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21.
Effects of inductively coupled plasma conditions on the etch properties of GaN and ohmic contact formations 总被引:1,自引:0,他引:1
Hyeon-Soo Kim Yong-Hyuk Lee Geun-Young Yeom Jae-Won Lee Tae-Il Kim 《Materials Science and Engineering: B》1997,50(1-3):82-87
In this study, n-GaN was etched using inductively coupled Cl2/H2 plasmas and the effects of plasma conditions on the etch properties, surface composition and ohmic contact formation were investigated as a function of gas composition using OES (optical emission spectroscopy), SEM (scanning electron microscope), XPS (X-ray photoelectron spectroscopy), AES (Auger electron spectroscopy) and TLM (transmission line method). The addition of hydrogen to Cl2 plasma decreased GaN etch rate and changed the surface composition from Ga-rich to N-rich. Etched profiles were near vertical with a smooth sidewall, however, the pure Cl2 case showed the most anisotropic etch profile. Specific contact resistivity was increased with increasing hydrogen percent in Cl2/H2, however, most of contact resistivities of the contacts fabricated on the GaN etched with Cl2/H2 (≤75% H2) were less than those fabricated on the non-etched GaN. 相似文献
22.
Kang Cholmin Yeom Inhwa Ashtari Amirsaman Woo Woontack Noh Junyong 《Virtual Reality》2023,27(3):1919-1936
Virtual Reality - Engaging in outdoor daily activities such as shopping is an essential, yet challenging activity for older wheelchair users (OWU). However, little is investigated on how to augment... 相似文献
23.
A number of checkpointing and message logging algorithms have been proposed to support fault tolerance of mobile computing systems. However, little attention has been paid to the optimistic message logging scheme. Optimistic logging has a lower failure-free operation cost compared to other logging schemes. It also has a lower failure recovery cost compared to the checkpointing schemes. This paper presents an efficient scheme to implement optimistic logging for the mobile computing environment. In the proposed scheme, the task of logging is assigned to the mobile support station so that volatile logging can be utilized. In addition, to reduce the message overhead, the mobile support station takes care of dependency tracking and the potential dependency between mobile hosts is inferred from the dependency between mobile support stations. The performance of the proposed scheme is evaluated by an extensive simulation study. The results show that the proposed scheme requires a small failure-free overhead and the cost of unnecessary rollback caused by the imprecise dependency is adjustable by properly selecting the logging frequency. 相似文献
24.
A High‐Performance WSe2/h‐BN Photodetector using a Triphenylphosphine (PPh3)‐Based n‐Doping Technique 下载免费PDF全文
25.
Lots of scallop shells were discharged from local restaurants and marine product manufacturers around the city of Gangneung and most of them are dumped into landfill. The scallop shell was recycled as an adsorbent for the removal of phosphate. The shell size greatly affected phosphate removal. One gram of shell having diameter of around 45 μm removed 100 mg/L of phosphate in 3 h while that of 3 mm hardly removed in 80 h. Phosphate removal was not much affected by the pH in the range of 2.0–7.5 but it was scarcely removed beyond pH 8.0. Higher temperature was preferred for phosphate removal but the removal efficiency was almost constant over 35 °C. The maximum phosphate removal capacity was obtained through Langmuir isotherm plotting and it was as high as 23.0 mg-phosphate/g-shell. On the purpose of enhancing the adsorption capacity of scallop shell, it was treated with chemical reagents such as HCl, NaOH, NH4HCO3 and EDTA. HCl-treatment increased the adsorption capacity of the shell having diameter of 45 μm by 39.8% than raw scallop shell, but the treatment showed negligible effect on the shell of 1000 μm in diameter. Packed-bed containing HCl-treated scallop shell with 500 μm in diameter removed 20 mg/L of phosphate stably for 15 days and the removal efficiency was over 85% throughout operation. 相似文献
26.
A ring-type pulse oximeter sensor attached to the finger and its 24-hour ambulatory heart rate monitoring system are presented. The PCB has been designed with a light-to-frequency converter and the CPU with a built-in Zigbee stack for simple and low power consumption. Also designed is the algorithm using a least square estimator to calibrate various signal distortions caused by motion artefacts for a proper accuracy. 相似文献
27.
