Properties of reactively sputtered IrOx for PZT electrode applications

Abstract

The use of IrO_x for electrodes in PbZr_xTi_1?xO₃ (PZT) capacitors for ferroelectric memory applications has proven to be advantageous in several respects. In comparison with Pt, IrO_x often exhibits improved fatigue and provides resistance to hydrogen induced degradation at elevated temperatures. Since IrO_x is often produced by sputtering in an oxygen containing environment, several forms of IrO_x can be produced depending on the process conditions. This work concentrates on an analysis of the DC reactive sputtering of IrO_x from an Ir metal target. As with other oxidizable metals, Ir exhibits a transition between metal and oxide mode sputtering when sputtered in oxygen containing atmospheres. Variations in the Ar/O₂ gas flow ratio were used to produce Ir and IrO_xfilms on both sides of the metal-to-oxide mode reactive sputtering transition. Changes in the IrO_x film properties were quantified by using a combination of metrics including X-ray diffraction, sheet resistance, and stress. It was found that the, IrO_x crystalline structure and other IrO_x properties could be directly related to the ferroelectric switching performance of PZT capacitors with IrO_xtop electrodes. A relationship between IrO_x deposition processes and resistance to etch induced damage of the ferroelectric properties was also observed.     

Influence of separated vortex on aerodynamic noise of an airfoil blade

In order to clarify the mechanism by which aerodynamic noise is generated from separated flow around an airfoil blade, the relation between the attack angle and the aerodynamic noise of the blade was analyzed using a wind tunnel experiment and a CFD code. In the case of rear surface separation, the separated vortex which has a large-scale structure in the direction of the blade chord is transformed into a structure that concentrates at the trailing edge with an increase in the attack angle. The aerodynamic noise level then becomes small according to the vortex scale in the blade chord. When the flow is separated at the leading edge, a separated vortex of low pressure is formed at the vicinity of the trailing edge. The pressure fluctuations on the blade surface at the vicinity of the trailing edge become large due to the vortex in the wake. It is considered that the aerodynamic noise level increases when the flow is separated at the leading edge because the separated vortex is causing the fluctuations due to wake vortex shedding.     

在高纯度理想热耦合精馏塔的双组分控制中考虑过程的非线性

Dual-point composition control for a high-purity ideal heat integrated distillation column (HIDiC) is addressed in this work. Three measures are suggested and combined for overcoming process inherent nonlinearities:(1) variable scaling; (2) multi-model representation of process dynamics and (3) feedforward compensation. Theses trategies can offer the developed control systems with several distinct advantages: (1) capability of dealing with severe disturbances; (2) tight tuning of controller parameters and (3) high robustness with respect to variation of operating conditions. Simulation results demonstrate the effectiveness of the proposed methodology.     

Development on a coaxial heat integrated distillation column (HIDiC)

Various configurations of a column for performing the principle of HIDiC can be proposed, but a coaxial column which is installed a packing in an inside tube and outer side may be one of the simplest columns for HIDiC. In order to examine whether or not the configuration of the packed column mentioned above is appropriate to HIDiC, an experimental apparatus has been set up and heat and mass transfer rates have been measured by using benzene-toluene system. This paper was presented at The 5th International Symposium on Separation Technology-Korea and Japan held at Seoul between August 19 and 21, 1999.     

Hydraulic Model for Sedimentation in Storm-Water Detention Basins

Treatment of storm-water runoff may be necessary before discharge to surface waters. In urban areas, space constraints limit selection of conventional treatment systems, and alternative systems are needed. This research program involves design and laboratory testing of a small footprint nonproprietary detention basin which consists of pipes and box culvert sections with a specialized inlet and outlet system. This system can be placed below grade near the roadway section as part of the conventional drainage system and does not require additional right-of-way. A mathematical model, based entirely on hydraulic principles, is developed to estimate particle removal efficiency of the rectangular detention basin for the treatment of storm-water runoff by extending ideal horizontal tank theory under the condition in which water level is varied. A physical model was built in 1/5 scale to measure particle removal performance and validates the conceptual model. Experiments were performed for steady inflow conditions with different inflow rates, durations, and suspended sediment concentrations. Measured time series outflow suspended sediment concentrations and particle removal efficiency compare well with calculated results from the conceptual model. The outflow particle-size distribution can also be estimated using the conceptual model.     

