Polycrystalline silicon-germanium films for integrated microsystems

Two approaches were demonstrated for fabricating microstructures after completion of CMOS circuits with aluminum metallization. The first approach employed n-type poly-Ge deposited at 400/spl deg/C as a structural material with an SiO/sub 2/ sacrificial layer and an HF release. The CMOS circuits were protected from the release etchant with an amorphous Si layer. Clamped-clamped lateral resonator test structures had quality factors in vacuum as high as /spl sim/30000. Following a 500/spl deg/C, 30 s RTA the poly-Ge stress was 200 MPa (tensile) and the resistivity was 5.3 m/spl Omega/-cm. In the second integration approach, p-type poly-Si/sub 0.35/Ge/sub 0.65/ deposited at 450/spl deg/C was the structural material with poly-Ge as the sacrificial material and H/sub 2/O/sub 2/ as the release etchant. The H/sub 2/O/sub 2/ did not significantly etch the p-type poly-SiGe structural layer and no protection of the underlying CMOS layers was needed. For the first time, the fabrication of LPCVD surface microstructures directly on top of standard electronics was demonstrated, providing dramatic reductions in both MEMS-CMOS interconnect parasitics and device area. A folded flexure lateral resonator had a quality factor in vacuum as high as /spl sim/15000. No stress or dopant-activation anneal was needed, since the in situ boron-doped poly-SiGe was found to have an as-deposited stress of only -10 MPa (compressive) and a resistivity of only 1.8 m/spl Omega/-cm.     

Deformable M-Reps for 3D Medical Image Segmentation

M-reps (formerly called DSLs) are a multiscale medial means for modeling and rendering 3D solid geometry. They are particularly well suited to model anatomic objects and in particular to capture prior geometric information effectively in deformable models segmentation approaches. The representation is based on figural models, which define objects at coarse scale by a hierarchy of figures—each figure generally a slab representing a solid region and its boundary simultaneously. This paper focuses on the use of single figure models to segment objects of relatively simple structure.A single figure is a sheet of medial atoms, which is interpolated from the model formed by a net, i.e., a mesh or chain, of medial atoms (hence the name m-reps), each atom modeling a solid region via not only a position and a width but also a local figural frame giving figural directions and an object angle between opposing, corresponding positions on the boundary implied by the m-rep. The special capability of an m-rep is to provide spatial and orientational correspondence between an object in two different states of deformation. This ability is central to effective measurement of both geometric typicality and geometry to image match, the two terms of the objective function optimized in segmentation by deformable models. The other ability of m-reps central to effective segmentation is their ability to support segmentation at multiple levels of scale, with successively finer precision. Objects modeled by single figures are segmented first by a similarity transform augmented by object elongation, then by adjustment of each medial atom, and finally by displacing a dense sampling of the m-rep implied boundary. While these models and approaches also exist in 2D, we focus on 3D objects.The segmentation of the kidney from CT and the hippocampus from MRI serve as the major examples in this paper. The accuracy of segmentation as compared to manual, slice-by-slice segmentation is reported.     

Structural Refinement of Systems Specified in Object-Z and CSP

This paper is concerned with methods for refinement of specifications written using a combination of Object-Z and CSP. Such a combination has proved to be a suitable vehicle for specifying complex systems which involve state and behaviour, and several proposals exist for integrating these two languages. The basis of the integration in this paper is a semantics of Object-Z classes identical to CSP processes. This allows classes specified in Object-Z to be combined using CSP operators. It has been shown that this semantic model allows state-based refinement relations to be used on the Object-Z components in an integrated Object-Z/CSP specification. However, the current refinement methodology does not allow the structure of a specification to be changed in a refinement, whereas a full methodology would, for example, allow concurrency to be introduced during the development life-cycle. In this paper, we tackle these concerns and discuss refinements of specifications written using Object-Z and CSP where we change the structure of the specification when performing the refinement. In particular, we develop a set of structural simulation rules which allow single components to be refined to more complex specifications involving CSP operators. The soundness of these rules is verified against the common semantic model and they are illustrated via a number of examples.     

