Characterization and comparison of PECVD silicon nitride and silicon oxynitride dielectric for MIM capacitors

In this letter, we report on the electrical characteristic and the comparison of the metal-insulator-metal (MIM) capacitors with PECVD silicon nitride (SiN) and silicon oxynitride (SiON). Both capacitors are found to exhibit low leakage and high breakdown field strength, as well as absence of dispersive behavior, good linearity, and comparable quality factor behaviors.     

Discrete Modeling and Suggested Measurement of Heat Transfer in Gas-Solids Flows

This article presents a two-dimensional transient model for gas-solids flow and heat transfer through pipes using the coupled Computational Fluid Dynamics and Discrete Element Method approach. Numerical simulations have been conducted to examine the modification of fluid thermal structure due to the presence of particles in a pneumatic transport pipeline. Modeled results have demonstrated the key role of transversal motion of rebounding particles in the pipe cross section in altering fluid temperature. Further implementation of this modeling technique in air-drying processes is discussed and possible experimental methods for the measurement of in situ particle and fluid motion and temperature profile are cited.     

Mechanical stress control in a VLSI-fabrication process: a method for obtaining the relation between stress levels and stress-induced failures

An ideal fabrication process is designed to minimize mechanical stress in semiconductor devices and to improve device reliability. Mechanical stress levels were predicted by in-house simulations supported by a thin-film database. These stress levels were correlated with stress-induced defects by TEM analysis supported by fail bit addressing on matured megabit SRAMs. Amorphous-doped silicon film with various annealing temperatures were used for the gate electrode to change the mechanical stress in devices and to get the direct relationship between predicted stress levels and stress related defects. The authors describe brief guidelines for suppressing dislocations in the small geometry shallow-trench isolation process utilizing this system. Polysilicon thickness in the W-polycide gate electrode is designed to minimize mechanical stress in the gate oxide and to suppress the gate oxide failure in probe and class tests. Moreover, critical stress generates dislocations during post source/drain ion implantation anneal obtained by a ball indentation method. This indicated that lower temperature anneal is effective in suppressing the dislocations. A two-step anneal was introduced to suppress dislocations and to enable higher ion activation.     

Evaluating the stabilisation degree of digested sewage sludge: investigations at four municipal wastewater treatment plants.

Further reduction of volatile suspended solids (VSS) during a post-stabilisation step was applied to evaluate the stabilisation degree of digested sewage sludge. For this purpose digested sludge was collected at four municipal wastewater treatment plants (WWTPs) and further stabilised in lab-scale chemostat reactors either under anaerobic or aerobic conditions. Experimental results showed that even in adequately digested sludge a consistent amount of VSS was degraded during aerobic post-stabilisation. It seems that aerobic conditions play a significant role during degradation of residual VSS. Additionally, specific VSS production (gVSS/peCOD110.d) as well as specific oxygen uptake rate were shown to be suitable parameters to assess the degree of sludge stabilisation at WWTPs. Fourier transform infrared spectroscopy was used to reveal changes in the sludge composition. Spectra of treated and untreated sludge samples indicated that the major component of residual VSS in stabilised sludge for instance consisted of biomass, while cellulose was absent.     

Manipulation of microenvironment with a built-in electrochemical actuator in proximity of a dissolved oxygen microsensor

Biochemical sensors for continuous monitoring require dependable periodic self diagnosis with acceptable simplicity to check its functionality during operation. An in-situ self-diagnostic technique for a dissolved oxygen microsensor is proposed in an effort to devise an intelligent microsensor system with an integrated electrochemical actuation electrode. With a built-in platinum microelectrode that surrounds the microsensor, two kinds of microenvironments, called the oxygen-saturated or oxygen-depleted phases, can be created by water electrolysis, depending on the polarity. The functionality of the microsensor can be checked during these microenvironment phases. The polarographic oxygen microsensor is fabricated on a flexible polyimide substrate (Kapton) and the feasibility of the proposed concept is demonstrated in a physiological solution. The sensor responds properly during the oxygen-generating and oxygen-depleting phases. The use of these microenvironments for in-situ self-calibration is discussed to achieve functional integration, as well as structural integration, of the microsensor system.     

High voltage (>1kV) and high current gain (32) 4H-SiC power BJTs using Al-free ohmic contact to the base

This letter reports the design and fabrication of 4H-SiC bipolar junction transistors with both high voltage (>1kV) and high dc current gain (/spl beta/=32) at a collector current level of I/sub c/=3.83A (J/sub c/=319 A/cm/sup 2/). An Al-free base ohmic contact has been used which, when compared with BJTs fabricated with Al-based base contact, shows clearly improved blocking voltage. A specific on-resistance of 17 m/spl Omega//spl middot/cm/sup 2/ has been achieved for collector current densities up to 289 A/cm/sup 2/.     

Influence of Solution Composition on the Formation of Crystalline Scales

Scale formation is a difficulty encountered with water containing ions of sparingly soluble salts that can readily precipitate on heat transfer surfaces in evaporative concentration operations. Scale formation, hindering the heat transfer process, increases specific energy consumption and operating costs and causes frequent shut down of the evaporator for cleaning. The effects of changes in composition of the solution due to evaporation and CO₂ release on the formation of crystalline scales in seawater evaporators are studied. A model that predicts the CO₂ release is presented. The carbonate system in the salt solution on its whole flow path through the evaporator and the scaling (crystallization) tendency are described. Simulation results for different process configurations are shown and the differences are discussed, particularly with regard to the incrustation tendency.