A high resolution negative working resist,LMR-UV,for g- and i-line lithography

LMR-UV (“low molecular weight resist for uv lithography”), a naphthoquinone-diazide sulfonic acid ester of a novolak resin, is a negative working resist. The mechanism of insolubilization of LMR-UV is based on the facts that the naphthoquinone-diazide moiety is decomposed to indenecarboxylic acid (polar compound) by photolysis upon UV irradiation and that the irradiated resist film insolubilizes in a non-polar developer. LMR-UV reliably forms 0.6 μm lines and spaces over a reflective substrate with steps by using a g-line stepper having a 0.35 NA lens. 0.6 μm-wide aluminum patterns over topography are obtained by use of g-line exposure and reactive ion etching. By use of an i-line aligner (NA = 0.42), LMR-UV resolves 0.25 μm space patterns with overhang profiles. The profiles are due to the large absorption coefficient of 3.8 μm^?1. 0.3 μm wide aluminum patterns are formed by i-line exposure and lift-off metallization.     

Multichannel fiber ferrule for a stable laser-diode array module

We developed a multichannel fiber ferrule for a stable laser-diode array module. To apply YAG laser welding to parallel butt couple between the laser-diode and the single-mode fiber arrays, hermetically sealed and precisely aligned equi-interval fibers are required. We describe a V-grooved ceramic ferrule for embedding fibers. Fibers are fixed by soldering, using a flat ceramic lid and aligned with a 250 μm pitch. Our ferrule allowed a metallic, stem mounting laser-diode, to be fixed by YAG laser welding. All 30 samples tested have a leak rate of less than 1×10^-10 atm·cc/s. Optical coupling of fabricated modules was 9.7±0.2 dB and coupling loss change from 25°C to 115°C was within 0.5 dB     

An investigation of induced voltages to an underground gas pipeline from an overhead transmission line

This paper investigates induced voltage characteristics from an overhead transmission line by applying a method of modeling of induced voltages proposed by the authors. EMTP simulation results obtained by the modeling method agree with analytical results obtained from a well‐known formula. The induced voltages are significantly dependent on the configuration of the overhead line. A horizontal line induces the largest voltage in a gas pipeline, and the voltage induced by a vertical twin‐circuit line is about 20% smaller than that induced by a vertical single‐circuit line. The method is applied to a real pipeline system and the simulation results show reasonable agreement with field test results. © 2008 Wiley Periodicals, Inc. Electr Eng Jpn, 164(1): 43–51, 2008; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.20465     

Changes in the thermomechanical behavior of epoxy glasses under the state of strain aging

Changes in thermomechanical behavior with structural relaxation taking place in epoxy glasses were studied. Differential scanning calorimetry measurements and thermostimulated strain recovery tests were performed for specimens deformed and then aged under fixed strain. In the course of heating, the specimens started to absorb thermal energy, whereas plastic strain was still stable. At higher temperatures, plastic strain started recovery, which was accompanied by exothermic behavior of the specimen. With an increase in the aging duration, the endothermic peak signified and moved to a higher temperature. These results indicated that the longer the aging duration was, the harder the plastic strain and strain energy were frozen in the glassy structure. This freeze‐strain phenomenon was observed for crosslinked epoxy glass, as well as polymeric glasses with linear molecular structures, aged under strain. © 2007 Wiley Periodicals, Inc. J Appl Polym Sci, 2008     

Synthesis and applications of fluoroalkyl end-capped cooligomers having fullerene and mixed fullerenes in the main chain

