Chemical mechanical polishing of polymer films

Strategies to reduce capacitance effects associated with shrinking integrated circuit (IC) design rules include incorporating low resistivity metals and insulators with low dielectric values, or “low-κ” materials. Using such materials in current IC fabrication schemes necessitates the development of reliable chemical mechanical polishing (CMP) processes and process consumables tailored for them. Here we present results of CMP experiments performed on FLARE™ 2.0 using a specialized zirconium oxide (ZrO₂) polishing slurry. FLARE™ 2.0 is a poly(arylene) ether from AlliedSignal, Inc. with a nominal dielectric constant of 2.8. In addition, we provide insight into possible removal mechanisms during the CMP of organic polymers by examining the performance of numerous abrasive slurries. Although specific to a limited number of polymers, the authors suggest that the information presented in this paper is relevant to the CMP performance of many polymer dielectric materials.     

Coliphage prevalence in high school septic effluent and associated ground water

At the present time, somatic and male-specific coliphage and human enterovirus groups are being considered as indicators of possible pathogenic human enteric virus contamination from fecal contamination. A primary attribute for any indicator of fecal contamination is its prevalence at the source and in associated ground water. It must be consistently found in the source material at concentrations that are measurable with available techniques. Over a period of ten months, male-specific and somatic coliphage ranged from 7000 to 4,000,000 PFU/L in the effluent from a multi-user septic-tank. Unlike the values determined for septic-tank effluent, coliphage concentrations measured in ground water over this same period only varied by five-fold. Coliphage concentration in ground water under the down-gradient edge of the drainfield contained 1000 PFU/L. This concentration decreased at −1 log₁₀/5 m during 17.4 m of ground-water transport. From these data, coliphage concentrations in septic-tank effluent seem sufficient to allow their use as indicators of fecal contamination in ground water.     

Effect of preparation method on the dispersion and activity of V2O5–Al2O3 catalysts

Al2O3-supported 12 wt% V2O5 catalysts were prepared by physically grinding both the oxides (solid–solid wetting) and by wet impregnation techniques. The physical mixtures (PM) were treated under two different conditions – calcination in the presence of dry oxygen and wet oxygen. The catalysts were characterized by x-ray diffraction, scanning electron microscopy, electron spin resonance and oxygen and carbon dioxide chemisorptions. Vanadia dispersion of the physical mixture calcined in the presence of wet oxygen was found to be very similar to that of the V2O5/Al2O3 catalyst prepared by the standard impregnation method. Methanol partial oxidation activities of these catalysts were also comparable. This revised version was published online in November 2006 with corrections to the Cover Date.     

城市加油站的防火与消防管理

介绍汽车加油站在防火设计与消防管理方面需注意的问题，主要包括站址选择、总平面布置、油罐设置、管线布置、卸油方式等方面，同时对加油站的日常操作与防火消防管理提出了要求。     

Reliability and performance analysis of time – space – time switching networks with multiple separated space switches

Since electronic switching systems usually require very strict reliability requirements as well as good performance objectives, we need to jointly analyse the performance and reliability of switching systems. In this paper, we compare conventional time–space–time switches with single space switches with those with multiple separated space switches, from the viewpoints of reliability and performance. We consider time–space–time switching networks which consist of N incoming time switches, i.e. one NxN space switch, two (N/2)x(N/2) space switches, and four (N/4)x(N/4) space switches. We introduce a Markov reliability model to study the effect of failures and analyse the reliability and performance of three different types of switching networks in terms of average blocking probability and the mean time to unreliable operation, as we vary the offered traffic. As a result, T–S–T switching networks with multiple separated space switches exhibit better performance and reliability than those with single space switches.     

基于空间矩的灰度边缘亚像元度量精度分析

灰度图像中边缘定位受采样密度限制，亚像元精度度量方法在需要高精度的应用中受到重视，要想知识到底需要多高的分辨率才能达到定精度指标，就有必要分析特征定位方法的最坏情况的精度，文中用分析和实验的方法给出了基于空间矩的边缘定位方法，对于边缘点，边缘直线以及直边缘区域的最坏情况定位精度分析。分析和讨论的结果不但可以用来确定已知形状位置估计的最大误差，而且还可用于对准的形状几何参数，以获得较高的精度。     

简单网络 解脱众多——传感器连线束缚

有了合适的协议以后(如ZigBee),无需经常与外界交流的传感器就不会消耗过多能量。有时,一节碱性电池就可以为它们提供长达十年的能量。     

非理想截面脊形介质光波导导波模式的研究

提出了一种求解任意截面形状脊形光波导的方法，先利用有效折射率的概念解出某种截面形状脊形光波导的等效折射率，再利用转移矩阵的理论求解出波导的模式色散方程。     

云广特高压直流输电系统直流滤波器性能的若干问题

介绍实际工程中所用的直流滤波器的形式并讨论其参数的选择方式，同时介绍用于评价直流滤波器设计性能指标的等效干扰电流 Ieq 以及用于计算 Ieq 的三脉动谐波模型。以目前在研待建的云广特高压直流工程为例，利用Siemens公司的谐波分布计算程序HarmDistr进行计算，讨论分析各种因素对 Ieq 的影响。最后针对不同的直流系统运行工况、不同的直流滤波器的投切组合进行直流滤波器性能计算，比较 Ieq 的大小并进行分析讨论。