Nanoimprint lithography has two basic steps. The first is the imprint step in which a mold with nanostructures on its surface is pressed into a resin film on a substrate, followed by removal of the mold. The second step is the residual layer removal by a reactive ion etching (RIE). There is no report whether the properties of the imprinted structure after RIE change or not. In this work, the authors evaluated the Young’s modulus of the imprinted pillar after residual layer removal by RIE. In this experiment, hydrogen silsesquioxane (HSQ), a type of spin-on-glass, was used as an imprint material. The residual layer was etched by RIE using CHF3 gas. The Young’s modulus of imprinted pillar after RIE was measured via cantilever method. The Young’s modulus of HSQ pillar after RIE was twice as much as that of HSQ pillar before RIE. From the Fourier transform infrared measurement, it was founds the chemical structure of HSQ was changed by forming network structure due to heating by RIE plasma energy. These results indicate that the mechanical property of imprinted structure was changed in the residual layer removal step by using RIE. 相似文献
The primary and secondary particle sizes of monoclinic hydrous-ZrO2 particles produced by the hydrolysis of various ZrOCl2 solutions, with and without the addition of NaCl, CaCl2, or AlCl3, were measured using X-ray diffraction and transmission electron microscopy in order to clarify the formation mechanisms of primary and secondary particles. The primary particle size of hydrous ZrO2, under a constant ZrOCl2 concentration, decreased monotonously with increasing Cl−-ion concentration. On the contrary, the secondary particle size increased monotonously with increasing Cl−-ion concentration. The present experimental results revealed that the primary and secondary particle sizes of hydrous ZrO2 are controlled primarily by the concentrations of H+ and Cl− ions produced during hydrolysis, and are independent of the type of added metal ions. The formation mechanisms of the primary and secondary particles of hydrous ZrO2 were determined on the basis of the present experimental results. 相似文献
Direct internal and external reforming operations on Ni-samaria-doped ceria (SDC) anode with the practical size solid oxide fuel cell (SOFC) at intermediate temperatures from 600 to 750 °C are carried out to reveal the reforming activities and the electrochemical activities, being compared with the hydrogen-fueled power generation. The cell performance with direct internal and external steam reforming of methane and their limiting current densities were almost the same irrespective of the progress of reaction in the methane reformate at 700 and 750 °C. The durability test for 5.5 h at 750 °C with direct internal reforming operation confirmed that the cell performance did not deteriorate. The operation temperature of the cell controlled the reforming activities on the anode, and the large size electrode gave rise to high conversion due to the slow space velocity of the steam reforming. Direct internal steam reforming attained sufficient level of conversion for SOFC power generation with methane at 700 and 750 °C on the large Ni-SDC cermet anode. 相似文献
It has been reported that elongated Au nanoparticles oriented parallel to one another can be synthesized in SiO2 by ion irradiation. Our aim was to elucidate the mechanism of this elongation. We prepared Au and Ag nanoparticles with a diameter of 20 nm in an SiO2 matrix. It was found that Au nanoparticles showed greater elongated with a higher flux of ion beam and with thicker SiO2 films. In contrast, Ag nanoparticles split into two or more shorter nanorods aligned end to end in the direction parallel to the ion beam. These experimental results are discussed in the framework of a thermal spike model of Au and Ag nanorods embedded in SiO2. The lattice temperature exceeds the melting temperatures of SiO2, Au and Ag for 100 ns after one 110 MeV Br10+ ion has passed through the middle of an Au or Ag nanorod. 相似文献
Research and trials by the Japan Atomic Energy Agency (JAEA) focus on the remaining technical issues in the ITER TF coil winding pack (WP) manufacturing process. Specific issues include the feasibility of automatically measuring conductor length during automatic winding with a high degree of accuracy (±0.02%) and a fabrication process to comply with the demanding tolerances (up to 1 mm distortion in flatness and 1.5 mm in-plane shrinkage) of the radial plate (RP) due to cover plate (CP) welding. The authors developed a new technique to measure conductor length very accurately by combining an ordinary encoder and a newly developed optical system. A simulation based on test results of CP welding using a RP mock-up indicates that a flatness of 1 mm is achievable, but the in-plane shrinkage of the RP is approximately 5 mm. One possible solution is to fabricate the RP larger than required to allow for in-plane shrinkage. Another solution is to reduce the thickness or length of the welding. The feasibility of these solutions to most of the major technical issues suggests that it is time for full qualification testing of the fabrication process in a dummy double-pancake trial. 相似文献
