Liquid source chemical vapor deposition of high-dielectric-constant (Ba,Sr)TiO3 films

High-dielectric-constant (Ba, Sr)TiO₃ [BST] films were deposited by the liquid source chemical vapor deposition (CVD) method. The system consisted of a single-wafer, low-pressure thermal CVD reactor, a vaporizer for liquid source materials, and a shower-type gas nozzle head, giving stable BST film deposition on a 6-in. diam. substrate with uniform thickness and uniform chemical composition ratio. The source materials employed were Ba(DPM)₂, Sr(DPM)₂, and TiO(DPM)₂ dissolved in tetrahydrofuran (THF), resulting in conformal step coverage of BST films at lowered substrate temperatures, where DPM denotes dipivaloylmethanate. Moreover, the two-step deposition technique was developed to restart protrusions formed on BST film surfaces at low temperatures, where the BST films consisted of a buffer layer and a main layer; the buffer layer was a layer about 60 Å thick of CVD-BST film annealed in N₂. Thus, the two-step CVD deposition of BST films on Pt and Ru electrodes achieved an equivalent SiO₂ thickness of t_eq ∼ 0.5 nm, a leakage current of J_L ∼ 1.0 × 10⁻⁸ A/cm² (at +1.1 V), and a dielectric loss of tan δ ∼ 0.01 at a total film thickness of 250 Å, along with conformal coverage of 80% for a trench with an aspect ratio of 0.65. Then, for BST films deposited on patterned electrodes 0.24 μm wide, 0.60 μm deep, and 0.15 μm high (each spaced by 0.14 μm), the capacitance was demonstrated to be increased without significant deterioration of the leakage current: the capacitance was increased in comparison with that for films on flat electrodes, by a factor corresponding to the increase in surface area due to sidewalls of storage-node-like pattern features. This capacitance increase reflects the most characteristic advantage of CVD, an excellent step coverage on microscopic pattern features. These electrical properties satisfy the specifications for capacitors for Gb-scale dynamic random access memories (DRAMs), giving a storage capacitance of more than 25 fF/cell for a stacked capacitor having a storage node 0.2 to 0.3 μm high. © 1998 Scripta Technica, Electr Eng Jpn, 125(1): 47–54, 1998     

New Dyes and Intermediates for Synthetic-polymer Fibres. 7,7-Dioxo-Benzo(K, /)thioxan-thene-3,4-dicarboxylic Acid Imides

The synthesis of benzo [k, l] thioxanthene-3,4-dicarbo-xylic acid-7,7-dioxide is described. Condensation of this heterocycle with amines, or oxidation of the corresponding imides of benzo [k, l] thioxanthene-3,4-dicarboxylic acid, affords a new range of dyes which colour synthetic-polymer fibres, especially polyester, in yellow shades of excellent fastness to light and sublimation.     

Protection relaying scheme based on fault reactance operation type

The theories of operation of existing relays are roughly divided into two types: the current differential type based on Kirchhoff's first law and the impedance type based on Kirchhoff's second law. We can use Kirchhoff's laws to rigorously formulate fault phenomena, so the circuit equations are represented as nonlinear simultaneous equations whose variables are the fault point k and the fault resistance R_f. This method has two defects: (1) a heavy computational burden in iterative calculation by the N‐R method and (2) the relay operator cannot easily understand the principle of numerical matrix operation. The new protection relay principles proposed in this paper focus on the fact that the reactance component at the fault point is close to zero. The reactances X_f(S) and X_f(R) at the ends of the branch are calculated by solution of linear equations. If the signs of X_f(S) and X_f(R) are not the same, it can be inferred that the fault point is located in the branch. This reactance X_f corresponds to the difference in branch reactance between the actual fault point and an imaginary fault point. Thus, the relay engineer can understand the fault location in terms of the concept of “distance.” Simulation results using this new method indicate that it can provide much more precise estimation of fault locations than those obtained by inspection of operating transmission lines. © 2009 Wiley Periodicals, Inc. Electr Eng Jpn, 168(1): 29–40, 2009; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.20720     

Virtual Society: Collaboration in 3D Spaces on the Internet

The Virtual Society (VS) project is a long term research initiativethat is investigating the evolution of the futureelectronic society. Our vision for this electronic societyis a shared 3D virtual world where users, from homes and offices, canexplore, interact and work. Our first implementation of aninfrastructure to support our investigation is known asCommunityPlace and has been developed to support large-scale shared 3D spaces onthe Internet using the Virtual Reality Modeling Language (VRML). Obviously, such an ambitious project cutsacross many different domains. In this paper we outline thegoals of the Virtual Society project, discuss the architecture andimplementation of CommunityPlace with particular emphasis on Internetrelated technologies such as VRML and present our views on the role ofVRML and the Internet to support large-scale shared 3D spaces.     

Physical state of radiation-polymerized polyethylene blends

The physical state of the blends of radiation-polymerized polyethylene with high-density polyethylene was studied. Only one peak was observed in DSC heating curves of the blends quenched from the melt regardless of the each polymer content. In addition, transparency of the high-density polyethylene was improved by melt blending with radiation-polymerized polyethylene. This is a characteristic of high-density polyethylene and radiation-polymerized polyethylene blends different from high-density and low-density polyethylene blends. A new peak and/or a new shoulder, however, appeared in DSC heating curves of the blends with heat treatment at 110°, 120°, and 125°C. These results suggest that the physical state of the blends quenched from the melt is one where the crystallization of the radiation-polymerized polyethylene is high hindered by the presence of high-density polyethylene. The radiation-polymerized polyethylene may remain mainly in a physical state similar to the melt. The haze value of the blends increased with heat treatment. The increase in the haze is caused by change in physical states, such as growth of spherulites and formation of microcrystals and microvoids, by the heat treatment.