Reliability challenges for copper low-k dielectrics and copper diffusion barriers

The performance of interconnects containing micro- (pore size smaller than 2 nm) and meso-porous (pore size larger than 2 nm) interlevel dielectrics is influenced by material selection, integration scheme and virtually all fabrication steps. It is generally reported that the reliability margin of the dielectric/barrier/copper system is shrinking. Barrier and dielectric integrity play a most important role in line-to-line leakage and Time Dependent Dielectric Breakdown (TDDB) reliability. TDDB has never been an issue for Cu-SiO₂ interconnects, but for sub-100 nm copper/barrier/low-k systems it becomes challenging. When monitoring the integrated dielectric properties early failures can be caused by weak integration interfaces, dielectric damage during the integration, defective diffusion barrier or other non-uniformities related to the damascene process. Recent advances are reviewed along with examples and reference to state of the art.     

Influence of metal gate and capping film stress on TANOS cell performance

In this work it is shown that film stress in the gate stack of TANOS NAND memories plays an important role for cell device performance and reliability. Tensile stress induced by a TiN metal gate deteriorates TANOS cell retention compared to TaN gate material. However, the erase saturation level as well as cell endurance is improved by the use of a TiN gate. This trade-off between retention and erase saturation for TANOS cells is elaborated in detail.     

Germanium islands embedded in strained silicon quantum wells grown on patterned substrates

Germanium islands were embedded in strained silicon quantum wells in order to provide an improved electron confinement in vicinity of the islands. Growth was performed on relaxed SiGe layers. Patterned substrates were used, favouring lattice relaxation as well permitting the fabrication of small Ge islands at deposition temperatures above 500 °C. Photoluminescence analysis reveals a strongly reduced dislocation related signal. The low temperature spectra are dominated by intense signals from the germanium islands. The origin of these signals were investigated by removing the islands by etching, analysing reference samples without a silicon quantum well, varying the germanium deposition and the growth temperature.     

InGaAsSb(Gd)/InAsSbP double heterostructure lasers (λ=3.0–3.3 µm) for diode laser spectroscopy

Data on threshold currents, the differential quantum efficiency, the emission spectrum, current tuning, and radiation power of mesastripe InGaAsSb(Gd)/InAsSbP double heterostructure lasers with λ=3.0–3.3 µm and a cavity length of 70–150 µm in a temperature range of 50–107 K are reported. In the experiments, the threshold currents I _th<10 mA, a total output power of 0.5 mW/facet, and a single-mode power of 0.43 mW at 77 K in the cw regime were obtained. Lasers operated in the single-mode regime at currents I≤6I _th, the spectral purity was as high as 650: 1, the tuning rate was 210 cm^?1/A, and the tuning range was 10 cm^?1 wide. An example of methane detection at 3028.75 cm^?1 is presented.     

Inwards Interweaving of Polymeric Layers within Hydrogels: Assembly of Spherical Multi‐Shells with Discrete Porosity Differences

The unique inwards interweaving morphology of polyamines and polyacids within agarose hydrogels that leads to the formation of striated shells with different porosities within the spherical scaffold is reported. Microcompartments with sophisticated structures are commonly used in drug delivery, tissue engineering, and other biomedical applications. However, a method capable of producing well‐defined, multiporous shells within a single compartment is still lacking. By the alternating deposition of polyallylamine (PA) and polystyrenesulfonic acid (PSS) in 1‐butanol, at equal mass ratios, multiple levels of porosity are generated within an agarose microsphere. Each level of porosity is represented by a well‐defined, concentric shell of interweaving PA and PSS layers. The number, thickness, and porosity of the striated shells can be easily controlled by varying the number of PA/PSS bilayers and the polymer concentration, respectively. The feasibility of utilizing this morphology for the assembly of a multi‐shell porous spherical scaffold is validated by trapping different molecular weight dextrans within different regions of porosity. The unique interaction of polyacids and polyamines in hydrogels represents a facile and inexpensive approach to the development of intricate scaffold architectures.     

