Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing

Amorphous carbon layers (ACLs) were prepared by plasma enhanced chemical vapor deposition (PECVD) from 1-hexene (C₆H₁₂) and propylene (C₃H₆) as a carbon source at different temperatures for dry etch hard mask of semiconductor devices manufacturing process. The deposition rate of ACL deposited at 550 °C from C₆H₁₂ and C₃H₆ was 5050 Å/min and 6360 Å/min. Although the deposition rate of ACL deposited from C₆H₆ was lower than that from C₃H₆, normalized deposition rate of ACL deposited from C₆H₁₂ was 1.64 times higher than that from C₃H₆. The relative amount of hydrocarbon contents measured by FTIR (Fourier transformation infrared) and TDS (thermal desorption spectroscopy) was decreased with the increase of deposition temperature. Raman results showed that the numbers and size of graphite cluster of ACLs deposited from each source were increased with the increase of deposition temperature. The extinction coefficient of ACL deposited at 550 °C from C₆H₁₂ was 0.51 and that from C₃H₆ was 0.48. The density of ACL deposited at 550 °C from C₆H₁₂ was 1.48 g/cm³ and that from C₃H₆ was 1.45 g/cm³. The dry etching rate of ACL deposited at 550 °C from C₆H₁₂ was 1770 Å/min and that from C₃H₆ was 1840 Å/min. The deposition rate, dry etch rate and the amount of hydrocarbon contents of ACLs deposited from each carbon source were decreased with the increase of deposition temperature but extinction coefficient and density were increased with the increase of deposition temperature. We concluded that the variation behavior of the deposition characteristics and film properties of ACLs from C₆H₁₂ with the increase of deposition temperature was the same as those of ACLs from C₃H₆. The high density and low dry etch rate of ACL from C₆H₁₂ can be explained by less hydrocarbon incorporation during deposition and these properties are more favorable for the dry etch hard mask application in semiconductor device fabrication.     

Evaluation of transmitral flow velocity profile in supine and sitting positions by pulsed Doppler echocardiography in elderly hypertensives

To evaluate left ventricular diastolic filling properties in elderly hypertensive case with left ventricular hypertrophy (LVH), we investigated the influence of postural change from a supine to sitting position on transmitral flow velocity profile as assessed by pulsed Doppler echocardiography in 12 normotensives (N group) and 24 hypertensives, aged 65 to 80 years. Hypertensive subjects were divided into two groups on the basis of left ventricular mass index (LVMI): 12 hypertensives without LVH (H1 group; LVMI < 130 g/m2); 12 hypertensives with LVH (H2 group; LVMI > 130 g/m2). Peak early filling velocity (E), peak atrial filling velocity (A) and the E/A ratio were similar in the three groups in the supine position. The postural change decreased E and A in N and H1 groups. On the other hand, the change decreased E, but not A in the H2 group. The E/A ratio was decreased in the H2 group compared with both the N and H1 group in the sitting position. As a result, the sitting position increased atrial contribution to diastolic filling in the H2 group. These observations indicate that a reduction in preload changes the transmitral flow velocity profile in elderly hypertensives with left ventricular hypertrophy. The Doppler alterations may be related to impaired left ventricular diastolic function.     

Characterization of a polychromatic neutron beam diffracted by pyrolytic graphite crystals

The beam spectrum for polychromatic neutrons diffracted by pyrolytic graphite crystals was characterized. The theoretical beam spectrum was obtained using the diffraction model for a mosaic crystal. The lattice vibration effects were included in the calculation using the reported vibration amplitude of the crystal and the measured time-of-flight spectra in the thermal region. The calculated beam spectrum was compared with the results obtained in the absence of thermal motion. The lattice vibration effects became more important for the higher diffraction orders and a large decrease in the neutron flux induced by the vibrations was identified in the epithermal region. The validity of the beam spectrum was estimated by comparing with the effective quantities determined from prompt γ-ray measurements and Cd-ratios measured both for 1/ν and non-1/ν nuclides.     

A micro flow cell cytometry based on MEMS technologies using silicon and optical fibers

In this paper, we tested multi-mode optical fibers to select a suitable fiber for effective flow of cell cytometry. In order to align micro nozzle and multi-mode optical fibers, a guide channel was fabricated by silicon wafer etching with MEMS (Micro Electro-Mechanical System) technologies. The fabricated system is advantageous due to its low cost and simplicity in construction. It is possible because multi-mode optical fibers replace many optical lenses and expensive equipment. As a result of the flow cell cytometry using multi-mode optical fibers for both input and output, it is easy to align and we can reduce power consumption. The sensitivity of the micro flow cell cytometry is much better than other cytometries. The output voltage was as high as 300 mV. We injected various cells through the designed and fabricated flow cell cytometry, and we were able to detect cells. Every cell has its own cellulose and wall which cause different light permeability; therefore, we could get different voltage characteristics according to different cells. From the experimental results, we were able to count the number of cells and differentiate the relative size of the injected cells; therefore, we can use the micro flow cell cytometry for analyzing cells [1, 2].     

