Cylindrical coils created with 3D X-ray lithography and metallization

The demand for microactuators is increasing recently. The key technology to realizing practical microactuators is microfabrication process. In the production of microminiature components, the technologies for processing high-aspect-ratio structures are essential. As one of these technologies, the LIGA process is widely known. Our laboratory researches the LIGA process to three-dimensional microfabrication and established the cylindrical-microcoil production process. In this paper, we have fabricated the cylindrical-microcoil for the solenoidal electromagnetic type microactuator. We designed and analyzed microactuators, and fabricated and evaluated microactuator coils produced by the combination of three-dimensional X-ray lithography and level copper plating. We succeeded in creating threaded groove-shaped structures with 10 μm line width, 20 μm pitch, and aspect ratio of 5 on the surface of an acrylic pipe by means of three-dimensional X-ray lithography. As a measure to suppress void generation, which is one of the shortcomings of electrolytic plating processes, the sputtering apparatus and plating equipment were improved, a pretreatment process was additionally provided, and the actual electrolytic plating method was improved. As a result, a void-free metallic deposit could be formed on a thin coil line. The processing technology enables the formation of thin-wire coil lines whose current paths feature a large allowable current-carrying capacity, enabling the production of miniature, high-output microactuators.     

Fabrication of large area diffraction grating using LIGA process

X-ray imaging is a very important technology in the fields of medical, biological, inspection, material science, etc. However, it is not enough to get the clear X-ray imaging with low absorbance. We have produced a diffraction gratings for obtaining high resolution X-ray phase imaging, such as X-ray Talbot interferometer. In this X-ray Talbot interferometer, diffraction gratings were required to have a fine, high accuracy, high aspect ratio structure. Then, we succeeded to fabricate a high aspect ratio diffraction grating with a pitch of 8 μm and small area using a deep X-ray lithography technique. We discuss that the diffraction gratings having a narrow pitch and an large effective area to obtain imaging size of practical use in medical application. If the pitch of diffraction gratings were narrow, it is expected high resolution imaging for X-ray Talbot interferometer. We succeeded and fabricated the diffraction grating with pitch of 5.3 μm, Au height of 28 μm and an effective area of 60 × 60 mm².     

Non‐destructive evaluation of fatigue damage and fatigue crack initiation in type 316 stainless steel by positron annihilation line‐shape and lifetime analyses

Rotating bending fatigue tests were conducted using type 316 stainless steel. The fatigue tests were periodically terminated, and fatigue damage and fatigue crack initiation were non‐destructively and sequentially evaluated by positron annihilation line‐shape and lifetime analyses. The counter‐jig and anticoincidence methods were used for positron annihilation line‐shape and lifetime analyses, respectively, to enhance the analytical precision. The fatigue crack lengths were monitored by a plastic replication technique, and related to the parameters in both analyses. S‐parameter obtained in the line‐shape analysis increased with increasing fatigue damage, while it was difficult to detect fatigue crack initiation and subsequent small fatigue crack growth. That was because the precision of line‐shape analysis was limited. On the other hand, both fatigue damage and fatigue crack initiation were successfully detected by lifetime analysis. Positron annihilation lifetime also increased with increasing fatigue damage, and lifetime was longer at the notch root with fatigue crack than at the smooth section without crack. It was considered that the precision of lifetime analysis was high enough to detect high dislocation density areas at the fatigue crack tips.     

Intercalation of n-alkylamines into α-tin(IV) bis(hydrogenphosphate)

The intercalation reaction of n-alkylamines from methyl- to hexadecylamine into -tin(IV) bis(hydrogenphosphate) has been investigated. The reaction was conducted by mixing the phosphate and solutions of the amines dissolved in water or benzene. The amine/ phosphate molar ratios in the reaction mixtures were 0.43, 0.85, 1.71 and 3.41. The nitrogen/phosphorus atomic ratio in the intercalation compound was not changed by the amine/phosphate molar ratio. The interlayer distances of the intercalates obtained in the reaction mixtures with molar ratios of 3.41 and 1.71 increased with an increase in the number of carbon atoms in the alkyl chain of the amine. The slope of the straight line obtained in plot of interlayer distance versus number of carbon atoms in the alkyl chain of the amine indicates that the amine molecules form a double layer in the interlayer space of the phosphate and are inclined at an approximate angle of 67.7° to the phosphate layer. The interlayer distances of the intercalates of butyl- to nonylamines obtained at the molar ratio of 0.85 are smaller than those of the corresponding compounds from the molar ratios of 3.41 and 1.71, while those of decyl- to hexadecylamine intercalates lie on the previously discussed line. This behaviour is interpreted by assuming kink formation in the short alkyl chains between the phosphate layers.     

Fabrication of X-rays mask with carbon membrane for diffraction gratings

We have produced diffraction gratings for obtaining high resolution X-ray phase imaging, such as X-ray Talbot interferometer. These diffraction gratings were required to have a fine, high accuracy, high aspect ratio structure. Therefore, we decided to use the X-rays lithography technique that used synchrotron radiation of the directivity for a manufacture process. The accuracy of the completed structure depends largely on the accuracy of the X-ray mask. In our group, a resin material is conventionally used for the membrane of large X-ray masks. However, X-ray masks comprising a resin membrane have the disadvantage that, after several cycles of X-ray exposure, they crease and sag due to X-ray-derived heat. As a substitute for the conventional resin membrane, we experimentally fabricated a new X-ray mask using a carbon wafer membrane. The newly fabricated X-ray mask was subjected to X-ray exposure experiment. We succeeded in making the structure body which was almost shape. And the experimental results verified that the new mask did not deteriorate even when used repeatedly, demonstrating that it was highly durable.     

Fabrication of high hardness Ni mold with electroless nickel–boron thin layer

The nickel electroforming method using a high-concentration nickel sulfamate bath is commonly used to fabricate micro metal molds in the LIGA process; however, this method does not produce micro metal molds of sufficient hardness. One means of improving the hardness of micro metal molds made using the nickel electroforming method is to include additives in the nickel plating solution. Another method is nickel alloy plating or a similar technique. In this research, we used a nickel–boron (Ni–B) electroless alloy plating method to obtain a hard nickel plated film having hardness of 832 Hv. It was also ascertained that Ni–B electroless alloy plated film retains its high hardness even during heat treatment in conditions of 250°C for 1 h. To deal with the high stresses developed in high-hardness plated films, we proposed double-layer nickel electroforming. This method is covered and used on conventional nickel electroforming layer by high hardness micro mold. High hardness micro metal mold using double-layer was fabricated by nickel electroforming and Ni–B electroless alloy plating method.     

Development of ‘UR-System 2’: a training system for recovery of motor function of plegic upper limb after stroke

We developed a new training system, called ‘UR-System 2’, for the recovery of motor function of a plegic upper limb after stroke. UR-System 2, which was redesigned based on knowledge gained from clinical tests using UR-System 1, was newly equipped with a function for testing the motor function of patients, such as isolated movement. In order to verify the effectiveness of UR-System 2, we conducted the following procedures: we verified the safety of training in healthy persons; we gathered standard data on pronation and supination of healthy forearms during tests; and, we verified that the test function was effective in evaluating the recovery effect of isolated movement in two hemiplegic patients.     

Basic constructs of the SIM operating system

The basic constructs of SIMPOS (Sequential Inference Machine Programming and Operating System) are explained. SIMPOS is an operating system for a super-personal computer (SIM), based on logic programming language (a modified Prolog, called KL0). Our design principle is simplicity both in concept and structure. The entire system will be constructed using these basic constructs.