Reduction of loading effect by tungsten etchback in a magneticallyenhanced reactive ion etcher

The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF ₆/Ar mixtures. It was found that while the plug loading effect is independent of varying SF₆/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology     

Analysis of culture fluorescence by a fiber-optic sensor inNicotiana tabacum plant cell culture

The on-line sensing of viable cell weight in plant cell culture process is applied to analysis and control of process. The fiber-optic fluorescence sensor was constructed to measure the NADH-dependent fluorescence inNicotiana tabacum plant cell culture and the analysis of fluorescence signal was done to be correlated with the viable cell weight. The structured kinetic model for cell growth was proposed to estimate the theoretical viable cell weight. The dimensional analysis was proposed for the interpretation of fluorescence signal, in which the path length, the inner filter effect and the hydrodynamic conditions were considered as the key factors on fluorescence signal. The dimensional analysis and empirical correlation of fluorescence signal to viable cell weight was applied to the interpretation of the detected fluorescence signal during cultivation. The proposed interpretation of fluorescence signal using dimensional analysis was well correlated with the viable cell weight estimated by the structured kinetic model as well as by empirical correlation.     

Multiresolution segmentation of respiratory electromyographicsignals

Analysis of respiratory electromyographic (EMG) signals in the study of respiratory control requires the detection of burst activity from background (signal segmentation), and focuses upon the determination of onset and cessation points of the burst activity (boundary estimation). The authors describe a new automated multiresolution technique for signal segmentation and boundary estimation. During signal segmentation, a new transitional segment is defined which contains the boundary between background a burst activity. Boundary estimation is then performed within this transitional segment. Boundary candidates are selected and a probability is attributed to each candidate, using an artificial neural network. The final boundary for a given transitional segment is the boundary estimate with the maximum a posteriori probability. This new method has proved accurate when compared to boundaries chosen by two investigators     

Dislocations in strained layers: The Ge-Si system

The Ge-Si on Si epilayer system, besides being an interesting technological system in its own right, is a superb model for strained-layer studies. The point defect and symmetry defect structures associated with compound semiconductors can be avoided, allowing a focus on the mechanics of the system. Dislocation sources, glide behavior, and performance effects have been examined for strained-layer systems. Surprises have appeared along the way, but these materials are now becoming characterized well enough for industrial device applications.     

Strength,toughness and R-curve behaviour of SiC whisker-reinforced composite Si3N4 with reference to monolithic Si3N4

The flexural strength and fracture toughness of 30 vol% SiC whisker-reinforced Si₃N₄ material were determined as a function of temperature from 25 to 1400°C in an air environment. It was found that both strength and toughness of the composite material were almost the same as those of the monolithic counterpart. The room-temperature strength was retained up to 1100°C; however, appreciable strength degradation started at 1200°C and reached a maximum at 1400°C due to stable crack growth. In contrast, the fracture toughness of the two materials was independent of temperature with an average value of 5.66 MPam^1/2. It was also observed that the composite material exhibited no rising R-curve behaviour at room temperature, as was the case for the monolithic material. These results indicate that SiC whisker addition to the Si₃N₄ matrix did not provide any favourable effects on strength, toughness and R-curve behaviour.     

Characterization of solid state array cameras for the mid-IR

We present a characterization of some processes affecting the performance of solid state array cameras designed for ground based astronomical imaging in the 8–13μm atmospheric window. Our discussion includes a novel model for electron-hole generationrecombination noise based on the probable pathlength of an electron in a photoconductor. We use the Berkeley mid-IR Array Camera as an example. For this camera, the results show that the total optical system composed of the camera, a 3m telescope, and the atmosphere has an efficiency of about 3%, a 1σ noise equivalent flux density of 25 mJy min^?1/2arcsec^?2 measured over a Δλ/λ=10% band width, and a noise equivalent expressed as the ambient temperature thermal black body noise of 23%.     

Non-linear properties of polymer cellular materials with a negative Poisson's ratio

Negative Poisson's ratio polymeric cellular solids (re-entrant foams) were studied to ascertain the optimal processing procedures which give rise to the smallest value of Poisson's ratio. The non-linear stress-strain relationship was determined for both conventional and re-entrant foams; it depended upon the permanent volumetric compression achieved during the processing procedure. Poisson's ratio of re-entrant foam measured as a function of strain was found to have a relative minimum at small strains. The toughness of re-entrant foam increased with permanent volumetric compression, and hence with density.     

Atmospheric Chemistry of 2-Ethyl Acrolein

The atmospheric oxidation of the unsaturated aldehyde 2-ethyl acrolein, CH₂=C(C₂H₅)CHO, has been studied in laboratory experiments involving the reaction of ozone with 2-ethyl acrolein in the dark (with cyclohexane added to scavenge the hydroxyl radical), and the sunlight irradiation of 2-ethyl acrolein with NO in air. The major carbonyl products of the 2-ethyl acrolein reaction with ozone are formaldehyde, acetaldehyde, and the dicarbonyl ethylglyoxal, CH₃CH₂COCHO. Sunlight irradiation of 2-ethyl acrolein and NO led to the formation of three carbonyls (formaldehyde, acetaldehyde, and ethylglyoxal) and three peroxyacyl nitrates, (RC(O)OONO₂), including PAN (R = CH₃), PPN (R = C₂H₅), and the unsaturated compound EPAN (R = CH₂=C(C₂H₅)). Mechanisms are outlined for the reactions of ozone and of the hydroxyl radical with 2-ethyl acrolein. These mechanisms are consistent with the observed carbonyl and peroxyacyl nitrate products. Thermal decomposition, a major atmospheric removal process for peroxyacyl nitrates, has been studied for EPAN. The decomposition rate of EPAN relative to that of PAN is 0.59–0.73 at 292–294 K and 1 atm of air. Atmospheric implications of these results are discussed.     

Activity of NiO in (Ni,Mg)O Solid Solutions

Disagreement exists in the literature concerting the activity of NiO in (Ni,Mg)O solid solutions. Ideal behavior, as well as strong positive deviations and strong negative deviations from ideality, has been reported. In the present study, the activity of NiO was determined by electromotive force measurements using the solid-state cell Pt/Ni-NiO/0.92ZrO₂-0.08Y₂O₃/Ni-(Ni,Mg)O/Pt. The compositions studied had NiO mole fractions of 0.1,0.3,0.5,0.7, and 0.9. In agreement with theoretical expectations, the solid solutions exhibited ideal behavior at 882° and 982°C. Possible reasons for the conflicting results in the literature arc presented.     

Control of circulating current in two parallel three-phase boost rectifiers

One unique feature in parallel three-phase converters is a potential zero-sequence circulating current. To avoid the circulating current, most present technology uses an isolation approach, such as transformers or separate power supplies. This paper proposes a parallel system where individual converters connect both AC and DC sides directly without additional passive components to reduce size and cost of the overall parallel system. In this case, the control of the circulating current becomes an important objective in the converter design. This paper: (1) develops an averaged model of the parallel converters based on a phase-leg averaging technique; (2) a zero-sequence model is then developed to predict the dynamics of the zero-sequence current; (3) based on the zero-sequence model, this paper introduces a new control variable, which is associated with space-vector modulation; (4) a strong zero-sequence current control loop is designed to suppress the circulating current; and (5) simulation and experimental results validate the developed model and the proposed control scheme.