New approach to resolution limit and advanced image formationtechniques in optical lithography

Practical resolution, the minimum feature size with a depth of focus (DOF) required for LSI fabrication process, is analyzed. Dependence of practical resolution on various factors, such as optical system parameters (exposure wavelength λ, and numerical aperture NA), resist processes, and required DOF, is investigated. It is shown that practical resolution in the sub-halfmicrometer region is not improved, and may even be degraded, with increasing NA. Furthermore, resolution improvement by increasing NA becomes less effective as λ becomes shorter. This means that the high-resolution capability of high-NA/short-wavelength optics cannot be utilized to create fine-pattern LSIs. In order to overcome this limitation, the effectiveness of advanced image formation techniques, the phase-shifting method and the FLEX method, in practical resolution enhancement is investigated. It is experimentally verified, using a phase-shifting mask and the excimer laser stepper, that a pattern feature size less than 0.2 μm can be clearly delineated with sufficient focus latitude. These advanced techniques make it possible to overcome the resolution limitation of conventional optical lithography     

All-digital A/D converter TAD with high-resolution and low-power for sensor/RF digitization

For achieving both high resolution and low power of a sensor/RF interface, time-domain processing using full-digital circuits, which deals with only two voltage levels (i.e., V _in-supply-voltage and ground-level), is presented. In a much broader sense, digital circuits can be used for time-domain processing instead of conventional analog signal processing. In this study, an all-digital 6- to 16-bit adaptive sensor-interface ADC is experimentally evaluated for high-resolution and low-power operation along with high scalability. The circuit architecture is completely digital, using a ring-delay-line (RDL) driven by an input voltage V _in as its power supply. Resolutions can be controlled by setting its conversion time T _cv, resulting in 16 bit (1 kS/s, 34 μW) and 6 bit (1 MS/s, 48 μW) with a prototype IC in a low-cost 0.65-μm (650-nm) digital CMOS, achieving the sensor digitizer (sensor-digitization product) of a pressure sensor ASIC. The all-digital structure has been scaled into a 0.18-μm technology, and the test IC presented a higher performance with 28 μV/LSB (160-kS/s). Finally, as an RF digitization application, the circuit is demonstrated to realize the time-domain processing of an RF signal, working as both mixer and ADC, achieving minimum/maximum detectable sensitivity of 0.7-μVrms/100-mVrms, respectively, for a 40-kHz sine wave at the LNA input terminal of a 0.18-μm digital CMOS one-chip radio-controlled clock receiver IC.     

The long-term hemodynamic effect of fusaric acid in elderly hypertensive patients

The hemodynamic effect of fusaric acid calcium salt (calcium salt of 5-butylpicolinic acid), an inhibitor of dopamine beta-hydroxylase, was studied in long-term administration of this agent in 10 elderly hypertensive patients. The hemodynamic items were measured by dye-dilution method before and 3 months, 6 months and one year after administration of fusaric acid calcium salt. The main hemodynamic changes observed were as follows: 1) Heart rate did not show any consistent change. 2) Systolic, diastolic and mean blood pressure decreased. The mean values of these pressures after fusaric acid calcium salt administration were significantly lower than the mean values before administration of this agent. 3) Total peripheral vascular resistance index decreased. The mean values of this index at 3 months, 6 months and one year after fusic acid calcium salt administration were significantly lower than the mean value before administration of this agent. 4) Cardiac index showed various changes throughout administration of fusaric acid calcium salt. The changes in this index might be secondary following the changes in total peripheral vascular resistance index, an inverse correlation being existed between them. 5) Stroke volume index showed almost a similar pattern of change as observed in cardiac index. An inhibitory action of fusaric acid calcium salt on the inotropism of the heart could be hardly found. 6) Plasma volume showed no tangible changes after fusaric acid calcium salt administration throughout one year. It might be concluded that fusaric acid calcium salt elicited the hypotensive response primarily through the reduction of total peripheral vascular resistance index.     

