Systematic characterization of Cl2 reactive ion etchingfor improved ohmics in AlGaN/GaN HEMTs

Pre-metal-deposition reactive ion etching (RIE) was performed on an Al_0.3Ga_0.7N/AlN/GaN heterostructure in order to improve the metal-to-semiconductor contact resistance. An optimum AlGaN thickness for minimizing contact resistance was determined. An initial decrease in contact resistance with etching time was explained in terms of removal of an oxide surface layer and/or by an increase in tunnelling current with the decrease of the AlGaN thickness. The presence of a dissimilar surface layer was confirmed by an initial nonuniform etch depth rate. An increase in contact resistance for deeper etches was experienced. The increase was related to depletion of the two-dimensional (2-D) electron gas (2-DEG) under the ohmics. Etch depths were measured by atomic force microscopy (AFM). The contact resistance decreased from about 0.45 Ωmm for unetched ohmics to a minimum of 0.27 Ωmm for 70 Å etched ohmics. The initial thickness of the AlGaN layer was 250 Å. The decrease in contact resistance, without excessive complications on device processing, supports RIE etching as a viable solution to improve ohmic contact resistance in AlGaN/GaN HEMTs     

A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate

In this letter, a concise process technology is proposed for the first time to enable the fabrication of good quality three-dimensional (3-D) suspended radio frequency (RF) micro-inductors on bulk silicon, without utilizing the lithography process on sidewall and trench-bottom patterning. Samples were fabricated to demonstrate the applicability of the proposed process technology.     

基于智能网实现统一消息业务

统一消息业务（UMS）主要包括电子邮件转语音，电子邮件转传真，电子邮件转机，语音转电子邮件，传真转电子邮件等功能，讨论了统一消息业务的业务特征和业务实现体系结构。结合智能网的模型提出了基于智能网业务节点（ServiceNode)平台实现统一消息业务的方案。     

用于光城域网的新型RPR技术

介绍IEEE802.17正在进行标准化的弹性分组环(RPR,Resilient Packet Ring)协议,分析其帧结构及主要功能特色,并和SDH与以太网等现有城域网技术作简要对比;可以预见,随着标准化工作的进行,综合多种传输技术优势的RPR会成为创建下一代高速光城域网的首选技术。     

两种波长激光血管内照射生物效应比较

目的：研究同等照射条件的低强度532nm与633nm激光血管内照射生物效应的特点。方法：用532nm和633nm激光对健康大耳白家兔血管内照射，平均照射功率均设定在5mW左右，照射总能量约12J。两组家兔均于照前及照后1d、4d、7d、11d采集外周血，检测血浆ET、NO、MDA含量和SOD活性。结果：两组家兔上述各指标随照后时间的变化规律相似，经方差分析组间各指标都没有显著性差异。结论：同等照射条件下，低强度532nm与633nm激光照射血液的生物效应相似。     

胃肠道激光内镜应用技术

本文结合作者的体验和文献，详细介绍了激光光导纤维检查与准备，激光内镜在胃肠道疾病应用的技巧、方法和注意事项等，可为临床医生和相关技术人员提供帮助。     

Interfacial reactions in In-Sn/Ni couples and phase equilibria of the In-Sn-Ni system

The In-Sn-Ni alloys of various compositions were prepared and annealed at 160°C and 240°C. No ternary compounds were found; however, most of the binary compounds had extensive ternary solubility. There was a continuous solid solution between the Ni₃Sn phase and Ni₃In phase. The Sn-In/Ni couples, made of Sn-In alloys with various compositions, were reacted at 160°C and 240°C and formed only one compound for all the Sn-In alloys/Ni couples reacted up to 8 h. At 240°C, Ni₂₈In₇₂ phase formed in the couples made with pure indium, In-10at.%Sn and In-11at.%Sn alloys, while Ni₃Sn₄ phase formed in the couples made of alloys with compositions varied from pure Sn to In-12at.%Sn. At 160°C, except in the In/Ni couple, Ni₃Sn₄ formed by interfacial reaction.     

全有机配方在我公司的应用

介绍了成都齐达科技开发公司的全有机配方在该公司循环冷却水系统的应用     

大颗粒尿素造粒工艺简介

介绍了大颗粒尿素造粒工艺，着重介绍了荷兰NSM公司的流化床造粒技术和法国K－T公司的流化床转鼓造粒（FDG）技术。     

几种重要的有机氯系阻燃剂

介绍了氯化石蜡、氯化聚乙烯、四氯邻苯二甲酸酐、四氯双酚A、六氯环戊二烯 及由六氯环戊二烯衍生的几种氯系阻燃剂的生产过程和用途。