Structural properties and electrical behaviour of thin silicon oxynitride layers

Thin SiO₂ and SiO_xN_y layers were grown on silicon using Rapid Thermal Processing (RTP) in either O₂ or N₂O ambient. Subsequent annealing or nitridation was performed in order to improve the electrical stability. The composition of the films, in particular the incorporation of nitrogen and hydrogen, has been studied. We obtained the distribution of states at the Si/insulator interface through the evaluation of CV measurements and investigated the charge trapping in the layers analysing the voltage–time behaviour during Fowler–Nordheim constant current injection. Furthermore, assuming a trap assisted tunneling mechanism, the influence of near interface trap states on the current voltage characteristic was used to derive an effective insulator state distribution.     

(Vinylaryloxy)acetic acids. A new class of diuretic agents. 3. ((2-Nitro-1-alkenyl)aryloxy)acetic acids

A series of [(2-nitro-1-alkenyl)aryloxy]acetic acids was synthesized and tested in dogs for saluretic and diuretic activity. A number of these compounds exhibit a high order of activity on iv or po administration; representative of these is (E)-[2,3-dichloro-4-(2-nitropropenyl)phenoxy]acetic acid (5). The most highly active compounds are qualitatively similar in action to [2,3-dichloro-4-(2-methylenebutyryl)phenoxylacetic acid (ethacrynic acid) in causing a prompt increase in the excretion of water and of sodium and chloride ions in approximately equimolar amounts but are three to five times as potent. Potassium ion excretion is increased but less markedly than sodium excretion.     

Interaction of aldolase with pigeon erythrocyte plasma membranes]

Osmotically hemolysed pigeon erythrocytes retain a considerable part of the total cell content of aldolase activity. After washing off the ghosts from hemoglobin and removing the nuclei, a considerable portion of aldolase activity is found in the supernatant. The retained part of aldolase is rather firmly bound to plasma membranes (PM), as evidenced by the fact, that double washing with a mixture of 0.3 M sucrose, 0.01 M tris-HCl (pH 7.4) and 0.004 M MgCL2, or with 0.15 M NaCl or H2O does not appreciably decrease the aldolase activity of PM. Only washing of PM with 0.5 M NaCl results in appreciable decrease of aldolase retention by PM. The binding of aldolase proved to be temperature sensitive: after heating the binding of aldolase to PM specifically decreased. These data suggest that the interaction of the enzyme with PM of pigeon erythrocytes occurs in the intact cell and may be of physiological significance.     

A deoxyribonucleic acid-replication intermediate in the growing mosquito

The arrangement of 18-S rRNA and 28-S rRNA within their 40-S common precursor molecule (pre-rRNA) of Xenopus laevis was investigated by electron microscopic analysis of secondary structure of nascent pre-rRNA chains of oocytes, and by 5'-end analysis of 18-S rRNA and 28-S rRNA hybridized to the EcoRI fragment of rDNA cloned as plasmid pCD42. Secondary structure mapping of phenol-extracted RNA from nucleolar cores revealed complete pre-rRNA chains or molecules at various stages of processing and pre-rRNA molecules apparently lacking one end. In this latter group, which was regarded as representing nascent chains, more than 90% of the molecules had no 28-S rRNA REGION. This shows that the 28-S rRNA sequence is transcribed after the 18-S rRNA region and hence must be located nearer to the 3' end of the pre-rRNA molecule. For 5' end-group determination [3H]uridine-labelled 18-S rRNA and 28-S rRNA were hybridized, as fragments of about 200 nucleotides, to the plasmid pCD42 containing coding sequences for four-fifths of the 18-S rRNA sequence, the external transcribed spacer, the non-transcribed spacer and a tenth of the 28-S rRNA sequence. The RNA was recovered from the hybrids and analyzed for uridine 3',5'-bisphosphate (pUp) after alkaline hydrolysis. The pUp content of the hybridized 18-S rRNA fragments was 20-fold higher than in those of 28-S rRNA, THUS DEMONSTRATING THAT THE 5' END OF THE 18-S rRNA is located next to the external spacer region. From these results it is concluded that the 18-S rRNA is located close to the 5' end of the 40-S pre-rRNA molecule.