Fabrication of damascene Cu wirings using solid acidic catalyst

The copper damascene process is one of the most promising technologies for fabricating Cu wirings for electronic devices such as LSIs. In this research, the fabrication of damascene Cu wirings was conducted using solid acidic catalyst. When a Cu-plated wafer, whose oxide is a basic oxide is dipped into a mixture of oxidizing solution and acidic solution, surface atoms are ionized and etched off into the solution. However, because conventional nonelectrolytic etching does not have a reference surface, it is difficult to utilize for planarization. Therefore, a new nonelectrolytic machining method using a cation-exchange fabric instead of an acidic solution was developed. To be more precise, the planarization of a Cu-plated wafer was carried out by rubbing with the cation-exchange fabric in ozone water. Basically, this method exploits chemical reactions so that the physical properties of the workpiece surface are not deteriorated. Furthermore, this method uses no chemicals except for ozone water, which easily dissociates into water and oxygen molecules; thus, this method is a low-cost, environmentally friendly process. In this paper, as a preliminary experiment, the nonelectrolytic etching of a Cu sample using solutions of O₃ and CO₂ was carried out to inspect the dependence of the etching rate on [O₃] and [H⁺]. The results indicate that the etching rate increased as [O₃] and [H⁺] increased. When [H⁺] was high relative to [O₃], a smooth etch-pit-free surface was achieved. Next, nonelectrolytic etching using a cation-exchange fabric was carried out, and properties similar to those in the case of etching using solutions were obtained. Finally, damascene Cu wirings were fabricated using ozone water and a cation-exchange catalyst.     

0.5-μm 3.3-V BiCMOS standard cells with 32-kilobyte cache andten-port register file

BiCMOS standard cell macros, including a 0.5-W 3-ns register file, a 0.6-W 5-ns 32-kbyte cache, a 0.2-W 3-ns table look-aside buffer (TLB), and a 0.1-W 3-ns adder, are designed with a 0.5-μm BiCMOS technology. A supply voltage of 3.3 V is used to achieve low power consumption. Several BiCMOS/CMOS circuits, such as a self-aligned threshold inverter (SATI) sense amplifier and an ECL HIT logic are used to realize high-speed operation at the low supply voltage. The performance of the BiCMOS macros is verified using a fabricated test chip     

The validity of new memory complaints in the elderly

OBJECTIVE: To determine the validity of new subjective memory complaints (MCs) from individuals who previously, when without dementia, denied having MCs. DESIGN: Prospective cohort. SETTING: Longitudinal, community-based study of aging and dementia. PATIENTS: One hundred thirty-three community-dwelling elderly individuals who were part of a registry for the study of conditions related to aging in North Manhattan, NY. Patients were selected if they were initially without dementia and had completed at least 2 successive annual clinical and neuropsychological evaluations and provided their own medical history. MAIN OUTCOME MEASURES: Performance on memory tests--the Buschke Selective Reminding Test and a visual memory task--and global performance on a neuropsychological test battery and clinical evaluation, by which questionable dementia or dementia was diagnosed according to a well-defined paradigm. RESULTS: Fifty-three subjects with MCs at the initial evaluation performed no worse on the memory test than the 80 subjects who denied MCs initially. There was a weak association between MCs and the diagnosis of questionable dementia at baseline (P = .04), but this was nonsignificant after adjusting for age and education. At 1-year follow-up, 21 of the 80 without baseline MCs now reported MCs. At the follow-up evaluation, these 21 subjects performed significantly worse on the memory tests, were 5 times more likely to have significant cognitive impairment, and had shown significantly greater decline over the preceding year on several of the cognitive measures than the 59 who continued to deny MCs. CONCLUSION: New MCs from individuals, who when without dementia recently denied MCs, may suggest the presence of significant impairment of memory or cognition.     