Modulation of T cell and monocyte function in the spleen following infection of pigs with African swine fever virus

Infection of pigs with many strains of African Swine Fever Virus (ASFV) has been shown to cause a loss or marked decrease in the ability of splenocytes to respond to mitogens. These observations have been extended by cell fractionation and reconstitution experiments to show that the mitogen stimulated proliferative capacity of both the CD4+ and CD8+ T cells is affected. Similarly, monocytes which are directly infectable by virus, are functionally defective as antigen presenting cells when added to mitogen stimulated normal T cells. Interestingly, the same T cells which respond poorly in mitogenic assays can be activated by stimulation through the CD3 receptor. In contrast to the defective mitogenic response of T cells, B cell function, as assessed by stimulation through the CD40 ligand in vitro remains intact. There is no evidence for apoptosis in either the T cells or the B cells recovered from the spleens of ASFV infected animals 1-5 days following infection. Although the number of leucocytes which can be recovered from the infected spleen decreases rapidly with progression of the disease, the proportion of the different cell phenotypes remains constant. Thus decreased activity of lymphocytes in lymphoid tissue from ASFV infected animals appears to be directly attributable to infection of the monocytes.     

Applications of tumor markers to the screening of endometrial and ovarian cancers

Several new trials, using tumor markers in the screening for gynecological malignancies, have been conducted. For assisting the cytological diagnosis of uterine endometrial cancers, the new EIA method using cytological specimens and the monoclonal antibody against endometrial cancer cells, MSN-1, was developed. This method could help to discriminate between cancer and normal cells, so this would result in decrease the numbers of suspicious cases on cytological diagnosis. For ovarian cancers, especially to identify high-risk groups, two carbohydrate-related antigens, CA602 and CA546, were employed. The combined use of these two markers showed a high potentiality to detect ovarian cancers. GAT (galactosyltransferase associated with tumor), an isoform of galactosyltransferase, could rescue the false-positive cases with endometriotic cysts. These new methods with tumor markers are supposed to be handy tools in the screening for gynecological malignancies.     

Test research in Japan

Surveys recent research activities in test technology for computers, focusing on the results of university researchers. They cover test-pattern generation, fault simulation, design for testability, built-in self-test, and self-checking     

Application of mixed-integer linear programming in multiterm expansion planning under multiobjectives

A procedure to expand plant capacities over a time horizon is presented under multiobjectives. A stepwise interactive approach has been proposed to formulate a problem that is small but complete enough to provide a best-compromise solution for decision-making. The approach relies on the relaxation of flexible constraints and the sensitivity analysis of linear programming. It yields the significant feature of identifying the expansion increments associated with specific objectives or with structural infeasibility. The resulting multiobjective mixed-integer linear programming problem was solved advantageously by an interactive goal programming algorithm. An illustrative example is provided to clarify the procedure and show its computational effectiveness.     

Hydroxyl radical generation after the third hour following ischemia contributes to brain damage

The effects of 10 antiallergic drugs (astemizole, azelastine, ebastine, emedastine, epinastine, ketotifen, oxatomide, terfenadine, pemirolast and tranilast) on neuronal dopamine uptake were examined. Some drugs examined showed a concentration-dependent inhibition of [3H]dopamine uptake into synaptosomal preparations of the rat striatum. The inhibition constant (Ki) values were 231-876 nM for ebastine, terfenadine, oxatomide and astemizole. The specific binding of [3H] (1-[2-(diphenylmethoxy)ethyl]-4-(3-phenylpropyl)piperazine) (GBR12935) to the rat striatal membranes was also inhibited by these antiallergic drugs. There was a good correlation between the degrees of inhibition of [3H]dopamine uptake and [3H]GBR12935 binding. Then, the behavioral excitement induced by L-DOPA (100 mg/kg, s.c.) plus pargyline hydrochloride (80 mg/kg, i.p.) in mice was significantly enhanced by i.p. treatment with ebastine (10 mg/kg) and astemizole (5 mg/kg). These results suggest that the neuronal dopamine uptake is inhibited by some antiallergic drugs, especially ebastine.