Impact of Al in Cu alloy interconnects on electro and stress migration reliabilities

The reliability of Cu interconnects was successfully improved by applying a CuAl alloy seed. However, the effect of additive Al on the reliability is not fully understood. In order to reveal the reliability improvement mechanism, Cu films using CuAl alloy seed were investigated in detail. As stress induced voiding (SIV) as well as electromigration is caused by migration of vacancies and/or Cu atoms, the measured activation energy value of electromigration using CuAl indicates that the fast diffusion paths are Cu grain boundaries. The analysis using high lateral resolution scanning type secondary ion mass spectrometry (nano-SIMS) clarifies that additive Al in ECP-Cu film is mainly localized at grain boundaries. Furthermore, positron annihilation was used to probe vacancy-type defects in Cu films. The CuAl films before recrystallization contain larger and higher density vacancy-type defects. Whereas, the recrystallized CuAl films after annealing above 250 °C contain smaller and lower density defects. Furthermore, CuAl films with annealing above 350 °C contain less Al inside the grains. These results represent that Al atoms in Cu films with annealing above 350 °C are exhausted from inside grains to the grain boundaries, and the spewed Al atoms existing at Cu grain boundary effectively prevents the diffusion of Cu and/or vacancies.     

Generation mechanism and prevention method of secondary molybdate phase during vitrification of PUREX wastes in liquid-fed ceramic melter

ABSTRACT

In order to develop a glass production method that inhibits formation of the Mo-bearing secondary phase, the so-called yellow phase (YP), and also to clarify its formation behavior, vitrification tests using a small-scale liquid-fed ceramic melter (LFCM) were conducted. Chemically simulated PUREX liquid waste containing Na, Mo and other fission elements was fed into a molten glass pool in the melter together with several sizes of feed glass. When the glass beads with a diameter of around 2 mm were fed, some YP was contained in the vitrified glass products at 25 wt% waste loading. While, almost no YP was detected in the glass products when glass powder with a diameter of less than 63 μm was used. The microscopic analysis of the cold-cap samples revealed that powderization of the feed glass contributed to the facilitation of Na dissolution to the feed glass in the cold-cap. This quick intake of Na to the feed glass prevented the formation of liquid Na₂MoO₄ aggregation and provided homogeneous Mo dispersion in the cold-cap with forms of alkali earth and/or rare earth molybdates. The homogeneous dispersion of Mo resulted in the fast and complete dissolution of Mo in the glass melt.     

Development of RF magnetron sputtering method to fabricate PZT thin film actuator

PZT piezoelectric very thin films suitable for a microactuator have been deposited onto Invar alloy substrate using a high-temperature RF magnetron sputtering technique. PZT thin films must be deposited onto conductive substrate for a monomorph or a bimorph actuator. The chemical composition and the crystalline structure of these films were measured by ESCA and XRD, respectively. The chemical composition of PZT deposited stoichiometrically was almost the same as commercially-produced bulk PZT. Crystal planes (1 1 0) and (1 1 1) of PZT perovskite structure were observed in XRD analysis. When the substrate was heated to above 600 °C, SEM revealed only a very small number of pinholes on the surface. A thin (500 nm) film actuator has been characterized by measuring the piezoelectric property using a Laser Doppler Vibrograph. It was confirmed that the piezoelectric property has a linear relationship with the grain size, which also increased with the substrate temperature. The piezoelectric property of deposited PZT thin films showed a good agreement with a quoted value of bulk PZT, when the substrates were heated to 600 °C.     

Peak assignments of ELNES and XANES using overlap population diagrams

The usefulness of overlap population (OP) diagrams for peak assignments of an electron energy loss near-edge structure (ELNES) and an X-ray absorption near-edge structure (XANES) is demonstrated. Mg-K, L(2,3), and O-K edges of MgO are taken as examples. Theoretical calculations are performed using a first-principles orthogonalized linear combination of atomic orbitals (OLCAO) method. A core-hole is included explicitly, and a large supercell is used to minimize artificial interactions among the core-holes in adjacent cells. All experimental spectra are quantitatively reproduced by the calculations. The OP diagrams for a selected pair of atomic orbitals are computed in order to provide proper assignments for each peak in ELNES and XANES. They are interpreted in terms of interactions among Mg-Mg and Mg-O bonds. Results are found to be consistent to our previous conclusion, which was obtained using a cluster method [T. Mizoguchi, et al., Phys. Rev. B 61 (2000) 2180]. The powerful combination of the OP diagram and a high-energy resolution ELNES to obtain fine electronic structures is also demonstrated.     

