High pass filter with above IC integrated SrTiO3 high K MIM capacitors

This paper describes realization and characterization of SrTiO₃ (STO) high K MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors in order to realize a high pass filter. Surface capacitance achieved is 10 nF/mm² with capacitance value of 1.2 nF. The process for STO MIM fabrication does not exceed 400 °C, which is compatible with interconnections. Typical K and dielectric losses values obtained are, respectively 110% and 2%. Yield obtained reaches 83% for capacitors. A functional high pass filter using these STO capacitors was realized in this study. It exhibits a cut-off frequency at 6.5 kHz and a constant gain at higher frequencies of −1.3 dB.     

Quantitative coherent anti-Stokes Raman scattering microspectroscopy using a nanosecond supercontinuum light source

We describe and characterize a multiplex CARS microspectroscopic system that uses a nanosecond supercontinuum generated from a photonic crystal fiber and a sub-nanosecond pulse laser. This system has a high spectral resolution (<0.1 cm^?1) and an ultrabroadband spectral coverage (>2500 cm^?1). The estimated spatial resolutions are 0.45 μm (lateral) and 4.5 μm (axial), respectively. This system enables us to obtain CARS spectra and corresponding images in the fingerprint region as well in the CH stretch region. Using this system, we have successfully obtained label-free and multi-mode vibrational images of a yeast cell.     

Pinhole SPECT imaging: compact projection/backprojection operator for efficient algebraic reconstruction

We describe the efficient algebraic reconstruction (EAR) method, which applies to cone-beam tomographic reconstruction problems with a circular symmetry. Three independant steps/stages are presented, which use two symmetries and a factorization of the point spread functions (PSFs), each reducing computing times and eventually storage in memory or hard drive. In the case of pinhole single photon emission computed tomography (SPECT), we show how the EAR method can incorporate most of the physical and geometrical effects which change the PSF compared to the Dirac function assumed in analytical methods, thus showing improvements on reconstructed images. We also compare results obtained by the EAR method with a cubic grid implementation of an algebraic method and modeling of the PSF and we show that there is no significant loss of quality, despite the use of a noncubic grid for voxels in the EAR method. Data from a phantom, reconstructed with the EAR method, demonstrate 1.08-mm spatial tomographic resolution despite the use of a 1.5-mm pinhole SPECT device and several applications in rat and mouse imaging are shown. Finally, we discuss the conditions of application of the method when symmetries are broken, by considering the different parameters of the calibration and nonsymmetric physical effects such as attenuation.     

MCT technology challenges for mass production

Second generation infrared (IR) detectors are now mature at the production level. These detectors are mostly based on HgCdTe (MCT) materials technology. The main second generation detectors at the mass production level are the 288 4 long wave length for most of the European forward-looking infrared (FLIR) and the 480 6 long wave length for the U.S. Army SADA applications. As far as the 288 4 is concerned, SOFRADIR has delivered more than 3000 units already and the market is estimated to be 15,000 units at least! The market is also very large for SADA II units and SOFRADIR has produced them since the end of 1999. Thus, SOFRADIR produces large quantities of mercury cadmium telluride (MCT) detectors and has a unique experience for MCT detectors in mass production. MCT materials technology challenges for mass production concern the main following issues: Quality and reproducibility, MCT wafer size increase, array yield level increase, and the collective manufacturing approach. These issues are discussed in detail in this paper as well as future trends.     

Motion correction for coronary stent reconstruction from rotational X-ray projection sequences

This paper presents a new method for 3-D tomographic reconstruction of stent in X-ray cardiac rotational angiography. The method relies on 2-D motion correction from two radiopaque markerballs located on each side of the stent. The two markerballs are on a guidewire and linked to the balloon, which is introduced into the artery. Once the balloon has been inflated, deflated, and the stent deployed, a rotational sequence around the patient is acquired. Under the assumption that the guidewire and the stent have the same 3-D motion during rotational acquisition, we developed an algorithm to correct cardiac stent motion on the 2-D X-ray projection images. The 3-D image of the deployed stent is then reconstructed with the Feldkamp algorithm using all the available projections. Although the correction is an approximation, we show that the intrinsic geometrical error of our method has no visual impact on the reconstruction when the 2-D markerball centers are exactly detected and the markerballs have the same 3-D motion as the stent. Qualitative and quantitative results on simulated sequences under different realistic conditions demonstrate the robustness of the method. Finally, results from animal data acquired on a rotational angiography device are presented.     

Sputtered metal lift-off for grating fabrication on InP based optical devices

Sputtered metal gratings have been realized using lift-off process based on bilayer resist electron beam lithography (EBL). The lithography mask is composed of PMMA (poly(methylméthacrylate)) layer deposited under HSQ (hydrogen silsesquioxane) inorganic resist. EBL is performed in HSQ, whereas PMMA is used to ease final lift-off. We demonstrate the possibility of patterning by lift-off metals with different sputtering yields and deposition conditions. Gratings with period of 200 nm and filling factor of 50% are obtained.     

用于先进的双嵌入和栓工艺的低缺陷钨CMP高性价比浆料(英文)

介绍了用于钨双嵌入和钨栓CMP工艺的新型CMP3200TM氧化铝浆料,测试证明,这种浆料在110nm技术节点的钨CMP工艺应用中取得了理想的效果。通过对氧化铝粒子制造工艺的有效控制,获得了可满足110nm技术节点双嵌入和栓层钨CMP工艺要求的低缺陷率,高性价比的氧化铝蛐硝酸铁浆料。从而在价格竞争激烈的半导体制造领域,特别是代工市场引起了业界越来越多的关注。     

Time-domain surface impedances of lossless Debye media

In a previous paper, a surface impedance formalism was given. Its application to interfaces modelling between homogeneous and frequency dependent media, was of great interest in the finite difference timedomain (fdtd) codes. In this paper, an extension of the method to dispersive media is presented. Applying this formalism to lossless Debye medium, the analytical expressions of the time- domain surface impedances are given. The implementation in a fdtd code permits then a numerical verification of the results in relation to the Fresnel method.     

Winner-Takes-All Associative Memory: A Hamming Distance Vector Quantizer

We present a design methodology for mapping neuralyinspired algorithms for vector quantization, into VLSI hardware.We describe the building blocks used: memory cells, current conveyors,and translinear circuits. We use the basic building blocks todesign an associative processor for bit-pattern classification;a high-density memory based neuromorphic processor. Operatingin parallel, the single chip system determines the closest match,based on the Hamming distance, between an input bit pattern andmultiple stored bit templates; ties are broken arbitrarily. Energyefficient processing is achieved through a precision-on-demandarchitecture. Scalable storage and processing is achieved througha compact six transistor static RAM cell/ALU circuit. The singlechip system is programmable for template sets of up to 124 bitsper template and can store up to 116 templates (total storagecapacity of 14 Kbits). An additional 604 bits of auxiliary storageis used for pipelining and fault tolerance re-configuration capability.A fully functional 6.8 mm by 6.9 mmchip has been fabricated in a standard single–poly, double–metal2.0µmn–well CMOS process.