Formation of metal–TiN/TiC nanocomposite powders by mechanical alloying and their consolidation

Fe–TiN, Ni–TiN, and SUS316–TiC nanocomposite powders were prepared by ball-milling Fe–Ti, Ni–Ti, and SUS316–TiC powder mixtures in a nitrogen or argon gas atmosphere. Fe–63vol.% TiN and Ni–44–64vol.% TiN milled powders were dynamically compacted by use of a propellant gun to produce bulk materials of nanocrystalline structure and having grain sizes between about 5 and 400 nm. SUS316–2.8–5.6vol.% TiC milled powders were consolidated by hot isostatic pressing (HIP) to produce bulk materials having grain sizes between about 100 and 400 nm. The possibility of using fine-dispersed TiN/TiC particles to pin grain boundaries and thereby maintain ultra-fine grained structures of grain sizes down to the nanocrystalline scale has been discussed.     

Synthesis and evaluation of water-soluble non-prodrug analogs of docetaxel bearing sec-aminoethyl group at the C-10 position

To develop non-prodrugs of taxoids with satisfactory stability in vivo, high water-solubility, and potent antitumor activity, we prepared several 10-O-sec-aminoethyl docetaxel analogs (3) and evaluated their cytotoxicity against mouse leukemia and human tumor cell lines, microtubule disassembly-inhibitory activity, and water-solubility. These analogs were synthesized from the 10-O-allyl baccatin derivatives (5a-c) using the beta-lactam synthon method. Among these analogs, the 10-O-(2-morpholinoethyl) (18, 21) and 10-O-(2-thiomorpholinoethyl) (19, 24) analogs exhibited cytotoxicity comparable or superior to that of docetaxel (2). In addition, the methanesulfonic acid salt (18a) had a high water-solubility.     

Mobilization of peripheral blood stem cells in advanced ovarian cancer

High-dose chemotherapy with hematopoietic support has been expected to improve the survival of advanced ovarian cancer patients in recent years. An essential component of such treatment has been the ability to collect and reinfuse a large number of peripheral blood stem cells (PBSCs) following high dose therapy. This study was designed to determine which clinical and hematological factors would be better indicators to collect the proper volume of PBSCs. Thirteen patients received a total of 24 courses of induction chemotherapy and 69 of apheresis. We usually mobilized stem cells using CEP chemotherapy (cisplatin 50-70 mg/m2, epirubicin 50 mg/m2 and cyclophosphamide 1.5 g/m2) with G-CSF and CEE regimen (cyclophosphamide 2.0 g/m2, epirubicin 50 mg/m2, and etoposide 50 mg/m2) as a salvage for mobilization. We obtained an average 5 x 10(6)/kg of CD34+ cells for 3 days as one course. The number of CD34+ cells collected significantly depended on the platelets and reticulocytes on the first day of apheresis, but not a nadir of WBCs. It is concluded that apheresis should be started on recovery of WBCs to 5,000-10,000/microliters, of immature granulocytes to > or = 10% and of reticulocytes to > or = 20%. This study confirmed the feasibility of collecting enough PBSCs to use standard chemotherapy of ovarian cancer patients.     

Development of an interrupting chamber for 1000-kV high-speed grounding switches

In Japan, construction of 1000 kV (UHV) transmission lines is planned in order to deal with the expected increase of electric power demand. On the line, after the fault current is interrupted by circuit breakers, the arc caused by electrostatic induction current remains for a long time because of its high voltage. To re-energize the fault line after arc extinction, a new circuit breaker reclosing system which has high-speed grounding switches (HSGS) installed at both ends of the line is employed. If, while the HSGS is interrupting an electromagnetic induction current, a ground fault takes place in another energized line, causing a shirt-circuit current including a dc component to flow, the large dc component is superimposed on the HSGS current, producing a zero shifting state with no passage through the zero point for long time. Such zero shifting durations are estimated to be up to about 80 ms. Therefore HSGS are required to interrupt this delayed zero current as a special duty. This requirement is met by a newly developed puffer interrupting chamber allowing a long pressure rise by optimizing the exhaust and residual volume of the puffer cylinder and utilizing the effect of pressure rise due to the arc. © 1997 Scripta Technica, Inc. Electr Eng Jpn, 119(4): 12–21, 1997