缺陷问题驱动浸没光刻技术发展

涂层的应用导致晶圆上缺陷的增加或者使光刻表现发生变化虽然现在推测浸没光刻技术的量产时间还太早,但是许多公司正在努力确定生产线何时能从干法工艺跃为湿法工艺。根据最近在San Jose举办的     

Pressure‐Tunable Ambipolar Conduction and Hysteresis in Thin Palladium Diselenide Field Effect Transistors

Few‐layer palladium diselenide (PdSe₂) field effect transistors are studied under external stimuli such as electrical and optical fields, electron irradiation, and gas pressure. The ambipolar conduction and hysteresis are observed in the transfer curves of the as‐exfoliated and unprotected PdSe₂ material. The ambipolar conduction and its hysteretic behavior in the air and pure nitrogen environments are tuned. The prevailing p‐type transport observed at atmospheric pressure is reversibly turned into a dominant n‐type conduction by reducing the pressure, which can simultaneously suppress the hysteresis. The pressure control can be exploited to symmetrize and stabilize the transfer characteristics of the device as required in high‐performance logic circuits. The transistors are affected by trap states with characteristic times in the order of minutes. The channel conductance, dramatically reduced by the electron irradiation during scanning electron microscope imaging, is restored after an annealing of several minutes at room temperature. The work paves the way toward the exploitation of PdSe₂ in electronic devices by providing an experiment‐based and deep understanding of charge transport in PdSe₂ transistors subjected to electrical stress and other external agents.     

Optimizing Proportionally Fair Prices

We demonstrate the non-uniqueness of proportional fairness prices, and show that the model of Kelly et al. [9] falls into the category of models that can be generalized to allow optimization of the link prices, with a view toward profit maximization. However, through this framework, we also show that the total revenue that can be obtained through proportional fairness pricing on a network is unique.     

成品率的预测准确度有多高

成品率预测是可制造性设计（DFM）的基础之，但它还远不止于此。IBM系统和技术群300mm半导体运营副总裁DanArmbrust说：“我们精确预测成品率的能力就是我们的经济模式。”Armbrust是SEMICON West 2007成品率论坛讨论DFM现状的三位参与者之一。与他共同参加讨论的是Synopsys公司DFM解决方案副总裁Anantha Sethuraman和Photronics公司的CTO Chris Progler。     

Predictive Validity of an Empirical Approach for Selecting Promising Message Topics: A Randomized‐Controlled Study

Several message topic selection approaches propose that messages based on beliefs pretested and found to be more strongly associated with intentions will be more effective in changing population intentions and behaviors when used in a campaign. This study aimed to validate the underlying causal assumption of these approaches which rely on cross‐sectional belief–intention associations. We experimentally tested whether messages addressing promising themes as identified by the above criterion were more persuasive than messages addressing less promising themes. Contrary to expectations, all messages increased intentions. Interestingly, mediation analyses showed that while messages deemed promising affected intentions through changes in targeted promising beliefs, messages deemed less promising also achieved persuasion by influencing nontargeted promising beliefs. Implications for message topic selection are discussed.     

在65nm及以下节点获得良好的互连可靠性

尽管互连尺寸在不断地等比例缩小,同时也会用到更加多孔的低k材料,工程师们还是在设法满足互连的可靠性规范。VLSI电路,特别是高性能逻辑器件的不断等比例缩小,推动着对低k材料和铜互连的需求,以降低RC延迟、串扰噪声和功耗。     

Images of a First‐Order Spin‐Reorientation Phase Transition in a Metallic Kagome Ferromagnet

First‐order phase transitions, where one phase replaces another by virtue of a simple crossing of free energies, are best known between solids, liquids, and vapors, but they also occur in a wide range of other contexts, including even elemental magnets. The key challenges are to establish whether a phase transition is indeed first order, and then to determine how the new phase emerges because this will determine thermodynamic and electronic properties. Here it is shown that both challenges are met for the spin reorientation transition in the topological metallic ferromagnet Fe₃Sn₂. The magnetometry and variable temperature magnetic force microscopy experiments reveal that, analogous to the liquid–gas transition in the temperature–pressure plane, this transition is centered on a first‐order line terminating in a critical end point in the field‐temperature plane. The nucleation and growth associated with the transition is directly imaged, indicating that the new phase emerges at the most convoluted magnetic domain walls for the high temperature phase and then moves to self‐organize at the domain centers of the high temperature phase. The dense domain patterns and phase coexistence imply a complex inhomogenous electronic structure, which can yield anomalous contributions to the electrical conductivity.     

Conductive Anodic Filament Formation Part II: Electrochemical Reactions Leading to CAF

Conductive anodic filament (CAF) formation has been studied for a number of years, but the mechanism of its formation has not previously been defined. In 2002, Ready identified CAF as atacamite, Cu₂(OH)₃Cl. Electrochemical studies have shown that both CuCl and CuCl ₂ ^? participate in the formation of Cu₂(OH)₃Cl, with the predominating species being CuCl. This paper proposes a mechanism for CAF formation based on x-ray photoelectron spectroscopy. The data show that CuCl is the precursor to the formation of Cu₂(OH)₃Cl in the presence of oxygen and water. Earlier, Meeker and Lu Valle had proposed that CAF failure is best represented by two competing reactions: the formation of a copper chloride corrosion compound (now identified as Cu₂(OH)₃Cl) and the formation of innocuous trapped chlorine compounds. Since no evidence of any trapped chloride compounds has been found, we propose that the formation of CAF is best represented by a single nonreversible reaction.     

Insights into the In Vitro Formation of Apatite from Mg-Stabilized Amorphous Calcium Carbonate

A protein-free formation of bone-like apatite from amorphous precursors through ball-milling is reported. Mg²⁺ ions are crucial to achieve full amorphization of CaCO₃. Mg²⁺ incorporation generates defects which strongly retard a recrystallization of ball-milled Mg-doped amorphous calcium carbonate (BM-aMCC), which promotes the growth of osteoblastic and endothelial cells in simulated body fluid and has no effect on endothelial cell gene expression. Ex situ snapshots of the processes revealed the reaction mechanisms. For low Mg contents (<30%) a two phase system consisting of Mg-doped amorphous calcium carbonate (ACC) and calcite “impurities” was formed. For high (>40%) Mg²⁺ contents, BM-aMCC follows a different crystallization path via magnesian calcite and monohydrocalcite to aragonite. While pure ACC crystallizes rapidly to calcite in aqueous media, Mg-doped ACC forms in the presence of phosphate ions bone-like hydroxycarbonate apatite (dahllite), a carbonate apatite with carbonate substitution in both type A (OH⁻) and type B (PO₄³⁻) sites, which grows on calcite “impurities” via heterogeneous nucleation. This process produces an endotoxin-free material and makes BM-aMCC an excellent “ion storage buffer” that promotes cell growth by stimulating cell viability and metabolism with promising applications in the treatment of bone defects and bone degenerative diseases.     

DFM“共用平台”技术的进展

新加坡特许半导体制造有限公司的J．B．Tan不久将推出五大成品率及可靠性问题的解决方案，结合多层互连结构及铜和低k介质集成。工程师们在互连工艺向批量生产过渡之前对这些问题进行了验证，并在6月5-7日在加州Burlingame举行的“国际互连技术会议”中推出研究成果。