This paper reports a novel fabrication process to develop planarized isolated islands of benzocyclobutene (BCB) polymer embedded in a silicon substrate. Embedded BCB in silicon (EBiS) can be used as an alternative to silicon dioxide in fabrication of electrostatic micromotors, microgenerators, and other microelectromechanical devices. EBiS takes advantage of the low dielectric constant and thermal conductivity of BCB polymers to develop electrical and thermal isolation integrated in silicon. The process involves conventional microfabrication techniques such as photolithography, deep reactive ion etching, and chemical mechanical planarization (CMP). We have characterized CMP of BCB polymers in detail since CMP is a key step in EBiS process. Atomic force microscopy (AFM) and elipsometry of blanket BCB films before and after CMP show that higher polishing down force pressure and speed lead to higher removal rate at the expense of higher surface roughness, non-uniformity, and scratch density. This is expected since BCB is a softer material compared to inorganic films such as silicon dioxide. We have observed that as the cure temperature of BCB increases beyond 200 °C, the CMP removal rate decreases drastically. The results from optical microscopy, scanning electron microscopy, and optical profilometry show excellent planarized surfaces on the EBiS islands. An average step height reduction of more than 95% was achieved after two BCB deposition and three CMP steps. 相似文献
Impulse noise reduction from corrupted images plays an important role in image processing. This problem will also affect on image segmentation, object detection, edge detection, compression, etc. Generally, median filters or nonlinear filters have been used for noise reduction but these methods will destroy the natural texture and important information in the image like the edges. In this paper, to eliminate impulse noises from noisy images, we used a hybrid method based on cellular automata (CA) and fuzzy logic called Fuzzy Cellular Automata (FCA) in two steps. In the first step, based on statistical information, noisy pixels are detected by CA; then using this information, the noisy pixel will change by FCA. Regularly, CA is used for systems with simple components where the behavior of each component will be defined and updated based on its neighbors. The proposed hybrid method is characterized as simple, robust and parallel which keeps the important details of the image effectively. The proposed approach has been performed on well-known gray scale test images and compared with other conventional and famous algorithms, is more effective. 相似文献
In this article, the small-signal equivalent circuit model of SiGe:C heterojunction bipolar transistors (HBTs) has directly been extracted from S-parameter data. Moreover, in this article, we present a new modelling approach using ANFIS (adaptive neuro-fuzzy inference system), which in general has a high degree of accuracy, simplicity and novelty (independent approach). Then measured and model-calculated data show an excellent agreement with less than 1.68?×?10?5% discrepancy in the frequency range of higher than 300 GHz over a wide range of bias points in ANFIS. The results show ANFIS model is better than ANN (artificial neural network) for redeveloping the model and increasing the input parameters. 相似文献
We present the design and characterization of planar mm-wave patch antenna arrays with waveguide-to-microstrip transition using both near- and far-field methods. The arrays were designed for metrological assessment of error sources in antenna measurement. One antenna was designed for the automotive radar frequency range at 77 GHz, while another was designed for the frequency of 94 GHz, which is used, e.g., for imaging radar applications. In addition to the antennas, a simple transition from rectangular waveguide WR-10 to planar microstrip line on Rogers 3003? substrate has been designed based on probe coupling. For determination of the far-field radiation pattern of the antennas, we compare results from two different measurement methods to simulations. Both a far-field antenna measurement system and a planar near-field scanner with near-to-far-field transformation were used to determine the antenna diagrams. The fabricated antennas achieve a good matching and a good agreement between measured and simulated antenna diagrams. The results also show that the far-field scanner achieves more accurate measurement results with regard to simulations than the near-field scanner. The far-field antenna scanning system is built for metrological assessment and antenna calibration. The antennas are the first which were designed to be tested with the measurement system. 相似文献
The fabrication of cell‐laden structures with anisotropic mechanical properties while having a precise control over the distribution of different cell types within the constructs is important for many tissue engineering applications. Automated textile technologies for making fabrics allow simultaneous control over the color pattern and directional mechanical properties. The use of textile techniques in tissue engineering, however, demands the presence of cell‐laden fibers that can withstand the mechanical stresses during the assembly process. Here, the concept of composite living fibers (CLFs) in which a core of load bearing synthetic polymer is coated by a hydrogel layer containing cells or microparticles is introduced. The core thread is drawn sequentially through reservoirs containing a cell‐laden prepolymer and a crosslinking reagent. The thickness of the hydrogel layer increases linearly with to the drawing speed and the prepolymer viscosity. CLFs are fabricated and assembled using regular textile processes including weaving, knitting, braiding, winding, and embroidering, to form cell‐laden structures. Cellular viability and metabolic activity are preserved during CLF fabrication and assembly, demonstrating the feasibility of using these processes for engineering functional 3D tissue constructs. 相似文献
Motion perception is arguably a fundamental mechanism used by natural species to accomplish a number of tasks, such as navigating freely in an unknown environment. Traditional motion perception methods tend to be computationally intensive, requiring powerful computers and large memories. However, by copying biological mechanisms, such as elementary motion discrimination at the early stages of the visual processing paths, it should be possible to build small and efficient motion perception systems. This paper describes the manner in which a simple motion perception model based on the insect visual system has been implemented using mixed analog/digital VLSI. The device has been fabricated in a 2 micron double metal, double polysilicon process, and comprises 61 photo-detectors, and associated analog and digital circuitry. While not entirely successful in that component mismatches hamper the detection of dark-to-bright changes in contrast, the results clearly show the feasibility of using such a device in autonomous control systems. 相似文献
The increasing global energy demand and declination of oil reservoir in recent years cause the researchers attention focus on the enhancement of oil recovery approaches. One of the extensive applicable methods for enhancement of oil recovery, which has great efficiency and environmental benefits, is carbon dioxide injection. The CO2 injection has various effects on the reservoir fluid, which causes enhancement of recovery. One of these effects is extraction of lighter components of crude oil, which straightly depends on solubility of hydrocarbons in carbon dioxide. In order to better understand of this parameter, in this study, Least squares support vector machine (LSSVM) algorithm was developed as a novel predictive tool to estimate solubility of alkane in CO2 as function of carbon number of alkane, carbon dioxide density, pressure, and temperature. The predicting model outputs were compared with the extracted experimental solubility from literature statistically and graphically. The comparison showed the great ability and high accuracy of developed model in prediction of solubility. 相似文献
Hydrogen is one a gas that demands continue to grow across many industries. Due to the growth for this gas the means of producing it and the ability to supply this demand is of great importance. As a result of this, steam methane reforming is a process of high significance as it is one of the most economically and popular means of producing hydrogen. The value of this process is tremendous as it is able to provide up to 48% of global demands, with this only predicted to increase. Therefore, the understanding of what occurs during this process and the steps that it experiences must be understood to ensure that an efficient system is created.
Steam methane reforming operates by converting the hydrocarbons located in methane into hydrogen and COx. This process will generally occur over two different stages, a reformer stage, before going into a water-gas shift reactor. After these main processes occur the product produced may undergo purification to remove any containments and ensuring that the hydrogen is at the industry standard. To help investigate this process and how various stages affect others it can be modeled through software such as Unisim which allows modifications to be made and analyzed the effect this had on the system, allowing a potential more efficient system to be designed which will help meet the growing demand. 相似文献
Wireless Networks - The original version of this article unfortunately contained a mistake in the title. The correct title has been published with this erratum. 相似文献