Stress and strain partition in elastic and plastic deformation of two phase alloys

A stress and strain partition theory for two phase alloys was developed on the basis of the modified rules of mixtures. The extreme value condition of macroscopic strain energy density was found through Lagrangian multiplier method. Expressions for macroscopic elastic constants of two phase alloys were derived from the extreme value condition by assuming the strain linearity between constituent phases. Governing equation for stress and strain partition in plastic deformation was also obtained from the extreme value condition. The calculated elastic constants of WC-Co alloys fell invariably within the Hashin and Shtrikman's bounds. According to the governing equation the stress ratio between constituent phases was plotted as a function of strain increment ratio. By applying the governing equation to spheroidized carbon steel and duplex stainless steel, it was shown that the stress ratios, strain ratios, macroscopic stress-strain curves, and internal stresses could be evaluated from thein situ stress-strain curves of constituent phases.     

Fast full search motion estimation algorithm using early detection of impossible candidate vectors

To reduce the amount of computations for a full search (FS) algorithm for fast motion estimation, we propose a new and fast FS motion estimation algorithm. The computational reduction of our FS motion estimation algorithm comes from fast elimination of impossible motion vectors. We obtain faster elimination of inappropriate motion vectors using efficient matching units from localization of a complex area in image data. In this paper, we show three properties in block matching of motion estimation. We suggest two fast matching scan algorithms: one from adaptive matching scan and the other from fixed dithering order. Experimentally, we remove the unnecessary computations by about 30% with our proposed algorithm compared with the conventional fast FS algorithms.     

Gamma irradiation and ozone treatment for inactivation of Escherichia coli O157:H7 in culture media

A study was conducted to investigate the reduction and elimination of Escherichia coli O157:H7 by the effects of gamma irradiation and ozone treatment. Log phase cells were found to be more sensitive to gamma irradiation than stationary phase cells. E. coli O157:H7 was found to be considerably more resistant to irradiation at -18 degrees C than at 20 degrees C. The D values for this organism for treatment with ozone in tryptic soy agar were higher than those for treatment with ozone in phosphate buffer. Gamma irradiation at a dose of 1.5 kGy or ozone treatment at a concentration of 3 to 18 ppm for 20 to 50 min was required to assure the elimination of E. coli O157:H7.     

Reproducibility of spasm in patients with long-term remission of vasospastic angina by medical treatment

No single musculoskeletal disorder has generated more passionate discussion than bone osteonecrosis. Surprisingly, its physiopathogenesis remains largely unknown despite in-depth studies. Its treatment is still debated, and its wide range of clinical manifestations which vary from totally asymptomatic to the catastrophic event of irreversible epiphyseal collapse remains a fascinating question for the clinicians (1-4). Magnetic Resonance (MR) imaging has given a large tribute to the discussion during the last decade by allowing detection of marrow infarcts at a presymptomatic period of the disease, thus providing data on its natural history. Unfortunately, MR imaging has also contributed to increase the confusion among various epiphyseal disorders. The aim of the current paper is to provide an overview of the current knowledge of imaging features by stressing accepted data and delineating blind areas.     

The design and analysis of an ATM multicast switch with adaptivetraffic controller

The paper describes several improvements to a nonblocking copy network proposed previously for multicast packet switching. The improvements provide a complete solution to some system problems inherent in multicasting. The input fairness problem caused by overflow is solved by a cyclic running adder network (CRAN), which can calculate running sums of copy requests starting from any input port. The starting point can change adaptively in every time slot based on the overflow condition of the previous time slot. The CRAN also serves as a multicast traffic controller to regulate the overall copy requests. The throughput of a multicast switch can be improved substantially if partial service of copy request is implemented when overflow occurs. Call-splitting can also be implemented by the CRAN in a straightforward manner. Nonuniform distribution of replicated packets at outputs of the copy network may affect the performance of the following routing network. This output fairness problem due to underflow is solved by cyclically shifting the copy packets in every time slot. An approximate queueing model is developed to analyze the performance of this improved copy network. It shows that if the loading on each output of the copy network is maintained below 80%, the average packet delay in an input buffer would be less than two time slots     

柔性有源OLED显示器制造几点技术方面的考虑

AMOLED在柔性显示领域前途似锦。LG显示展示了一款全彩4in柔性AMOLED样机,衬底为80μm厚的不锈钢薄片,曲率达到5cm弯曲半径。本文就此项柔性显示技术所面临的挑战进行了探讨．包括柔性衬底衬底的传送、如何获得特性稳定可靠的TFT以使OLED的亮度和一致性适用于此项技术的商业化推广。