Epitaxy of Si:C on Si(001) via methyldichlorosilane

Methyldichlorosilane (CH₃SiHCl₂) is compared to methylsilane (CH₃SiH₃) for vapor phase epitaxy of cubic silicon - carbon (NO :) (Si:C) alloys on Si (001). Parameters of interest are growth rate, percent carbon and crystallinity. Carbon incorporation efficiency and experimental window for epitaxial growth are similar for both precursors. The two precursors differ in Si contribution to the film growth rate.     

Laser-produced plasma light source for extreme ultraviolet lithography

Pulsed Nd:YAG lasers have been developed to achieve high peak power and high pulse repetition rate. These systems are being used as drivers for laser-produced plasmas which efficiently convert the 1064-nm laser output to extreme ultraviolet (EUV) light at 13.5 nm for future microlithography systems. The requirements for laser-produced plasma EUV light sources and their integration in lithography tools for high-volume manufacturing are reviewed to establish the key design issues for high-power lasers and plasma targets. Xenon has been identified as a leading target material to realize the goals of intense EUV emission and clean operation. Recent progress in high-power diode-pumped Nd:YAG lasers and xenon targets for EUV generation is reviewed, showing that laser-produced plasma sources meet the needs for current EUV lithography development tools. Future directions to meet EUV source requirements for high-volume manufacturing tools are discussed.     

Nanostructured Bulk Silicon as an Effective Thermoelectric Material

Thermoelectric power sources have consistently demonstrated their extraordinary reliability and longevity for deep space missions and small unattended terrestrial systems. However, more efficient bulk materials and practical devices are required to improve existing technology and expand into large‐scale waste heat recovery applications. Research has long focused on complex compounds that best combine the electrical properties of degenerate semiconductors with the low thermal conductivity of glassy materials. Recently it has been found that nanostructuring is an effective method to decouple electrical and thermal transport parameters. Dramatic reductions in the lattice thermal conductivity are achieved by nanostructuring bulk silicon with limited degradation in its electron mobility, leading to an unprecedented increase by a factor of 3.5 in its performance over that of the parent single‐crystal material. This makes nanostructured bulk (nano‐bulk) Si an effective high temperature thermoelectric material that performs at about 70% the level of state‐of‐the‐art Si_0.8Ge_0.2 but without the need for expensive and rare Ge.     

Filtres microondes en microruban suspendu

The authors present the design and the development of integrated microwave filters using suspended substrate microstrip, a technology that provides many advantages. Through quasi-static approximation the propagation structure has been treated using integral equations solved with the method of moments. Thanks to this tool of analysis and to an accurate synthesis method, a series of bandpass filters have been designed and manufactured. The results presented validate the accuracy of our design method.     

Simulation of the High-Frequency Response of a Heterogeneous Ground through the Finite Difference Technique

To simulate the propagation of an electromagnetic plane wave in an inhomogeneous ground, the finite difference approach can be used. One of the main problems in using this method is imposing the boundary conditions near the ground surface, especially at high frequency. Indeed, for the E polarization, the upper top of the numerical grid must be sufficiently far away from the air-ground interface in order to neglect the field due to the heterogeneities and the discretization of the atmosphere is necessary. For magneto-telluric modeling, improved boundary conditions have already been proposed. This paper deals with a new condition, valid everywhere in air and which can be applied for E and H polarization. Thus even at high frequency, as for radar applications, only one line is added to the grid discretizing the ground.     

Analyse théorique et caractérisation expérimentale ďune jonction Y intégrée utilisée comme capteur de déplacement

The coherent coupling of radiation modes in symmetric single-mode Y-junction excited by a single mode fiber is studied in this work. Using the bpm (beam propagation method) we find that the power splitting between the two outputs of the junction depends strongly on the fiber displacement with respect to the junction axis of symmetry. A GaAs/GaAlAs single mode junction is tested and the experimental measurements show a splitting ratio as high as 12 dB that could not be explained if the radiation field is neglected. The experimental results confirm the theoretical predictions that take into account the propagation of radiation modes in the structure. These results propose the structure to be used as an integrated optical displacement sensor with a sensitivity in the order of 5 dB/μm and a dynamic range within 4 to 5 μm.     

Array-OL with delays,a domain specific specification language for multidimensional intensive signal processing

Intensive signal processing applications appear in many application domains such as video processing or detection systems. These applications handle multidimensional data structures (mainly arrays) to deal with the various dimensions of the data (space, time, frequency). A specification language allowing the direct manipulation of these different dimensions with a high level of abstraction is a key to handling the complexity of these applications and to benefit from their massive potential parallelism. The Array-OL specification language is designed to do just that. We introduce here an extension of Array-OL to deal with states or delays by the way of uniform inter-repetition dependences. We show that this specification language is able to express the main patterns of computation of the intensive signal processing domain.     

Catalyst Design by NH4OH Treatment of USY Zeolite

Hierarchical zeolites are a class of superior catalysts which couples the intrinsic zeolitic properties to enhanced accessibility and intracrystalline mass transport to and from the active sites. The design of hierarchical USY (Ultra‐Stable Y) catalysts is achieved using a sustainable postsynthetic room temperature treatment with mildly alkaline NH₄OH (0.02 m ) solutions. Starting from a commercial dealuminated USY zeolite (Si/Al = 47), a hierarchical material is obtained by selective and tuneable creation of interconnected and accessible small mesopores (2–6 nm). In addition, the treatment immediately yields the NH₄⁺ form without the need for additional ion exchange. After NH₄OH modification, the crystal morphology is retained, whereas the microporosity and relative crystallinity are decreased. The gradual formation of dense amorphous phases throughout the crystal without significant framework atom leaching rationalizes the very high material yields (>90%). The superior catalytic performance of the developed hierarchical zeolites is demonstrated in the acid‐catalyzed isomerization of α‐pinene and the metal‐catalyzed conjugation of safflower oil. Significant improvements in activity and selectivity are attained, as well as a lowered susceptibility to deactivation. The catalytic performance is intimately related to the introduced mesopores, hence enhanced mass transport capacity, and the retained intrinsic zeolitic properties.