Fluoroalkanoyl peroxides reacted with FULLERENES [fullerene (C₆₀) and commercially available fullerenes (Nanom Mix^TR and Nanom Black^TR)] and radical polymerizable comonomers such as acrylic acid, N,N-dimethylacrylamide, N-(1,1-dimethyl-3-oxobutyl)acrylamide, and acryloylmorpholine to afford fluoroalkyl end-capped cooligomers having FULLERENES in the main chain under very mild conditions. Fluoroalkyl end-capped Nanom Mix and Nanom Black cooligomers thus obtained were found to exhibit a similar solubility to that of the corresponding fluoroalkyl end-capped cooligomers having fullerene in the main chain. These fluorinated FULLERENES cooligomers were found to form the nanometer size-controlled self-assembled cooligomeric aggregates in aqueous solutions. These fluoroalkyl end-capped FULLERENES cooligomers were more effective for solubilizing fullerene, Nanom Mix and Nanom Black into water, compared to those of the corresponding fluoroalkyl end-capped homooligomers having no FULLERENES in the main chain. Fluoroalkyl end-capped fullerene- and Nanom Mix-acrylic acid cooligomers were found to exhibit fluorescence spectra related to fullerene and Nanom Mix in cooligomers, respectively, in aqueous solutions. Additionally, these fluorinated fullerene- and Nanom Mix-acrylic acid cooligomers were able to increase chemiluminescence intensity related to luminol, effectively, compared to the corresponding fluorinated acrylic acid homooligomers.     

Frequency response function of magnetic bearings using high-temperature superconductor

A high-temperature superconductor YBa₂Cu₃O_7-x with strong pinning force has allowed stable magnetic suspension with no control to be developed. Two types of superconducting magnetic bearings (SMB) using YBCO and permanent magnet were assembled. The two types are radial and axial. The dynamic stiffness of each SMB as it was cooled down under a magnetic field by liquid nitrogen was measured both radially and axially. As a result, it was found that the spring constants of these SMBs were almost as large as a practically desirable value; however, their damping coefficients were lower than the practical level. These findings are useful as one of the data bases for development of an optimum SMB design to support the weight of rotors in an axial direction.     

Radiation tolerance of type IIa synthetic diamond detector for 14 MeV neutrons

Radiation tolerance of a type IIa synthetic diamond detector was examined from irradiation of mono-energetic 14 MeV neutrons. Measurements of I–V (current–voltage) characteristics and energy spectrum for 5.486 MeV alpha particles were performed after neutron irradiation. In the I–V characteristics measurement, enhancement of rectification was observed after neutron irradiation of up to 2.0 × 10¹² n/cm². Concurrently with the enhancement of rectification, significant decrease in signal amplitude was observed in energy spectrum measurement for alpha particles. It is considered that these changes were due to increase in the concentration of defects acting as shallow energy levels in the forbidden band. For neutron irradiation of higher than 1.6 × 10¹³ n/cm², weakening of the rectification characteristics and recovery of the signal amplitude were observed. These changes imply that deep energy levels, which were also considered to be introduced by defects, were dominant and weakened the effects of the shallow energy levels. Increase in the concentration of the deep trapping levels resulted in gradual decrease of the signal amplitude and degradation in the energy resolution. The peak for the alpha particles was obtained up to 5.5 × 10¹³ n/cm².     

Multiobjective dynamic load-dispatching method for optimal operation of power systems

A new practical method is proposed which gives a quasi-optimal solution of the dynamic load-dispatching problem formulated by a multiconstraint multiobjective optimization problem. Here, the multiple constraints are rate reserve constraints and power flow ones, and the multiple objectives are fuel cost and CO₂ emission. The proposed method is an integration of the following three techniques: (1) “Group Dispatch Scheme,” which is developed by the authors, is used to satisfy a violated constraint easily. This scheme consists of three steps. The first step is to classify all generators into two groups. One is the group which should be more loaded to satisfy the violated constraint, and the other is the should-be less loaded group. The second step is to add some load to the former group, and to subtract the same load from the latter. The third step is to dispatch each group load to each groups generators, respectively; (2) the dynamic load-dispatching algorithm is used which provides, in practical time, quasi-optimal generation trajectories; (3) the conventional weighting parametric method is used to obtain a Pareto optimal solution of multiobjective problems. The effectiveness of the method is clarified by a computer simulation on the actual power system of Kansai Electric Power Company.