Gettering of iron in silicon by boron implantation

In this work we studied, both experimentally and theoretically the iron gettering by boron implantation. Sample material was p-type bulk silicon with resistivity of 21 Ωcm. Samples were iron contaminated and boron was implanted into the wafers using two different implantation doses of 4 × 10¹⁵ and 8 × 10¹⁵ cm^?2. After that various gettering annealings were performed. The results indicate that gettering cannot be explained by electronic interactions between interstitial iron and boron ions alone i.e. segregation gettering to heavily doped implantation region. It was found out that better agreement between experimental and simulation results is achieved if heterogeneous precipitation of iron to ion implantation induced damage is included in the simulations. Finally, the effects of high boron doping and gettering site morphology on iron precipitation are discussed.     

Reliability of parameter control with exponential error

We consider the problem of determining the reliability of control when measurement error depends on component parameters. The error model we use is a polynomial. Translated from Izmeritel'naya Tekhnika, No. 4, pp. 38–41, April, 2000.     

Analog Section of a Hadron–Electron Separator of the ZEUS Experiment (DESY)

Some special design features of the detector part of a hadron–electron separator of the ZEUS detector (DESY, Hamburg, Germany) are described. The test results for the basic components of the analog section of the front part of the separator manufactured by Russian factories are given.     

Kaolinitic clays as binders for molded zeolite adsorbents

Translated from Khimiya i Tekhnologiya Topliv i Masel, No. 2, pp. 12–13, February, 1991.     

A method for determining errors in measuring systems

Translated from Izmeritel'naya Tekhnika, No. 11, pp. 27–28, November, 1992.     

Recommendations on the preliminary estimate of the volume of fractured rock during commercial blasting excavation

G. M. Plekhanov Mining Institute, Leningrad. Translated from Fiziko-Tekhnicheskie Problemy Razrabotki Poleznykh Iskopaemykh, No. 1, pp. 45–49, January-February, 1992.