Atomic layer deposition and characterization of zirconium oxide-erbium oxide nanolaminates

ZrO₂ and Er₂O₃ thin films and nanolaminates were grown by atomic layer deposition from tris(2,2,6,6-tetramethyl-3,5-heptanedionato)erbium, bis(methylcyclopentadienyl)methoxymethylzirconium and ozone as precursors at 350 °C. Nanolaminates consisted of 3-8 nm thick ZrO₂ and Er₂O₃ layers alternately deposited on planar substrates and on three-dimensional substrates with aspect ratio 1:20. The erbium content was 5-15 at.%. ZrO₂-Er₂O₃ films crystallized already in as-deposited states. Upon annealing at 650 °C, the films were stabilized in the form of cubic or tetragonal ZrO₂ polymorph and cubic Er₂O₃. Dielectric properties of the nanolaminates were comparable to those of the constituent oxides.     

Characterisation of steam-treated nanoporous carbide-derived carbon of TiC origin: structure and enhanced electrochemical performance

Modifications of pore size distribution and structural order of nanoporous carbide-derived carbon (CDC) materials with variety of surface areas and pore sizes were investigated using physical activation by etching with water vapour. Variable etching duration was used to explore the activation impact on the pore size distribution and the adsorption behaviour of TiC-derived carbon. A distribution of micro- and mesopores, modified during physical activation, was studied using N₂ and CO₂ adsorption. Notable impact of preceding carbon structure on the activation product was revealed by the results of scanning electron microscopy, powder X-ray diffraction and Raman spectroscopy. An infrared spectroscopy, energy dispersive spectroscopy and X-ray photoelectron spectroscopy confirmed that water-induced etching of CDC followed by high-temperature treatment in inert gas atmosphere does not change notably the total amount of surface oxygen, however, leads to the changes in a composition of oxygen containing functional groups in post-activated carbon. The electrochemical evaluation was performed in triethylmethylammonium tetrafluoroborate/acetonitrile electrolyte to elaborate the structure-electrochemical properties relationships on post-activated nanoporous CDC materials. It was observed that the degree of improvement in double-layer capacitance achievable with a steam-treatment significantly depends on the preceding properties of CDC prior treatment, whereby the highest capacitance, ~?160 Fg^?1, was reached for the steam-treated TiC-derived CDC made at 800 °C, which clearly is a very promising material for the electrical double-layer capacitor.