Single-step synthesis and characterization of single-walled carbon nanohorns hybridized with Pd nanoparticles using N2 gas-injected arc-in-water method

Single-walled carbon nanohorns (SWCNHs) hybridized with palladium (Pd) nanoparticles were synthesized by a single-step gas-injected arc-in-water method (GI-AIW) with a Pd wire inserted inside the anode hole. In the arc zone, carbon and Pd were vaporized simultaneously, leading to the formation of hybrid material of SWCNHs and Pd nanoparticles due to effective quenching. Based on TEM and CO chemisorption analyses, Pd nanoparticles were found to be embedded inside SWCNH aggregates. The size of Pd nanoparticles, determined by X-ray diffraction, was in the range of 3–6 nm when Pd wires with diameters of 0.1 and 0.3 mm were used. Using a Pd wire with a diameter larger than 0.5 mm results in larger Pd nanoparticles which tend to be exposed to the outer surface of the hybrid material. According to thermogravimetric analyses, the weight fraction of Pd nanoparticles is increased by increasing the Pd wire diameter although the yield of Pd nanoparticles decreased. SWCNHs hybridized with dispersed Pd nanoparticles, synthesized with 0.1 mm Pd wire, exhibited strong anti-oxidation resistance with a highly graphitic structure.     

Generation of New Artificial Metalloproteins by Cofactor Modification of Native Hemoproteins

Heme can be removed from a number of native hemoproteins, thus forming corresponding apoproteins, each of which provides a site for binding of a metal complex. In one example, myoglobin, an O₂ storage protein, can be reconstituted with iron porphycene to dramatically enhance the O₂ affinity. Although it is known that myoglobin has poor enzymatic activity, the insertion of iron corrole or iron porphycene into apomyoglobin increases its H₂O₂-dependent peroxidase/peroxygenase activities. Furthermore, reconstitution with manganese porphycene promotes hydroxylation of an inert C H bond. It is also of interest to insert a non-porphyrinoid complex into an apoprotein. A cavity of apocytochrome c has been found to bind a diiron carbonyl complex, serving as a functional model of diiron hydrogenase. Aponitrobindin has a rigid β-barrel structure that provides an excellent cavity for covalently anchoring a metal complex. A rhodium complex embedded in the cavity of genetically modified nitrobindin has been found to promote stereoselective polymerization of phenylacetylene.     

Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode

We figure optical surfaces by plasma chemical vaporization machining (CVM) with a pipe electrode, in which an rf plasma generated at the electrode tip under approximately atmospheric pressure moves over the surfaces. We propose a shaping method in which the movement of plasma on the surfaces can be determined. Flat and aspheric surfaces are successfully figured with the desired peak-to-valley shape accuracy of 0.1 microm. The root-mean-square roughness of the resultant surfaces is at the subnanometer level. These results confirm that the plasma CVM and the shaping method have the capability to fabricate optics with high accuracy.     

Enhancing effect of monoolein surfactant on carbon nanoparticle synthesis by arc discharge in liquid

Effect of monoolein surfactant which promotes n-hexane to dissolve in water was investigated to enhance the carbon nanoparticle (CNP) synthesis by arc discharge in liquid. The production rate of CNPs consisting of multi-shelled fullerenes and multi-walled carbon nanotubes was increased by the addition of the n-hexane to water with support of monoolein surfactant. An optimal amount of monoolein led to the maximal production rate of CNPs which was ca. two-fold higher than that obtained from a pure water system. This effect is ascribed to the role of n-hexane and monoolein to provide carbon clusters to the arc reactive zone. The hydrodynamic particle sizes of CNPs and their crystallinity were also enhanced by the addition of these organic compounds. As the vapor pressure of the organic component is significantly suppressed, the proposed method is much safer than that using pure organic liquid.     

Power reduction using adiabatic charge method for PDP driver circuit

Abstract— By applying an energy‐recovery method to their driver circuits, the circuit power consumption of plasma displays can be reduced. However, further power reduction is necessary for large‐sized higher‐resolution displays such as used for Super HDTV. The ideal adiabatic charge method has been proven to be able to minimize circuit resistive element power consumption to 81 % of the conventional energy‐recovery‐circuit resistive‐element loss. An experimental pseudo‐adiabatic charge circuit that reduces the power consumption to about 90% of a conventional circuit has been demonstrated. The power consumption caused by both the resistance loss and the discharge loss of the switching‐element parasitic capacitances was analyzed.     

Phenomenological studies of optical properties of Cu nanowires

We report on the experimental observation of surface plasmon resonance in Cu nanowires fabricated by shadow deposition method. When the incident light is polarized perpendicular to the wire axes, plasmon maxima appeared at about 2.3 eV in the absorption spectra. Plasmon resonance appeared at lower photon energy when the incident light is polarized parallel to the wire axes. Resonance peaks move to lower energy when the nanowire widths are increased. We have found that finite-difference time-domain (FDTD) simulation gives better results than Maxwell–Garnett model in explaining the relation between the light polarization and the energies of the observed absorption maxima.