光学和电子束曝光系统之间的匹配与混合光刻技术

介绍如何实现光学和电子束曝光系统之间的匹配和混合光刻的技术，包括：(1）光学曝光系统与电子束曝光系统的匹配技术；(2）投影光刻和JBX-5000LS混合曝光技术；(3）接触式光刻机和JBX-5000LS混合曝光技术；(4）大小束流混合曝光技术或大小光阑混合曝光技术；(5）电子束与光学曝光系统混合光刻对准标记制作技术. 该技术已成功地应用于纳米器件和集成电路的研制工作，实现了20nm线条曝光，研制成功了27nm CMOS器件；进行了50nm单电子器件的演试；并广泛地用于100nm化合物器件和其他微/纳米结构的制造.     

1.3μm自组织InGaAs/InAs/GaAs量子点激光器分子束外延生长

报道了分子束外延生长的1.3μm多层InGaAs/InAs/GaAs自组织量子点及其室温连续激射激光器.室温带边发射峰的半高宽小于35meV,表明量子点大小比较均匀.原子力显微镜图像显示,量子点密度可以控制在(1～7)×1010cm-2范围之内,而面密度处于4×1010cm-2时有良好的光致发光谱性能.含有三到五层1. 3μm量子点的激光器成功实现了室温连续激射.     

High‐Strength Laminated Copper Matrix Nanocomposites Developed from a Single‐Walled Carbon Nanotube Film with Continuous Reticulate Architecture

A critical challenge in nanocomposite fabrication by adding SWCNTs as reinforcement is to realize an effective transfer of the excellent mechanical properties of the SWCNTs to the macroscale mechanical properties of the matrix. Using directly grown SWCNT films with continuous reticulate structure as the template, Cu/SWCNTs/Cu laminated nanocomposites are fabricated by an electrodepositing process. The resulting Cu/SWCNTs/Cu laminated nanocomposites exhibit extremely high strength and Young's modulus. The estimated Young's modulus of the SWCNT bundles in the composite are between 860 and 960 GPa. Such a high strength and an effective load‐transfer capacity are ascribed to the unique continuous reticulate architecture of SWCNT films and the strong interfacial strength between the SWCNTs and Cu matrix. Raman spectroscopy is used to characterize the loading status of the SWCNTs in the strained composite. It provides a route to investigate the load transfer of SWCNTs in the metal matrix composites.     

采用高斯波形近似的干涉型光纤光栅法布里-珀罗传感系统的可见度分析

两光纤布拉格光栅(FBG)的光谱失配会使其构成的光纤法布里-珀罗(FFP)传感系统的干涉条纹可见度降低,从而影响探测性能。基于弱反射率FBG反射谱的高斯波形近似,推导了光谱失配引起的可见度变化表示式。实验测量了干涉型FFP传感系统的可见度曲线,对理论分析进行了验证。研究表明,反射谱旁瓣对光谱失配引起的可见度变化有重要影响。从光谱匹配的角度,采用高斯切趾光栅的FFP传感系统优于普通均匀光栅的系统。     

激光偏振拉曼的CVD多晶石墨烯表征

石墨烯具有优异的物理化学性质,在MEMS器件、光电检测材料、柔性显示屏、新能源电池、复合材料等方面成为研究热点。目前大面积石墨烯制备主要依赖于化学气相沉积技术(chemical vapor deposition, CVD),但其生长的晶体质量直接影响到电化学特性和实际应用,因此需要一种快速而准确的表征方法。实验利用背向散射的偏振激光散射装置测量CVD生长的石墨烯拉曼光谱。通过分析实验获得的300 nm SiO2/Si基底上的单层、五层和十层左右的石墨烯角分辨偏振拉曼光谱,发现单层生长的石墨烯偏振特性与机械剥离单晶石墨烯一致;随着层数的增加,G峰偏振响应差异更加明显,表现出明显的椭圆特性;在不同石墨烯层数上的D峰也呈现出一定的偏振响应差异性。偏振拉曼测试结果表明目前CVD生长的缺陷和多晶特性与石墨烯层数呈现正相关特征。     

