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991.
为研究粗磨硅晶圆亚表面微裂纹,采用截面显微观测法,实验研究了粗磨工艺下砂轮进给速率、砂轮转速和硅晶圆转速对晶圆亚表面裂纹的影响.结果表明:磨削后晶圆亚表面斜线裂纹和折线裂纹占70%,中位裂纹、分叉裂纹和横向裂纹占30%,裂纹形状与工艺参数的关系不大.裂纹深度从晶圆圆心向外逐渐增大,〈110〉晶向裂纹深度稍大于〈100〉晶向.裂纹深度随砂轮进给速率增大单调增加,随砂轮转速增大单调减小.裂纹深度与晶圆转速之间的关系复杂,晶圆转速增大时,裂纹深度先是减小,然后增大.提出了磨削工艺参数的优化措施. 相似文献
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Yi-Ping Tong Guo-Tian Luo Wen Zhou Seik Weng Ng 《Inorganic chemistry communications》2010,13(11):1281-1284
A novel two-dimensional (2D) polyoxovanadate compound KV3O8 (1) has been synthesized and characterized crystallographically. The 2D anionic frameworks are built up from distorted VO6 octahedrons and VO5 square pyramids which are linked to one another via μ1-oxo, μ2-oxo and μ3-oxo atoms. The energy band structure, density of states (DOS), dielectric constant, refractive index and chemical bonds have been investigated by DFT method. The calculated results indicate that 1 is a semi-conductor (band gap 2.1 eV). The character of the VO interactions is mainly covalent, while that of the K–O interactions is mainly ionic. The top of valence bands and the bottom of conduction bands are mostly built upon O 2p states mixed with V 3d states, and V 3d states mixed with O 2p states, respectively, via covalent P–O interactions. The nature of electronic absorption peak is assigned to be O(2p) → V(3d) charge transfer transition. 相似文献
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高职院校致力于课程改革的良苦用心值得肯定,但具体实践中的进展并不顺利。总体上讲,高职课程改革已经陷入进退维谷的两难困境。本文从时代沿革、改革动因、改革理论基础、改革成本与风险等方面,拟对高等职业教育课程改革作些理性探索和思考。 相似文献
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In this study, the morphological evolution of poly(acrylonitrile) (PAN) nanofibers during electrospinning was examined via immersion precipitation of newly electrospun filaments in ethanol, and subsequently associating the fiber morphologies with the electrospinning distances (2 to 10 cm). We have observed that an uneven fiber stretching happened throughout the electrospinning process. A massive filament‐thinning took place at the initial stage of whipping instability, and fiber stretching at the later whipping stage was mainly concentrated on the bead sections, leading to improved uniformity of the resultant fibers. This work has provided a new insight into the fiber formation mechanism in the electrospinning process. © 2010 Wiley Periodicals, Inc. J Appl Polym Sci, 2010 相似文献
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Novel thermosetting monomers possessing both maleimide and propargyl groups were first designed and synthesized. The monomers included N‐(2‐propargyloxyphenyl) maleimide (2‐PPM), N‐(3‐propargyloxyphenyl) maleimide (3‐PPM), and N‐(4‐propargyloxyphenyl) maleimide (4‐PPM), and their structures were confirmed with Fourier transform infrared (FTIR) spectroscopy, 1H‐NMR, and elemental analysis. The cure behaviors of these monomers were characterized with differential scanning calorimetry and FTIR spectroscopy, and the results indicated that the monomers had a broader processing window than normal bismaleimide (BMI) resins. The thermal properties of the cured monomers were characterized with thermogravimetric analysis and dynamic mechanical analysis. The 5% mass loss temperatures of the cured monomers were high (ca. 400°C), and the glass‐transition temperatures of cured 2‐PPM, 3‐PPM, and 4‐PPM were 386, 373, and 387°C, respectively, which were much higher than those of typical commercial blended BMI resins. © 2009 Wiley Periodicals, Inc. J Appl Polym Sci, 2010 相似文献