, various typical defect cases are utilized to illustrate how to create VI models and verify the reliability of the proposed approach. Furthermore, a feasible architecture of the VI implementation for mass production in semiconductor factory is presented in the paper.     

有限长度LDPC码一种速率兼容删余算法

提出一种AWGN信道下有限长度RC-LDPC码的删余算法,该算法对规则及非规则LDPC码均有效。该删余算法基于一系列准则,其中一个重要准则是某个候选删除节点的具有低的近似环外消息度(ACE)的短环的数量。仿真结果表明,ACE对删余码的性能有很大的影响,该算法的性能比已有算法有进一步提高。     

A New Medical Image Enhancement Based on Human Visual Characteristics

Study of image enhancement shows that the quality of image heavily relies on human visual system. In this paper, we apply this fact effectively to design a new image enhancement method for medical images that improves the detail regions. First, the eye region of interest （ROI） is segmented; then the Un-sharp Masking （USM） is used to enhance the detail regions. Experiments show that the proposed method can effectively improve the accuracy of medical image enhancement and has a significant effect.     

Stability analysis of networked control systems with time-varying sampling periods

In this paper, we present an interval model of networked control systems with time-varying sampling periods and time-varying network-induced delays and discuss the problem of stability of networked control systems using Lyapunov stability theory. A sufficient stability condition is obtained by solving a set of linear matrix inequalities. In the end, the illustrative example demonstrates the correctness and effectiveness of the proposed approach.     

LIGA技术及其在制造可动微结构件中的应用

介绍了将LIGA技术及其与牺牲层技术相结合 ,制造可动微结构的工艺方法。并给出了可实现摆动、转动的可动微结构———微执行器、微传感器和三维加速度传感器的制造过程等应用实例     

应用遥编程的大时延遥操作技术

如何克服通信线路中的大时延和有限带宽,是空间遥机器人面临的最重要的一个问题．本文 阐述了应用遥编程技术提高大时延遥操作的稳定性和操作精度的基本思想．提出了一种将操 作区分段,采取复合控制策略的遥操作方法．同时介绍了基于遥编程概念的遥操作实验系统 的设计及其试验结果．     

Polycrystalline diamond MESFETs by Au-mask technology for RF applications

Metal-semiconductor field effect transistors (MESFETs) were fabricated on H-terminated polycrystalline diamond.The DC characteristics of the p-channel MESFET showed a maximum drain current density of 204 mA/mm at a gate-source voltage of 6 V,and a maximum transconductance of 20 mS/mm at a gate-source voltage of 1.5 V.The small signal S-parameters of MESFET with 2 100 m gate width and 2 m gate length were measured.An extrinsic cut-off frequency (fT) of 1.7 GHz and the maximum oscillation frequency (fmax) of 2.5 GHz were obtained,which was the first report on diamond MESFETs with RF characteristics in China.     

The aeroelastic effects on the scatter phenomenon of wind-tunnel data

The unsteady Reynolds-averaged Navier-Stokes equations coupled with the k SST turbulence model are solved to obtain the steady and unsteady aerodynamic forces for airfoils and wings.The effects of vibration types and amplitudes on aerodynamic forces of airfoils and wings are studied.The deformation characteristics of a swept wing induced by steady aerodynamic load are presented.It is found that for a vibrating elastic wing at small and medium incidences,its mean aerodynamic loads are almost the same as those obtained from the static one.On the contrary,at high incidences especially around the stall incidence,the vibration may change the mean values.In addition,the larger amplitude is,the larger discrepancy will be.For a swept wing,the steady aerodynamic loads usually lead to the "pitching down" effect on the wing tip which delays the stall compared with a rigid one;But this phenomenon dose not occur on a aeroelastic wing which can induce the separation ahead and trigger the stall.The above conclusions are in good agreement with the scatter characteristics of wind-tunnel data.The reason why the data obtained from wind tunnel and CFD are different is also analyzed.Meanwhile,it can be an explanation for scatter phenomenon of wind-tunnel data,especially for high incidence cases,which remains a puzzle so far.     

金属表面脏污区域的分割和量化算法研究

针对目前金属表面缺陷检测技术的研究现状,主要研究金属表面脏污检测与量化算法。结合金属表面的特点,通过对几种分割方法的比较,研究了阈值分割法中的迭代法对图像进行分割,该算法能够最大限度地保留细节信息。另外,研究了一种改进的自适应滤波算法结合像素计数法对金属表面的脏污区域进行量化处理。实验结果证明了所提出方法的有效性。