Knowledge-directed inspection for complex multilayered patterns

Combining the knowledge-based processing with image processing is considered a key issue in the future of visual inspection of complex patterns such as multilayered semiconductor wafers. However, present technology restricts this combination, mainly because of the exhaustively long time usually required for each type of processing. To cope with this situation, a unique knowledge-directed image processing method is proposed, in which every image processing step is controlled in real time by parametric knowledge driven by design patterns. The resulting structure of the image processor is a pipeline, in which each piece of knowledge is embodied as a combination of a hardware processing unit and control unit. In this paper the types of knowledge and their implementation are explained, and an inspection machine for logic IC wafers based on this pipelined knowledgedirected image processing is introduced.     

An anaerobic bacterium isolated from Japanese spiny lobster Panulirus japonicus

Eight strains of bacteria which could not grow under aerobic conditions, were isolated from Japanese spiny lobster. All the strains were Gram-positive, non-sporeforming cocci, and grew well under anaerobic conditions. The strains required a decreased oxygen tension rather than an increased CO₂ tension. Catalase, oxidase, nitrate reductase and urease were not produced. The strains fermented glucose, cellobiose, trehalose and levulose. Indole and H₂S were not produced. Macromolecule substances including starch, esculin, casein, gelatin and chitin were not hydrolyzed. Lactic acid was the sole product from peptone-yeast extract-Fildes solution-glucose broth. Fermentable carbohydrates were not required. The strains could grow at 20 to 37°C, and required NaCl for growth. From the above results, the strains were identified as anaerobic (aerotolerant) Streptococcus sp.     

Density and viscosity of tetralin and trans-decalin

New measurements are reported for the density and viscosity of tetralin and trans-decalin. The density was determined from room temperature to 60°C for tetralin and to 95°C for trans-decalin. The kinematic viscosity was measured up to temperatures slightly above 100°C. Our results improve upon the values recommended by the American Petroleum Institute for these liquids.     

Investigation of Ozone Concentration Measurement by Visible Photo Absorption Method

The measurement of ozone concentration based on the visible photo absorption method is investigated. An LED having an emission peak at 609 nm and a photo diode sensitive at visible light frequencies are used as the light source and the photo detector, respectively. The transmittance is measured as a function of ozone concentration, which is in reasonable agreement with the Beer–Lambert relationship. The effective absorption cross-section can therefore be estimated from the fitting procedure. The concentrations determined by both the UV and visible photo absorptions agree well with each other in the range from 7.1 to 68.4 g/m³(N). The relative error in these concentrations is discussed on the basis of the Twyman–Lothian curve. The ozone measurement for the air-fed ozone generation is also investigated. The effect of photo absorption due to NOx species is unavoidable. The present results provide useful data if the ozone measurement based on the visible photo absorption method is applied to ozone monitoring instruments or used for laboratory experiments.     

Electrical conductivity of metastable κ-CeZrO4 phase possessing ordered arrangement of Ce and Zr ions

Electrical conductivity σ_t of metastable κ-CeZrO₄ possessing ordered arrangement of Ce and Zr ions in a manner similar to a pyrochlore-type was measured as a function of temperature and time, and compared with tetragonal metastable t′-(Ce_0.5Zr_0.5)O₂ and t′_meta-(Ce_0.5Zr_0.5)O₂ phases possessing random arrangement of the cations. The κ disk was prepared by reoxidizing a pyrochlore-type precursor in O₂ gas at 873 K. The σ_t as measured for the κ-CeZrO₄ was reproducible as a function of temperatures between 957 and 1190 K. At increasing temperatures above 1233 K, the σ_t decreased gradually with time due to the phase transition: κ→t′, and became consistent with the t′. Although the κ-CeZrO₄ phase is thermodynamically less stable than the t′-(Ce_0.5Zr_0.5)O₂, it was virtually stable up to around 1233 K. It was found from the change in the σ_t due to the phase transition that the σ_t for the metastable κ-CeZrO₄ was an order of magnitude higher than that for the t′ and was similar to that for the t′_meta. It was previously reported that a phase transition, t′_meta→t′, occurred above 1143 K. The phase transition, κ→t′, accompanied by redistribution of the cations appeared to occur at higher temperatures than that for t′_meta→t′ leaving random cation arrangement.     

Heat transfer characteristics of a reservoir embedded loop heat pipe (Heat transfer characteristics of a deployable radiator for use on the ETS‐VIII satellite while in orbit)

As heat generation in satellites increases, ensuring that they are provided with sufficient radiator panel area is an important problem. Deployable radiators, with radiator panels that are deployed post‐launch in space to increase the satellite's effective radiator panel area of the satellite, are becoming an important thermal control technology. A reservoir embedded loop heat pipe (RELHP) is used in deployable radiators as a heat transport device. A deployable radiator of this type was mounted on the ETS‐VIII satellite, which was launched on December 18, 2006 and injected into a geostationary orbit. The satellite is still operating without any significant issues over two years later. This paper investigates the heat transport characteristics of an RELHP system used in a deployable radiator in a geostationary orbital environment. This system can be successfully started up in a micro gravity environment. We also found that the sub‐cooling region is shorter in a micro gravity environment than in a terrestrial gravity environment, because there is less heat leakage into the reservoir in a micro gravity environment. © 2011 Wiley Periodicals, Inc. Heat Trans Asian Res; Published online in Wiley Online Library ( wileyonlinelibrary.com/journal/htj ). DOI 10.1002/htj.20346