Closest-point projection method for the extended subloading surface model

This paper presents an implicit integration scheme based on the closest-point projection method for an unconventional plasticity model, the extended subloading surface model. A cutting-plane algorithm has already been formulated for the model. However, the present paper aims to introduce an alternative closest-projection return mapping scheme for resolving the elasto-plastic problem by improving the accuracy of the similarity center variable. Numerical examples are examined for monotonic and cyclic loading conditions to validate the results against a forward Euler method. The speed and accuracy of the resolution technique are determined, showing the local and global convergence rates and the iso-error map for the numerical algorithm.     

Generation of Effective Field Gradient and Spin Current by a Flow of Liquid Helium-3

Journal of Low Temperature Physics - The coupling of spin angular momentum and mechanical rotation is utilized for generating a spin current of nuclear spins of the liquid helium-3. A hydrodynamic...     

Synthesis and Sintering of Cerium(II) Monosulfide

Cerium monosulfide (CeS) powder was synthesized by the reduction of Ce₂S₃ powder with metallic Ce, which was obtained from ceria (CeO₂) powder using carbon disulfide (CS₂) gas. To obtain the maximum amount of CeS from a mixture of Ce₂S₃ and Ce, an excess amount of metallic Ce, a stoichiometric composition, was necessary in the synthesis at 1273 K for 10.8 ks. The preliminary sintering experiments also were performed using a synthetic CeS powder containing a small amount of Ce, Ce₂O₂S, and β-Ce₂S₃ as impurities. It was found that the oxygen content in the sintered compact decreases gradually as the sintering temperature increases, because of the removal of the impurities due to the evaporation of the volatile CeO. Single-phase CeS was formed by sintering at 2173 K. To evaluate the activation energy for densification of single-phase CeS, a CeS powder was prepared by milling an initial sintered compact and was used as an ingredient for hot-press experiments. Densification data during hot-press sintering were analyzed using a kinetic equation, showing that boundary diffusion is a rate-limiting process. The results suggest that this boundary diffusion model can explain well the densification data, with an apparent activation energy of 479 kJ·mol^-1.     

Dietary conjugated linolenic acid in relation to CLA differently modifies body fat mass and serum and liver lipid levels in rats

The present study compared the effect of dietary conjugated linolenic acid (CLNA) on body fat and serum and liver lipid levels with that of CLA in rats. FFA rich in linoleic acid, α-linolenic acid, CLA, or CLNA were used as experimental fats. Male Sprague-Dawley rats (4 wk old) were fed purified diets containing 1% of one of these experimental fats. After 4 wk of feeding, adipose tissue weights, serum and liver lipid concentrations, serum tumor necrosis factor (TNF)-α and leptin levels, and hepatic β-oxidation activities were measured. Compared with linoleic acid, CLA and, more potently, CLNA were found to reduce perirenal adipose tissue weight. The same trend was observed in the weight of epididymal adipose tissue. CLNA, but not CLA, was found to significantly increase serum and liver IG concentrations. Serum FFA concentration was also increased in the CLNA group more than in the other groups. The activity of β-oxidation in liver mitochondria and peroxisomes was significantly higher in the CLNA group than in the other groups. Thus, the amount of liver TG exceeded the ability of hepatic β-oxidation. Significant positive correlation was found between the adipose tissue weights and serum leptin levels in all animals (vs. perirenal: r=0.557, P<0.001; vs. epididymal: r=0.405, P<0.05). A less significant correlation was found between adipose tissue weights and serum TNF-α level (vs. perirenal: r=0.069, P<0.1; vs. epididymal: r=0.382, P<0.05). Although the mechanism for the specific effect of CLNA is not clear at present, these findings indicate that in rats CLNA modulated the body fat and TG metabolism differently from CLA.     

Wettability of a microgrid‐structured polymer film with microfabrication utilizing the stick–slip phenomenon

A microgrid structure was formed on the surface of a polyethylene terephthalate (PET) film with an original microfabrication method (termed SS processing) utilizing the stick–slip (SS) phenomenon, and the effect of this surface structure on wettability was evaluated. Microgrid‐structured films could be fabricated by two‐axis SS processing. Moreover, an arbitrary parallelogram microgrid structure could be formed by selecting the direction of the second SS processing with respect to that of the first SS processing. Both water contact angle and water sliding angle of the SS‐processed film were larger than that of the PET film. Hence, the SS‐processed film showed a petal‐like effect. Furthermore, the water sliding angle of the microgrid‐structured film showed anisotropy due to the pinning effect derived from the microgrid structure. As a result, it is revealed that a hydrophobic PET film with a petal‐like effect and anisotropic wettability can be fabricated by SS processing. © 2017 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2017 , 134, 45140.