基于模糊控制的中压异步电机软启动控制器的研究设计

本文介绍了一种基于模糊控制的中压异步电动机软起动器的原理和软硬件设计。根据对电动机起动特性的分析,提出了基于模糊控制的中压电动机软起动的设计方法。通过检测输入电流,在电动机起动过程中,在恒流平滑升压下有效的消除了启动过程中的电流振荡问题,以达到最佳的起动效果。     

The Golden Touch by Light: A Finely Engineered Luminogen Empowering High Photoactivatable and Photodynamic Efficiency for Cancer Phototheranostics

Photoactivatable agent is a powerful tool in biomedicine studies due to high-precision spatiotemporal control of light. However, those previously reported agents generally suffer from short wavelength, fluorescence self-quenching effect, and the lack of photosensitizing property, which severely restrict their practical applications. To address these issues, molecular engineering of 1,4-dihydropyridine derivatives is conducted to obtain an optimized agent, namely TPA-DHPy-Py, which exhibits low oxidation potential, high photoactivation efficiency, and excellent type I/II combined photodynamic activity. Concurrently, its photoactivated counterpart is featured by aggregation-induced near-infrared emission and remarkable reactive oxygen species (ROS) production efficiency. Upon photoactivation, TPA-DHPy-Py is capable of precisely identifying cancer cells from co-culturing cancer cells and normal cells without the assistance of any extra targeting units, and in situ monitoring lipid droplets and endoplasmic reticulum alteration under ROS stress, as well as achieving fluorescent visualization of tumor in vivo with supremely high imaging contrast. Furthermore, the unprecedented performance on photodynamic cancer therapy is demonstrated by the significant inhibition of tumor growth. Therefore, the photoactivatable TPA-DHPy-Py with dual-organelle-targeted and excellent photodynamic activity associated with self-monitoring ability is highly promising for cancer theranostics in clinical trials.     

Study of Ka-band TM01 to TE11 Mode Converters with Parallel Input and Output Waveguides

Based on the bent waveguide mode coupling theory, a combined TM₀₁-TE₁₁ mode converter with parallel input and output ports is designed by numerical calculation with the phase rematch technology employed. A numerical calculation comparison between the converter and another double-arc TM₀₁-TE₁₁ mode converter with nonparallel input and output ports shows that the former has obvious advantages over the latter in conversion, bandwidth and compact. Good agreement between tests and calculations shows the converter meets the application well.     

竞走运动员运动训练计划管理系统的设计与开发探究

随着我国经济和科技的快速发展,现代信息化技术的应用已经深入到了社会上的各个领域。在竞走运动员训练计划中建立信息化管理系统是信息化时代发展的必然需求,也是科学化、合理化运动员运动训练计划的制定。使得运动员的运动潜力得到挖掘和激发,使得运动员的竞技水平能够在比赛中得到有效的发挥。     

一种改进的保留图像细节信息的图像增强化方法

本文通过分析传统直方图均衡化的思想,得出在传统的直方图均衡化处理过程中由于图像的灰度级合并处理造成图像灰度级丢失继而使原图像细节信息损失,使增强后的图像边缘模糊,效果不理想。由此,本文给出了一种在图像经过均衡化处理后可以增加图像灰度级保留图像细节信息的方法。即先提取原目标图像中的高频细节成分,然后将其与原目标图像经直方图均衡化处理后的结果做叠加。经试验验证,与传统的直方图均衡化[1,2]算法相比,本文算法处理后的目标图像在增强了整体对比度的同时也保留了原图像的细节信息,能达到比较理想的增强效果。通过采用本文提出的改进算法,可以有效的实现图像增强的同时尽可能的保留图像细节信息的效果。