Systematic characterization of Cl2 reactive ion etchingfor improved ohmics in AlGaN/GaN HEMTs

Pre-metal-deposition reactive ion etching (RIE) was performed on an Al_0.3Ga_0.7N/AlN/GaN heterostructure in order to improve the metal-to-semiconductor contact resistance. An optimum AlGaN thickness for minimizing contact resistance was determined. An initial decrease in contact resistance with etching time was explained in terms of removal of an oxide surface layer and/or by an increase in tunnelling current with the decrease of the AlGaN thickness. The presence of a dissimilar surface layer was confirmed by an initial nonuniform etch depth rate. An increase in contact resistance for deeper etches was experienced. The increase was related to depletion of the two-dimensional (2-D) electron gas (2-DEG) under the ohmics. Etch depths were measured by atomic force microscopy (AFM). The contact resistance decreased from about 0.45 Ωmm for unetched ohmics to a minimum of 0.27 Ωmm for 70 Å etched ohmics. The initial thickness of the AlGaN layer was 250 Å. The decrease in contact resistance, without excessive complications on device processing, supports RIE etching as a viable solution to improve ohmic contact resistance in AlGaN/GaN HEMTs     

全有机配方在我公司的应用

介绍了成都齐达科技开发公司的全有机配方在该公司循环冷却水系统的应用     

几种重要的有机氯系阻燃剂

介绍了氯化石蜡、氯化聚乙烯、四氯邻苯二甲酸酐、四氯双酚A、六氯环戊二烯 及由六氯环戊二烯衍生的几种氯系阻燃剂的生产过程和用途。     

结合试飞特点,开展专用测试设备计量确认

根据我院专用测试设备计量确认现状及需求，对开展试飞专用测试设备计量确认工作的要求，步骤、确认原则，以及编定计量确认方法进行了必要的讨论分析。     

Development of the Chinese Scientometric Indicators (CSI)

We describe the Chinese Scientometric Indicators (CSI), an indicator database derived from the Chinese Science Citation Database (CSCD). Its design is supported by the Natural Sciences Foundation of China (NSFC). In this indicator database data of a statistical nature are organized and categorized leading to ranked lists and providing bases for comparisons among Chinese institutions and regions.     

8096/8098单片机集成开发系统

本集成开发环境集编辑、编译、调试和运行于一体,模拟了MCS-96系列单片机的指令系统,并给教学、实验、应用、科研和单片机的开发提供了强有力的手段。     

环保型隧道防火涂料的研究

介绍了国内外公路隧道、铁路隧道及地铁火灾情况 ,研制出一种可在潮湿环境中使用、火灾发生时无有害气体产生的环保型隧道防火涂料。涂层厚度 18～2 0 mm,耐火极限达 3小时。为防止涂料加水拌和后沉淀分层 ,增加涂料的和易性 ,研制出一种分散剂。