The single-pass (50 cm) amplifier performance of an atmospheric-pressure ArF laser pumped by a 65-ns full-width-at-half-maximum short-pulse electron beam was investigated theoretically for a wide range of excitation rates (0.1-2.0 MW/cm3 ). Atmospheric mixtures of Ne, Ar, and F2 (three mixtures of Ar=40%, 70%, and Ne-free) were studied. A kinetic numerical model of the ArF amplifier with a Ne buffer system was constructed. A one-dimensional propagation treatment considered the gain depletion and saturation absorption spatially and temporally along the optical axis. In this model the rate constants for electron quenching of ArF* of 1.6×10-7, 1.9×10-7, and 2.4×10 -7 cm3/s were used for Ar concentration of 40, 70 percent, and Ar/F2 mixture, respectively 相似文献
The system architectures, which allow a high performance fully balanced (FB) system based on ordinary/modified single-ended opamps to be implemented, are investigated and the basic and general requirements are formulated. Two new methods of an FB analog system design, which contribute towards achieving both a high performance IC system implementation and a great reduction of the design time are presented. It is shown that a single-ended system based on any type of opamp (rail-to-rail, constant gm, etc.), realized in any technology (CMOS, bipolar, BiCMOS, GaAs), can be easily and effectively converted to its FB counterpart in a very practical way. Using the proposed rules, any FB system implementation with opamps (data converter, modulator, filter, etc.) requires only a single-ended system version design and the drawbacks related to a conventional FB system design are avoided. The principles of the design are pointed out and they are verified by experimental results. 相似文献
The optical properties of the rare elements Tm3+, Ho3+ and Yb3+ were systematically investigated in various glasses. The Tm3+ doped aluminozircofluoride glass shows higher quantum efficiency, longer lifetime and stronger fluorescence intensity than Tm3+ doped YSGG crystal and other Tm3+ doped glasses for the 3H4 → 3H6 transition. Similar quantum efficiency, longer lifetime and stronger fluorescence intensity were also found in Ho3+ doped aluminozircofluoride glass for the 5I7 → 5I8 transition. The higher quantum efficiencies of Tm3+ and Ho3+ in aluminozircofluoride glass are due to the longer lifetime and the lower phonon energy. The fluorescence mechanisms and energy transfer in the Yb3+ -Tm3+ system, Yb3+ -Ho3+ system and Yb3+ - Tm3+ -Ho3+ system were studied. The very strong fluorescence intensities in the Yb3+ -Tm3+ system for Tm3+ and the Yb3+ -Tm3+ -Ho3+ system for Ho3+ which are 1.68 times that of Tm3+ doped YSGG crystal and 2.25 times that of Tm3+---Ho3+ codoped YSGG crystal are attributed to the efficient Yb3+ → Tm3+, Yb3+ → Ho3+ and Tm3+ → Ho3+ energy transfer processes. The fluorescence processes are described by cross relaxations of 2F5/2 → 3H5 → 3H4 → 3H6 → 2F7/2 and2F5/2 → 3H5 (or 2F5/2 → 5I6 → 3H5) → 3H4 → 5I7 → 5I8 → 3H6 → 2F7/2. 相似文献
Instrumentation and monitoring systems in a nuclear power plant are very important to monitor plant conditions for safe operations and a plant shutdown. The severe accident at TOKYO ELECTRIC POWER COMPANY's Fukushima Daiichi Nuclear Power Station (hereinafter called as TF1) in March 2011 caused several severe situations such as core damage, hydrogen explosion, etc. Lessons learned from the severe accident at TF1 show that an appropriate operable instrumentation and monitoring system for a severe accident should be developed so that the system will deliver an appropriate performance for mitigation of severe accident condition in a nuclear power plant.
This paper proposes the classification method of severe accident condition for the development of an appropriate operable instrumentation and monitoring system for a severe accident based on the problem analysis of monitoring variables during the severe accident at TF1. The classification is formed on the basis of the integrity of boundary for plant safety and the successful (or unsuccessful) condition of the cooling water injection, and is used for an establishment of defining severe accident environmental conditions for the instrumentation and monitoring system. Examples of the establishment method are also shown in this paper. 相似文献