Fabrication of sub-micron structures for MEMS using deep X-ray lithography

Fabrication techniques of microstructures with high resolution and high aspect ratio are necessary for practical microelectromechanical systems (MEMS) that have high performance and integration. In order to fabricate microstructures with sub-micron resolution and high aspect ratio, deep X-ray lithography has been investigated using the compact synchrotron radiation (SR) light source called “AURORA”. An X-ray mask for sub-micron deep X-ray lithography, which is composed of 1 μm thick Au as absorbers, 2 μm thick SiC as a membrane and 625 μm thick Si as a frame, was designed. In preliminary experiments, the following results were achieved: EB resist microstructures with an aspect ratio of 22 corresponding with 0.07 μm width and 1.3 μm height were formed; a 10 μm thick PMMA resist containing no warp was formed by direct polymerization, enabling more precise gap control.     

Nonlinear adaptive control system design and experiment for a 3-DOF model helicopter

This paper deals with model following control of a model helicopter with three degree-of-freedom. Since the decoupling matrix is singular, a nonlinear structure algorithm is used to design the controller. Furthermore, since the model dynamics are described linearly by unknown system parameters, a well-known parameter estimation technique is introduced. The integral type of estimation model is proposed here since the use of the derivative type of model cannot obtain the desired estimation result. The experimental results show the effectiveness of the proposed method. This work was presented in part at the 13th International Symposium on Artificial Life and Robotics, Oita, Japan, January 31–February 2, 2008     

A 60-GHz point-to-multipoint millimeter-wave fiber-radio communication system

A 60-GHz point-to-multipoint wireless access link with data rate of 156 Mb/s incorporating 60-GHz transceiver modules and full-duplex fiber-optic millimeter-wave transmission is developed for short-range applications such as indoor wireless local area networks and intelligent transport systems. For compact system configuration, a small-size millimeter-wave transceiver module with planar antennas is developed. The transceiver module is based on broadband planar integration and packaging of millimeter-wave circuits. The RF output power is +10 dBm and the measured 3-dB antenna beamwidth is 30/spl deg/. The total size of the developed 60-GHz transceiver module, except input and output connectors, is 50 mm /spl times/ 75 mm /spl times/ 35 mm. A point-to-point full duplex fiber-optic configuration is extended to the scheme with multiple access points (APs) by using a tree coupler and a dense wavelength division multiplexing multiplexer. The AP has a simple configuration without frequency conversion. The bit error rate and packet error rate performances of the 60-GHz fiber-radio access link are evaluated. Furthermore, the effect of the extension to the scheme with multiple APs is investigated.     

FRP补强疲劳损伤钢结构裂纹扩展研究

钢结构在服役过程中,因超载、疲劳等原因会引起损伤累积,极大地影响了结构的安全使用.对纤维增强复合材料(FRP)补强钢结构张开型裂纹疲劳扩展进行了实验研究.比较了不同的钢结构表面处理方式对FRP与钢结构粘接接头剪切强度的影响,根据剪切强度选择最佳表面处理工艺.对FRP补强后钢结构试样进行疲劳实验,与未补强试样的结果加以对比.结果表明,用FRP增强后钢结构FRP增强区疲劳裂纹扩展速率得到抑制、疲劳循环次数得到了提高.     

An atomic force microscope study of surface roughness of thin silicon films deposited on SiO/sub 2/

Atomic force microscope analysis, with a resolution of /spl lsim/1.1 nm, shows that peak-to-peak surface roughness (/spl Delta/h/sub p-p/) of amorphous silicon films thinner than /spl ap/50 nm on silicon dioxide can be controlled to better than 5 nm. Low-pressure, chemically-vapor-deposited silicon films on silicon dioxide initially show an approximately linear increase in the surface roughness due to growing nuclei as the deposition progresses, followed by a decrease in the surface roughness as growth nuclei coalesce. A simple model based on random nucleation and nuclei growth displays similar trends. Films deposited on rougher substrates show more surface roughness. Surface treatment during the predeposition cleaning process does not significantly affect /spl Delta/h/sub p-p/. As a means of producing smooth surfaces, films thinner than about 20 nm are first deposited more thickly than needed, and then etched back to the desired dimension; the use of a binary HNO/sub 3/ and HF etching process improves roughness control. Boron-ion implanted and subsequently crystallized 45-nm-thick Si films show significant smoothing with /spl Delta/h/sub p-p//spl ap/2.2 nm. Thin amorphous silicon films deposited by source evaporation are attractive because they can be deposited at room temperature, and have smoother surfaces (/spl Delta/h/sub p-p//spl ap/2.5 nm) than comparable films produced by chemical vapor deposition.     

Static Coarse Grain Task Scheduling with Cache Optimization Using OpenMP

Effective use of cache memory is getting more important with increasing gap between the processor speed and memory access speed. Also, use of multigrain parallelism is getting more important to improve effective performance beyond the limitation of loop iteration level parallelism. Considering these factors, this paper proposes a coarse grain task static scheduling scheme considering cache optimization. The proposed scheme schedules coarse grain tasks to threads so that shared data among coarse grain tasks can be passed via cache after task and data decomposition considering cache size at compile time. It is implemented on OSCAR Fortran multigrain parallelizing compiler and evaluated on Sun Ultra80 four-processor SMP workstation using Swim and Tomcatv from the SPEC fp 95. As the results, the proposed scheme gives us 4.56 times speedup for Swim and 2.37 times on 4 processors for Tomcatv respectively against the Sun Forte HPC Ver. 6 update 1 loop parallelizing compiler.     

Rolling and swaying motion estimation for a mobile robot by using omnidirectional optical flows

Described here is a method for estimating rolling and swaying motions of a mobile robot using optical flow. We have proposed an image sensor with a hyperboloidal mirror for the vision-based navigation of a mobile robot. Its name is HyperOmni Vision. The radial component of optical flow in HyperOmni Vision has a periodic characteristic. The circumferential component of optical flow has a symmetric characteristic. The proposed method makes use of these characteristic to estimate robustly the rolling and swaying motion of the mobile robot. Correspondence to: Y. Yagi e-mail: y-yagi@sys.es.osaka-u.ac.jp     

Czochralski growth of Yb doped oxyapatite for high power laser application

Ca₈(La,Yb)₂(PO₄)₆O₂ (Yb:CLPA) single crystals with the apatite-type structure could be grown from the melt using the Czochralski method. Grown crystal was 18 mm in diameter and 110 mm in length. It is transparent with slightly blue color. Neither visible inclusion nor crack was observed. Thermal conductivity of Yb:CLPA was calculated from the values of thermal diffusivity, heat capacity measurement and density. Luminescent characterization was carried out from the results of emission, absorption and Raman spectrum.