Nanocrystalline silicon thin films (nc-Si:H) were deposited using He as the dilution gas instead of H2 and the effect of the operating pressure and rf power on their characteristics was investigated. Especially, operating pressures higher than 4 Torr and a low SiH4 containing gas mixture, that is, SiH4(3 sccm)/He(500 sccm) were used to induce high pressure depletion (HPD) conditions. Increasing the operating pressure decreased the deposition rate, however at pressures higher than 6 Torr, crystallized silicon thin films could be obtained at an rf power of 100 W. The deposition of highly crystallized nc-Si:H thin film was related to the HPD conditions, where the damage is decreased through the decrease in the bombardment energy at the high pressure and the crystallization of the deposited silicon thin film is increased through the increased hydrogen content in the plasma caused by the depletion of SiH4. When the rf power was set at a fixed operating pressure of 6 Torr, HPD conditions were obtained in the rf power range from 80 to 100 W, which was high enough to dissociate SiH4 fully, but meantime low enough not to damage the surface by ion bombardment. At 6 Torr of operating pressure and 100 W of rf power, the nc-Si:H having the crystallization volume fraction of 67% could be obtained with the deposition rate of 0.28 nm/s. 相似文献
28.
Hyuck Jong Kim Gyunyoung Heo Hyung Chan Kim Jun Ho Yeom Jong Kyung Kim Young-seok Lee Myeun Kwon Gyung-Su Lee Yong-soo Kim Eunbae Kim Chul-sik Lee 《Fusion Engineering and Design》2012,87(5-6):757-763
With the vision of being an early demonstrator of fusion energy, the strategic plans for the Fusion DEMO program of Korea (K-DEMO program) has been developed. A staged development of the K-DEMO plant was considered in the strategic plans as to verify technical feasibility in the first stage and economic feasibility in the second stage. The top-tier design requirements and assumptions of the first stage K-DEMO plant are defined and postulated. With these requirements and assumptions, the desired and current status of nuclear fusion technologies are compared to identify the gaps to be filled to design, fabricate, construct, and operate it. The pathways from KSTAR, ITER to K-DEMO plant have also been studied to identify R&D activities for K-DEMO program that are to go in parallel with KSTAR and ITER are extracted from the pathways. Cross-cutting with the fusion R&D activities of the other countries and utilizing the commonalities with the existing systems are discussed with the provision of open-innovation strategy that is one of the key strategies of K-DEMO program. The priority of the R&D activities of K-DEMO program is qualitatively determined in consideration of the gaps, cross-cutting, and risks associated with the R&D investments. 相似文献
29.
For the purposes of new membrane material development for pervaporation separation based on crosslinked polyvinyl alcohol (PVA), IR spectroscopy and DSC were used to characterize the crosslinking reaction and the imidization of the (PVA)-amic acid system. The IR spectra and the thermal analysis were performed on specimens that had been reacted for several different times at 150°C. The crosslinking reaction between the hydroxy groups of PVA and the carboxylic groups of amic acid was faster than the imidization of the amic acid. The best reaction times were about 30 min for the crosslinking reaction and 90 min for the imidization. The effects of the reaction time and the amic acid content on the thermal and mechanical properties have also been investigated. 相似文献
30.
HR Yeom YJ Park SJ Lee IC Rhyu CP Chung RJ Nisengard 《Canadian Metallurgical Quarterly》1997,68(11):1102-1109
Clinical and microbiological effects of subgingival delivery of 10% minocycline-loaded (MC), bioabsorbable microcapsules were examined in 15 adult periodontitis patients. Patients received oral hygiene instruction 2 weeks prior to the study. At baseline (day 0) all teeth received supragingival scaling (SC); 2 quadrants received no further treatment and 1 quadrant received subgingival scaling and root planning (SRP). In the fourth quadrant, the tooth with the deepest probing sites (at least 1 site > or = 5 mm) was treated with minocycline microcapsules. The sites were evaluated at baseline and weeks 1, 2, 4, and 6. Clinical indices included bleeding on probing (BOP), probing depths (PD), and attachment loss (AL). Microbiological evaluations included percent morphotypes by phase-contrast microscopy; cultivable anaerobic, aerobic, and black-pigmented Bacteroides (BPB); and percent Porphyromonas gingivalis, Prevotella intermedia, Eikenella corrodens, and Actinomyces viscosus by indirect immunofluorescence. In the SC + MC group, BOP, PD, and AL were significantly reduced from baseline for weeks 1 to 6. BOP in the SC + MC group was significantly reduced compared to the SRP group from weeks 2 to 6. In the SC + MC group the percent of spirochetes and motile rods decreased and the percent of cocci increased after 1 week. The increased cocci and decreased motile rods were statistically greater at weeks 4 and 6 in the SC + MC group compared to the SRP group. This study demonstrates that local subgingival delivery of 10% minocycline-loaded microcapsules as an adjunct to scaling results in reduction in the percent sites bleeding on probing greater than scaling and root planning alone and induces a microbial response more favorable for periodontal health than scaling and root planing. 相似文献