改进缺陷,套刻和聚焦性能的第五世代浸没式曝光系统

论述了第五世代双扫描平台浸液式扫描曝光机的性能和进展。表明了在高速扫描状态下有生产价值的套刻和聚焦性能的实现。浸液式设备更多的关键部分与缺陷有关,而且该机的改进是通过有生产价值的缺陷水平方面来体现的。为了保持这种缺陷水平的改进效果,需要在圆片应用中进行专门稳定的测量。特加是边缘空泡除去(EBR)设计和圆片斜面良流线性是很重要的。     

Tunability and bandwidth of microstrip filters fabricated on magnetized ferrites

The method of moments in the spectral domain is applied to the rigorous full-wave analysis of coupled line microstrip filters fabricated on magnetized ferrites. The results show that the center frequency of the filters can be tuned over a wide range by adjusting the magnitude of the bias magnetic field of the ferrite substrates. However, the filters bandwidth is reduced as the tuning frequency increases. This bandwidth reduction is explained in terms of the behavior of the resonant frequencies and quality factors of the resonators included in the filters.     

Yield Strengths of Biaxially Textured Metallic Substrates (Ni and its Alloys) Determined Using a Simplified Test Method

A simple testing method is used to compare the yield strengths (YS) of biaxially textured metallic substrates (Ni and its alloys) presently under development for YBa₂Cu₃O_7−x coated conductors. This method is based on a retired ASTM D3379 tensile test standard method that was originally recommended for single filament materials. Several common textured substrates, such as Ni, Ni-3at.%W, and Ni-5at.%W, procured from different manufacturers, were tested using this method, and the data were compared with the values reported in the literature. A new alloy substrate (constantan (Cu55-Ni44-Mn1wt.%)) that is biaxially textured in-house was also tested using this method, and the YS data were compared with those of other substrates. For the substrates used in this study, the data obtained using this method indicated that Ni substrates have YS of ∼52 MPa, Ni-3at.%W substrates have YS of ∼106 MPa, Ni-5at.%W substrates have YS 163 MPa, and Cu55-Ni44-Mn1 wt.% substrates have YS of 74 MPa.     

A Low Complexity Decoding Algorithm for Extended Turbo Product Codes

In this letter, we propose a low complexity algorithm for extended turbo product codes by considering both the encoding and decoding aspects. For the encoding part, a new encoding scheme is presented for which the operations of looking up and fetching error patterns are no longer necessary, and thus the lookup table can be omitted. For the decoder, a new algorithm is proposed to extract the extrinsic information and reduce the redundancy. This new algorithm can reduce decoding complexity greatly and enhance the performance of the decoder. Simulation results are presented to show the effectiveness of the proposed scheme.     

Consideration of chiral optical fibres

Circular birefringence is a property of chiral materials. In this work, we consider the use of chiral materials in optical fibres to produce circularly birefringent optical fibres and in fibres where a contrast in circular birefringence contributes to forming the waveguide. (-)-menthyl methacrylate is also investigated as a possible material for the fabrication of such fibres.     

Frequency analysis of time-varying periodic linear systems by using modulop transforms and its applications to the computer-aided analysis of switched networks

This paper introduces a theory of modulop Laplace andZ-transforms which can adequately analyze any time-varying periodically switching system in frequency domain, in particular, switched-capacitor SC networks with nonideal operational amplifiers. Formulae for inverse and direct modulop transforms are included. Since the regular Laplace andZ-transform fail to be adequate for a nonideal sampled system, this new tool can be effectively used instead. An extremely efficient and fast program is developed based on the general theory. This program has been used by the author for the analysis of SC networks with nonideal operational amplifiers and requires less time for calculations compared with conventional time-domain methods. Furthermore, closed-form solutions for the nonideal transfer functions are given. The presented algorithm permits us to calculate the transfer function in partial fraction form and thus stability can be verified immediately.     

A simulation-based multi-objective design optimization of electronic packages under thermal cycling and bending

In this study, a simulation-based multi-objective design optimization methodology was developed for improving electronic packaging reliability. It was demonstrated using a generic model of an electronic package on a printed wiring board. The objective for the optimization was to improve the reliability of solder joints under both thermal cycling and bending by optimizing a group of design parameters. A parametric finite element model was developed using ANSYS for both load conditions. To improve the numerical efficiency of the optimization, a multi-quadric response surface method was implemented to approximate the response of finite element simulations for each loading condition. Subsequently, the multi-objective optimization of solder joint reliability was implemented using a Minmax principle on all response surfaces and a differential evolution algorithm as optimal search engine, which is capable of finding global minimum when local minima exist. Our study demonstrated that the reliability of the solder joints is significantly improved for this given generic model of electronic package. The proposed methodology can be effectively used in improving the reliability of electronic packages.     

Iron Oxide‐Labeled Collagen Scaffolds for Non‐Invasive MR Imaging in Tissue Engineering

Non‐invasive imaging holds significant potential for implementation in tissue engineering. It can be used to monitor the localization and function of tissue‐engineered implants, as well as their resorption and remodelling. Thus far, however, the vast majority of effort in this area of research have focused on the use of ultrasmall super‐paramagnetic iron oxide (USPIO) nanoparticle‐labeled cells, colonizing the scaffolds, to indirectly image the implant material. Reasoning that directly labeling scaffold materials might be more beneficial (enabling imaging also in the case of non‐cellularized implants), more informative (enabling the non‐invasive visualization and quantification of scaffold degradation), and easier to translate into the clinic (cell‐free materials are less complex from a regulatory point‐of‐view), three different types of USPIO nanoparticles are prepared and incorporated both passively and actively (via chemical conjugation; during collagen crosslinking) into collagen‐based scaffold materials. The amount of USPIO incorporated into the scaffolds is optimized, and correlated with MR signal intensity, showing that the labeled scaffolds are highly biocompatible, and that scaffold degradation can be visualized using MRI. This provides an initial proof‐of‐principle for the in vivo visualization of the scaffolds. Consequently, USPIO‐labeled scaffold materials seem to be highly suitable for image‐guided tissue engineering applications.     

Generalization of the Gram-Charlier/Edgeworth Series and Application to Time-Frequency Analysis

We derive a general equation relating probability densities and as special cases we the obtain Gram-Charlier and Edgeworth series. This allows us to generalize these methods and clarify a number of issues pertaining to both probability theory and time-frequency analysis. In particular we show how the Gram-Charlier and Edgeworth series are related to the kernel method of time-frequency analysis. The approach allows us to construct densities that satisfy given constraints such as joint moments or conditional moments. Also, we show that the kernel has to be signal dependent and that to obtain a proper distribution it should be the ratio of two characteristic functions.