Formal Verification Successes at Motorola

Formal tools are either too labor intensive or are completely impractical for industrial-size problems. This paper describes two formal verification tools used within Motorola, Versys2 and CBV, that challenge this assertion. The two tools are being used in current design verification flows and have shown that it is possible to seamlessly integrate formal tools into existing design flows.     

A novel method for measuring induction machine magnetizing inductance

This paper presents a novel method for measuring the magnetizing inductance of an induction machine. The approach uses a static DC excitation technique which can be employed whenever the neutral of the machine is accessible. The proposed method measures only the magnetizing inductance and not the self inductance which normally includes the effect of the stator leakage inductance. Because this test uses a DC excitation, the iron losses in the motor are considerably reduced as well and minimally influence the measurement when compared to the traditional 60-Hz no-load test. By using the proposed method for measuring only the magnetizing inductance, the stator leakage inductance can be later individually determined by performing a separate no-load test. Test results using the method are compared with theoretical values and confirm its feasibility.     

Knowledge-directed Adaptation in Multi-level Agents

Most work on adaptive agents have a simple, single layerarchitecture. However, most agent architectures support three levels ofknowledge and control: a reflex level for reactive responses, a deliberatelevel for goal-driven behavior, and a reflective layer for deliberateplanning and problem decomposition. In this paper we explore agentsimplemented in Soar that behave and learn at the deliberate and reflectivelevels. These levels enhance not only behavior, but also adaptation. Theagents use a combination of analytic and empirical learning, drawing from avariety of sources of knowledge to adapt to their environment. We hypothesize that complete, adaptive agents must be able to learn across all three levels.     

Post-pass partitioning of signal processing programs

Symmetric multiprocessor systems are increasingly common, not only as high-throughput servers, but as a vehicle for executing a single application in parallel in order to reduce its execution latency. This article presents Pedigree, a compilation tool that employs a new partitioning heuristic based on the program dependence graph (PDG). Pedigree creates overlapping, potentially interdependent threads, each executing on a subset of the SMP processors that matches the thread’s available parallelism. A unified framework is used to build threads from procedures, loop nests, loop iterations, and smaller constructs. Pedigree does not require any parallel language support; it is post-compilation tool that reads in object code. The SDIO Signal and Data Processing Benchmark Suite has been selected as an example of real-time, latency-sensitive code. Its coarse-grained data flow parallelism is naturally exploited by Pedigree to achieve speedups of 1.63×/2.13× (mean/max) and 1.71×/2.41× on two and four processors, respectively. There is roughly a 20% improvement over existing techniques that exploit only data parallelism. By exploiting the unidirectional flow of data for coarse-grained pipelining, the synchronization overhead is typically limited to less than 6% for synchronization latency of 100 cycles, and less than 2% for 10 cycles. This research was supported by ONR contract numbers N00014-91-J-1518 and N00014-96-1-0347. We would like to thank the Pittsburgh Supercomputing Center for use of their Alpha systems.     

From First Conception to First Demonstration: the Nascent Years of Machine Translation, 1947–1954. A Chronology

The early history of applying electronic computers to the task of translating natural languages is chronicled, from the first suggestions by Warren Weaver in March 1947 to the first demonstration of a working, if limited, program in January 1954.     

Improving the availability and cost-effectiveness of guidelines for guideline-users: towards a structured approach

The achievement of design and development solutions can be enhanced through consulting appropriate guidelines Although a wide range exist, frequently their full benefits are not realized by guideline-users because of the costs associated with their use. Guideline-users are people who use guidelines to support purposeful activity. Major cost drivers for guideline-users are the processes of 'selecting' appropriate guidelines and their subsequent 'translation' to an applied setting both of which can be prohibitively expensive. A strategy for producing guidelines is proposed, to minimize these costs, which is illustrated by the use of a case study concerned with the development of guidelines to assist in the production of management and administrative tools which will support project managers concerned with Human Factors Acceptance Testing. A process to support the assessment of guidelines is also proposed.