22nm技术节点的成品率目标

半导体行业正在开发必要的缺陷量测和薄膜量测解决方案,但22nm技术节点的监测还需开发新的成像套刻目标结构。     

太阳能产业不能仅依赖于效率

对那些追踪不同太阳能技术的人来说,很容易的事情就是直接去查效率数字,并且认为低转换效率的技术无法进入实际应用。基于硅太阳能电池的太阳能组件可以将太阳能量的     

先进光刻技术大步向前

正如半导体国际杂志上所说的那样,在今年的SPIE Microlithography会议上,光刻领域的技术专家们共聚一堂并发表了他们的最新研究成果。毫无疑问本次会议将会产生更多的新闻和技术热点,而近来公布的一些     

Princeton小组加深对纳米压印的理解

最近,普林斯顿大学(Princeton University)的研究人员在Nanotechnology《纳米技术》杂志上发表了两篇论文,介绍了他们在纳米压印光刻(NIL)领域内的重大进展,推动这项技术向着成为可行的、用于主流半导体制造的下一代光刻技术(NGL)选择方案迈进了几大步。     

Experimental Analysis of Atypically Long Finned Oscillating Heat Pipe for Ventilation Waste Heat Recovery Application

Oscillating heat pipes(OHP)which are constructed from a serpentine-arranged capillary tube possess a desirable aerodynamic form factor and provide for relatively high heat transfer rates via cyclic evaporation and condensation of an encapsulated working fluid with no internal wicking structure required.In last two decades,OHP has been extensively investigated for its potential application in thermal management of various applications.This study presents an experimental investigation on the heat transfer performance of an atypically long finned OHP.The heat transfer performance of the proposed OHP was analyzed and compared with a bare tube OHP with similar overall dimensions.Results show that a unit row of finned OHP filled with n-pentane with fill ratio of 70%can recover up to(400±40)W of heat from a typical waste exhaust air stream.The additional pressure drop due to fins was estimated to be(6.8±2)Pa resulting in an increase of 1–2 W of fan power consumption.The average heat recovery rate via finned OHP was found to be almost 80%more than bare tube OHP filled with same working fluid with same fill ratio.     

漂洋过海来爱你

互联网上，每天都有神话，每天都有童话。还有多少人记得痞子蔡和轻舞飞扬的故事，又曾经有多少人向往过这样的经历。Aaron Nace和Rosie Hardy拿起相机最初都只不过是兴趣使然，却在不经意间成就了一段美丽的爱情。     

Multi-Material ALE with AMR for Modeling Hot Plasmas and Cold Fragmenting Materials

We have developed a new 3D multi-physics multi-material code,ALE-AMR,which combines Arbitrary Lagrangian Eulerian(ALE) hydrodynamics with Adaptive Mesh Refinement(AMR) to connect the continuum to the microstructural regimes.The code is unique in its ability to model hot radiating plasmas and cold fragmenting solids.New numerical techniques were developed for many of the physics packages to work efficiently on a dynamically moving and adapting mesh.We use interface reconstruction based on volume fractions of the material components within mixed zones and reconstruct interfaces as needed.This interface reconstruction model is also used for void coalescence and fragmentation.A flexible strength/failure framework allows for pluggable material models,which may require material history arrays to determine the level of accumulated damage or the evolving yield stress in J2 plasticity models.For some applications laser rays are propagating through a virtual composite mesh consisting of the finest resolution representation of the modeled space.A new 2nd order accurate diffusion solver has been implemented for the thermal conduction and radiation transport packages.One application area is the modeling of laser/target effects including debris/shrapnel generation.Other application areas include warm dense matter,EUV lithography,and material wall interactions for fusion devices.     

IMEC采用机械叠层方式制造出GaAs／Ge多结太阳能电池

IMEC已经成功的采用机械叠层的方法在锗电池上集成了GaAs电池,朝转化效率高于40％的三结太阳能电池迈进了一步。与单光刻多结电池不同,机械叠层结构无需进行电流匹配和晶格匹配。     

日益增多的工艺需求关注新的晶圆清洗方法

随着器件结构尺寸的缩小,在保持低材料损失的同时去除粒子正变得越来越难以实现。而且围绕材料和器件结构保持器件避免损伤、侵袭或以其他方式修改也日益困难．包括掺杂硅损失,低一南电介质艮值的变化,金属栅极腐蚀,图形倒塌等等。在32nm及以下节点,所有这些,将会更加严峻。因而,需要建立一个下一步如何进行晶圆清洗的转变模式。     

传感器的信号路径

传感器越来越多地应用于嵌入式系统中。虽然长期以来工业产品一直将其用于制造控制系统,但消费设备现在也开始采用传感器。制造商们正在消费产品中集成传感器,以创造出更好的用户体验,如在手机中增加加速度计,以及在微波炉中加入蒸汽传感器等。以前仅在数字域中工作的系统设计者现在发现,自己必须要与模拟传感器打交道了。